WO2000000998A3 - Electrode for plasma processes and method for manufacture and use thereof - Google Patents

Electrode for plasma processes and method for manufacture and use thereof Download PDF

Info

Publication number
WO2000000998A3
WO2000000998A3 PCT/US1999/015053 US9915053W WO0000998A3 WO 2000000998 A3 WO2000000998 A3 WO 2000000998A3 US 9915053 W US9915053 W US 9915053W WO 0000998 A3 WO0000998 A3 WO 0000998A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
support member
electrode assembly
elastomeric joint
manufacture
Prior art date
Application number
PCT/US1999/015053
Other languages
French (fr)
Other versions
WO2000000998A2 (en
Inventor
John Lilleland
Jerome S Hubacek
William S Kennedy
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Priority to JP2000557491A priority Critical patent/JP3450828B2/en
Priority to DE69920453T priority patent/DE69920453T2/en
Priority to KR1020007015011A priority patent/KR100329974B1/en
Priority to AU48562/99A priority patent/AU4856299A/en
Priority to EP99932201A priority patent/EP1092228B1/en
Publication of WO2000000998A2 publication Critical patent/WO2000000998A2/en
Publication of WO2000000998A3 publication Critical patent/WO2000000998A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Abstract

An electrode assembly for a plasma reaction chamber wherein processing of a semiconductor substrate such as a single wafer can be carried out, a method of manufacture of the electrode assembly and a method of processing a semiconductor substrate with the assembly. The electrode assembly includes a support member such as a graphite ring, an electrode such as a silicon showerhead electrode in the form of a circular disk of uniform thickness and an elastomeric joint between the support member and the electrode. The elastomeric joint allows movement between the support member and the electrode to compensate for thermal expansion as a result of temperature cycling of the electrode assembly. The elastomeric joint can include an electrically and/or thermally conductive filler and the elastomer can be a catalyst-cured polymer which is stable at high temperatures.
PCT/US1999/015053 1998-06-30 1999-06-30 Electrode for plasma processes and method for manufacture and use thereof WO2000000998A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2000557491A JP3450828B2 (en) 1998-06-30 1999-06-30 Electrode for plasma processing, method for producing the same, and use thereof
DE69920453T DE69920453T2 (en) 1998-06-30 1999-06-30 ELECTRODE FOR PLASMA TREATMENT METHOD AND METHOD FOR THE PREPARATION AND APPLICATION THEREOF
KR1020007015011A KR100329974B1 (en) 1998-06-30 1999-06-30 Electrode for plasma processes and method for manufacture and use thereof
AU48562/99A AU4856299A (en) 1998-06-30 1999-06-30 Electrode for plasma processes and method for manufacture and use thereof
EP99932201A EP1092228B1 (en) 1998-06-30 1999-06-30 Electrode for plasma processes and method for manufacture and use thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/107,471 1998-06-30
US09/107,471 US6073577A (en) 1998-06-30 1998-06-30 Electrode for plasma processes and method for manufacture and use thereof

Publications (2)

Publication Number Publication Date
WO2000000998A2 WO2000000998A2 (en) 2000-01-06
WO2000000998A3 true WO2000000998A3 (en) 2000-08-10

Family

ID=22316783

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US1999/015053 WO2000000998A2 (en) 1998-06-30 1999-06-30 Electrode for plasma processes and method for manufacture and use thereof
PCT/US1999/014790 WO2000000999A1 (en) 1998-06-30 1999-06-30 Elastomer bonded parts for plasma processes and method for manufacture and use thereof

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US1999/014790 WO2000000999A1 (en) 1998-06-30 1999-06-30 Elastomer bonded parts for plasma processes and method for manufacture and use thereof

Country Status (11)

Country Link
US (4) US6073577A (en)
EP (3) EP1105917B1 (en)
JP (3) JP3450828B2 (en)
KR (3) KR100417846B1 (en)
CN (2) CN100585794C (en)
AU (2) AU4963699A (en)
DE (3) DE69931168T2 (en)
ES (2) ES2264263T3 (en)
MY (1) MY120364A (en)
TW (1) TW423072B (en)
WO (2) WO2000000998A2 (en)

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