WO2000032990A8 - Dispositif de traitement des gaz d'echappement - Google Patents
Dispositif de traitement des gaz d'echappementInfo
- Publication number
- WO2000032990A8 WO2000032990A8 PCT/JP1999/006632 JP9906632W WO0032990A8 WO 2000032990 A8 WO2000032990 A8 WO 2000032990A8 JP 9906632 W JP9906632 W JP 9906632W WO 0032990 A8 WO0032990 A8 WO 0032990A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- burner section
- prevented
- combustion chamber
- wall
- treating device
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/32—Incineration of waste; Incinerator constructions; Details, accessories or control therefor the waste being subjected to a whirling movement, e.g. cyclonic incinerators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J3/00—Removing solid residues from passages or chambers beyond the fire, e.g. from flues by soot blowers
- F23J3/02—Cleaning furnace tubes; Cleaning flues or chimneys
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
- F23M5/00—Casings; Linings; Walls
- F23M5/08—Cooling thereof; Tube walls
- F23M5/085—Cooling thereof; Tube walls using air or other gas as the cooling medium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2064—Chlorine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2219/00—Treatment devices
- F23J2219/70—Condensing contaminants with coolers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
- F23M2900/00—Special features of, or arrangements for combustion chambers
- F23M2900/05004—Special materials for walls or lining
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/857,025 US6969250B1 (en) | 1998-12-01 | 1999-11-29 | Exhaust gas treating device |
JP2000585593A JP4497726B2 (ja) | 1998-12-01 | 1999-11-29 | 排ガス処理装置 |
EP99973112.8A EP1143197B1 (en) | 1998-12-01 | 1999-11-29 | Exhaust gas treating device |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10/342243 | 1998-12-01 | ||
JP34224398 | 1998-12-01 | ||
JP11/255855 | 1999-09-09 | ||
JP25585599 | 1999-09-09 | ||
JP11/315271 | 1999-11-05 | ||
JP31527199 | 1999-11-05 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/857,025 A-371-Of-International US6969250B1 (en) | 1998-12-01 | 1999-11-29 | Exhaust gas treating device |
US10/286,755 Division US20030054299A1 (en) | 1998-12-01 | 2002-11-04 | Waste gas treatment system |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2000032990A1 WO2000032990A1 (fr) | 2000-06-08 |
WO2000032990A8 true WO2000032990A8 (fr) | 2001-09-07 |
Family
ID=27334472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1999/006632 WO2000032990A1 (fr) | 1998-12-01 | 1999-11-29 | Dispositif de traitement des gaz d'echappement |
Country Status (6)
Country | Link |
---|---|
US (2) | US6969250B1 (ja) |
EP (1) | EP1143197B1 (ja) |
JP (2) | JP4497726B2 (ja) |
KR (1) | KR100694903B1 (ja) |
TW (1) | TW438950B (ja) |
WO (1) | WO2000032990A1 (ja) |
Families Citing this family (66)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0005231D0 (en) * | 2000-03-03 | 2000-04-26 | Boc Group Plc | Abatement of semiconductor processing gases |
WO2002016830A1 (fr) * | 2000-08-22 | 2002-02-28 | Ebara Corporation | Procede et dispositif de traitement par combustion des gaz d'echappement |
US6948929B2 (en) | 2000-10-02 | 2005-09-27 | Ebara Corporation | Combustion type waste gas treatment system |
JP4374814B2 (ja) * | 2001-09-20 | 2009-12-02 | 株式会社日立製作所 | 過弗化物処理の処理方法 |
JP2005522660A (ja) * | 2002-04-11 | 2005-07-28 | 三菱化工機株式会社 | 窒素酸化物放出レベルの低い燃焼炉においてフッ素含有化合物を含む排気ガスを浄化するための装置 |
DE10304489B4 (de) | 2002-04-11 | 2014-07-31 | Das Environmental Expert Gmbh | Einrichtung zur Reinigung von Abgasen mit fluorhaltigen Verbindungen in einem Verbrennungsreaktor mit niedriger Stickoxidemission |
DE10343439A1 (de) | 2003-09-12 | 2005-04-14 | DAS-Dünnschicht Anlagen Systeme GmbH Dresden | Einlasselement an einer Entsorgungseinrichtung für Schadstoffe enthaltende Prozessabgase |
DE10342498B4 (de) * | 2003-09-12 | 2006-07-13 | Centrotherm Elektrische Anlagen Gmbh & Co. Kg | Verfahren und Vorrichtung für die thermische Abgasreinigung |
US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
US7736599B2 (en) * | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
US8095240B2 (en) * | 2004-11-18 | 2012-01-10 | Applied Materials, Inc. | Methods for starting and operating a thermal abatement system |
US7682574B2 (en) * | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
KR100717730B1 (ko) * | 2005-07-07 | 2007-05-11 | 주식회사 엠아이 | 다중 폐가스 처리장치 |
WO2007053626A2 (en) | 2005-10-31 | 2007-05-10 | Applied Materials, Inc. | Process abatement reactor |
GB0613044D0 (en) * | 2006-06-30 | 2006-08-09 | Boc Group Plc | Gas combustion apparatus |
GB2453086A (en) * | 2006-07-20 | 2009-03-25 | Sharp Kk | Enviromental evaluation system and environmental evaluation method |
JP4987380B2 (ja) * | 2006-08-04 | 2012-07-25 | 東京瓦斯株式会社 | 難燃性物質分解バーナ |
US20090149996A1 (en) * | 2007-12-05 | 2009-06-11 | Applied Materials, Inc. | Multiple inlet abatement system |
DE102008036269A1 (de) * | 2008-08-04 | 2010-02-11 | Ewe Ag | Vorrichtung zum kontinuierlichen Mischen von ausgespeichertem Erdgas mit Sauerstoff zu einem Brenngas für eine Erwärmung des unter Druck stehenden Erdgases vor oder nach seiner Entspannung |
JP5659491B2 (ja) * | 2009-01-30 | 2015-01-28 | セントラル硝子株式会社 | フッ素ガス発生装置を含む半導体製造設備 |
JP2010276307A (ja) * | 2009-05-29 | 2010-12-09 | Japan Pionics Co Ltd | 熱分解装置 |
JP5437734B2 (ja) * | 2009-08-07 | 2014-03-12 | 株式会社荏原製作所 | 燃焼式排ガス処理装置 |
JP5606806B2 (ja) * | 2010-06-11 | 2014-10-15 | 三菱重工環境・化学エンジニアリング株式会社 | 溶融設備 |
TWI398293B (zh) * | 2010-11-08 | 2013-06-11 | Orient Service Co Ltd | Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes |
US9097436B1 (en) * | 2010-12-27 | 2015-08-04 | Lochinvar, Llc | Integrated dual chamber burner with remote communicating flame strip |
EP2503238A1 (en) * | 2011-03-22 | 2012-09-26 | Guilherme Martins Ferreira | Combustion chamber |
DE102011016175A1 (de) * | 2011-04-05 | 2012-10-11 | Ipsen International Gmbh | Verfahren und Industrieofen zur Nutzung eines anfallenden Schutzgases als Heizgas |
CN102225305B (zh) * | 2011-05-16 | 2013-04-03 | 德州市奥珍环保科技有限公司 | 废烟气转换为类空气气体的方法 |
GB2493752A (en) * | 2011-08-17 | 2013-02-20 | Edwards Ltd | Apparatus for treating a gas stream |
WO2013096646A1 (en) * | 2011-12-20 | 2013-06-27 | Eclipse, Inc. | METHOD AND APPARATUS FOR A DUAL MODE BURNER YIELDING LOW NOx EMISSION |
KR101406065B1 (ko) * | 2012-03-16 | 2014-07-01 | 주식회사 글로벌스탠다드테크놀로지 | 선회류 예혼합 저공해 연소장치 |
WO2013163192A1 (en) * | 2012-04-24 | 2013-10-31 | Applied Materials, Inc. | Gas reclamation and abatement system for high volume epitaxial silicon deposition system |
KR101435371B1 (ko) * | 2012-10-16 | 2014-08-29 | 주식회사 글로벌스탠다드테크놀로지 | CO, NOx 개별 제어 방식을 이용한 저공해 연소방법 |
KR101391191B1 (ko) * | 2013-03-20 | 2014-05-07 | 영진아이엔디(주) | 스크러버용 부산물 제거장치 및 이를 구비한 플라즈마 스크러버 |
JP2014206297A (ja) * | 2013-04-11 | 2014-10-30 | 小池酸素工業株式会社 | 排ガスの処理装置 |
US9023303B2 (en) * | 2013-04-15 | 2015-05-05 | Airgard, Inc. | Extended or multiple reaction zones in scrubbing apparatus |
JP6166102B2 (ja) | 2013-05-30 | 2017-07-19 | 株式会社荏原製作所 | 除害機能付真空ポンプ |
JP2015010800A (ja) * | 2013-07-01 | 2015-01-19 | 小池酸素工業株式会社 | 排ガスの処理装置 |
GB2516267B (en) * | 2013-07-17 | 2016-08-17 | Edwards Ltd | Head assembly |
JP6321997B2 (ja) * | 2014-02-28 | 2018-05-09 | エドワーズ株式会社 | 除害装置、該除害装置で使用される掻き取り部及び軸受装置 |
KR101657468B1 (ko) * | 2015-01-22 | 2016-09-19 | 주식회사 글로벌스탠다드테크놀로지 | 난분해성 유해가스의 소각처리를 위한 배가스 전처리 장치 및 그 전처리장치를 이용한 배가스 전처리 방법 |
US10465905B2 (en) | 2015-03-26 | 2019-11-05 | Korea Institute Of Energy Research | Energy saving combustion device for burning refractory hazardous gas and method for operating the same |
GB2536905B (en) * | 2015-03-30 | 2020-01-08 | Edwards Ltd | Radiant burner |
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US10690341B2 (en) * | 2017-01-06 | 2020-06-23 | Alzeta Corporation | Systems and methods for improved waste gas abatement |
GB2561190A (en) | 2017-04-04 | 2018-10-10 | Edwards Ltd | Purge gas feeding means, abatement systems and methods of modifying abatement systems |
JP6968274B2 (ja) * | 2017-07-07 | 2021-11-17 | 鑑鋒國際股▲ふん▼有限公司Siw Engineering Pte., Ltd. | ガス状汚染物の分解・酸化をコントロールする装置及びシステム |
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Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2326525A (en) * | 1940-08-28 | 1943-08-10 | Standard Oil Co | Method of preventing deleterious coke deposits |
US3100734A (en) * | 1960-09-23 | 1963-08-13 | Rex Roto Corp | Furnace combustion chamber |
US3567399A (en) * | 1968-06-03 | 1971-03-02 | Kaiser Aluminium Chem Corp | Waste combustion afterburner |
GB1274637A (en) * | 1969-03-27 | 1972-05-17 | Zink Co John | Process for disposal of oxides of nitrogen |
US3819468A (en) * | 1971-06-28 | 1974-06-25 | Sander Ind Inc | High temperature insulation module |
JPS5212648B2 (ja) | 1971-09-11 | 1977-04-08 | ||
US3840344A (en) * | 1972-06-06 | 1974-10-08 | Chemothermic Ind Inc | Carbon black production |
FR2208096B1 (ja) * | 1972-11-24 | 1976-04-23 | Pillard Marcel | |
JPS5313205B2 (ja) | 1973-06-05 | 1978-05-09 | ||
JPS55105111A (en) * | 1979-02-08 | 1980-08-12 | Nittetsu Kakoki Kk | Process for combustion of fluid |
JPS6053809B2 (ja) * | 1981-06-26 | 1985-11-27 | 経久 松岡 | ガス安全燃焼装置 |
JPS58108322A (ja) * | 1981-12-02 | 1983-06-28 | ミツドランド−ロス・コ−ポレ−シヨン | ガスバ−ナ− |
US4444724A (en) | 1982-04-05 | 1984-04-24 | The Air Preheater Company, Inc. | Fume incinerator with gas cooled burner |
US4555389A (en) * | 1984-04-27 | 1985-11-26 | Toyo Sanso Co., Ltd. | Method of and apparatus for burning exhaust gases containing gaseous silane |
JPS6142321A (ja) | 1984-08-06 | 1986-02-28 | Sony Corp | シランガス処理装置 |
US4547148A (en) * | 1984-10-29 | 1985-10-15 | Refractory Products Co. | Gas-fired radiant burner |
US4801437A (en) | 1985-12-04 | 1989-01-31 | Japan Oxygen Co., Ltd. | Process for treating combustible exhaust gases containing silane and the like |
JPS62185335U (ja) * | 1986-05-13 | 1987-11-25 | ||
JPS6391401A (ja) * | 1986-10-02 | 1988-04-22 | 三菱重工業株式会社 | 排ガスエコノマイザ煤付着防止方法 |
JPH01134197A (ja) | 1987-11-19 | 1989-05-26 | Shinagawa Refract Co Ltd | セラミックファイバーによる炉壁構造およびその施工方法 |
US4857075A (en) * | 1988-05-19 | 1989-08-15 | The Dow Chemical Company | Apparatus for use with pressurized reactors |
JP2688655B2 (ja) | 1988-09-02 | 1997-12-10 | 千代田化工建設株式会社 | 有毒性ガスの燃焼処理法及び装置 |
FR2651561B1 (fr) * | 1989-09-04 | 1991-12-27 | Sgn Soc Gen Tech Nouvelle | Procede et installation pour la combustion d'effluents gazeux toxiques. |
JP2921064B2 (ja) * | 1990-08-23 | 1999-07-19 | 大同特殊鋼株式会社 | 排気ダクトのダスト除去装置 |
FR2669622B1 (fr) * | 1990-11-28 | 1993-11-19 | Aerospatiale Ste Nat Indle | Materiau composite a renfort fibreux refractaire et son procede de fabrication. |
US5165887A (en) * | 1991-09-23 | 1992-11-24 | Solaronics | Burner element of woven ceramic fiber, and infrared heater for fluid immersion apparatus including the same |
US5462429A (en) | 1993-10-20 | 1995-10-31 | Praxair Technology, Inc. | Mechanical wiper for waste gas incinerator |
JPH07138078A (ja) | 1993-11-16 | 1995-05-30 | Fuji Kensetsu Kogyo Kk | 炉壁の耐火構造および炉壁の耐火施工法 |
JPH07305819A (ja) | 1994-05-16 | 1995-11-21 | Sanyo Electric Co Ltd | 焼却装置 |
JP3309377B2 (ja) * | 1994-05-25 | 2002-07-29 | 大同特殊鋼株式会社 | 廃棄物溶融炉における排ガス用のダクト |
JPH0816527A (ja) | 1994-06-30 | 1996-01-19 | Fuji Electric Co Ltd | コンピュータネットワーク装置 |
US5510093A (en) | 1994-07-25 | 1996-04-23 | Alzeta Corporation | Combustive destruction of halogenated compounds |
US5643544A (en) | 1995-04-28 | 1997-07-01 | Applied Web Systems, Inc. | Apparatus and method for rendering volatile organic compounds harmless |
BR9610600A (pt) * | 1995-08-16 | 1999-12-21 | Northrop Grumman Corp | Redução do desgaste entre peças de compósito de matriz cerâmica estrutural reforçada com fibras para motores de automóveis em relação de contato deslizante. |
JP3278565B2 (ja) * | 1995-12-28 | 2002-04-30 | 日立造船株式会社 | 高温溶融炉における排気ダクトのダスト除去装置 |
GB9608061D0 (en) * | 1996-04-16 | 1996-06-19 | Boc Group Plc | Removal of noxious substances from gas streams |
JPH10110926A (ja) | 1996-08-14 | 1998-04-28 | Nippon Sanso Kk | 燃焼式除害装置 |
JP3316619B2 (ja) | 1996-08-14 | 2002-08-19 | 日本酸素株式会社 | 燃焼式排ガス処理装置 |
TW342436B (en) * | 1996-08-14 | 1998-10-11 | Nippon Oxygen Co Ltd | Combustion type harm removal apparatus (1) |
JPH1061934A (ja) | 1996-08-16 | 1998-03-06 | Nippon Sanso Kk | 燃焼式排ガス処理装置 |
JP3585342B2 (ja) * | 1997-03-27 | 2004-11-04 | 日立造船株式会社 | 排気ダクトのダスト除去装置 |
JPH1179871A (ja) | 1997-08-27 | 1999-03-23 | Harima Ceramic Co Ltd | 焼却炉の内張り構造 |
JP4066107B2 (ja) | 1997-11-21 | 2008-03-26 | 株式会社荏原製作所 | 排ガス処理用燃焼器 |
JPH11193916A (ja) | 1997-12-26 | 1999-07-21 | Japan Pionics Co Ltd | 有害ガスの燃焼式除害装置 |
-
1999
- 1999-11-29 JP JP2000585593A patent/JP4497726B2/ja not_active Expired - Lifetime
- 1999-11-29 EP EP99973112.8A patent/EP1143197B1/en not_active Expired - Lifetime
- 1999-11-29 KR KR1020017006814A patent/KR100694903B1/ko active IP Right Grant
- 1999-11-29 WO PCT/JP1999/006632 patent/WO2000032990A1/ja active IP Right Grant
- 1999-11-29 US US09/857,025 patent/US6969250B1/en not_active Expired - Lifetime
- 1999-11-30 TW TW088120837A patent/TW438950B/zh not_active IP Right Cessation
-
2002
- 2002-11-04 US US10/286,755 patent/US20030054299A1/en not_active Abandoned
-
2010
- 2010-07-07 JP JP2010154646A patent/JP5238763B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2000032990A1 (fr) | 2000-06-08 |
JP2010249509A (ja) | 2010-11-04 |
KR100694903B1 (ko) | 2007-03-13 |
JP5238763B2 (ja) | 2013-07-17 |
TW438950B (en) | 2001-06-07 |
EP1143197A1 (en) | 2001-10-10 |
EP1143197B1 (en) | 2017-03-29 |
US20030054299A1 (en) | 2003-03-20 |
KR20010093133A (ko) | 2001-10-27 |
EP1143197A4 (en) | 2007-06-27 |
JP4497726B2 (ja) | 2010-07-07 |
US6969250B1 (en) | 2005-11-29 |
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