WO1999013494A3 - Method and apparatus for cleaning electronic test contacts - Google Patents

Method and apparatus for cleaning electronic test contacts Download PDF

Info

Publication number
WO1999013494A3
WO1999013494A3 PCT/US1998/018942 US9818942W WO9913494A3 WO 1999013494 A3 WO1999013494 A3 WO 1999013494A3 US 9818942 W US9818942 W US 9818942W WO 9913494 A3 WO9913494 A3 WO 9913494A3
Authority
WO
WIPO (PCT)
Prior art keywords
contact
electromagnetic radiation
debris
conductive material
probe
Prior art date
Application number
PCT/US1998/018942
Other languages
French (fr)
Other versions
WO1999013494A2 (en
Inventor
Arno G Marcuse
Edward S North
Robert A Most
Original Assignee
New Wave Research
Arno G Marcuse
Edward S North
Robert A Most
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Wave Research, Arno G Marcuse, Edward S North, Robert A Most filed Critical New Wave Research
Priority to AU93143/98A priority Critical patent/AU9314398A/en
Priority to EP98946037A priority patent/EP1021822A4/en
Publication of WO1999013494A2 publication Critical patent/WO1999013494A2/en
Publication of WO1999013494A3 publication Critical patent/WO1999013494A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Abstract

A method and device for cleaning an electrical contact (310a). Semiconductor testing device. Process of manufacturing integrated circuits. The method comprises directing electromagnetic radiation (210) at the contact. The electromagnetic energy reacts with at least one of the contact (310a) and the debris (314) so as to cause at least a portion of the debris (314) on the contact (310a) to be removed. The electromagnetic radiation (210) may comprise coherent radiation, such as electromagnetic radiation generated using a laser. According to one aspect of the invention, the contact (310a) comprises a conductive material and the electromagnetic radiation (210) causes removal of the portion of the debris (314) substantially without removal of the conductive material. According to another aspect of the invention, the electromagnetic radiation (210) at least partially melts the conductive material. In one preferred system, the contact (310a) comprises a probe tip. In such a system the probe tip may comprise the tip of a probe needle mounted to a probe card used for testing integrated circuits.
PCT/US1998/018942 1997-09-12 1998-09-11 Method and apparatus for cleaning electronic test contacts WO1999013494A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU93143/98A AU9314398A (en) 1997-09-12 1998-09-11 Method and apparatus for cleaning electronic test contacts
EP98946037A EP1021822A4 (en) 1997-09-12 1998-09-11 Method and apparatus for cleaning electronic test contacts

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/928,806 US6573702B2 (en) 1997-09-12 1997-09-12 Method and apparatus for cleaning electronic test contacts
US08/928,806 1997-09-12

Publications (2)

Publication Number Publication Date
WO1999013494A2 WO1999013494A2 (en) 1999-03-18
WO1999013494A3 true WO1999013494A3 (en) 1999-07-01

Family

ID=25456796

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/018942 WO1999013494A2 (en) 1997-09-12 1998-09-11 Method and apparatus for cleaning electronic test contacts

Country Status (5)

Country Link
US (1) US6573702B2 (en)
EP (1) EP1021822A4 (en)
AU (1) AU9314398A (en)
TW (1) TW455687B (en)
WO (1) WO1999013494A2 (en)

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US9835653B2 (en) 2014-05-13 2017-12-05 International Business Machines Corporation Solder bump array probe tip structure for laser cleaning
JP2016003925A (en) * 2014-06-16 2016-01-12 株式会社Ｃ．Ｉ．Ｃ Contact foreign matter removal method and contact foreign matter removal system
JP6457981B2 (en) * 2016-07-08 2019-01-23 株式会社スギノマシン Nozzle cleaning method and laser processing apparatus
CN106345752B (en) * 2016-08-22 2018-08-07 沧州致胜机器人科技有限公司 A kind of double four-rotor helicopter photovoltaic laser wiping board systems
US9825000B1 (en) 2017-04-24 2017-11-21 International Test Solutions, Inc. Semiconductor wire bonding machine cleaning device and method
US11155428B2 (en) 2018-02-23 2021-10-26 International Test Solutions, Llc Material and hardware to automatically clean flexible electronic web rolls
CN110146421A (en) * 2019-06-14 2019-08-20 深圳市杰普特光电股份有限公司 It is a kind of to clean the method for probe, laser resistance adjuster
US10792713B1 (en) 2019-07-02 2020-10-06 International Test Solutions, Inc. Pick and place machine cleaning system and method
US11756811B2 (en) 2019-07-02 2023-09-12 International Test Solutions, Llc Pick and place machine cleaning system and method
CN110230982A (en) * 2019-07-03 2019-09-13 合肥新汇成微电子有限公司 A kind of probe card fully-automatic dry type cleaning equipment
US11211242B2 (en) 2019-11-14 2021-12-28 International Test Solutions, Llc System and method for cleaning contact elements and support hardware using functionalized surface microfeatures
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Also Published As

Publication number Publication date
WO1999013494A2 (en) 1999-03-18
TW455687B (en) 2001-09-21
US20010007421A1 (en) 2001-07-12
EP1021822A2 (en) 2000-07-26
US6573702B2 (en) 2003-06-03
EP1021822A4 (en) 2005-02-09
AU9314398A (en) 1999-03-29

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