WO1997033701A1 - Anti-static cleanroom products and methods of making same - Google Patents
Anti-static cleanroom products and methods of making same Download PDFInfo
- Publication number
- WO1997033701A1 WO1997033701A1 PCT/US1997/004006 US9704006W WO9733701A1 WO 1997033701 A1 WO1997033701 A1 WO 1997033701A1 US 9704006 W US9704006 W US 9704006W WO 9733701 A1 WO9733701 A1 WO 9733701A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- product
- cleanroom
- recited
- static
- static cleanroom
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools, brushes, or analogous members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/16—Anti-static materials
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- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
- D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
- D06M15/21—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
- D06M15/356—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of other unsaturated compounds containing nitrogen, sulfur, silicon or phosphorus atoms
- D06M15/3562—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of other unsaturated compounds containing nitrogen, sulfur, silicon or phosphorus atoms containing nitrogen
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- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M23/00—Treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, characterised by the process
- D06M23/08—Processes in which the treating agent is applied in powder or granular form
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F1/00—Preventing the formation of electrostatic charges
- H05F1/02—Preventing the formation of electrostatic charges by surface treatment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S2/00—Apparel
- Y10S2/901—Antibacterial, antitoxin, or clean room
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/2481—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including layer of mechanically interengaged strands, strand-portions or strand-like strips
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24893—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including particulate material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
- Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
- Y10T442/2418—Coating or impregnation increases electrical conductivity or anti-static quality
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
- Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
- Y10T442/2418—Coating or impregnation increases electrical conductivity or anti-static quality
- Y10T442/2434—Linear polyether group chain containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
- Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
- Y10T442/2418—Coating or impregnation increases electrical conductivity or anti-static quality
- Y10T442/2459—Nitrogen containing
Definitions
- This invention relates generally to the prevention of particulate contamination and static- discharge in cleanrooms. More specifically, this invention relates to anti-static products used in "cleanrooms", semiconductor fabrication plants, pharmaceutical manufacturing facilities, and other applications and environments where extreme cleanliness must be maintained, and to methods for making such products. Description of the Related Art
- Cleanrooms are being used more often in a greater variety of areas.
- the requirements for maintaining cleanliness in semiconductor fabrication cleanrooms, pharmaceutical manufacturing facilities and similar facilities, for example, are stringent. Products brought into and used in cleanroom environments must be carefully designed and manufactured to avoid the risk of contamination. In semiconductor fabrication cleanrooms, for example, surfaces frequently must be wiped with exceptionally clean wipers and cleaning solution in order to prevent contamination.
- Other examples of cleanroom products include clothing, gloves and stationery products (i.e., notebooks and writing instruments).
- Cleanrooms are characterized by a special emphasis on the prevention of particulate generation and the removal thereof prior to deposition on cleanroom surfaces and products.
- applicator or "wiper”, as used in this specification, is intended to mean a cleaning fabric suitable for use in cleaning surfaces in cleanrooms and the like.
- Such applicators or wipers are distinguished from tissues and similar materials in that they are extremely clean and have a relatively high degree of wet strength and structural integrity. Accordingly, these products do not disintegrate when used to wipe surfaces, even when dampened or saturated with cleaning liquids.
- Cleanroom products used in sensitive areas are carefully selected for characteristics such as particle emission levels, levels of ionic contaminants, adsorptiveness, resistance to attack or degradation by wear or exposure to cleaning materials, and lack of attack by or degradation by biocides.
- microcontamination The contamination which is to be controlled is often called "microcontamination” because it consists of small physical contaminants, such as particulate matter of a size between that of bacteria and viruses, and chemical contaminants in very low concentrations, typically measured in parts per million or parts per billion.
- the contaminants usually are of three types including (1) particles, (2) ions and (3) "extractables", which are impurities leached from the fibers of the wiper, for example.
- Loose particles 100 micrometers and smaller in size are an anathema to obtaining high production yields and reliable semiconductor devices. Therefore, wipers, cleaning materials and other products used in cleanrooms should emit as small a number of loose particles as possible. Similarly, ions and "extractables" are to be minimized since each, interferes with the exacting process of semiconductor manufacturing.
- ESD electrostatic discharge
- a spark can be extremely dangerous.
- static discharge can damage sensitive integrated circuits.
- Insulating materials can often be a source of static discharge, particularly those having a relatively high value of surface resistance on the order of 10 16
- Such insulated materials should be modified to reduce the risk of static discharge. In the past, this has been accomplished by increasing the electrical conductivity of the products. Such an increase in conductivity allows the product to dissipate the static electrical buildup.
- the use of such fibers has many disadvantages.
- the conductive fibers only allow for increasing conductivity in the direction of the fiber. Accordingly, the resultant product would have different conductivities in different areas and in different directions.
- conductive fibers may be relatively brittle when compared to the majority of fibers used in a wiper product and therefore have a tendency to break when flexed. Such breakage not only results in a reduction in the static dissipative capability of the material, but also provides a source of contamination to the cleanroom environment.
- cleanroom products are provided with a coating of conductive polymeric particulates.
- the particulates decrease the surface resistivity of the products to give them anti ⁇ static characteristics, without degrading the cleanroom properties of the products.
- the particulates are pyrrole polymers.
- the anti-static properties are achieved by depositing conductive polymer particles onto the non- conductive substrate surface.
- the coating consists of particles spaced relatively widely from one another, covering less than 75% of the area of the surface to which they adhere.
- the anti-static cleanroom products include wipers, stationery products (notebooks and pens), garments, and swabs (i.e., polyurethane foam tipped swabs) .
- the cleanroom stationery products also include notebooks comprising polyethylene impregnated with silica.
- the garments include anti-static plastic gloves. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 depicts a scanning electron micrograph ("SEM") of untreated nylon fibers.
- Fig. 2 depicts a SEM of nylon fibers coated with pyrrole polymer particulates.
- Fig. 3 depicts a SEM of untreated polyester fibers.
- Fig. 4 depicts a SEM of polyester fibers coated with pyrrole polymer particulates.
- the presently disclosed anti-static cleanroom products provide for the dissipation of static electric charge without degrading their cleanroom qualities. This is achieved by applying conductive polymer particulates onto the insulative surface of the product. Surprisingly, the conductive particulate polymeric coatings, even though in particulate form, do not degrade the cleanroom properties. It has been discovered that such particulates can be formed on the cleanroom product and are not easily removed. Accordingly, such coatings do not provide a significant source of "loose particle" contamination. Additionally, it has been found that the particulate coating, even though not covering the entire product with either a uniform or coherent film, provides for increased dissipative qualities.
- a continuous and coherent coating of the particulates is not required and is, in fact, avoided using the present invention. Furthermore, it has been found that the coating results in relatively uniform surface resistivities in multiple directions.
- the anti-static properties for the wiper are achieved by depositing conductive polymer particles onto the non-conductive fibers that make up the wiper.
- the polymer particles decrease the resistivity of the wiper from approximately 10 14 ⁇ to approximately 10 8 ⁇ ohms per square cm.
- the resistivity of the final product is from 10 5 to 10 11 ⁇ . If the resistivity is greater than 10 12 ⁇ there will be no charge dissipation.
- the resistivity of the resultant wiper is between about 10 5 to 10 11 ⁇ .
- the wiper product is made, for example, by contacting an untreated wiper with an aqueous solution containing polymerizable monomers, an oxidizing agent and a counter ion.
- Suitable monomers include aniline and pyrrole.
- the monomer is preferably pyrrole, suitable oxidizing agents include ferric chloride and potassium persulfate.
- suitable counter ions include 2,6- Napthalenedisulfonic acid, disodium salt and benzenesulfonic acid, sodium salt.
- an ESD dissipative wiper is prepared by adding a counter ion and an oxidizing agent in an aqueous solution at room temperature and mixing. Subsequently, a monomer solution is added to the mixture and mixed. After sufficient mixing, uncoated cleanroom wipers are added to the solution and mixed. The wipers are subsequently removed, rinsed and dried to result in anti-static cleanroom wipers.
- the time for treatment can range from about 0.5 hour to about 2 hours, preferably about 1 hour to about 1.75 hours.
- the time of treatment can be varied to an even greater extent, for example, by varying the concentration of reactants in solution, the amount of wipers added to the solution, the temperature of reaction and the amount of agitation.
- the temperature of treatment is preferably room temperature, although it can be varied if necessary.
- the concentration of the oxidizing agent, counter ion, monomer and uncoated product in the mixing solution can also be varied and adjusted by one skilled in the art without undue experimentation to result is a varying degree of resultant conductivity for the product.
- the resultant cleanroom product has irregular and non-uniform polymeric particles deposited onto the surface.
- the polymeric particles are deposited onto the substrate to form an irregular coating.
- the particulate coating covers less than 75% of the substrate surface, more preferably less than 50%, even more preferably less than 25% and most preferably less than 10%.
- the embodiments of the invention include applying such coatings of conductive polymer particulates to cleanroom wipers, gloves and garments. Additionally, the invention includes applying such particulates to plastic gloves.
- the particle counts of the resultant anti-static cleanroom product is less than 30 million per square meter, more preferably less than 20 million, even more preferably less than 15 million and most preferably less than 10 million.
- the non-volatile residue in deionized water is less than 0.50 g/meter 2 , more preferably less than 0.25 g/meter 2 , even more preferably less than 0.15 g/meter 2 and most preferably less than 0.10 g/meter 2 .
- the ion concentration is less than 20 ppm, more preferably less than 10 ppm, even more preferably less than 5 ppm, and most preferably less than 1 ppm.
- Some of the wiper fabrics which have been successfully used in such cleanroom applications and may be rendered anti-static include knitted, woven and non- woven fabrics such as the following:
- Example 1 300 mL of deionized water was placed in a 1.5 L beaker. The beaker placed on the platform of an orbital shaker running at a speed of 150 rpm. 2.0 g of benzenesulfonic acid, sodium salt and 2.8 g of ferric chloride were slowly added into the beaker after both ingredients were predissolved separately in 50 mL water. Immediately after the additions, 0.5 g of neat pyrrole (non-diluted) was added dropwise into the beaker. While the shaker was still running, 12.2 g of polyester wiper material was added to the beaker. The total weight represented two 9" x 9" sealed-edge double-knit wipers constructed from 100 percent continuous filament textured polyester.
- the reaction was run for two hours at room temperature. Initially the color of the white wipers changed to light yellow and then gradually changed to grayish black. At this stage, the wipers were taken out from the beaker and placed in a separate clean beaker. The wipers were then rinsed several times with deionized water containing a surfactant (Triton-X®) and left to dry overnight in a laminar flow cleanroom workstation.
- a surfactant Triton-X®
- Example 2 To determine the contamination characteristics of the electrostatic discharge (ESD) dissipative wipers, additional wipers were produced using procedures similar to Example 1 with the following changes:
- Example 1 The steps in Example 1 were repeated except that the reaction was conducted in a clean stainless steel tray (size 11 3/4" x 9 1/2" x 3 3/4").
- the contamination characteristics such as particles, non- volatile residues, and ions, of the original wipers were determined by usual laboratory test procedures prior to coating. After the coating treatment, the same parameters were evaluated in order to determine the extent of any increase in contamination that may have occurred as a result of the process.
- the nylon wipers were taken out and placed in a beaker and rinsed several times with deionized water and surfactant solution (Triton-X®) . Meanwhile, the polyester wipers were allowed to run for additional time for a total of 2 hours, at which point, they turned grayish black. The polyester wipers were rinsed in the same manner as the nylon wipers. Both sets of wipers were dried overnight at room temperature by hanging them in a cleanroom workstation. The resistivities of the dry wipers were measured using the same procedure set forth in Example 1. Both types of wipers had excellent ESD dissipative properties.
- the coated nylon wipers had a resistivity of 10 +6 ⁇ and the polyester wipers had resistivities from 10 +8 ⁇ to 10 +9 ⁇ . Before the application of the coatings all of the wipers had resistivities ranging from 10 +13 ⁇ to 10 +14 ⁇ (insulative) .
- the sodium concentration was in the range of 1 ppm and the concentration of chloride was 26.5 ppm (high).
- the coated wipers were also tested by being placed in an aqueous solution or in isopropyl alcohol solution for several days to determine the strength of the particulate adhesion. It was found that the particulates adhered to the substrate even after several days of exposure.
- Example 2 provided three important findings. First, nylon material coats more rapidly than polyester in this process (in terms of time needed for the application of the coating) . Second, ferric chloride should be avoided as the oxidizing agent if chloride concentration is a concern since it causes the higher chloride contamination in the product. Third, the resultant particulate coating adheres strongly to the fibers.
- Example 3 The procedure of Example 2 was repeated except the contents of the steel tray as shown in Example 2 were changed as follows: a. 900 L deionized water
- Example 4 Samples or the products made in Example 3 were inspected in the Scanning Electron Microscope (SEM) to evaluate the degree of enhancement of particulate burden before and after coatings.
- the fibers in the uncoated nylon wipers appeared very clean (see Figure 1) .
- the coated nylon fibers showed extremely random irregular polymer particulates distributed over the surface of each fiber and in between fibers (see Figures 2) .
- a similar non-uniform distribution of particles was also seen in the case of the polyester fibers ( Figure 4) .
- the uncoated polyester fibers also appeared very clean ( Figure 3) .
- the overall macroscopic appearance of the coated surface was very uniform. Accordingly, aesthetics were nicely maintained in the process in spite of an extremely random microscopic distribution of the coating particulates.
- Example 5 In this example, thiophen was used for the coating. 950 mL of deionized water was added to a clean steel tray. In two separate beakers, 0.75 g of 2,6-
- Example 6 ESD dissipative nylon wipers were prepared by adding the following ingredients together and running the reaction for 25 minutes at room temperature. a. 600 mL deionized water in a clean steel tray b. 1 g aniline hydrochloride c. 2 mL concentrated hydrochloric acid d. 2.5 g 2,6-Naphthalenedisulfonic acid, disodium salt, predissolved in 5 ml water
- Example 7 A method for producing ESD dissipative wipers on a larger scale was developed using the experimentation as exemplified in Examples 1 through 6. Experimental runs were carried out using the following procedures: First, a paddle tank (capacity of 140 gallons) was cleaned with sodium hydroxide solution. The tank was rinsed thoroughly with water.
- the tank was first filled with 140 gallons of water, the temperature being maintained at 70° F.
- 270 g of 2,6-Naphthalenedisulfonic acid, disodium salt was first predissolved in one gallon of water taken out from the tank and subsequently added back into the tank.
- 270 g of potassium persulfate was predissolved in one gallon of water (also taken out from the tank) and subsequently poured back into the paddle tank. Both of the chemicals were allowed to mix well for 2 minutes. 550 mL of neat pyrrole solution was then added directly to the tank and mixing continued for another 2 minutes.
- polyester wipers were found to be in the range of 10 +9 ⁇ to 10 +1 ° ⁇ after one hour 35 minutes of treatment time. Samples of polyester wipers taken out 10 minutes earlier, were found to be in the range of 10 +12 ⁇ , hence still insulative. This confirms the earlier finding that polyester wipers take longer to coat than nylon wipers.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU23248/97A AU2324897A (en) | 1996-03-15 | 1997-03-14 | Anti-static cleanroom products and methods of making same |
EP97915951A EP0912256A4 (en) | 1996-03-15 | 1997-03-14 | Anti-static cleanroom products and methods of making same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/616,249 US5736469A (en) | 1996-03-15 | 1996-03-15 | Anti-static cleanroom products and methods and methods of making same |
US08/616,249 | 1996-03-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997033701A1 true WO1997033701A1 (en) | 1997-09-18 |
Family
ID=24468627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1997/004006 WO1997033701A1 (en) | 1996-03-15 | 1997-03-14 | Anti-static cleanroom products and methods of making same |
Country Status (6)
Country | Link |
---|---|
US (3) | US5736469A (en) |
EP (1) | EP0912256A4 (en) |
AU (1) | AU2324897A (en) |
MY (1) | MY115235A (en) |
TW (1) | TW436423B (en) |
WO (1) | WO1997033701A1 (en) |
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Also Published As
Publication number | Publication date |
---|---|
US5736469A (en) | 1998-04-07 |
EP0912256A1 (en) | 1999-05-06 |
AU2324897A (en) | 1997-10-01 |
EP0912256A4 (en) | 2003-07-02 |
US20010000769A1 (en) | 2001-05-03 |
US6235660B1 (en) | 2001-05-22 |
TW436423B (en) | 2001-05-28 |
US6685989B2 (en) | 2004-02-03 |
MY115235A (en) | 2003-04-30 |
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