WO2000003169A3 - Manifold system of removable components for distribution of fluids - Google Patents
Manifold system of removable components for distribution of fluids Download PDFInfo
- Publication number
- WO2000003169A3 WO2000003169A3 PCT/US1999/015272 US9915272W WO0003169A3 WO 2000003169 A3 WO2000003169 A3 WO 2000003169A3 US 9915272 W US9915272 W US 9915272W WO 0003169 A3 WO0003169 A3 WO 0003169A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- distribution
- manifold
- fluids
- port
- manifold system
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
- F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
- F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87249—Multiple inlet with multiple outlet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000559369A JP3972172B2 (en) | 1998-07-08 | 1999-07-07 | Removable part manifold device for dispensing fluid |
DE1999617064 DE69917064T2 (en) | 1998-07-08 | 1999-07-07 | distribution system |
EP99933722A EP1133652B1 (en) | 1998-07-08 | 1999-07-07 | Manifold system of removable components for distribution of fluids |
AT99933722T ATE266166T1 (en) | 1998-07-08 | 1999-07-07 | MODULAR CHANNEL SYSTEM FOR DISTRIBUTING MEDIA |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/111,999 US6374859B1 (en) | 1996-10-30 | 1998-07-08 | Manifold system for enabling a distribution of fluids |
US09/111,999 | 1998-07-08 | ||
US09/229,722 | 1999-01-13 | ||
US09/229,722 US6394138B1 (en) | 1996-10-30 | 1999-01-13 | Manifold system of removable components for distribution of fluids |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2000003169A2 WO2000003169A2 (en) | 2000-01-20 |
WO2000003169A3 true WO2000003169A3 (en) | 2001-07-05 |
Family
ID=26809455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/015272 WO2000003169A2 (en) | 1998-07-08 | 1999-07-07 | Manifold system of removable components for distribution of fluids |
Country Status (6)
Country | Link |
---|---|
US (1) | US6394138B1 (en) |
EP (1) | EP1133652B1 (en) |
JP (1) | JP3972172B2 (en) |
AT (1) | ATE266166T1 (en) |
DE (1) | DE69917064T2 (en) |
WO (1) | WO2000003169A2 (en) |
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AU2001234907A1 (en) * | 2000-02-10 | 2001-08-20 | Pall Corporation | Fluid device assembly |
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US6953048B2 (en) * | 2001-09-07 | 2005-10-11 | Circle Seal Controls, Inc. | Modular surface-mount fluid-flow system |
US20030079786A1 (en) * | 2001-10-30 | 2003-05-01 | Diana Michael J. | Modular fluid pressure regulator with bypass |
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US7048008B2 (en) * | 2004-04-13 | 2006-05-23 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US7320339B2 (en) * | 2005-06-02 | 2008-01-22 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US7299825B2 (en) * | 2005-06-02 | 2007-11-27 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US7628168B2 (en) | 2005-06-10 | 2009-12-08 | Lam Research Corporation | Optimized activation prevention assembly for a gas delivery system and methods therefor |
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DE102005047041B3 (en) * | 2005-09-30 | 2006-12-14 | Siemens Ag | Micro fluidic system, has modules and fluid line for rinsing fluid and running into rear wall unit, where pipe flows into distributor chamber and inside of modules at its lower or back side has outlet for rinsing fluid |
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US7575616B2 (en) * | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
US20070224708A1 (en) * | 2006-03-21 | 2007-09-27 | Sowmya Krishnan | Mass pulse sensor and process-gas system and method |
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US20080009977A1 (en) * | 2006-07-10 | 2008-01-10 | Ultra Clean Holdings | Apparatus and Method for Monitoring a Chemical-Supply System |
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US20080103623A1 (en) * | 2006-10-27 | 2008-05-01 | Applied Materials, Inc. | Facility connection positioning template |
JP5079393B2 (en) * | 2007-05-25 | 2012-11-21 | サーパス工業株式会社 | Fluid equipment unit structure |
US20080302426A1 (en) * | 2007-06-06 | 2008-12-11 | Greg Patrick Mulligan | System and method of securing removable components for distribution of fluids |
US7806143B2 (en) * | 2007-06-11 | 2010-10-05 | Lam Research Corporation | Flexible manifold for integrated gas system gas panels |
US20090078324A1 (en) * | 2007-09-21 | 2009-03-26 | Ultra Clean Technology, Inc. | Gas-panel system |
US20090114295A1 (en) * | 2007-11-06 | 2009-05-07 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
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US9233347B2 (en) * | 2010-02-22 | 2016-01-12 | Fujikin Incorporated | Mixed gas supply device |
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US8950433B2 (en) | 2011-05-02 | 2015-02-10 | Advantage Group International Inc. | Manifold system for gas and fluid delivery |
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US9109732B2 (en) | 2012-04-18 | 2015-08-18 | Vistadeltek, Llc | EZ-seal gasket for joining fluid pathways |
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US9869409B2 (en) * | 2013-01-15 | 2018-01-16 | Vistadeltek, Llc | Gasket retainer for surface mount fluid component |
US10502321B2 (en) | 2014-01-14 | 2019-12-10 | Compart Systems Pte, Ltd. | Gasket retainer for surface mount fluid component |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2250907A1 (en) * | 1973-11-09 | 1975-06-06 | Bouteille Daniel | Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block |
US4080752A (en) * | 1975-05-01 | 1978-03-28 | Burge David A | Toy blocks with conduits and fluid seal means |
US4168724A (en) * | 1976-10-27 | 1979-09-25 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften, E.V. | Valve arrangement for distributing fluids |
US4524807A (en) * | 1982-05-21 | 1985-06-25 | Humphrey Products Company | Snap-together modular manifold construction |
US5178191A (en) * | 1990-09-05 | 1993-01-12 | Newmatic Controls Inc. | Modular pneumatic control systems |
US5460204A (en) * | 1993-08-06 | 1995-10-24 | Vygon | Strip of cocks |
EP0845623A1 (en) * | 1996-11-20 | 1998-06-03 | Tadahiro Ohmi | Shutoff-opening device |
WO1998025058A1 (en) * | 1996-12-03 | 1998-06-11 | Insync Systems, Inc. | Building blocks for integrated gas panel |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3025878A (en) | 1959-06-02 | 1962-03-20 | Robert C Hupp | Mounting panel for fluid control components |
AT255802B (en) | 1964-09-29 | 1967-07-25 | Zd Y Prumyslove Automatisace N | Pneumatic logic system |
US3476214A (en) | 1968-02-01 | 1969-11-04 | Mccord Corp | Divisional lubricant feeder with bypass means |
DE2302267B1 (en) | 1973-01-18 | 1974-06-12 | Abex Gmbh Denison, 4010 Hilden | Line column for hydraulic valves |
FR2257846B1 (en) | 1973-07-03 | 1976-05-28 | Legris France Sa | |
US3993091A (en) | 1975-10-06 | 1976-11-23 | General Gas Light Company | Manifold and valve system |
DE2704869C3 (en) | 1977-02-05 | 1980-11-20 | Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen | In a modular design, fluidic control circuit composed of the same assemblies containing logic circuit elements |
US4093329A (en) | 1977-03-22 | 1978-06-06 | Robertshaw Controls Company | Manifolding means and system for electrical and/or pneumatic control devices and methods |
DE2852685A1 (en) | 1978-12-06 | 1980-06-19 | Wabco Fahrzeugbremsen Gmbh | DEVICE WITH BASE PLATES FOR A VALVE BATTERY |
US4352532A (en) | 1980-09-15 | 1982-10-05 | Robertshaw Controls Company | Manifolding means for electrical and/or pneumatic control units and parts and methods therefor |
IT1222940B (en) | 1987-10-19 | 1990-09-12 | Dropsa Spa | MODULAR PROGRESSIVE HYDRAULIC DISTRIBUTOR FOR LUBRICATION SYSTEMS |
JP2633060B2 (en) | 1990-05-30 | 1997-07-23 | ファナック株式会社 | Stacked work supply device |
DE69114817T2 (en) | 1990-05-30 | 1996-06-05 | Fanuc Ltd | DEVICE FOR STORING AND CONVEYING STACKED PARTS. |
US5368062A (en) * | 1992-01-29 | 1994-11-29 | Kabushiki Kaisha Toshiba | Gas supplying system and gas supplying apparatus |
JPH0778128A (en) | 1993-06-17 | 1995-03-20 | Kanebo Ltd | Method and device for reverse discrete cosine transformation |
JPH0758721A (en) | 1993-08-17 | 1995-03-03 | Fujitsu Denso Ltd | Multiple transmission system |
WO1995010001A1 (en) | 1993-10-06 | 1995-04-13 | Unit Instruments, Inc. | Apparatus for handling process fluid |
US5653259A (en) | 1994-10-17 | 1997-08-05 | Applied Biosystems, Inc. | Valve block |
US5605179A (en) | 1995-03-17 | 1997-02-25 | Insync Systems, Inc. | Integrated gas panel |
EP0733810B1 (en) | 1995-03-24 | 2002-09-11 | Rexroth Mecman GmbH | Modular valve arrangement |
WO1996034705A1 (en) | 1995-05-05 | 1996-11-07 | Insync Systems, Inc. | Mfc-quick change method and apparatus |
JP2832166B2 (en) | 1995-05-19 | 1998-12-02 | シーケーディ株式会社 | Gas supply integrated unit |
JP3546275B2 (en) | 1995-06-30 | 2004-07-21 | 忠弘 大見 | Fluid control device |
JP3605705B2 (en) | 1995-07-19 | 2004-12-22 | 株式会社フジキン | Fluid controller |
TW347460B (en) | 1995-11-29 | 1998-12-11 | Applied Materials Inc | Flat bottom components and flat bottom architecture for fluid and gas systems |
KR100232112B1 (en) * | 1996-01-05 | 1999-12-01 | 아마노 시게루 | Gas supply unit |
US5662143A (en) | 1996-05-16 | 1997-09-02 | Gasonics International | Modular gas box system |
US5992463A (en) | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
US5860676A (en) | 1997-06-13 | 1999-01-19 | Swagelok Marketing Co. | Modular block assembly using angled fasteners for interconnecting fluid components |
-
1999
- 1999-01-13 US US09/229,722 patent/US6394138B1/en not_active Expired - Lifetime
- 1999-07-07 JP JP2000559369A patent/JP3972172B2/en not_active Expired - Fee Related
- 1999-07-07 DE DE1999617064 patent/DE69917064T2/en not_active Expired - Fee Related
- 1999-07-07 WO PCT/US1999/015272 patent/WO2000003169A2/en active IP Right Grant
- 1999-07-07 AT AT99933722T patent/ATE266166T1/en not_active IP Right Cessation
- 1999-07-07 EP EP99933722A patent/EP1133652B1/en not_active Expired - Lifetime
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2250907A1 (en) * | 1973-11-09 | 1975-06-06 | Bouteille Daniel | Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block |
US4080752A (en) * | 1975-05-01 | 1978-03-28 | Burge David A | Toy blocks with conduits and fluid seal means |
US4168724A (en) * | 1976-10-27 | 1979-09-25 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften, E.V. | Valve arrangement for distributing fluids |
US4524807A (en) * | 1982-05-21 | 1985-06-25 | Humphrey Products Company | Snap-together modular manifold construction |
US5178191A (en) * | 1990-09-05 | 1993-01-12 | Newmatic Controls Inc. | Modular pneumatic control systems |
US5460204A (en) * | 1993-08-06 | 1995-10-24 | Vygon | Strip of cocks |
EP0845623A1 (en) * | 1996-11-20 | 1998-06-03 | Tadahiro Ohmi | Shutoff-opening device |
WO1998025058A1 (en) * | 1996-12-03 | 1998-06-11 | Insync Systems, Inc. | Building blocks for integrated gas panel |
Also Published As
Publication number | Publication date |
---|---|
US6394138B1 (en) | 2002-05-28 |
EP1133652A2 (en) | 2001-09-19 |
ATE266166T1 (en) | 2004-05-15 |
JP3972172B2 (en) | 2007-09-05 |
DE69917064T2 (en) | 2005-01-20 |
WO2000003169A2 (en) | 2000-01-20 |
EP1133652B1 (en) | 2004-05-06 |
DE69917064D1 (en) | 2004-06-09 |
JP2002520554A (en) | 2002-07-09 |
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