WO2001071226A3 - Thermally actuated microvalve assembly - Google Patents

Thermally actuated microvalve assembly Download PDF

Info

Publication number
WO2001071226A3
WO2001071226A3 PCT/US2001/008403 US0108403W WO0171226A3 WO 2001071226 A3 WO2001071226 A3 WO 2001071226A3 US 0108403 W US0108403 W US 0108403W WO 0171226 A3 WO0171226 A3 WO 0171226A3
Authority
WO
WIPO (PCT)
Prior art keywords
pilot
valve
cavity
ports
fluid
Prior art date
Application number
PCT/US2001/008403
Other languages
French (fr)
Other versions
WO2001071226A2 (en
Inventor
Richard Barron
Kirt R Williams
E Nelson Fuller
Harry A Hunnicutt
Original Assignee
Kelsey Hayes Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kelsey Hayes Co filed Critical Kelsey Hayes Co
Priority to JP2001569176A priority Critical patent/JP2003528276A/en
Priority to DE60124511T priority patent/DE60124511T2/en
Priority to EP01920419A priority patent/EP1266142B1/en
Priority to AU2001247475A priority patent/AU2001247475A1/en
Publication of WO2001071226A2 publication Critical patent/WO2001071226A2/en
Publication of WO2001071226A3 publication Critical patent/WO2001071226A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
    • B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
    • B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
    • B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
    • B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
    • B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
    • B60T8/3655—Continuously controlled electromagnetic valves
    • B60T8/366—Valve details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
    • B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
    • B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
    • B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
    • B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
    • B60T8/3695—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force wherein the pilot valve is mounted separately from its power section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
    • B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
    • B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
    • B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
    • B60T8/42—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition having expanding chambers for controlling pressure, i.e. closed systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
    • B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
    • B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
    • B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
    • B60T8/42—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition having expanding chambers for controlling pressure, i.e. closed systems
    • B60T8/4275—Pump-back systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
    • F15B13/043—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
    • F15B13/0438—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves the pilot valves being of the nozzle-flapper type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86622—Motor-operated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86847—Pivoted valve unit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y10T137/87193—Pilot-actuated
    • Y10T137/87209—Electric

Abstract

A microvalve device for controlling fluid flow in a fluid circuit (10). The microvalve device comprises a body (12) having a cavity formed therein. The body further has first (20) and second (22) pilot ports placed in fluid communication with the cavity. The body also has first (28) and second (30) primary ports placed in fluid communication with the cavity. Each port is adapted for connection with a designated fluid source. A pilot valve (36) supported by the body is movably disposed in the cavity for opening and closing the first and second pilot ports. An actuator (38) is operably coupled to the pilot valve for moving the pilot valve. A microvalve (40) is positioned by the fluid controlled by the pilot valve. The microvalve is a slider valve having a first end (40a) and a second end (40b). The slider valve is movably disposed in the cavity for movement between a first position and a second position. The first end of the slider valve is in fluid communication with the first and second pilot ports when the first and second pilot ports are open. The second end of the slider valve is in constant fluid communication with the first primary port. When moving between the first and second positions, the slider valve at least partially blocks and unblocks the second primary port for the purpose of variably restricting fluid flow between the primary ports.
PCT/US2001/008403 2000-03-22 2001-03-16 Thermally actuated microvalve assembly WO2001071226A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001569176A JP2003528276A (en) 2000-03-22 2001-03-16 Thermally actuated microvalve assembly
DE60124511T DE60124511T2 (en) 2000-03-22 2001-03-16 HEAT-OPERATED MICRO-VALVE DEVICE
EP01920419A EP1266142B1 (en) 2000-03-22 2001-03-16 Thermally actuated microvalve assembly
AU2001247475A AU2001247475A1 (en) 2000-03-22 2001-03-16 Thermally actuated microvalve assembly

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/533,893 2000-03-22
US09/533,893 US6845962B1 (en) 2000-03-22 2000-03-22 Thermally actuated microvalve device

Publications (2)

Publication Number Publication Date
WO2001071226A2 WO2001071226A2 (en) 2001-09-27
WO2001071226A3 true WO2001071226A3 (en) 2002-06-27

Family

ID=24127863

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/008403 WO2001071226A2 (en) 2000-03-22 2001-03-16 Thermally actuated microvalve assembly

Country Status (7)

Country Link
US (2) US6845962B1 (en)
EP (1) EP1266142B1 (en)
JP (1) JP2003528276A (en)
AT (1) ATE345445T1 (en)
AU (1) AU2001247475A1 (en)
DE (1) DE60124511T2 (en)
WO (1) WO2001071226A2 (en)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7011378B2 (en) * 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
WO2003012566A1 (en) * 2001-07-31 2003-02-13 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US20070251586A1 (en) * 2003-11-24 2007-11-01 Fuller Edward N Electro-pneumatic control valve with microvalve pilot
KR20060109959A (en) * 2003-11-24 2006-10-23 알루미나 마이크로 엘엘씨 Microvalve device suitable for controlling a variable displacement compressor
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
CN100501212C (en) * 2004-02-27 2009-06-17 铝微有限公司 Macro valve device
WO2005091820A2 (en) * 2004-03-05 2005-10-06 Alumina Micro Llc Selective bonding for forming a microvalve
US7156365B2 (en) * 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
WO2006018043A2 (en) * 2004-08-18 2006-02-23 Agilent Technologies, Inc. Valve slider for a microfluidic coupling device
WO2006076386A1 (en) * 2005-01-14 2006-07-20 Alumina Micro Llc. System and method for controlling a variable displacement compressor
US20070234785A1 (en) * 2006-03-30 2007-10-11 Timothy Beerling System and method for using a flexible membrane for controlling fluid flow in a microfluidic circuit
WO2008076388A1 (en) 2006-12-15 2008-06-26 Microstaq, Inc. Microvalve device
CN101675280B (en) 2007-03-30 2013-05-15 盾安美斯泰克公司(美国) Pilot operated micro spool valve
US8387659B2 (en) 2007-03-31 2013-03-05 Dunan Microstaq, Inc. Pilot operated spool valve
CN102164846B (en) * 2008-08-09 2016-03-30 盾安美斯泰克公司(美国) The microvalve assembly improved
US8113482B2 (en) * 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
US8540207B2 (en) 2008-12-06 2013-09-24 Dunan Microstaq, Inc. Fluid flow control assembly
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
WO2011022267A2 (en) 2009-08-17 2011-02-24 Microstaq, Inc. Micromachined device and control method
CN102792419B (en) 2010-01-28 2015-08-05 盾安美斯泰克股份有限公司 The technique that high temperature selective fusion engages and structure
US8956884B2 (en) 2010-01-28 2015-02-17 Dunan Microstaq, Inc. Process for reconditioning semiconductor surface to facilitate bonding
US10132303B2 (en) 2010-05-21 2018-11-20 Hewlett-Packard Development Company, L.P. Generating fluid flow in a fluidic network
EP2571696B1 (en) 2010-05-21 2019-08-07 Hewlett-Packard Development Company, L.P. Fluid ejection device with circulation pump
US8721061B2 (en) 2010-05-21 2014-05-13 Hewlett-Packard Development Company, L.P. Fluid ejection device with circulation pump
US9963739B2 (en) 2010-05-21 2018-05-08 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems
US9090084B2 (en) 2010-05-21 2015-07-28 Hewlett-Packard Development Company, L.P. Fluid ejection device including recirculation system
US9395050B2 (en) 2010-05-21 2016-07-19 Hewlett-Packard Development Company, L.P. Microfluidic systems and networks
US20120012299A1 (en) * 2010-07-16 2012-01-19 Industrial Idea Partners, Inc. Proportional Micro-Valve With Thermal Feedback
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US8851117B2 (en) 2012-01-30 2014-10-07 Gm Global Technology Operations, Llc MEMS valve operating profile
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
DE102012006658A1 (en) * 2012-04-03 2013-10-10 Burkhard Büstgens Micro-pilot valve
US9235219B2 (en) * 2012-12-27 2016-01-12 Zhejiang Dunan Hetian Metal Co., Ltd. Microvalve with integrated flow sensing capability
CN104884851B (en) * 2012-12-27 2017-04-12 浙江盾安人工环境股份有限公司 Micro valve device and valve body assembly
WO2014107892A1 (en) * 2013-01-11 2014-07-17 浙江盾安人工环境股份有限公司 Microvalve device and manufacturing method therefor
US9328850B2 (en) * 2013-06-24 2016-05-03 Zhejiang Dunan Hetian Metal Co., Ltd. Microvalve having improved air purging capability
CN104329484B (en) * 2013-06-24 2018-11-30 浙江盾安禾田金属有限公司 The miniature valve of pollution resistance with enhancing
WO2014209988A1 (en) 2013-06-25 2014-12-31 Zhejiang Dunan Hetian Metal Co., Ltd. On-demand micro expansion valve for a refrigeration system
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
CN104132163A (en) * 2014-08-03 2014-11-05 刘典军 Multilevel centrifugation pneumatic switch
US9512936B2 (en) * 2014-08-14 2016-12-06 Dunan Microstaq, Inc. Three-port microvalve with improved sealing mechanism
US9970535B1 (en) 2014-10-13 2018-05-15 Dunan Microstaq, Inc. Linear package for a two-stage control microvalve
US9618140B2 (en) * 2014-11-14 2017-04-11 Dunan Microstaq, Inc. Microvalve having improved actuator
US10094490B2 (en) 2015-06-16 2018-10-09 Dunan Microstaq, Inc. Microvalve having contamination resistant features
US9909671B2 (en) 2015-07-01 2018-03-06 Dunan Microstaq, Inc. Low leak pilot operated spool valve
US10125988B2 (en) 2016-01-25 2018-11-13 Dunan Microstaq, Inc. Two-stage fluid control valve having a first stage mechanical valve and a second stage microvalve
US10145594B2 (en) 2016-02-03 2018-12-04 Dunan Microstaq, Inc. Expansion valve
US10556072B2 (en) 2017-01-31 2020-02-11 Dunan Microstaq, Inc. Metering device for a metered dose inhaler
US10948102B2 (en) 2018-05-02 2021-03-16 Dunan Microstaq, Inc. Two-stage fluid control valve having a first stage bi-stable two-port valve and a second stage microvalve
US11353140B2 (en) 2019-01-29 2022-06-07 Dunan Microstaq, Inc. Two port mems silicon flow control valve
USD919833S1 (en) 2019-03-06 2021-05-18 Princeton Biochemicals, Inc Micro valve for controlling path of fluids in miniaturized capillary connections
US11415154B2 (en) * 2019-04-12 2022-08-16 Husco International, Inc. Hydraulic systems and methods for nested pressure regulating valves
US11371619B2 (en) * 2019-07-19 2022-06-28 Facebook Technologies, Llc Membraneless fluid-controlled valve

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5238223A (en) * 1989-08-11 1993-08-24 Robert Bosch Gmbh Method of making a microvalve
WO1999016096A1 (en) * 1997-09-24 1999-04-01 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5970998A (en) * 1998-02-27 1999-10-26 The Regents Of The University Of California Microfabricated cantilever ratchet valve, and method for using same
WO2000014415A2 (en) * 1998-09-03 2000-03-16 Lucas Novasensor Proportional micromechanical device

Family Cites Families (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US503778A (en) * 1893-08-22 Insulator for electric wires
US886045A (en) * 1906-03-06 1908-04-28 Herman J Ehrlich Valve.
US1926031A (en) * 1927-05-17 1933-09-12 Chas A Beatty Automatic stage lift flowing device
US1886205A (en) * 1929-07-01 1932-11-01 Int Harvester Co Spring pressure contact element
US2412205A (en) * 1945-05-12 1946-12-10 John A Cook Pontoon metering valve and combination
US2504055A (en) * 1948-10-08 1950-04-11 Stewart Warner Corp High-pressure lubricant receiving fitting
US2875779A (en) * 1954-02-08 1959-03-03 John F Campbell Variable area metering valve
US2840107A (en) * 1955-01-31 1958-06-24 John F Campbell Variable area scheduling valve
US3031747A (en) * 1957-12-31 1962-05-01 Tung Sol Electric Inc Method of forming ohmic contact to silicon
GB1374626A (en) * 1970-10-30 1974-11-20 Matsushita Electronics Corp Method of making a semiconductor device
NL7102074A (en) * 1971-02-17 1972-08-21
US3860949A (en) * 1973-09-12 1975-01-14 Rca Corp Semiconductor mounting devices made by soldering flat surfaces to each other
GB1457806A (en) * 1974-03-04 1976-12-08 Mullard Ltd Semiconductor device manufacture
DE2514922C2 (en) * 1975-04-05 1983-01-27 SEMIKRON Gesellschaft für Gleichrichterbau u. Elektronik mbH, 8500 Nürnberg Semiconductor component resistant to alternating thermal loads
US4019388A (en) * 1976-03-11 1977-04-26 Bailey Meter Company Glass to metal seal
US4152540A (en) * 1977-05-03 1979-05-01 American Pacemaker Corporation Feedthrough connector for implantable cardiac pacer
US4181249A (en) * 1977-08-26 1980-01-01 Hughes Aircraft Company Eutectic die attachment method for integrated circuits
DE2933835A1 (en) * 1979-08-21 1981-03-26 Siemens AG, 1000 Berlin und 8000 München METHOD FOR FASTENING TARGET MATERIALS PRESENT IN DISK OR PLATE SHAPE ON COOLING PLATE FOR DUST-UP SYSTEMS
US4298023A (en) * 1980-09-09 1981-11-03 Mcginnis Gerald E Spring loaded exhalation valve
US4434813A (en) 1981-11-19 1984-03-06 The United States Of America As Represented By The Secretary Of The Army Laminar proportional amplifier and laminar jet angular rate sensor with rotating splitter for null adjustment
DE3401404A1 (en) * 1984-01-17 1985-07-25 Robert Bosch Gmbh, 7000 Stuttgart SEMICONDUCTOR COMPONENT
US4581624A (en) 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
US4772935A (en) * 1984-12-19 1988-09-20 Fairchild Semiconductor Corporation Die bonding process
US4647013A (en) 1985-02-21 1987-03-03 Ford Motor Company Silicon valve
US4628576A (en) 1985-02-21 1986-12-16 Ford Motor Company Method for fabricating a silicon valve
US4824073A (en) 1986-09-24 1989-04-25 Stanford University Integrated, microminiature electric to fluidic valve
US4821997A (en) 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
US4943032A (en) 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US4966646A (en) 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
DE3738630C2 (en) 1987-11-13 1995-06-08 Rexroth Mannesmann Gmbh Electro-hydraulic pressure converter device
US4938742A (en) 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
DE3814150A1 (en) 1988-04-27 1989-11-09 Draegerwerk Ag VALVE ARRANGEMENT MADE FROM MICROSTRUCTURED COMPONENTS
US5065978A (en) 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
US4828184A (en) 1988-08-12 1989-05-09 Ford Motor Company Silicon micromachined compound nozzle
US4826131A (en) 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
US5074629A (en) 1988-10-26 1991-12-24 Stanford University Integrated variable focal length lens and its applications
US4869282A (en) 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
US5116457A (en) * 1989-04-07 1992-05-26 I C Sensors, Inc. Semiconductor transducer or actuator utilizing corrugated supports
US5064165A (en) 1989-04-07 1991-11-12 Ic Sensors, Inc. Semiconductor transducer or actuator utilizing corrugated supports
US5209118A (en) 1989-04-07 1993-05-11 Ic Sensors Semiconductor transducer or actuator utilizing corrugated supports
US5177579A (en) 1989-04-07 1993-01-05 Ic Sensors, Inc. Semiconductor transducer or actuator utilizing corrugated supports
US5037778A (en) 1989-05-12 1991-08-06 Intel Corporation Die attach using gold ribbon with gold/silicon eutectic alloy cladding
DE3917423C1 (en) 1989-05-29 1990-05-31 Buerkert Gmbh & Co Werk Ingelfingen, 7118 Ingelfingen, De
DE3917396A1 (en) 1989-05-29 1990-12-06 Buerkert Gmbh MICRO VALVE
DE3919876A1 (en) 1989-06-19 1990-12-20 Bosch Gmbh Robert MICRO VALVE
US5069419A (en) 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
US5061914A (en) 1989-06-27 1991-10-29 Tini Alloy Company Shape-memory alloy micro-actuator
US5066533A (en) * 1989-07-11 1991-11-19 The Perkin-Elmer Corporation Boron nitride membrane in wafer structure and process of forming the same
DE3926647A1 (en) 1989-08-11 1991-02-14 Bosch Gmbh Robert METHOD FOR PRODUCING A MICROVALVE
DE3940427A1 (en) 1989-12-07 1991-06-13 Bosch Gmbh Robert VEHICLE BRAKE SYSTEM WITH ANTI-BLOCKING DEVICE
US5180623A (en) 1989-12-27 1993-01-19 Honeywell Inc. Electronic microvalve apparatus and fabrication
US5244537A (en) 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
US5082242A (en) 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
US5133379A (en) 1990-01-31 1992-07-28 University Of Utah Research Foundation Servovalve apparatus for use in fluid systems
DE4003619A1 (en) 1990-02-07 1991-08-14 Bosch Gmbh Robert Two=stage multilayer micro-valve - has central flexible tongue in first stage for direction of fluid into two chambers with outlet and return ports, respectively
DE4006152A1 (en) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung MICROMINIATURIZED PUMP
DE4009090A1 (en) * 1990-03-21 1991-09-26 Bosch Gmbh Robert METHOD FOR PRODUCING MULTILAYER SILICON STRUCTURES
US5050838A (en) 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling
DE4035852A1 (en) 1990-11-10 1992-05-14 Bosch Gmbh Robert MULTI-LAYER MICROVALVE
DE4041579A1 (en) 1990-12-22 1992-06-25 Bosch Gmbh Robert MICRO VALVE
GB2251703B (en) 1991-01-11 1994-08-03 Marconi Gec Ltd Valve devices
US5400824A (en) 1991-01-21 1995-03-28 Robert Bosch Gmbh Microvalve
DE4107660C2 (en) * 1991-03-09 1995-05-04 Bosch Gmbh Robert Process for mounting silicon wafers on metallic mounting surfaces
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5355712A (en) 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
US5217283A (en) 1991-09-25 1993-06-08 Ford Motor Company Integral anti-lock brake/traction control system
US5179499A (en) 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
US5271597A (en) 1992-05-29 1993-12-21 Ic Sensors, Inc. Bimetallic diaphragm with split hinge for microactuator
JPH0656014A (en) 1992-08-07 1994-03-01 Nisshinbo Ind Inc Anti-skid control method
US5309943A (en) 1992-12-07 1994-05-10 Ford Motor Company Micro-valve and method of manufacturing
US5333831A (en) 1993-02-19 1994-08-02 Hewlett-Packard Company High performance micromachined valve orifice and seat
JPH06286600A (en) 1993-03-31 1994-10-11 Toyota Motor Corp Brake pressure control device for vehicle
US5445185A (en) 1993-04-05 1995-08-29 Ford Motor Company Piezoelectric fluid control valve
US5267589A (en) 1993-04-05 1993-12-07 Ford Motor Company Piezoelectric pressure control valve
US5325880A (en) 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
US5417235A (en) 1993-07-28 1995-05-23 Regents Of The University Of Michigan Integrated microvalve structures with monolithic microflow controller
US5368704A (en) 1993-08-06 1994-11-29 Teknekron Corporation Micro-electrochemical valves and method
DE4331851A1 (en) * 1993-09-20 1995-03-23 Bosch Gmbh Robert Perforated body and valve with a perforated body
US5577533A (en) * 1994-09-13 1996-11-26 Cook, Jr.; Joseph S. Flexured shaft poppet
DE19526897A1 (en) * 1995-07-22 1997-01-23 Bosch Gmbh Robert Micro-valve operating with high precision
US5838351A (en) * 1995-10-26 1998-11-17 Hewlett-Packard Company Valve assembly for controlling fluid flow within an ink-jet pen
US5941608A (en) 1996-03-07 1999-08-24 Kelsey-Hayes Company Electronic brake management system with manual fail safe
US5954079A (en) * 1996-04-30 1999-09-21 Hewlett-Packard Co. Asymmetrical thermal actuation in a microactuator
US6019437A (en) 1996-05-29 2000-02-01 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
US6105737A (en) * 1996-06-05 2000-08-22 Varity Kelsey-Hayes Gmbh Programmable electronic pedal simulator
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
US5785295A (en) 1996-08-27 1998-07-28 Industrial Technology Research Institute Thermally buckling control microvalve
US6038928A (en) 1996-10-07 2000-03-21 Lucas Novasensor Miniature gauge pressure sensor using silicon fusion bonding and back etching
US5909078A (en) 1996-12-16 1999-06-01 Mcnc Thermal arched beam microelectromechanical actuators
US5873385A (en) * 1997-07-21 1999-02-23 Emhart Inc. Check valve
US5848605A (en) 1997-11-12 1998-12-15 Cybor Corporation Check valve
US6523560B1 (en) * 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US7011378B2 (en) * 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5238223A (en) * 1989-08-11 1993-08-24 Robert Bosch Gmbh Method of making a microvalve
WO1999016096A1 (en) * 1997-09-24 1999-04-01 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5970998A (en) * 1998-02-27 1999-10-26 The Regents Of The University Of California Microfabricated cantilever ratchet valve, and method for using same
WO2000014415A2 (en) * 1998-09-03 2000-03-16 Lucas Novasensor Proportional micromechanical device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NOWOROLSKI J M ET AL: "Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 55, no. 1, 15 July 1996 (1996-07-15), pages 65 - 69, XP004077979, ISSN: 0924-4247 *

Also Published As

Publication number Publication date
US6845962B1 (en) 2005-01-25
US20050121090A1 (en) 2005-06-09
DE60124511T2 (en) 2007-09-06
ATE345445T1 (en) 2006-12-15
WO2001071226A2 (en) 2001-09-27
AU2001247475A1 (en) 2001-10-03
DE60124511D1 (en) 2006-12-28
JP2003528276A (en) 2003-09-24
EP1266142B1 (en) 2006-11-15
US6994115B2 (en) 2006-02-07
EP1266142A2 (en) 2002-12-18

Similar Documents

Publication Publication Date Title
WO2001071226A3 (en) Thermally actuated microvalve assembly
GB2345712A (en) Full bore variable flow control device
CA2430189A1 (en) Device and method for operating at least two valves
CA2403876A1 (en) Internal gate valve for flow completion systems
GB2377267A (en) Dual snap action for valves
WO2005046953A3 (en) Valve gate assembly
TW200506259A (en) Temperature control device
WO2005084211B1 (en) Hybrid micro/macro plate valve
JP2004515681A5 (en)
EP0913610A3 (en) Solenoid valve
EP1164283A3 (en) A fuel injection valve
SE8202565L (en) CONTROL VALVE
EP1362990A3 (en) Engine valve actuation system
WO2004096402A3 (en) Air conserving slide valve
CA2326985A1 (en) Hydraulic valve for a camera dolly
EP0963508A4 (en) Adjustment mechanism for valves
PT1023550E (en) THREE-WAY CONTROL VALVE
CA2323257A1 (en) Compact expanding gate valve
DE3873095D1 (en) AUTOMATICLY OPERATED FLUID COUPLING ARRANGEMENT OF EXTRA-TYPE.
WO2002033296A3 (en) Pneumatically actuated membrane valve assembly
NO176850C (en) Pilot controlled compressed air valve
JP4035711B2 (en) Pressure control device
CA2432084A1 (en) Sliding spool valve
WO2005065752A8 (en) Syringe assembly with shut off valve
JPH0325481Y2 (en)

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
AK Designated states

Kind code of ref document: A3

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
ENP Entry into the national phase

Ref country code: JP

Ref document number: 2001 569176

Kind code of ref document: A

Format of ref document f/p: F

WWE Wipo information: entry into national phase

Ref document number: 2001920419

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2001920419

Country of ref document: EP

WWG Wipo information: grant in national office

Ref document number: 2001920419

Country of ref document: EP