WO2001094920A3 - 3d array of integrated cells for the sampling and detection of air bound chemical and biological species - Google Patents

3d array of integrated cells for the sampling and detection of air bound chemical and biological species Download PDF

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Publication number
WO2001094920A3
WO2001094920A3 PCT/US2001/017490 US0117490W WO0194920A3 WO 2001094920 A3 WO2001094920 A3 WO 2001094920A3 US 0117490 W US0117490 W US 0117490W WO 0194920 A3 WO0194920 A3 WO 0194920A3
Authority
WO
WIPO (PCT)
Prior art keywords
sensors
mesopump
sensor
chambers
sampling
Prior art date
Application number
PCT/US2001/017490
Other languages
French (fr)
Other versions
WO2001094920A2 (en
Inventor
Cleopatra Cabuz
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Priority to JP2002502420A priority Critical patent/JP2003536068A/en
Priority to EP01941706A priority patent/EP1407250A2/en
Priority to AU2001275038A priority patent/AU2001275038A1/en
Priority to CA002410513A priority patent/CA2410513A1/en
Publication of WO2001094920A2 publication Critical patent/WO2001094920A2/en
Publication of WO2001094920A3 publication Critical patent/WO2001094920A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • G01N33/0032—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array using two or more different physical functioning modes

Abstract

An integrated mesopump-sensor (300, 320) suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump (30, 320) is formed of an electrostatically attractable flexible diaphragm (70, 240) disposed through cavities or pumping chambers (64) formed between two opposing electrostatically chargeable material layers (72, 74). Fluid is pumped through the chambers by sequentially moving the diaphragm (70, 240) toward the first chargeable layer (72), then towards the second chargeable layer (74), which can pull and push the fluid through a series of chambers (64, 132, 134, 136), and past the sensor (303, 354, 422, 502). One group of sensors utilizes multiple and varied chemoresistive sensors which can vary in resistance differently in response to the presence of various analytes. Another group of sensors utilzes chemo-fluorescent sensors (502, 506) that fluoresce in the presence of particular analytes. Some mesopump-sensor systems (600) can be manufactured using MEMS technology and can be coupled to controllers (602) for sequencing the pumps (60) and analyzing sensor outputs using methods including Principle Component Analysis.
PCT/US2001/017490 2000-06-02 2001-05-31 3d array of integrated cells for the sampling and detection of air bound chemical and biological species WO2001094920A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002502420A JP2003536068A (en) 2000-06-02 2001-05-31 3D integrated cell array for sampling and detecting chemical and biological species in air
EP01941706A EP1407250A2 (en) 2000-06-02 2001-05-31 3d array of integrated cells for the sampling and detection of air bound chemical and biological species
AU2001275038A AU2001275038A1 (en) 2000-06-02 2001-05-31 3d array of integrated cells for the sampling and detection of air bound chemical and biological species
CA002410513A CA2410513A1 (en) 2000-06-02 2001-05-31 3d array of integrated cells for the sampling and detection of air bound chemical and biological species

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/586,093 2000-06-02
US09/586,093 US6568286B1 (en) 2000-06-02 2000-06-02 3D array of integrated cells for the sampling and detection of air bound chemical and biological species

Publications (2)

Publication Number Publication Date
WO2001094920A2 WO2001094920A2 (en) 2001-12-13
WO2001094920A3 true WO2001094920A3 (en) 2002-04-25

Family

ID=24344279

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/017490 WO2001094920A2 (en) 2000-06-02 2001-05-31 3d array of integrated cells for the sampling and detection of air bound chemical and biological species

Country Status (6)

Country Link
US (3) US6568286B1 (en)
EP (1) EP1407250A2 (en)
JP (1) JP2003536068A (en)
AU (1) AU2001275038A1 (en)
CA (1) CA2410513A1 (en)
WO (1) WO2001094920A2 (en)

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US6889567B2 (en) 2005-05-10
US6568286B1 (en) 2003-05-27
AU2001275038A1 (en) 2001-12-17
US6758107B2 (en) 2004-07-06
EP1407250A2 (en) 2004-04-14
US20030136178A1 (en) 2003-07-24
CA2410513A1 (en) 2001-12-13
US20040020265A1 (en) 2004-02-05

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