WO2001075425A3 - Method and apparatus for multidomain data analysis - Google Patents
Method and apparatus for multidomain data analysis Download PDFInfo
- Publication number
- WO2001075425A3 WO2001075425A3 PCT/US2001/008752 US0108752W WO0175425A3 WO 2001075425 A3 WO2001075425 A3 WO 2001075425A3 US 0108752 W US0108752 W US 0108752W WO 0175425 A3 WO0175425 A3 WO 0175425A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- data
- genotypes
- genes
- domain
- genotype
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F18/00—Pattern recognition
- G06F18/20—Analysing
- G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
- G06F18/211—Selection of the most significant subset of features
- G06F18/2111—Selection of the most significant subset of features by using evolutionary computational techniques, e.g. genetic algorithms
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/12—Computing arrangements based on biological models using genetic models
- G06N3/126—Evolutionary algorithms, e.g. genetic algorithms or genetic programming
Abstract
An optical measuring device generates a plurality of measured optical data from inspection of a thin film stack. The measured optical data group naturally into several domains. In turn the thin film parameters associated with the data fall into two categories: local and global. Local 'genes' represent parameters that are associated with only one domain, while global genes represent parameters that are associated with multiple domains. A processor evolves models for the data associated with each domain, which models are compared to the measured data, and a 'best fit' solution is provided as the result. Each model of theoretical data is represented by an underlying 'genotype' which is an ordered set of the genes. For each domain a 'population' of genotypes is evolved through the use of a genetic algorithm. The global genes are allowed to 'migrate' among multiple domains during the evolution process. Each genotype has a fitness associated therewith based on how much the theoretical data predicted by the genotype differs from the measured data. During the evolution process, individual genotypes are selected based on fitness, then a genetic operation is performed on the selected genotypes to produce new genotypes. Multiple generations of genotypes are evolved until an acceptable solution is obtained or other termination criterion is satisfied.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/542,724 | 2000-04-04 | ||
US09/542,724 US6532076B1 (en) | 2000-04-04 | 2000-04-04 | Method and apparatus for multidomain data analysis |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001075425A2 WO2001075425A2 (en) | 2001-10-11 |
WO2001075425A3 true WO2001075425A3 (en) | 2002-03-28 |
Family
ID=24165017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/008752 WO2001075425A2 (en) | 2000-04-04 | 2001-03-16 | Method and apparatus for multidomain data analysis |
Country Status (2)
Country | Link |
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US (3) | US6532076B1 (en) |
WO (1) | WO2001075425A2 (en) |
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US7478019B2 (en) * | 2005-01-26 | 2009-01-13 | Kla-Tencor Corporation | Multiple tool and structure analysis |
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ATE459899T1 (en) * | 2005-07-15 | 2010-03-15 | Imec | METHOD AND SYSTEM FOR AN IMPROVED LITHOGRAPHIC PROCESS |
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US7349086B2 (en) * | 2005-12-30 | 2008-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for optical measurement |
US7426616B2 (en) * | 2006-08-22 | 2008-09-16 | Hewlett-Packard Development Company, L.P. | Method for determining a recovery schedule |
US8494988B2 (en) * | 2009-05-15 | 2013-07-23 | The Aerospace Corporation | Systems and methods for generating feasible solutions from two parents for an evolutionary process |
US9475901B2 (en) * | 2009-12-08 | 2016-10-25 | Transitions Optical, Inc. | Photoalignment materials having improved adhesion |
US8560472B2 (en) | 2010-09-30 | 2013-10-15 | The Aerospace Corporation | Systems and methods for supporting restricted search in high-dimensional spaces |
US8489526B2 (en) | 2010-11-24 | 2013-07-16 | International Business Machines Corporation | Controlling quarantining and biasing in cataclysms for optimization simulations |
US9563844B2 (en) | 2011-06-30 | 2017-02-07 | International Business Machines Corporation | Speculative asynchronous sub-population evolutionary computing utilizing a termination speculation threshold |
US8862627B2 (en) | 2011-07-29 | 2014-10-14 | The Aerospace Corporation | Systems and methods for auto-adaptive control over converged results for multi-dimensional optimization |
US9165247B2 (en) | 2012-01-04 | 2015-10-20 | International Business Machines Corporation | Using global and local catastrophes across sub-populations in parallel evolutionary computing |
US9189733B2 (en) | 2013-03-13 | 2015-11-17 | The Aerospace Corporation | Systems and methods for vector scalability of evolutionary algorithms |
US9953284B2 (en) | 2013-03-15 | 2018-04-24 | The Aerospace Corporation | Systems and methods for prioritizing funding of projects |
MX363557B (en) | 2013-05-07 | 2019-03-27 | Halliburton Energy Services Inc | Optical sensor optimization and system implementation with simplified layer structure. |
US9305257B2 (en) | 2013-05-20 | 2016-04-05 | International Business Machines Corporation | Adaptive cataclysms in genetic algorithms |
US9321544B2 (en) | 2014-07-10 | 2016-04-26 | The Aerospace Corporation | Systems and methods for optimizing satellite constellation deployment |
US10311358B2 (en) | 2015-07-10 | 2019-06-04 | The Aerospace Corporation | Systems and methods for multi-objective evolutionary algorithms with category discovery |
US10474952B2 (en) | 2015-09-08 | 2019-11-12 | The Aerospace Corporation | Systems and methods for multi-objective optimizations with live updates |
US10387779B2 (en) | 2015-12-09 | 2019-08-20 | The Aerospace Corporation | Systems and methods for multi-objective evolutionary algorithms with soft constraints |
US10402728B2 (en) | 2016-04-08 | 2019-09-03 | The Aerospace Corporation | Systems and methods for multi-objective heuristics with conditional genes |
US11379730B2 (en) | 2016-06-16 | 2022-07-05 | The Aerospace Corporation | Progressive objective addition in multi-objective heuristic systems and methods |
US11676038B2 (en) | 2016-09-16 | 2023-06-13 | The Aerospace Corporation | Systems and methods for multi-objective optimizations with objective space mapping |
US10474953B2 (en) | 2016-09-19 | 2019-11-12 | The Aerospace Corporation | Systems and methods for multi-objective optimizations with decision variable perturbations |
JP7353940B2 (en) * | 2019-11-26 | 2023-10-02 | 株式会社日立製作所 | Transferability determination device, transferability determination method, and transferability determination program |
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-
2000
- 2000-04-04 US US09/542,724 patent/US6532076B1/en not_active Expired - Lifetime
-
2001
- 2001-03-16 WO PCT/US2001/008752 patent/WO2001075425A2/en active Application Filing
-
2003
- 2003-01-22 US US10/349,262 patent/US6781706B2/en not_active Expired - Fee Related
-
2004
- 2004-03-02 US US10/791,256 patent/US7050179B2/en not_active Expired - Fee Related
Patent Citations (3)
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US5148513A (en) * | 1988-05-20 | 1992-09-15 | John R. Koza | Non-linear genetic process for use with plural co-evolving populations |
US5568590A (en) * | 1993-12-17 | 1996-10-22 | Xaos Tools | Image processing using genetic mutation of neural network parameters |
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Title |
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Also Published As
Publication number | Publication date |
---|---|
US6532076B1 (en) | 2003-03-11 |
US20040172202A1 (en) | 2004-09-02 |
US6781706B2 (en) | 2004-08-24 |
US20030128372A1 (en) | 2003-07-10 |
US7050179B2 (en) | 2006-05-23 |
WO2001075425A2 (en) | 2001-10-11 |
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