WO2001011328A1 - Capacitive pressure sensor having encapsulated resonating components - Google Patents
Capacitive pressure sensor having encapsulated resonating components Download PDFInfo
- Publication number
- WO2001011328A1 WO2001011328A1 PCT/US2000/021353 US0021353W WO0111328A1 WO 2001011328 A1 WO2001011328 A1 WO 2001011328A1 US 0021353 W US0021353 W US 0021353W WO 0111328 A1 WO0111328 A1 WO 0111328A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- elastic member
- capacitive plate
- sensor according
- planar surface
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Definitions
- the present invention relates to a pressure sensor, and more particularly, a pressure sensor which relies on changes in capacitance to indicate pressure fluctuations.
- Capacitive pressure sensors are well known in the prior art. Such sensors typically include a fixed element having a rigid, planar conductive surface forming one plate of a substantially parallel plate capacitor.
- a displacable (relative to the fixed element) conductive member such as a metal diaphragm, or a plated non-conductive member, such as a metalized ceramic diaphragm, forms the other plate of the capacitor.
- the diaphragm is edge-supported so that a central portion is substantially parallel to and opposite the fixed plate. Because the sensor generally has the form of a parallel plate capacitor, the characteristic capacitance C of the sensor may be approximated by the equation:
- e is the permittivity of the material between the parallel plates
- A is the surface area of the parallel plate
- d represents the gap between the plates.
- the characteristic capacitance is inversely proportional to the gap between a central portion of the diaphragm and the conductive surface of the fixed element. In order to permit a pressure differential to develop across the diaphragm, the region on one side of the diaphragm is sealed from the region on the opposite side.
- the diaphragm elasticity is selected so that pressure differentials across the diaphragm in a particular range of the interest cause displacements of the central portion of the diaphragm.
- These pressure differential-induced displacements result in corresponding variations in the gap, d, between the two capacitor plates, and thus in capacitance variations produced by the sensor capacitor.
- d the gap between the two capacitor plates
- capacitance variations produced by the sensor capacitor For relatively high sensitivity, such sensors require large changes of capacitance in response to relatively small gap changes.
- the gap is made as small as possible when the device is in equilibrium and the sensor is designed so that the gap d changes as pressure is applied.
- the multiplicative effect of e and A increases the sensitivity of the d to C relationship, so e and A are maximized to achieve the highest possible sensitivity.
- the sensor capacitor formed by the fixed conductive surface and the diaphragm is electrically coupled via conductors to an oscillator circuit.
- the oscillator circuit typically includes an inductor that forms a tank circuit with the remotely located sensor capacitor.
- This LC tank circuit provides a frequency reference for the oscillator circuit; the output frequency of which is a direct function of the resonant frequency of the tank circuit.
- the resonant frequency of the tank circuit is in turn a direct function of the inductance L of the inductor and the capacitance C of the sensor capacitor. It is well known to those in the art that the resonant frequency ⁇ 0 of a simple LC tank circuit is
- the output frequency of the oscillator circuit remains constant.
- the capacitance of the sensor capacitor varies as a function of the pressure applied to the diaphragm, the output frequency of the of the oscillator circuit also varies as a direct function of the applied pressure.
- Such a configuration produces a signal whose frequency is indicative of the pressure applied to the remote sensor.
- One disadvantage to this configuration is that having the capacitive sensor located remotely can introduce environmentally induced errors in the expected resonant frequency of the tank circuit.
- the inductance value L of an inductor and the capacitance value C of a capacitor are each temperature dependent to some extent, depending upon the design of each particular physical component. The effect of the temperature on the capacitance or inductance of a particular component is often quantified as the Atemperature coefficients associated with that component.
- the invention in one aspect comprises a capacitive sensor for measuring a pressure applied to a conductive, elastic member, or a plated non-conductive elastic member, having at least a first substantially planar surface and being supported on at least one edge.
- the sensor includes a housing for supporting the elastic member by its edge, thereby forming (i) a controlled pressure chamber disposed on the side of the elastic member corresponding to the first planar surface, and a variable pressure region disposed on the side of the elastic member opposite said first side.
- the sensor also includes a capacitive plate disposed substantially adjacent to the elastic member so as to define a gap between the first planar surface and a corresponding planar surface of the capacitive plate.
- the gap, capacitive plate and elastic member together define a capacitor having a characteristic capacitance.
- the sensor further includes an elongated electrical conductor characterized by an associated inductance value.
- the conductor is fixedly attached to and electrically coupled with the capacitive plate.
- the gap between the capacitive plate and the elastic member varies as a predetermined function of the pressure applied to the elastic member so as to vary the characteristic capacitance.
- the capacitor and the electrical conductor together form a tank circuit having a characteristic resonant frequency; varying the capacitance of this tank circuit varies the resonant frequency of the tank circuit.
- the resonant frequency of the tank circuit is indicative of the pressure applied to the elastic member.
- the pressure applied to the elastic member is generated by a pressure differential across (i) the first planar surface of the elastic member and (ii) a second planar surface of the elastic member disposed substantially parallel to the planar surface.
- this pressure differential is the result of a constant, controlled environment being in contact with the first planar surface, along with a fluid under pressure being in contact with the second planar surface of the elastic member.
- the electrical conductor is disposed in a spiral configuration within a plane substantially parallel to the capacitive plate.
- the senor further includes an insulator disposed between the capacitor plate and the electrical conductor.
- the insulator may be fixedly attached to either the capacitor plate, the electrical conductor, or both.
- the senor further includes a stiffening element fixedly attached to the capacitive plate and the conductive element.
- FIG. 1 shows a sectional view of one preferred embodiment of a capacitive pressure sensor
- FIG. 2 shows the capacitive sensor of FIG.1 with a higher pressure in the variable pressure region than the controlled pressure region;
- FIG. 3 A shows a bottom view of the capacitor plate;
- FIG. 3B shows a top view of the inductor coil;
- FIG. 4A shows the capacitor and the inductor coil connected as a series resonant tank circuit
- FIG. 4B shows the capacitor and the inductor coil connected as a parallel resonant tank circuit
- FIG. 5 shows the tank circuit of FIG 4A connected to an oscillator circuit
- FIG. 6 shows a closing-gap embodiment of the pressure sensor of FIG. 1
- FIG. 7 shows the sensor of FIG. 1 including a stiffening element attached to the electrode assembly
- FIG. 8 shows an alternate, multiple layer embodiment of the inductor coil from the sensor of FIG. 1;
- FIG. 9 shows another view of the multiple layer inductor coil shown in FIG. 8.
- FIG. 10 shows another embodiment of the sensor shown in FIG. 1.
- FIG. 1 shows a sectional view of one preferred embodiment of a capacitive pressure sensor 100 constructed in accordance with the present invention, which produces a characteristic capacitance proportional to a pressure (e.g., pressure via a fluid medium) applied to the sensor 100.
- Sensor 100 includes an electrically conductive, elastic member 102 that forms a physical boundary between a variable pressure region 104 and a controlled pressure region 106.
- FIG. 2 shows the capacitive sensor of FIG.1 with a higher pressure present in the variable pressure region 104 than the controlled pressure region 106.
- the elastic member 102 is supported at its periphery 108 by a support member 110.
- the support member 110 may include, or be integral with, the pressure sensor 100 housing, as is disclosed and described in detail in U.S. Pat. No. 5,442,962, assigned to the assignee of the subject invention and is hereby incorporated by reference.
- the planar surface of the elastic member 102 is substantially circular, although alternate embodiments may incorporate other shapes.
- a connection post 112 for supporting an electrode assembly 114 is fixedly attached to the elastic member 102.
- the connection post 112 may be attached to the elastic member 102 by brazing, soldering, welding, gluing, press fit, stud mount, or by other securing methods known to those in the art.
- the cross section of the elastic member 102 (shown in FIG. 1) is somewhat greater (i.e., thicker) at the center, as compared to the perimeter, to provide a foundation for attaching the connection post 112. Other elastic member 102 cross sections may be used to provide similar results.
- the electrode assembly 114 may be attached to the connection post 112 by brazing, soldering, gluing, press fit, stud mount, or by other methods of securing components known to those in the art.
- the electrode assembly 114 includes a capacitor plate 116, an insulator 118 and a planar inductor coil 120.
- the capacitor plate 116 a bottom view of which is shown in FIG. 3 A, is shaped, sized and contoured to substantially match the planar surface of the electrically conductive elastic member 102.
- the capacitor plate 116 includes a sheet of copper, silver or gold bonded to an insulating base 117 such as fiberglass, polyimide, glass, or ceramic, although other electrically conductive materials and other insulating materials known to those in the art may be used to form the capacitor plate 116 and the insulating base 117, respectively.
- the capacitor plate 116 may be etched from a copper-clad substrate, or screened and fired using thick-film techniques, using procedures well known for the fabrication of printed circuits.
- the insulator 118 may include a separate piece of insulating material bonded to and contiguous with the capacitor plate 116 and the inductor coil 120, or it may include an extension of the insulating base from the capacitor plate 1 16.
- the insulator 118 may include fiberglass, polyimide, ceramic, or other insulating materials known to those in the art.
- a preferred embodiment of the inductor coil 120 includes an elongated electrical conductor wound in a spiral form within a plane that is substantially parallel to the capacitor plate 116.
- the inductor coil 120 may be etched from a sheet of conductive foil bonded to an insulator 118, using printed circuit board techniques well known to those in the art.
- the coil may be screened and fired using thick-film techniques well known to those in the art.
- the coil 120 may include a single long conductor, wound in the shape shown in FIG. 3B and bonded to an insulator 118.
- the end of the coil 120 shown in FIG. 3B is electrically coupled to a plated through-hole 128 that passes through the insulator 118.
- the plated through-hole 128 is also electrically coupled to the capacitor plate 116; the coil 120 is thus electrically coupled to the capacitor plate 1 16.
- this electrical coupling between the coil 120 and the capacitive plate 116 may be accomplished by an electrical conductor passing through the insulator 118, by a conductor wrapping around the side of the insulator 1 18, or by other methods known to those in the art.
- the capacitive plate 116, the conductive elastic member 102 and the gap 126 formed between the capacitive plate 116 and the elastic member 102 form a capacitor 130 having a characteristic capacitance.
- the characteristic capacitance of such a structure is directly proportional to the areas of the capacitive plate 116 and the elastic member 102, and inversely proportional to the distance between the capacitive plate 116 and the elastic member 102.
- the pressure sensor 100 senses a pressure applied to the elastic member via a fluid medium present in the variable pressure region 104.
- the pressure in the controlled pressure region 106 may be ambient atmospheric pressure (i.e., simply exposed to the Aopen air@) or it may be more precisely controlled with respect to a constant pressure reference.
- a difference in pressure across the two regions 104 and 106 produces a net differential pressure 124 on the elastic member 102.
- the variable pressure region 104 is greater than the controlled pressure region 106, the direction of the elastic member displacement is from the variable pressure region 104 to the controlled pressure region 106, as shown in FIG. 2.
- a change of ambient pressure in the variable pressure region 104 produces a corresponding change in the amount of displacement of the elastic member 102.
- FIG. 1 shows the elastic member 102 in a neutral displacement position; i.e., when the differential pressure across the elastic member 102 is substantially zero.
- a substantially uniform gap 126 exists between the capacitive plate 116 and the elastic member 102.
- FIG. 2 shows the elastic member 102 displaced toward the controlled pressure region 106, such that the elastic member 102 presents a convex surface in the controlled pressure region 106. In this convex displacement position, a non-uniform gap 126 exists between the capacitive plate 116 and the elastic member 102.
- the width of the non-uniform gap 126 near the connection post 112 is substantially the same as the uniform gap 126 in the neutral displacement position, and the width of the non-uniform gap 126 increases as the distance from the post 112 increases.
- the increase in the gap 126 distance as the elastic member 102 displaces toward the controlled pressure region 106 produces a decrease in the characteristic capacitance.
- the characteristic capacitance of the capacitor 130 formed by the capacitive plate 116, the conductive elastic member 102 and the gap between them is inversely proportional to the magnitude of the differential pressure 124 applied to the elastic member 102.
- the capacitor 130 is electrically coupled in series to the inductive coil 120 so as to form a series resonant tank circuit 132 having a
- the LC capacitor 130 may be electrically coupled in parallel to the inductive coil 120 so as to form a
- the tank circuit (132 or 134) is electrically coupled to an oscillator circuit 136 that uses the tank circuit 132 as a frequency reference, as shown in FIG. 5 for a series resonant tank circuit 132.
- the oscillator circuit 136 is electrically coupled to the tank circuit 132 via conductors electrically coupled to inductor terminal 129 and capacitor terminal 131.
- the output of the oscillator circuit is a signal S ou ⁇ having a
- the capacitance C is a function of the frequency; i.e.,
- a closing-gap embodiment of a pressure sensor 200 shown in FIG. 6, includes an electrically conductive elastic member 202 secured about its perimeter 208 by a housing 210.
- the housing 210 includes an upper portion 210a and a lower portion 210b, and the elastic member 202 is secured between the two portions at its perimeter 208.
- the elastic member may be secured by a bonding technique known in the art such as brazing, welding, gluing, etc., or the elastic member may be secured by pressure (i.e., clamping) between the upper portion 210a and the lower portion 210b of the housing 210.
- pressure i.e., clamping
- the elastic member 202 forms a physical boundary between a variable pressure region 204 and a controlled pressure region 206.
- the electrode assembly 214 is not mechanically coupled to the elastic member 202 via a connection post. Rather, the electrode assembly 214 is suspended from the housing 210 by a suspension post 212, such that the electrode assembly 214 is disposed substantially adjacent to the elastic member 202. Because the electrode assembly 214 is not attached to the elastic member 202 in this embodiment, the cross section of the elastic member 202 can be relatively uniform as shown in FIG. 6, as opposed to the non-uniform cross section (i.e., thicker at the center and tapering out toward the perimeter) of the elastic member 102 shown in FIG. 1.
- the electrode assembly 214 in this embodiment is essentially the same as for the form of the invention shown in FIG. 1; the electrode assembly 214 includes a capacitor plate 216, an insulator 218 and a planar inductor coil 220.
- the inductor coil 220 and the capacitor plate 216 are electrically coupled via the plated through-hole 228.
- a capacitor 230 having a characteristic capacitance C is formed by the capacitor plate 216, the conductive elastic member 202 and the variable gap 226 formed between the plate 216 and the member 202. Since the areas of the capacitive plate 216 and the elastic member 202 do not vary, the characteristic capacitance C varies only as a function of the gap 226.
- the elastic member 202 As a differential pressure 224 is applied to the elastic member 202 in a direction from the variable pressure region 204 toward the controlled pressure region 206, the elastic member deflects toward the electrode assembly 214, so as to be substantially convex in the controlled pressure region. This pressure induced deflection toward the electrode assembly closes the variable gap 226, thereby increasing the characteristic capacitance C.
- the characteristic capacitance C is thus directly proportional to the magnitude of the differential pressure 124 applied to the elastic member 102 for this embodiment of the invention. Electrical access to the capacitor 230 is gained by a first electrical terminal 229 and a second electrical terminal 231.
- the first electrical terminal 229 is electrically coupled to the inductor coil 220 through an electrically conductive suspension post 212
- the second electrical terminal 231 is electrically coupled to the elastic member 202 at its perimeter 208.
- the electrode assembly 214 includes a stiffening element 140 as shown in FIG. 7. The stiffening element 140 prevents flexure of the overall electrode assembly, which in turn maintains the capacitor plate 116 within its nominal plane 142. The stability of capacitor 130 of FIG. 1, formed in part by the variable gap 126, is dependant upon the capacitor plate 116 being substantially planar. Flexure of the plate 116 due to temperature variations or other environmental forces (such as vibration and shock) may corrupt the measured value of the characteristic capacitance of the capacitor 130.
- the stiffening element 140 may include ceramics or other materials that are known to exhibit small amounts of expansion or contraction with respect to ambient temperature variations.
- the inductor coil 120 of FIG. 1 may include a multi-layer inductive coil.
- the coil 150 shown in FIG. 8 includes two layers of electrical conductor electrically coupled in series via a plated through-hole 152, although alternate embodiments may include any number of layers.
- the two layers of electrical conductor are bonded to opposite sides of an insulating layer 154, similar to the construction of a multi- layered printed circuit board.
- One utility of a multiple layer inductive coil 150 is a higher characteristic inductance value due to the increase in the length of the conductor.
- the capacitor 330 portion of the electrode assembly 314 is located within the housing 310, formed by upper portion 310a and lower portion 310b, while the insulator 318 and the inductor 320 portions are disposed outside of the housing 310.
- An electrically conductive post 312 extends through the upper portion 310a of the housing 310, and is secured in place by a non-conductive sleeve 322. This sleeve 322 electrically isolates the conductive post from the housing 310. Electrical access to the resonator formed by the inductor 320 and the capacitor 330 is gained via a first terminal 329 and a second terminal 331.
- the first terminal 329 is electrically coupled to the diaphragm 302 at the perimeter 308.
- the second terminal 331 is electrically coupled to a first end of the inductor 220.
- the second end of the inductor 220 is electrically coupled to the conductive post 320, as is the capacitive plate 316.
- the conductive post serves not only to support the capacitive plate 316 and the inductor 320, but also to electrically couple the inductor 320 to the capacitor 330.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00950987A EP1218712A1 (en) | 1999-08-06 | 2000-08-04 | Capacitive pressure sensor having encapsulated resonating components |
JP2001515937A JP2003506706A (en) | 1999-08-06 | 2000-08-04 | Capacitive pressure sensor with encapsulated resonant member |
CA002381494A CA2381494A1 (en) | 1999-08-06 | 2000-08-04 | Capacitive pressure sensor having encapsulated resonating components |
AU64002/00A AU6400200A (en) | 1999-08-06 | 2000-08-04 | Capacitive pressure sensor having encapsulated resonating components |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/369,573 US6532834B1 (en) | 1999-08-06 | 1999-08-06 | Capacitive pressure sensor having encapsulated resonating components |
US09/369,573 | 1999-08-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001011328A1 true WO2001011328A1 (en) | 2001-02-15 |
Family
ID=23456017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2000/021353 WO2001011328A1 (en) | 1999-08-06 | 2000-08-04 | Capacitive pressure sensor having encapsulated resonating components |
Country Status (6)
Country | Link |
---|---|
US (2) | US6532834B1 (en) |
EP (1) | EP1218712A1 (en) |
JP (1) | JP2003506706A (en) |
AU (1) | AU6400200A (en) |
CA (1) | CA2381494A1 (en) |
WO (1) | WO2001011328A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10323297A1 (en) * | 2002-05-24 | 2003-12-04 | Continental Teves Ag & Co Ohg | Measurement of hydraulic pressure in electronically-controlled vehicle braking system, detects de-tuning of oscillatory circuit by membrane movement |
US9719876B2 (en) | 2014-08-26 | 2017-08-01 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Fluid pressure sensor |
Families Citing this family (76)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6789429B2 (en) * | 1999-08-06 | 2004-09-14 | Setra System, Inc. | Capacitive pressure sensor having encapsulated resonating components |
US7420659B1 (en) * | 2000-06-02 | 2008-09-02 | Honeywell Interantional Inc. | Flow control system of a cartridge |
US6828801B1 (en) * | 2001-10-26 | 2004-12-07 | Welch Allyn, Inc. | Capacitive sensor |
US7100432B2 (en) * | 2002-06-06 | 2006-09-05 | Mineral Lassen Llc | Capacitive pressure sensor |
US7024936B2 (en) * | 2002-06-18 | 2006-04-11 | Corporation For National Research Initiatives | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure |
US6768958B2 (en) * | 2002-11-26 | 2004-07-27 | Lsi Logic Corporation | Automatic calibration of a masking process simulator |
US7353713B2 (en) | 2003-04-09 | 2008-04-08 | Loadstar Sensors, Inc. | Flexible apparatus and method to enhance capacitive force sensing |
US7570065B2 (en) * | 2006-03-01 | 2009-08-04 | Loadstar Sensors Inc | Cylindrical capacitive force sensing device and method |
US7086593B2 (en) * | 2003-04-30 | 2006-08-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Magnetic field response measurement acquisition system |
WO2004100363A2 (en) * | 2003-05-01 | 2004-11-18 | United States Of America, As Represented By The Administrator Of The National Aeronautics And Space Administration | Magnetic field response sensor for conductive media |
SE0400330D0 (en) * | 2004-02-12 | 2004-02-12 | Gambro Lundia Ab | Pressure sensing |
US7528597B2 (en) * | 2004-03-08 | 2009-05-05 | Digisensors, Inc. | Induction sensor |
JP4771667B2 (en) * | 2004-03-24 | 2011-09-14 | 京セラ株式会社 | Pressure detection device package and pressure detection device |
WO2006039236A2 (en) * | 2004-09-29 | 2006-04-13 | Loadstar Sensors, Inc. | Gap-change sensing through capacitive techniques |
US7222639B2 (en) * | 2004-12-29 | 2007-05-29 | Honeywell International Inc. | Electrostatically actuated gas valve |
US7511476B2 (en) * | 2005-01-04 | 2009-03-31 | Digisensors, Inc. | Electromagnetic sensor systems and methods of use thereof |
US7328882B2 (en) * | 2005-01-06 | 2008-02-12 | Honeywell International Inc. | Microfluidic modulating valve |
US7445017B2 (en) * | 2005-01-28 | 2008-11-04 | Honeywell International Inc. | Mesovalve modulator |
US7816911B2 (en) * | 2005-03-07 | 2010-10-19 | Digisensors, Inc. | Electromagnetic sensor systems |
US7898244B2 (en) * | 2005-03-07 | 2011-03-01 | Digisensors, Inc. | Electromagnetic sensor systems |
US20060267321A1 (en) * | 2005-05-27 | 2006-11-30 | Loadstar Sensors, Inc. | On-board vehicle seat capacitive force sensing device and method |
US7517201B2 (en) * | 2005-07-14 | 2009-04-14 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
US20070051415A1 (en) * | 2005-09-07 | 2007-03-08 | Honeywell International Inc. | Microvalve switching array |
US20070074579A1 (en) * | 2005-10-03 | 2007-04-05 | Honeywell International Inc. | Wireless pressure sensor and method of forming same |
US7181975B1 (en) * | 2005-09-13 | 2007-02-27 | Honeywell International | Wireless capacitance pressure sensor |
EP1811666A1 (en) * | 2006-01-19 | 2007-07-25 | 3M Innovative Properties Company | Proximity sensor and method for manufacturing the same |
US7343814B2 (en) * | 2006-04-03 | 2008-03-18 | Loadstar Sensors, Inc. | Multi-zone capacitive force sensing device and methods |
US7543604B2 (en) * | 2006-09-11 | 2009-06-09 | Honeywell International Inc. | Control valve |
US9536122B2 (en) | 2014-11-04 | 2017-01-03 | General Electric Company | Disposable multivariable sensing devices having radio frequency based sensors |
US9589686B2 (en) | 2006-11-16 | 2017-03-07 | General Electric Company | Apparatus for detecting contaminants in a liquid and a system for use thereof |
US9538657B2 (en) | 2012-06-29 | 2017-01-03 | General Electric Company | Resonant sensor and an associated sensing method |
US9658178B2 (en) | 2012-09-28 | 2017-05-23 | General Electric Company | Sensor systems for measuring an interface level in a multi-phase fluid composition |
US20110320142A1 (en) * | 2010-06-28 | 2011-12-29 | General Electric Company | Temperature independent pressure sensor and associated methods thereof |
US10914698B2 (en) | 2006-11-16 | 2021-02-09 | General Electric Company | Sensing method and system |
US7644731B2 (en) | 2006-11-30 | 2010-01-12 | Honeywell International Inc. | Gas valve with resilient seat |
US8120463B2 (en) * | 2007-01-04 | 2012-02-21 | Lockheed Martin Corporation | RFID protocol for improved tag-reader communications integrity |
US7677107B2 (en) * | 2007-07-03 | 2010-03-16 | Endotronix, Inc. | Wireless pressure sensor and method for fabricating wireless pressure sensor for integration with an implantable device |
US20090015269A1 (en) * | 2007-07-13 | 2009-01-15 | Pinto Gino A | Stray Capacitance Compensation for a Capacitive Sensor |
US8119057B2 (en) * | 2008-02-19 | 2012-02-21 | University Of Central Florida Research Foundation, Inc. | Method for synthesizing bulk ceramics and structures from polymeric ceramic precursors |
US9737657B2 (en) | 2010-06-03 | 2017-08-22 | Medtronic, Inc. | Implantable medical pump with pressure sensor |
US8397578B2 (en) | 2010-06-03 | 2013-03-19 | Medtronic, Inc. | Capacitive pressure sensor assembly |
US8542023B2 (en) | 2010-11-09 | 2013-09-24 | General Electric Company | Highly selective chemical and biological sensors |
US8718317B2 (en) * | 2011-05-19 | 2014-05-06 | Zonghan Wu | Moving-magnet electromagnetic device with planar coil |
US8692562B2 (en) | 2011-08-01 | 2014-04-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Wireless open-circuit in-plane strain and displacement sensor requiring no electrical connections |
US8899264B2 (en) | 2011-12-15 | 2014-12-02 | Honeywell International Inc. | Gas valve with electronic proof of closure system |
US9557059B2 (en) | 2011-12-15 | 2017-01-31 | Honeywell International Inc | Gas valve with communication link |
US8947242B2 (en) | 2011-12-15 | 2015-02-03 | Honeywell International Inc. | Gas valve with valve leakage test |
US9835265B2 (en) | 2011-12-15 | 2017-12-05 | Honeywell International Inc. | Valve with actuator diagnostics |
US9851103B2 (en) | 2011-12-15 | 2017-12-26 | Honeywell International Inc. | Gas valve with overpressure diagnostics |
US8839815B2 (en) | 2011-12-15 | 2014-09-23 | Honeywell International Inc. | Gas valve with electronic cycle counter |
US9074770B2 (en) | 2011-12-15 | 2015-07-07 | Honeywell International Inc. | Gas valve with electronic valve proving system |
US9995486B2 (en) | 2011-12-15 | 2018-06-12 | Honeywell International Inc. | Gas valve with high/low gas pressure detection |
US9846440B2 (en) | 2011-12-15 | 2017-12-19 | Honeywell International Inc. | Valve controller configured to estimate fuel comsumption |
US8905063B2 (en) | 2011-12-15 | 2014-12-09 | Honeywell International Inc. | Gas valve with fuel rate monitor |
US20130160567A1 (en) * | 2011-12-21 | 2013-06-27 | Canon Kabushiki Kaisha | Force sensor |
US8984950B2 (en) * | 2012-04-20 | 2015-03-24 | Rosemount Aerospace Inc. | Separation mode capacitors for sensors |
WO2014031749A1 (en) | 2012-08-22 | 2014-02-27 | General Electric Company | Wireless system and method for measuring an operative condition of a machine |
US10598650B2 (en) | 2012-08-22 | 2020-03-24 | General Electric Company | System and method for measuring an operative condition of a machine |
US10422531B2 (en) | 2012-09-15 | 2019-09-24 | Honeywell International Inc. | System and approach for controlling a combustion chamber |
US9234661B2 (en) | 2012-09-15 | 2016-01-12 | Honeywell International Inc. | Burner control system |
US10684268B2 (en) | 2012-09-28 | 2020-06-16 | Bl Technologies, Inc. | Sensor systems for measuring an interface level in a multi-phase fluid composition |
US9329153B2 (en) | 2013-01-02 | 2016-05-03 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of mapping anomalies in homogenous material |
US9861524B2 (en) * | 2013-03-14 | 2018-01-09 | New Jersey Institute Of Technology | Smart shunt devices and methods |
EP2868970B1 (en) | 2013-10-29 | 2020-04-22 | Honeywell Technologies Sarl | Regulating device |
US10024439B2 (en) | 2013-12-16 | 2018-07-17 | Honeywell International Inc. | Valve over-travel mechanism |
US9841122B2 (en) | 2014-09-09 | 2017-12-12 | Honeywell International Inc. | Gas valve with electronic valve proving system |
US9645584B2 (en) | 2014-09-17 | 2017-05-09 | Honeywell International Inc. | Gas valve with electronic health monitoring |
US9995778B1 (en) | 2014-09-26 | 2018-06-12 | David Fiori, Jr. | Sensor apparatus |
US10503181B2 (en) | 2016-01-13 | 2019-12-10 | Honeywell International Inc. | Pressure regulator |
US10564062B2 (en) | 2016-10-19 | 2020-02-18 | Honeywell International Inc. | Human-machine interface for gas valve |
EP3585252A1 (en) | 2017-02-24 | 2020-01-01 | Endotronix, Inc. | Wireless sensor reader assembly |
US11615257B2 (en) | 2017-02-24 | 2023-03-28 | Endotronix, Inc. | Method for communicating with implant devices |
US11073281B2 (en) | 2017-12-29 | 2021-07-27 | Honeywell International Inc. | Closed-loop programming and control of a combustion appliance |
US10697815B2 (en) | 2018-06-09 | 2020-06-30 | Honeywell International Inc. | System and methods for mitigating condensation in a sensor module |
US11415474B2 (en) * | 2020-06-15 | 2022-08-16 | The Boeing Company | Pressure sensor and system for measuring pressure |
CN112683427B (en) * | 2020-11-26 | 2022-04-29 | 南京高华科技股份有限公司 | LC composite MEMS pressure sensor and preparation method thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4127110A (en) * | 1976-05-24 | 1978-11-28 | Huntington Institute Of Applied Medical Research | Implantable pressure transducer |
US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62115110U (en) * | 1985-11-29 | 1987-07-22 | ||
JPH0314443U (en) * | 1989-06-27 | 1991-02-14 | ||
US5150275A (en) * | 1991-07-01 | 1992-09-22 | Setra Systems, Inc. | Capacitive pressure sensor |
US5155653A (en) * | 1991-08-14 | 1992-10-13 | Maclean-Fogg Company | Capacitive pressure sensor |
US5499533A (en) * | 1992-08-26 | 1996-03-19 | Miller; Mark | Downhole pressure gauge converter |
US5442962A (en) * | 1993-08-20 | 1995-08-22 | Setra Systems, Inc. | Capacitive pressure sensor having a pedestal supported electrode |
SE506558C2 (en) * | 1994-04-14 | 1998-01-12 | Cecap Ab | Sensor element for pressure transducer |
US5911162A (en) * | 1997-06-20 | 1999-06-08 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
-
1999
- 1999-08-06 US US09/369,573 patent/US6532834B1/en not_active Expired - Lifetime
-
2000
- 2000-08-04 JP JP2001515937A patent/JP2003506706A/en active Pending
- 2000-08-04 CA CA002381494A patent/CA2381494A1/en not_active Abandoned
- 2000-08-04 EP EP00950987A patent/EP1218712A1/en not_active Withdrawn
- 2000-08-04 WO PCT/US2000/021353 patent/WO2001011328A1/en not_active Application Discontinuation
- 2000-08-04 AU AU64002/00A patent/AU6400200A/en not_active Abandoned
-
2003
- 2003-03-18 US US10/391,064 patent/US20040035211A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4127110A (en) * | 1976-05-24 | 1978-11-28 | Huntington Institute Of Applied Medical Research | Implantable pressure transducer |
US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10323297A1 (en) * | 2002-05-24 | 2003-12-04 | Continental Teves Ag & Co Ohg | Measurement of hydraulic pressure in electronically-controlled vehicle braking system, detects de-tuning of oscillatory circuit by membrane movement |
US9719876B2 (en) | 2014-08-26 | 2017-08-01 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Fluid pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
EP1218712A1 (en) | 2002-07-03 |
US6532834B1 (en) | 2003-03-18 |
CA2381494A1 (en) | 2001-02-15 |
JP2003506706A (en) | 2003-02-18 |
US20040035211A1 (en) | 2004-02-26 |
AU6400200A (en) | 2001-03-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6532834B1 (en) | Capacitive pressure sensor having encapsulated resonating components | |
US6789429B2 (en) | Capacitive pressure sensor having encapsulated resonating components | |
US5798462A (en) | Magnetic position sensor with magnetic field shield diaphragm | |
KR100421304B1 (en) | Capacitive strain sensor and method for using the same | |
US8104358B1 (en) | High sensitivity passive wireless strain sensor | |
EP0424149B1 (en) | Capacitance accelerometer | |
EP1573273B1 (en) | Transducer and electronic device | |
CN100573070C (en) | Utilize the variable inductor type mems pressure sensor of magnetostrictive effect | |
US7340951B2 (en) | Distributed impedance sensor | |
US4772983A (en) | Method and article for a nearly zero temperature coefficient pressure transducer | |
CA2130364C (en) | Capacitive transducer feedback-controlled by means of electrostatic force and method for controlling the profile of the transducing element in the transducer | |
US4279155A (en) | Bourdon tube transducer | |
US20090315546A1 (en) | Magnetic Field Response Sensor For Conductive Media | |
US6786095B2 (en) | Acceleration sensor | |
US4866988A (en) | Capacitive pressure transducer | |
US11371898B2 (en) | Pressure sensor including increased processing precision | |
US9815686B2 (en) | Microelectromechanical device and system with low-impedance resistive transducer | |
EP4043850A1 (en) | Electrodynamic position transducer | |
JP2001074767A (en) | Accelerometer and its manufacture | |
JP2912949B2 (en) | Capacitive pressure sensor | |
JP2000275126A (en) | Force sensor circuit | |
CN220626257U (en) | Three-stage split ring resonant gas sensor | |
RU2717165C1 (en) | Seismic sensor | |
JP3386233B2 (en) | Piezoelectric sensor and method of manufacturing the same | |
WO2020180794A1 (en) | Pressure sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AU CA JP |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2381494 Country of ref document: CA |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2000950987 Country of ref document: EP Ref document number: 64002/00 Country of ref document: AU |
|
WWP | Wipo information: published in national office |
Ref document number: 2000950987 Country of ref document: EP |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 2000950987 Country of ref document: EP |