WO2001075425A3 - Method and apparatus for multidomain data analysis - Google Patents

Method and apparatus for multidomain data analysis Download PDF

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Publication number
WO2001075425A3
WO2001075425A3 PCT/US2001/008752 US0108752W WO0175425A3 WO 2001075425 A3 WO2001075425 A3 WO 2001075425A3 US 0108752 W US0108752 W US 0108752W WO 0175425 A3 WO0175425 A3 WO 0175425A3
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WO
WIPO (PCT)
Prior art keywords
data
genotypes
genes
domain
genotype
Prior art date
Application number
PCT/US2001/008752
Other languages
French (fr)
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WO2001075425A2 (en
Inventor
John J Sidorowich
Original Assignee
Therma Wave Inc
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Publication date
Application filed by Therma Wave Inc filed Critical Therma Wave Inc
Publication of WO2001075425A2 publication Critical patent/WO2001075425A2/en
Publication of WO2001075425A3 publication Critical patent/WO2001075425A3/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/8422Investigating thin films, e.g. matrix isolation method
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00Pattern recognition
    • G06F18/20Analysing
    • G06F18/21Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/211Selection of the most significant subset of features
    • G06F18/2111Selection of the most significant subset of features by using evolutionary computational techniques, e.g. genetic algorithms
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/12Computing arrangements based on biological models using genetic models
    • G06N3/126Evolutionary algorithms, e.g. genetic algorithms or genetic programming

Abstract

An optical measuring device generates a plurality of measured optical data from inspection of a thin film stack. The measured optical data group naturally into several domains. In turn the thin film parameters associated with the data fall into two categories: local and global. Local 'genes' represent parameters that are associated with only one domain, while global genes represent parameters that are associated with multiple domains. A processor evolves models for the data associated with each domain, which models are compared to the measured data, and a 'best fit' solution is provided as the result. Each model of theoretical data is represented by an underlying 'genotype' which is an ordered set of the genes. For each domain a 'population' of genotypes is evolved through the use of a genetic algorithm. The global genes are allowed to 'migrate' among multiple domains during the evolution process. Each genotype has a fitness associated therewith based on how much the theoretical data predicted by the genotype differs from the measured data. During the evolution process, individual genotypes are selected based on fitness, then a genetic operation is performed on the selected genotypes to produce new genotypes. Multiple generations of genotypes are evolved until an acceptable solution is obtained or other termination criterion is satisfied.
PCT/US2001/008752 2000-04-04 2001-03-16 Method and apparatus for multidomain data analysis WO2001075425A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/542,724 2000-04-04
US09/542,724 US6532076B1 (en) 2000-04-04 2000-04-04 Method and apparatus for multidomain data analysis

Publications (2)

Publication Number Publication Date
WO2001075425A2 WO2001075425A2 (en) 2001-10-11
WO2001075425A3 true WO2001075425A3 (en) 2002-03-28

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/008752 WO2001075425A2 (en) 2000-04-04 2001-03-16 Method and apparatus for multidomain data analysis

Country Status (2)

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US (3) US6532076B1 (en)
WO (1) WO2001075425A2 (en)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6532076B1 (en) 2000-04-04 2003-03-11 Therma-Wave, Inc. Method and apparatus for multidomain data analysis
KR100892743B1 (en) * 2001-09-06 2009-04-15 가부시키가이샤 호리바 세이사꾸쇼 Method for analyzing thin-film layer structure using spectroscopic ellipsometer
US6898596B2 (en) 2001-10-23 2005-05-24 Therma-Wave, Inc. Evolution of library data sets
US7092378B1 (en) * 2001-12-10 2006-08-15 At & T Corp. System for utilizing a genetic algorithm to provide constraint-based routing of packets in a communication network
US6609086B1 (en) * 2002-02-12 2003-08-19 Timbre Technologies, Inc. Profile refinement for integrated circuit metrology
US7170604B2 (en) * 2002-07-03 2007-01-30 Tokyo Electron Limited Overlay metrology method and apparatus using more than one grating per measurement direction
US7043463B2 (en) 2003-04-04 2006-05-09 Icosystem Corporation Methods and systems for interactive evolutionary computing (IEC)
WO2005013081A2 (en) 2003-08-01 2005-02-10 Icosystem Corporation Methods and systems for applying genetic operators to determine system conditions
US7349079B2 (en) * 2004-05-14 2008-03-25 Kla-Tencor Technologies Corp. Methods for measurement or analysis of a nitrogen concentration of a specimen
US7067819B2 (en) * 2004-05-14 2006-06-27 Kla-Tencor Technologies Corp. Systems and methods for measurement or analysis of a specimen using separated spectral peaks in light
US7564552B2 (en) * 2004-05-14 2009-07-21 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US7359052B2 (en) * 2004-05-14 2008-04-15 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US20080144036A1 (en) * 2006-12-19 2008-06-19 Asml Netherlands B.V. Method of measurement, an inspection apparatus and a lithographic apparatus
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
JP2006155449A (en) 2004-12-01 2006-06-15 Matsushita Electric Ind Co Ltd Optimization processing method using distributed genetic algorithm
US7478019B2 (en) * 2005-01-26 2009-01-13 Kla-Tencor Corporation Multiple tool and structure analysis
US7408641B1 (en) 2005-02-14 2008-08-05 Kla-Tencor Technologies Corp. Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
US7625824B2 (en) * 2005-06-16 2009-12-01 Oerlikon Usa, Inc. Process change detection through the use of evolutionary algorithms
ATE459899T1 (en) * 2005-07-15 2010-03-15 Imec METHOD AND SYSTEM FOR AN IMPROVED LITHOGRAPHIC PROCESS
WO2007035848A2 (en) 2005-09-21 2007-03-29 Icosystem Corporation System and method for aiding product design and quantifying acceptance
US7349086B2 (en) * 2005-12-30 2008-03-25 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for optical measurement
US7426616B2 (en) * 2006-08-22 2008-09-16 Hewlett-Packard Development Company, L.P. Method for determining a recovery schedule
US8494988B2 (en) * 2009-05-15 2013-07-23 The Aerospace Corporation Systems and methods for generating feasible solutions from two parents for an evolutionary process
US9475901B2 (en) * 2009-12-08 2016-10-25 Transitions Optical, Inc. Photoalignment materials having improved adhesion
US8560472B2 (en) 2010-09-30 2013-10-15 The Aerospace Corporation Systems and methods for supporting restricted search in high-dimensional spaces
US8489526B2 (en) 2010-11-24 2013-07-16 International Business Machines Corporation Controlling quarantining and biasing in cataclysms for optimization simulations
US9563844B2 (en) 2011-06-30 2017-02-07 International Business Machines Corporation Speculative asynchronous sub-population evolutionary computing utilizing a termination speculation threshold
US8862627B2 (en) 2011-07-29 2014-10-14 The Aerospace Corporation Systems and methods for auto-adaptive control over converged results for multi-dimensional optimization
US9165247B2 (en) 2012-01-04 2015-10-20 International Business Machines Corporation Using global and local catastrophes across sub-populations in parallel evolutionary computing
US9189733B2 (en) 2013-03-13 2015-11-17 The Aerospace Corporation Systems and methods for vector scalability of evolutionary algorithms
US9953284B2 (en) 2013-03-15 2018-04-24 The Aerospace Corporation Systems and methods for prioritizing funding of projects
MX363557B (en) 2013-05-07 2019-03-27 Halliburton Energy Services Inc Optical sensor optimization and system implementation with simplified layer structure.
US9305257B2 (en) 2013-05-20 2016-04-05 International Business Machines Corporation Adaptive cataclysms in genetic algorithms
US9321544B2 (en) 2014-07-10 2016-04-26 The Aerospace Corporation Systems and methods for optimizing satellite constellation deployment
US10311358B2 (en) 2015-07-10 2019-06-04 The Aerospace Corporation Systems and methods for multi-objective evolutionary algorithms with category discovery
US10474952B2 (en) 2015-09-08 2019-11-12 The Aerospace Corporation Systems and methods for multi-objective optimizations with live updates
US10387779B2 (en) 2015-12-09 2019-08-20 The Aerospace Corporation Systems and methods for multi-objective evolutionary algorithms with soft constraints
US10402728B2 (en) 2016-04-08 2019-09-03 The Aerospace Corporation Systems and methods for multi-objective heuristics with conditional genes
US11379730B2 (en) 2016-06-16 2022-07-05 The Aerospace Corporation Progressive objective addition in multi-objective heuristic systems and methods
US11676038B2 (en) 2016-09-16 2023-06-13 The Aerospace Corporation Systems and methods for multi-objective optimizations with objective space mapping
US10474953B2 (en) 2016-09-19 2019-11-12 The Aerospace Corporation Systems and methods for multi-objective optimizations with decision variable perturbations
JP7353940B2 (en) * 2019-11-26 2023-10-02 株式会社日立製作所 Transferability determination device, transferability determination method, and transferability determination program

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148513A (en) * 1988-05-20 1992-09-15 John R. Koza Non-linear genetic process for use with plural co-evolving populations
US5568590A (en) * 1993-12-17 1996-10-22 Xaos Tools Image processing using genetic mutation of neural network parameters
US5953446A (en) * 1996-05-17 1999-09-14 Therma-Wave, Inc. Method and apparatus for optical data analysis

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652757A (en) * 1985-08-02 1987-03-24 At&T Technologies, Inc. Method and apparatus for optically determining defects in a semiconductor material
US5255345A (en) 1988-02-17 1993-10-19 The Rowland Institute For Science, Inc. Genetic algorithm
US5222192A (en) 1988-02-17 1993-06-22 The Rowland Institute For Science, Inc. Optimization techniques using genetic algorithms
US5343554A (en) 1988-05-20 1994-08-30 John R. Koza Non-linear genetic process for data encoding and for solving problems using automatically defined functions
JP2637820B2 (en) 1989-03-27 1997-08-06 オリンパス光学工業株式会社 Optical film thickness measuring device
US4999014A (en) * 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
US5249259A (en) 1990-01-23 1993-09-28 Massachusetts Institute Of Technology Genetic algorithm technique for designing neural networks
US5586218A (en) 1991-03-04 1996-12-17 Inference Corporation Autonomous learning and reasoning agent
US5159412A (en) * 1991-03-15 1992-10-27 Therma-Wave, Inc. Optical measurement device with enhanced sensitivity
US5394509A (en) 1992-03-31 1995-02-28 Winston; Patrick H. Data processing system and method for searching for improved results from a process
US5434796A (en) 1993-06-30 1995-07-18 Daylight Chemical Information Systems, Inc. Method and apparatus for designing molecules with desired properties by evolving successive populations
JP2866559B2 (en) 1993-09-20 1999-03-08 大日本スクリーン製造株式会社 Film thickness measurement method
US5581657A (en) 1994-07-29 1996-12-03 Zerox Corporation System for integrating multiple genetic algorithm applications
US6035246A (en) 1994-11-04 2000-03-07 Sandia Corporation Method for identifying known materials within a mixture of unknowns
US5541848A (en) 1994-12-15 1996-07-30 Atlantic Richfield Company Genetic method of scheduling the delivery of non-uniform inventory
US5651099A (en) 1995-01-26 1997-07-22 Hewlett-Packard Company Use of a genetic algorithm to optimize memory space
US5694474A (en) 1995-09-18 1997-12-02 Interval Research Corporation Adaptive filter for signal processing and method therefor
US5896294A (en) 1997-03-11 1999-04-20 Advanced Micro Devices, Inc. Method and apparatus for inspecting manufactured products for defects in response to in-situ monitoring
US6268916B1 (en) * 1999-05-11 2001-07-31 Kla-Tencor Corporation System for non-destructive measurement of samples
US6532076B1 (en) 2000-04-04 2003-03-11 Therma-Wave, Inc. Method and apparatus for multidomain data analysis

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148513A (en) * 1988-05-20 1992-09-15 John R. Koza Non-linear genetic process for use with plural co-evolving populations
US5568590A (en) * 1993-12-17 1996-10-22 Xaos Tools Image processing using genetic mutation of neural network parameters
US5953446A (en) * 1996-05-17 1999-09-14 Therma-Wave, Inc. Method and apparatus for optical data analysis

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BAECK T ET AL: "PROCEEDINGS OF THE ANNUAL CONFERENCE ON EVOLUTIONARY PROGRAMMING, XX, XX", PROCEEDINGS OF THE ANNUAL CONFERENCE ON EVOLUTIONARY PROGRAMMING, XX, XX, 1995, pages 33 - 51, XP002040793 *
SEQUEIRA R A ET AL: "AUTOMATING THE PARAMETERIZATION OF MATHEMATICAL MODELS USING GENETIC ALGORITHMS", COMPUTERS AND ELECTRONICS IN AGRICULTURE, AMSTERDAM, NL, vol. 11, 1994, pages 265 - 290, XP002040788 *

Also Published As

Publication number Publication date
US6532076B1 (en) 2003-03-11
US20040172202A1 (en) 2004-09-02
US6781706B2 (en) 2004-08-24
US20030128372A1 (en) 2003-07-10
US7050179B2 (en) 2006-05-23
WO2001075425A2 (en) 2001-10-11

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