WO1998048608A3 - Microbellows actuator - Google Patents

Microbellows actuator Download PDF

Info

Publication number
WO1998048608A3
WO1998048608A3 PCT/US1998/007424 US9807424W WO9848608A3 WO 1998048608 A3 WO1998048608 A3 WO 1998048608A3 US 9807424 W US9807424 W US 9807424W WO 9848608 A3 WO9848608 A3 WO 9848608A3
Authority
WO
WIPO (PCT)
Prior art keywords
microbellows
disclosed
actuator
microbellows actuator
layered
Prior art date
Application number
PCT/US1998/007424
Other languages
French (fr)
Other versions
WO1998048608A2 (en
Inventor
Yu-Chong Tai
Xing Yang
Original Assignee
California Inst Of Techn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Inst Of Techn filed Critical California Inst Of Techn
Priority to AU69692/98A priority Critical patent/AU6969298A/en
Priority to EP98915532A priority patent/EP1018145A2/en
Publication of WO1998048608A2 publication Critical patent/WO1998048608A2/en
Publication of WO1998048608A3 publication Critical patent/WO1998048608A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/031—Thermal actuators

Abstract

A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections. Anchor structures (420, 430, 440, 450) are disclosed that improve the strength of the microbellows membrane (150). Thermopneumatic actuators having a resistive heater chip are also disclosed.
PCT/US1998/007424 1997-04-11 1998-04-09 Microbellows actuator WO1998048608A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU69692/98A AU6969298A (en) 1997-04-11 1998-04-09 Microbellows actuator
EP98915532A EP1018145A2 (en) 1997-04-11 1998-04-09 Microbellows actuator

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US4346397P 1997-04-11 1997-04-11
US60/043,463 1997-04-11
US09/057,381 1998-04-08
US09/057,381 US6069392A (en) 1997-04-11 1998-04-08 Microbellows actuator

Publications (2)

Publication Number Publication Date
WO1998048608A2 WO1998048608A2 (en) 1998-11-05
WO1998048608A3 true WO1998048608A3 (en) 1999-04-01

Family

ID=26720455

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/007424 WO1998048608A2 (en) 1997-04-11 1998-04-09 Microbellows actuator

Country Status (4)

Country Link
US (2) US6069392A (en)
EP (1) EP1018145A2 (en)
AU (1) AU6969298A (en)
WO (1) WO1998048608A2 (en)

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Also Published As

Publication number Publication date
EP1018145A2 (en) 2000-07-12
AU6969298A (en) 1998-11-24
WO1998048608A2 (en) 1998-11-05
US6069392A (en) 2000-05-30
US6146543A (en) 2000-11-14

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