WO1999015312A1 - Polishing machine including a platform assembly mounted on three columns - Google Patents
Polishing machine including a platform assembly mounted on three columns Download PDFInfo
- Publication number
- WO1999015312A1 WO1999015312A1 PCT/US1998/017931 US9817931W WO9915312A1 WO 1999015312 A1 WO1999015312 A1 WO 1999015312A1 US 9817931 W US9817931 W US 9817931W WO 9915312 A1 WO9915312 A1 WO 9915312A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- platform
- polish plate
- polishing apparatus
- plate
- polishing
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19882679T DE19882679T1 (en) | 1997-09-19 | 1998-08-28 | Polishing device with a platform structure, which is mounted on three columns |
JP2000512667A JP2001517559A (en) | 1997-09-19 | 1998-08-28 | Polishing apparatus including a platform assembly mounted on three cylinders |
KR1020007002671A KR20010015582A (en) | 1997-09-19 | 1998-08-28 | Polishing machine including a platform assembly mounted on three columns |
GB0006566A GB2344545A (en) | 1997-09-19 | 1998-08-28 | Polishing machine including a platform assembly mounted on three columns |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/932,578 US5957763A (en) | 1997-09-19 | 1997-09-19 | Polishing apparatus with support columns supporting multiple platform members |
US08/932,578 | 1997-09-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999015312A1 true WO1999015312A1 (en) | 1999-04-01 |
Family
ID=25462533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/017931 WO1999015312A1 (en) | 1997-09-19 | 1998-08-28 | Polishing machine including a platform assembly mounted on three columns |
Country Status (8)
Country | Link |
---|---|
US (2) | US5957763A (en) |
JP (1) | JP2001517559A (en) |
KR (1) | KR20010015582A (en) |
DE (1) | DE19882679T1 (en) |
GB (1) | GB2344545A (en) |
MY (1) | MY133050A (en) |
TW (1) | TW421615B (en) |
WO (1) | WO1999015312A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107127671A (en) * | 2017-06-14 | 2017-09-05 | 新乡市振英机械设备有限公司 | A kind of spin vibration sieve umbrella hat polishes support meanss |
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US6385486B1 (en) * | 1997-08-07 | 2002-05-07 | New York University | Brain function scan system |
JP2977807B1 (en) * | 1998-07-15 | 1999-11-15 | システム精工株式会社 | Polishing method and polishing apparatus |
US6640155B2 (en) | 2000-08-22 | 2003-10-28 | Lam Research Corporation | Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head |
US7481695B2 (en) | 2000-08-22 | 2009-01-27 | Lam Research Corporation | Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head |
US6652357B1 (en) | 2000-09-22 | 2003-11-25 | Lam Research Corporation | Methods for controlling retaining ring and wafer head tilt for chemical mechanical polishing |
US6585572B1 (en) | 2000-08-22 | 2003-07-01 | Lam Research Corporation | Subaperture chemical mechanical polishing system |
US6471566B1 (en) | 2000-09-18 | 2002-10-29 | Lam Research Corporation | Sacrificial retaining ring CMP system and methods for implementing the same |
US6443815B1 (en) | 2000-09-22 | 2002-09-03 | Lam Research Corporation | Apparatus and methods for controlling pad conditioning head tilt for chemical mechanical polishing |
JP2002154049A (en) * | 2000-11-15 | 2002-05-28 | Fujikoshi Mach Corp | Polishing method |
FR2824769B1 (en) * | 2001-05-18 | 2004-05-28 | Rech S Et Realisations Remy | TEST GRINDER, ESPECIALLY CONCRETE |
DE10132504C1 (en) * | 2001-07-05 | 2002-10-10 | Wacker Siltronic Halbleitermat | Method for simultaneously polishing both sides of semiconductor wafer mounted on cogwheel between central cogwheel and annulus uses upper and lower polishing wheel |
US20030192573A1 (en) * | 2002-04-16 | 2003-10-16 | Loi Tran | Floor care machine with counter acting force |
US20040176017A1 (en) * | 2003-02-25 | 2004-09-09 | Aleksander Zelenski | Apparatus and methods for abrading a work piece |
JP4145750B2 (en) * | 2003-07-15 | 2008-09-03 | 日本電波工業株式会社 | Planar processing equipment |
US20060122453A1 (en) * | 2004-12-02 | 2006-06-08 | Nikolay Alekseyenko | Therapeutic device for local area stimulation |
US8979837B2 (en) | 2007-04-04 | 2015-03-17 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Flexible tip catheter with extended fluid lumen |
US8187267B2 (en) | 2007-05-23 | 2012-05-29 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Ablation catheter with flexible tip and methods of making the same |
JP5342253B2 (en) * | 2009-01-28 | 2013-11-13 | 株式会社ディスコ | Processing equipment |
CN102601711B (en) * | 2012-03-20 | 2014-10-08 | 友达光电(苏州)有限公司 | Board grinding device |
CN106181630A (en) * | 2016-07-15 | 2016-12-07 | 绔ユ旦 | A kind of grinding attachment being easy to regulation |
CN107584400A (en) * | 2017-10-12 | 2018-01-16 | 芜湖市永帆精密模具科技有限公司 | The auxiliary polishing portion of ball swage core rod polishing mechanism |
CN108789111A (en) * | 2018-08-14 | 2018-11-13 | 天长市永鑫制冷设备有限公司 | Simple type burnishing device |
CN109176242B (en) * | 2018-09-07 | 2020-08-28 | 江西新德合汽配有限责任公司 | Polishing equipment for machining and manufacturing engine piston ring |
JP7235587B2 (en) * | 2019-05-14 | 2023-03-08 | 株式会社ディスコ | Load sensor voltage adjustment method |
KR102214115B1 (en) * | 2020-10-12 | 2021-02-09 | 임재균 | Stainless Steel Electrolytic Corrosion Device for Field Use |
CN112936068B (en) * | 2021-02-02 | 2023-01-10 | 鹤山市金洲铜材实业有限公司 | Grooved pulley type double-side polishing device for copper block processing |
US20230052496A1 (en) * | 2021-08-10 | 2023-02-16 | Kla Corporation | Spring mechanism for self-lock and centering during loading |
CN115179174B (en) * | 2022-06-14 | 2023-12-29 | 成都市玖展科技有限公司 | Disc type multi-station automatic polishing machine |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US240966A (en) * | 1881-05-03 | ohappell | ||
US1838553A (en) * | 1925-08-17 | 1931-12-29 | Owens Illinois Glass Co | Parallel resurfacing |
US3225492A (en) * | 1964-01-30 | 1965-12-28 | Spitfire Tool & Machine Co Inc | Lapping apparatus |
US3537214A (en) * | 1967-08-21 | 1970-11-03 | Dell Foster Co H | Optical surfacing apparatus |
US3691694A (en) * | 1970-11-02 | 1972-09-19 | Ibm | Wafer polishing machine |
US3791083A (en) * | 1970-10-15 | 1974-02-12 | Messerschmidt Spezialmaschin | Apparatus for machining balls |
US4007560A (en) * | 1974-09-03 | 1977-02-15 | Jmj Werkzeugmaschinen Gmbh Fuer Feinbearbeitung | Two wheel lapping machine |
US4742651A (en) * | 1985-06-10 | 1988-05-10 | Peter Wolters | Control device for the processing pressure on lapping, honing and polishing machines |
US5121572A (en) * | 1990-11-06 | 1992-06-16 | Timesavers, Inc. | Opposed disc deburring system |
Family Cites Families (30)
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US2618911A (en) * | 1950-07-08 | 1952-11-25 | Norton Co | Lapping machine |
US2688215A (en) * | 1951-05-04 | 1954-09-07 | Crane Packing Co | Double lap for lapping parallel faces |
US2822647A (en) * | 1955-12-16 | 1958-02-11 | Younger Mfg Company | Method and apparatus for forming bifocal lenses |
DE1110544B (en) * | 1957-11-29 | 1961-07-06 | Siemens Ag | Single disc lapping machine for semiconductor wafers |
US2963830A (en) * | 1958-06-04 | 1960-12-13 | Norton Co | Lapping machine |
DE2204581B2 (en) * | 1972-02-01 | 1977-12-08 | Wolters, Peter, 4020 Mettmann | CONTROL DEVICE FOR THE PROCESSING PRESSURE OF A LAEPP OR HONING MACHINE |
US3925936A (en) * | 1974-01-23 | 1975-12-16 | Petr Nikolaevich Orlov | Lapping machine |
US3986433A (en) * | 1974-10-29 | 1976-10-19 | R. Howard Strasbaugh, Inc. | Lap milling machine |
US3898770A (en) * | 1974-11-25 | 1975-08-12 | Speedfam Corp | Lapping fixture reference plate assembly |
US4205489A (en) * | 1976-12-10 | 1980-06-03 | Balabanov Anatoly S | Apparatus for finishing workpieces on surface-lapping machines |
US4194324A (en) * | 1978-01-16 | 1980-03-25 | Siltec Corporation | Semiconductor wafer polishing machine and wafer carrier therefor |
US4315383A (en) * | 1980-05-13 | 1982-02-16 | Spitfire Tool & Machine, Co. Inc. | Inner gear drive for abrading machines |
JPS58171255A (en) * | 1982-03-29 | 1983-10-07 | Toshiba Corp | Double side mirror polishing apparatus |
US4459785A (en) * | 1982-11-08 | 1984-07-17 | Buehler Ltd. | Chuck for vertically hung specimen holder |
US4593495A (en) * | 1983-11-25 | 1986-06-10 | Toshiba Machine Co., Ltd. | Polishing machine |
US4592169A (en) * | 1984-08-07 | 1986-06-03 | St. Florian Company, Ltd. | Disc grinder with floating grinding wheel |
JPH0243655Y2 (en) * | 1985-07-05 | 1990-11-20 | ||
DE3624878A1 (en) * | 1985-07-31 | 1987-02-12 | Speedfam Corp | Flat lay machine |
JPS62176755A (en) * | 1986-01-31 | 1987-08-03 | Yasunori Taira | Surface polishing device |
DE3730795A1 (en) * | 1987-09-14 | 1989-03-23 | Wolters Peter Fa | HONING, LAEPPING OR POLISHING MACHINE |
DE3818159A1 (en) * | 1988-05-28 | 1989-11-30 | Wolters Peter Fa | METHOD AND DEVICE FOR CONTROLLING THE OPERATION OF HONING OR GRINDING MACHINES |
US4860498A (en) * | 1988-08-15 | 1989-08-29 | General Signal Corp. | Automatic workpiece thickness control for dual lapping machines |
JPH03120077A (en) * | 1989-10-03 | 1991-05-22 | Sanyo Chem Ind Ltd | Thermal recording materials |
US5016399A (en) * | 1990-04-09 | 1991-05-21 | Paul Vinson | Planetary lap |
US5140774A (en) * | 1991-10-31 | 1992-08-25 | System Seiko Co., Ltd. | Apparatus for polishing hard disk substrates |
US5205082A (en) * | 1991-12-20 | 1993-04-27 | Cybeq Systems, Inc. | Wafer polisher head having floating retainer ring |
US5329732A (en) * | 1992-06-15 | 1994-07-19 | Speedfam Corporation | Wafer polishing method and apparatus |
US5377451A (en) * | 1993-02-23 | 1995-01-03 | Memc Electronic Materials, Inc. | Wafer polishing apparatus and method |
US5595529A (en) * | 1994-03-28 | 1997-01-21 | Speedfam Corporation | Dual column abrading machine |
JPH09174399A (en) * | 1995-12-22 | 1997-07-08 | Speedfam Co Ltd | Polishing device and plashing method using this polishing device |
-
1997
- 1997-09-19 US US08/932,578 patent/US5957763A/en not_active Expired - Fee Related
-
1998
- 1998-05-01 US US09/071,442 patent/US6001005A/en not_active Expired - Fee Related
- 1998-08-28 DE DE19882679T patent/DE19882679T1/en not_active Withdrawn
- 1998-08-28 GB GB0006566A patent/GB2344545A/en not_active Withdrawn
- 1998-08-28 KR KR1020007002671A patent/KR20010015582A/en not_active Application Discontinuation
- 1998-08-28 WO PCT/US1998/017931 patent/WO1999015312A1/en not_active Application Discontinuation
- 1998-08-28 JP JP2000512667A patent/JP2001517559A/en active Pending
- 1998-09-05 TW TW087114800A patent/TW421615B/en not_active IP Right Cessation
- 1998-09-17 MY MYPI98004249A patent/MY133050A/en unknown
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US240966A (en) * | 1881-05-03 | ohappell | ||
US1838553A (en) * | 1925-08-17 | 1931-12-29 | Owens Illinois Glass Co | Parallel resurfacing |
US3225492A (en) * | 1964-01-30 | 1965-12-28 | Spitfire Tool & Machine Co Inc | Lapping apparatus |
US3537214A (en) * | 1967-08-21 | 1970-11-03 | Dell Foster Co H | Optical surfacing apparatus |
US3791083A (en) * | 1970-10-15 | 1974-02-12 | Messerschmidt Spezialmaschin | Apparatus for machining balls |
US3691694A (en) * | 1970-11-02 | 1972-09-19 | Ibm | Wafer polishing machine |
US4007560A (en) * | 1974-09-03 | 1977-02-15 | Jmj Werkzeugmaschinen Gmbh Fuer Feinbearbeitung | Two wheel lapping machine |
US4742651A (en) * | 1985-06-10 | 1988-05-10 | Peter Wolters | Control device for the processing pressure on lapping, honing and polishing machines |
US5121572A (en) * | 1990-11-06 | 1992-06-16 | Timesavers, Inc. | Opposed disc deburring system |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107127671A (en) * | 2017-06-14 | 2017-09-05 | 新乡市振英机械设备有限公司 | A kind of spin vibration sieve umbrella hat polishes support meanss |
CN107127671B (en) * | 2017-06-14 | 2023-03-14 | 新乡市振英机械设备有限公司 | Polishing and supporting device for umbrella-shaped cap of rotary vibration sieve |
Also Published As
Publication number | Publication date |
---|---|
GB2344545A (en) | 2000-06-14 |
US5957763A (en) | 1999-09-28 |
GB0006566D0 (en) | 2000-05-10 |
DE19882679T1 (en) | 2000-08-24 |
TW421615B (en) | 2001-02-11 |
US6001005A (en) | 1999-12-14 |
KR20010015582A (en) | 2001-02-26 |
MY133050A (en) | 2007-10-31 |
JP2001517559A (en) | 2001-10-09 |
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