WO1998052206A3 - Plasma discharge emitter device and array and a method of fabricating same - Google Patents

Plasma discharge emitter device and array and a method of fabricating same Download PDF

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Publication number
WO1998052206A3
WO1998052206A3 PCT/US1998/010152 US9810152W WO9852206A3 WO 1998052206 A3 WO1998052206 A3 WO 1998052206A3 US 9810152 W US9810152 W US 9810152W WO 9852206 A3 WO9852206 A3 WO 9852206A3
Authority
WO
WIPO (PCT)
Prior art keywords
array
emitter
plasma discharge
plasma
emitter device
Prior art date
Application number
PCT/US1998/010152
Other languages
French (fr)
Other versions
WO1998052206A2 (en
Inventor
Timothy A Pletcher
Vipulkumar K Patel
Robert Amantea
Original Assignee
Sarnoff Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarnoff Corp filed Critical Sarnoff Corp
Publication of WO1998052206A2 publication Critical patent/WO1998052206A2/en
Publication of WO1998052206A3 publication Critical patent/WO1998052206A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/385—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material
    • B41J2/39—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material using multi-stylus heads
    • B41J2/395—Structure of multi-stylus heads

Abstract

An inexpensive, robust plasma discharge emitter that repeatably creates a patterned charge on a substrate (122). To facilitate highly accurate charge deposition, each emitter (100) contains a plasma well (114) for confining the plasma within the emitter (100). Additionally, a plurality of emitters are arranged in an array to provide a practical charge patterning device. Furthermore, to fabricate an emitter or an array of emitters, a relatively low-cost, repeatable method of fabrication is used that relies upon conventional integrated circuit fabrication techniques.
PCT/US1998/010152 1997-05-16 1998-05-18 Plasma discharge emitter device and array and a method of fabricating same WO1998052206A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US4666297P 1997-05-16 1997-05-16
US60/046,662 1997-05-16
US08/912,658 1997-08-18
US08/912,658 US6028615A (en) 1997-05-16 1997-08-18 Plasma discharge emitter device and array

Publications (2)

Publication Number Publication Date
WO1998052206A2 WO1998052206A2 (en) 1998-11-19
WO1998052206A3 true WO1998052206A3 (en) 1999-03-18

Family

ID=26724170

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/010152 WO1998052206A2 (en) 1997-05-16 1998-05-18 Plasma discharge emitter device and array and a method of fabricating same

Country Status (2)

Country Link
US (1) US6028615A (en)
WO (1) WO1998052206A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6923979B2 (en) 1999-04-27 2005-08-02 Microdose Technologies, Inc. Method for depositing particles onto a substrate using an alternating electric field
US6499348B1 (en) * 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
US6644786B1 (en) * 2002-07-08 2003-11-11 Eastman Kodak Company Method of manufacturing a thermally actuated liquid control device
JP4125069B2 (en) * 2002-08-13 2008-07-23 キヤノン株式会社 Inkjet recording head substrate, inkjet recording head, and inkjet recording apparatus using the inkjet recording head
KR100519756B1 (en) * 2003-01-15 2005-10-07 삼성전자주식회사 Method of expelling fluid by using ion wind and inkjet printhead adopting the method
US8260174B2 (en) * 2008-06-30 2012-09-04 Xerox Corporation Micro-tip array as a charging device including a system of interconnected air flow channels
JP5801195B2 (en) * 2008-08-20 2015-10-28 ヴィジョン・ダイナミックス・ホールディング・ベスローテン・ヴェンノーツハップ A device that generates a plasma discharge to pattern the surface of a substrate
WO2014077623A1 (en) * 2012-11-16 2014-05-22 주식회사 지아이티 Plasma processing device comprising multiple ballast modules
JP6195528B2 (en) * 2014-02-19 2017-09-13 東京エレクトロン株式会社 Plasma processing apparatus and operation method thereof
JP6356516B2 (en) * 2014-07-22 2018-07-11 東芝メモリ株式会社 Plasma processing apparatus and plasma processing method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4498952A (en) * 1982-09-17 1985-02-12 Condesin, Inc. Batch fabrication procedure for manufacture of arrays of field emitted electron beams with integral self-aligned optical lense in microguns
US4794254A (en) * 1987-05-28 1988-12-27 Xerox Corporation Distributed resistance corona charging device
US5266530A (en) * 1991-11-08 1993-11-30 Bell Communications Research, Inc. Self-aligned gated electron field emitter
US5561348A (en) * 1995-04-10 1996-10-01 Old Dominion University Field controlled plasma discharge device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4155093A (en) * 1977-08-12 1979-05-15 Dennison Manufacturing Company Method and apparatus for generating charged particles
JPS5737365A (en) * 1980-08-15 1982-03-01 Konishiroku Photo Ind Co Ltd Ion current control electrode
US4409604A (en) * 1981-01-05 1983-10-11 Dennison Manufacturing Company Electrostatic imaging device
US4408214A (en) * 1981-08-24 1983-10-04 Dennison Manufacturing Company Thermally regulated ion generation
US4675703A (en) * 1984-08-20 1987-06-23 Dennison Manufacturing Company Multi-electrode ion generating system for electrostatic images
US4879569A (en) * 1988-12-14 1989-11-07 Delphax Systems Multiple source charged particle generation
US5138348A (en) * 1988-12-23 1992-08-11 Kabushiki Kaisha Toshiba Apparatus for generating ions using low signal voltage and apparatus for ion recording using low signal voltage
US5014076A (en) * 1989-11-13 1991-05-07 Delphax Systems Printer with high frequency charge carrier generation
US5027136A (en) * 1990-01-16 1991-06-25 Dennison Manufacturing Company Method and apparatus for charged particle generation
US5202705A (en) * 1990-10-05 1993-04-13 Fuji Xerox Co., Ltd. Electrostatic latent image forming device having a ceramic insulating layer
US5710487A (en) * 1994-08-24 1998-01-20 Valcke; Francisco Javier Velasco Ballast circuit for gaseous discharge lamps without inductive electrical components or filaments

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4498952A (en) * 1982-09-17 1985-02-12 Condesin, Inc. Batch fabrication procedure for manufacture of arrays of field emitted electron beams with integral self-aligned optical lense in microguns
US4794254A (en) * 1987-05-28 1988-12-27 Xerox Corporation Distributed resistance corona charging device
US5266530A (en) * 1991-11-08 1993-11-30 Bell Communications Research, Inc. Self-aligned gated electron field emitter
US5561348A (en) * 1995-04-10 1996-10-01 Old Dominion University Field controlled plasma discharge device

Also Published As

Publication number Publication date
WO1998052206A2 (en) 1998-11-19
US6028615A (en) 2000-02-22

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