WO2002005357A1 - Led-modul, verfahren zu dessen herstellung und dessen verwendung - Google Patents
Led-modul, verfahren zu dessen herstellung und dessen verwendung Download PDFInfo
- Publication number
- WO2002005357A1 WO2002005357A1 PCT/DE2001/002565 DE0102565W WO0205357A1 WO 2002005357 A1 WO2002005357 A1 WO 2002005357A1 DE 0102565 W DE0102565 W DE 0102565W WO 0205357 A1 WO0205357 A1 WO 0205357A1
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- WO
- WIPO (PCT)
- Prior art keywords
- led module
- substrate
- semiconductor components
- module according
- glass
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/641—Heat extraction or cooling elements characterized by the materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/13—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L33/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
Definitions
- the invention relates to an LED module with a substrate, on the top of which one or more radiation-emitting semiconductor components are attached.
- the invention further relates to a method for producing the LED module.
- the invention relates to the use of the LED module.
- Optoelectronic modules are known in which one or more radiation-emitting semiconductor components, for example light-emitting diodes or laser diodes, are attached to a substrate.
- the substrate has only a very low thermal capacity and a high thermal resistance or poor thermal conductivity. The heat generated during the operation of the radiation-emitting semiconductor components can therefore be dissipated only poorly, as a result of which the semiconductor components heat up accordingly.
- the known optoelectronic modules have the disadvantage that they can only be operated with a relatively low current of about 10-50 mA due to the heating. Therefore, the amount of light emitted by the known modules is very limited, making them, for example, poorly suited for coupling light into a light guide from the side. The known optoelectronic modules therefore do not have sufficient brightness.
- the aim of the present invention is therefore to provide an LED module whose radiation-emitting semiconductor components can be operated with a high current.
- the invention specifies an LED module with a good heat-conducting substrate, on the top of which one or more radiation-emitting semiconductor components are attached.
- the underside of the substrate is fastened to a carrier body which has a high heat capacity.
- the component fastening between the semiconductor components and the substrate like the substrate fastening between the substrate and the carrier body, is carried out with good thermal conductivity. This ensures that the heat generated in the semiconductor components during operation is dissipated essentially via the carrier body. Of course, this does not exclude that part of the heat can also be removed by radiation or convection.
- a high heat capacity is to be understood in particular as the heat capacity of a metallic carrier.
- carriers with high heat capacity are carriers based on semiconductors, for example carriers containing silicon or gallium arsenide, as well as ceramic carriers and metal-ceramic composite carriers. Such materials suitable for heat sinks are known per se and are not described further here.
- the LED module according to the invention has the advantage that due to the good heat conduction between the radiation-emitting semiconductor components and the carrier body with high heat capacity, the heat generated during operation of the radiation-emitting semiconductor components is dissipated particularly well.
- the radiation-emitting semiconductor components can be operated with a particularly high current of up to 500 mA, which results in a correspondingly large current Brightness of the radiation emitted by the LED module results.
- the radiation-emitting semiconductor components can be, for example, vertically emitting light-emitting diodes or vertically emitting laser diodes.
- Such diodes have the advantage that the radiation leaves the LED module perpendicular to the substrate without further measures, as a result of which the radiation emitted by the module can be coupled particularly easily into further components, for example light guides.
- an LED module is particularly advantageous in which the carrier body is a metallic carrier, a contact pin electrically insulated from the carrier body being arranged in the carrier body.
- a metallic carrier has the advantage that it has a particularly high thermal capacity and good thermal conductivity. As a result, the heat generated during the operation of the radiation-emitting semiconductor components can be dissipated particularly well. With the help of the electrically insulated contact pin, the metallic carrier is also suitable as a plug-in connection element for the electrical supply to the LED module.
- the carrier body can have a TO design, which has the advantage that the commercially available, readily available TO designs can be used without the in-house development of a special carrier and without aftertreatment.
- Such TO designs can also be installed particularly easily in common housings, so that the LED module according to the invention does not require any special adaptations to the existing housings.
- an LED module is particularly advantageous in which the semiconductor components each have a first connection surface on their underside. This connection surface can be contacted via the component fastening with one contact surface arranged on the substrate, whereby one of the two necessary electrical contacts to the semiconductor component is produced.
- the contact area arranged on the substrate can particularly advantageously have a free-standing contact area section, which is still accessible from the outside even when the semiconductor component is already attached to the contact area, so that, for example, a bonding wire can be attached there for further contacting.
- a bonding wire can be attached there for further contacting.
- an LED module in which the substrate consists of silicon is particularly advantageous.
- Silicon is an easily and relatively inexpensively available material which has excellent heat conduction and is therefore very well suited for the purpose of the LED module according to the invention.
- the top of the substrate is additionally at least partially covered by a glass body attached to the substrate.
- This glass body has at least one recess exposing the substrate surface, in which the semiconductor components are arranged on the substrate surface.
- the glass body arranged on the substrate has the advantage that, depending on requirements, it can be designed as a reflector for the light emitted by the semiconductor components or as a cavity for a sealing compound to be subsequently applied to the substrate. As a result, either the radiation characteristic or the shape of the potting compound or the lenses produced by the potting compound can be optimized.
- a plurality of semiconductor components can be in one recess in the glass body or, if the glass body has several recesses, in each recess Semiconductor component can be arranged. From these possibilities, the person skilled in the art will select appropriately, depending on the requirements placed on the LED module, for example geometric dimensions or special radiation characteristics.
- the shape of the glass body having depressions can be produced particularly advantageously by anisotropic, wet-chemical etching.
- Such a wet chemical etching process has the advantage that it is very easy to control and that it provides particularly smooth side edges for the depressions.
- Anodic bonding is an easy process that provides a mechanically particularly stable connection.
- an LED module in which the glass body has two conductor surfaces insulated from one another is particularly advantageous.
- the semiconductor components each have a second connection surface corresponding to the first connection surface on their upper side.
- the first conductor surface on the top of the glass body is the second connection surface on the top of the
- the arrangement according to the invention has the advantage that long bonding wires, which would have to bridge the glass body and would therefore easily tear off, in particular on sharp edges of the glass body, can be dispensed with on the upper side of the second connection surfaces arranged with the contact pin.
- the LED module according to the invention can be designed particularly advantageously by the inner surfaces of the recesses in the glass body being shaped as reflectors, the reflector deflecting the radiation emitted by the semiconductor components arranged in the respective recess such that the radiation is emitted perpendicular to the substrate by the module ,
- Such inner surfaces shaped as reflectors allow the use of laterally emitting light-emitting diodes or laterally emitting laser diodes as radiation-emitting semiconductor components.
- the radiation characteristic for example the beam width, can be varied as desired within wide limits by suitable design of the inner surfaces or of the reflector.
- the inner surfaces of the depressions in the glass body can be designed particularly advantageously as reflectors by being covered by a metal layer, for example a thin chrome layer.
- a metal layer for example a thin chrome layer.
- Such a chrome layer can be applied to the inner surfaces particularly easily by vapor deposition.
- an LED module is particularly advantageous in which the upper side of the substrate is encapsulated with a covering that encloses the semiconductor components.
- a cladding has the advantage that the semiconductor components and possibly also the bonding wires used for contacting are shielded from external influences.
- the cladding In order for the radiation to be able to penetrate outward from the semiconductor components, the cladding must be transparent in the corresponding wavelength range. By appropriate shaping of the envelope it can be achieved that an additional lens effect for optimizing the radiation characteristics of the LED module is achieved.
- This covering can be realized, for example, by casting the module with a resin (for example an epoxy resin). Instead, a glazed cap can also be welded onto the top of the substrate.
- the space between the cap and the components can additionally be encapsulated, as a result of which the outcoupling of light from the semiconductor component is improved due to the reduced refractive index jump, firstly from the semiconductor to the resin and also from the resin to the air.
- a higher component temperature can be set by dispensing with the potting with a resin, since in this case there is no longer any dependence on the glass point of the resin. It would also be possible to screw on a glazed cap in addition to casting the module.
- light-emitting diodes which are connected in series to one another are attached to the substrate, the type and number of light-emitting diodes being selected such that the total voltage dropping during operation corresponds to the operating voltage of a motor vehicle electrical system. It can e.g. For example, six LEDs with a voltage drop of 2 V can be used for a 12 V electrical system. However, 2 LEDs with 5 V and one LED with 2 V voltage drop can also be used. This principle can of course also be applied to on-board networks with 42 V operating voltage. In any case, the operating voltage of the vehicle electrical system drops off at the light-emitting diodes, which enables the LED module according to the invention to be used in the motor vehicle, without a series resistor that cannot be used to produce heat.
- the invention specifies a method for producing the LED module according to the invention, wherein initially two metal surfaces which are insulated from one another are placed on a glass pane. be brought. These metal surfaces are suitable as an etching mask for anisotropic wet chemical etching and can consist, for example, of an alloy of chromium and gold.
- the glass pane is then structured by anisotropic wet chemical etching to produce a glass body, an etching process using an etching mixture which contains hydrofluoric acid, nitric acid and / or ammonium fluoride being particularly suitable.
- This etching method is described in detail in WO 98/42628, which is hereby incorporated into the disclosure of this invention.
- the glass body is then attached to a silicon substrate by anodic bonding, the current required for the anodic bonding being impressed through the metal surfaces applied at the start of the production process.
- the semiconductor component is attached to the substrate in any order and the substrate is attached to the carrier body.
- the method according to the invention for producing the LED module has the advantage that the current impressions during anodic bonding are improved by the metal surfaces.
- the metal surfaces suitable as an etching mask are applied and structured using methods customary in semiconductor technology.
- Borosilicate glass (BF 33) or a similar glass which is adapted to the coefficient of expansion of the silicon substrate is particularly suitable as the glass pane.
- the method according to the invention can be configured particularly advantageously by using each metal surface as a conductor surface for contacting the semiconductor components with the carrier body or the contact pin.
- This has the advantage that it is possible to dispense with specially applied conductor surfaces for contacting the semiconductor components.
- the invention specifies a method for producing the LED module according to the invention, which allows several substrates with glass bodies attached to them to be produced in parallel (etching process).
- a masking surface suitable as an etching mask is applied to a glass pane such that a plurality of etching masks, each belonging to a glass body, are present on the glass pane in a chessboard-like arrangement.
- the etching masks do not necessarily have to be square, but they can also be rectangular or round. The only thing that matters is that they form a regular, repeating pattern on the glass pane.
- all glass bodies provided on the glass pane are structured at the same time, as a result of which several interconnected glass bodies are produced.
- Such a simultaneous structuring can be done, for example, by immersing the glass pane in the etching solution described above.
- the glass pane is attached to a surface of a silicon wafer, whereby a silicon-glass wafer is produced.
- the silicon wafer was possibly processed before attaching the glass pane by applying contact surfaces for the components.
- the flat mounting of the glass pane on the silicon wafer can be carried out, for example, by anodic or eutectic bonding or also by gluing.
- radiation-emitting semiconductor components are fastened in the depressions belonging to a glass body on the corresponding silicon wafer section.
- the semiconductor components can, for example, be glued on using conductive silver adhesive or fastened using laser soldering.
- Laser soldering additionally requires a gold-tin layer on the underside of the semiconductor component, which improves the thermal conductivity of the component attachment.
- the silicon-glass wafer is cut, specifically perpendicular to the wafer plane, along lines that separate the individual glass bodies from one another. This creates a so-called submount, which is attached to a carrier body, for example a T08 header, in a subsequent step.
- This attachment can be realized, for example, by a thermally highly conductive adhesive.
- the method according to the invention for producing the LED module has the advantage that it allows the simultaneous production of many glass bodies required for the module. As a result, large quantities of the module according to the invention can be produced in a short time.
- all of the depressions on the submount can be equipped with semiconductor components. After sawing the silicon glass wafer, a large number of LED modules can be produced in a short time by cutting out and sucking in the submounts with a suction needle and then mounting them on a carrier body.
- the invention specifies the use of the LED module for the lateral coupling of light into a light guide. Due to the particularly high brightness of the radiation emitted by the LED module, the LED module is particularly suitable for the lateral coupling of light into the end face of light guides.
- Figure 1 shows an example of an inventive LED module in a schematic cross section.
- Figure 2 shows an example of a substrate equipped with a vitreous in a schematic cross section.
- Figure 3 shows the substrate of Figure 2 in plan view.
- FIG. 4 shows, by way of example, a further substrate equipped with a glass body in a schematic cross section.
- Figure 5 shows the assembled substrate from Figure 4 in plan view.
- FIG. 1 shows a substrate 1 on which a plurality of radiation-emitting semiconductor components 2 are attached.
- the component attachment 4 of the semiconductor components 2 is implemented using a conductive adhesive.
- the substrate 1 is also attached to a carrier body 3.
- the substrate attachment 5 is carried out by means of a highly thermally conductive adhesive, for example by means of a silver conductive adhesive.
- the upper side of the substrate 1 is partially covered by a glass body 9 which has a depression 10 which partially exposes the substrate 1.
- a first conductor surface 11 is arranged on the top side of the glass body 9 and is contacted by means of bond wires 16 with second connection surfaces 13 arranged on the top side of the semiconductor components 2.
- the first conductor surface 11 is in turn contacted with a contact pin 6 arranged on the carrier body 3 and insulated from it.
- the inner surfaces 14 of the glass body 9 are designed as reflectors which allow the light emitted laterally by the semiconductor components 2 to be deflected and focused in such a way that it leaves the LED module perpendicular to the substrate 1.
- FIG. 2 shows a substrate 1 equipped with a glass body 9 and two semiconductor components 2 fastened on the surface of the substrate 1.
- the glass body 9 has two depressions 10, in each of which a semiconductor component 2 is arranged.
- the inner surfaces 14 of the depressions 10 can each be adapted to the radiation characteristic of the semiconductor components 2.
- the top sides of the semiconductor components 2 are connected to the first conductor surface 11 arranged on the top side of the glass body 9 by means of bonding wires 16.
- the upper side of the substrate 1 also has a contact surface 7, which is connected to first connection surfaces arranged on the underside of the semiconductor components 2 or to a second conductor surface arranged on the upper side of the glass body 9 (cf. FIG. 3).
- FIG 3 two further depressions 10 of the glass body 9 shown in Figure 2 can be seen.
- the glass body 9 has four depressions 10, in each of which a semiconductor component 2 is arranged.
- the substrate 1 has contact areas 7 which contact the semiconductor components 2 from the underside and which are additionally provided with a free-standing contact area section 8 which allows the contacting of the contact areas 7 from the outside.
- Each of the semiconductor components 2 is connected from the top with a respective connection surface 13 to the first conductor surface 11 on the glass body 9 by means of bonding wires 16.
- the first conductor surface 11 is in turn connected by means of a "bonding wire 16 to a contact pin 6 which extends through the support body. 3 portions by the free-standing Druckflachen- 8, the contact areas 7 of the individual semiconductor elements 2 are joined together, so that a single bonding wire is sufficient 16 in order to contact all semiconductor components 2 on their underside with the second conductor surface 12 animals, which in turn is contacted by means of a bonding wire 16 with the carrier body 3.
- FIG. 4 shows an assembled substrate 1 with a glass body 9 and two semiconductor components 2 fastened on the surface of the substrate 1.
- the top sides of the semiconductor components 2 are connected to a first conductor surface 11 arranged on the top side of the glass body 9 by bonding wires 16.
- only one depression 10 is provided, in which a plurality of semiconductor components 2 are arranged.
- the top of the substrate 1 also has a contact surface 7, which is arranged with first connection surfaces arranged on the underside of the semiconductor components 2 or with one on the
- FIG. 5 shows two further semiconductor components 2 of the substrate 1 shown in FIG. 4.
- the substrate 1 has contact surfaces 7 which contact the semiconductor components 2 from the underside and which are additionally provided with a free-standing contact surface section 8, which contacts the contact surfaces 7 allowed from the outside.
- Each of the semiconductor components 2 is connected from the top to the first conductor surface 11 on the glass body 9 by means of bond wires 16.
- the first conductor surface 11 is in turn connected by means of a bonding wire 16 to a contact pin 6 which projects through the carrier body 3.
- the free-standing contact surface sections 8 connect the contact surfaces 7 of the individual semiconductor components 2 to one another, so that a single bond wire 16 is sufficient to contact all of the semiconductor components on their underside with the second conductor surface 12, which in turn is connected to the carrier body 3 by means of a bond wire 16 is contacted.
- the invention is not limited to the exemplary embodiments shown by way of example, but is defined in its most general form by patent claim 1, patent claim 16 and patent claim 18.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01953900A EP1299910A1 (de) | 2000-07-10 | 2001-07-10 | Led-modul, verfahren zu dessen herstellung und dessen verwendung |
US10/345,442 US6860621B2 (en) | 2000-07-10 | 2003-01-10 | LED module and methods for producing and using the module |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10033502.0 | 2000-07-10 | ||
DE10033502A DE10033502A1 (de) | 2000-07-10 | 2000-07-10 | Optoelektronisches Modul, Verfahren zu dessen Herstellung und dessen Verwendung |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/345,442 Continuation US6860621B2 (en) | 2000-07-10 | 2003-01-10 | LED module and methods for producing and using the module |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002005357A1 true WO2002005357A1 (de) | 2002-01-17 |
Family
ID=7648433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2001/002565 WO2002005357A1 (de) | 2000-07-10 | 2001-07-10 | Led-modul, verfahren zu dessen herstellung und dessen verwendung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6860621B2 (de) |
EP (1) | EP1299910A1 (de) |
DE (1) | DE10033502A1 (de) |
WO (1) | WO2002005357A1 (de) |
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WO2002086972A1 (en) * | 2001-04-23 | 2002-10-31 | Plasma Ireland Limited | Illuminator |
EP1482567A1 (de) * | 2002-03-05 | 2004-12-01 | Rohm Co., Ltd. | Lichtemissionsbauelement mit einem led-chip und verfahren zur herstellung dieses bauelements |
AT501081B1 (de) * | 2003-07-11 | 2006-06-15 | Guenther Dipl Ing Dr Leising | Led sowie led-lichtquelle |
EP2237328A1 (de) * | 2009-03-31 | 2010-10-06 | OSRAM Opto Semiconductors GmbH | Verfahren zur Herstellung einer Vielzahl von optoelektronischen Halbleiterkomponenten und optoelektronische Halbleiterkomponente |
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DE10245930A1 (de) * | 2002-09-30 | 2004-04-08 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Bauelement-Modul |
AU2003297588A1 (en) * | 2002-12-02 | 2004-06-23 | 3M Innovative Properties Company | Illumination system using a plurality of light sources |
JP3910144B2 (ja) * | 2003-01-06 | 2007-04-25 | シャープ株式会社 | 半導体発光装置およびその製造方法 |
JP2004304041A (ja) * | 2003-03-31 | 2004-10-28 | Citizen Electronics Co Ltd | 発光ダイオード |
EP1614299A1 (de) * | 2003-04-16 | 2006-01-11 | Upstream Engineering Oy | Projektor für 2d/3d-daten |
FI20030583A (fi) * | 2003-04-16 | 2004-10-17 | Upstream Engineering Oy | Dataprojektori |
US6869812B1 (en) * | 2003-05-13 | 2005-03-22 | Heng Liu | High power AllnGaN based multi-chip light emitting diode |
US7391153B2 (en) * | 2003-07-17 | 2008-06-24 | Toyoda Gosei Co., Ltd. | Light emitting device provided with a submount assembly for improved thermal dissipation |
US7915085B2 (en) * | 2003-09-18 | 2011-03-29 | Cree, Inc. | Molded chip fabrication method |
US20050116235A1 (en) * | 2003-12-02 | 2005-06-02 | Schultz John C. | Illumination assembly |
US7329887B2 (en) * | 2003-12-02 | 2008-02-12 | 3M Innovative Properties Company | Solid state light device |
US7250611B2 (en) | 2003-12-02 | 2007-07-31 | 3M Innovative Properties Company | LED curing apparatus and method |
US20050116635A1 (en) * | 2003-12-02 | 2005-06-02 | Walson James E. | Multiple LED source and method for assembling same |
US7403680B2 (en) * | 2003-12-02 | 2008-07-22 | 3M Innovative Properties Company | Reflective light coupler |
US7456805B2 (en) * | 2003-12-18 | 2008-11-25 | 3M Innovative Properties Company | Display including a solid state light device and method using same |
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Also Published As
Publication number | Publication date |
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DE10033502A1 (de) | 2002-01-31 |
EP1299910A1 (de) | 2003-04-09 |
US6860621B2 (en) | 2005-03-01 |
US20030142500A1 (en) | 2003-07-31 |
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