WO2002007154A3 - Process and apparatus for finishing a magnetic slider - Google Patents

Process and apparatus for finishing a magnetic slider Download PDF

Info

Publication number
WO2002007154A3
WO2002007154A3 PCT/US2001/021561 US0121561W WO0207154A3 WO 2002007154 A3 WO2002007154 A3 WO 2002007154A3 US 0121561 W US0121561 W US 0121561W WO 0207154 A3 WO0207154 A3 WO 0207154A3
Authority
WO
WIPO (PCT)
Prior art keywords
sliders
slider
finished
finishing
substrate
Prior art date
Application number
PCT/US2001/021561
Other languages
French (fr)
Other versions
WO2002007154A2 (en
Inventor
Zine-Eddine Boutaghou
Original Assignee
Seagate Technology Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology Llc filed Critical Seagate Technology Llc
Priority to KR10-2003-7000501A priority Critical patent/KR100525568B1/en
Priority to AU2001273273A priority patent/AU2001273273A1/en
Priority to GB0301026A priority patent/GB2380049B/en
Priority to JP2002512974A priority patent/JP4091419B2/en
Publication of WO2002007154A2 publication Critical patent/WO2002007154A2/en
Publication of WO2002007154A3 publication Critical patent/WO2002007154A3/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/048—Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G11B5/102—Manufacture of housing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1871—Shaping or contouring of the transducing or guiding surface
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3173—Batch fabrication, i.e. producing a plurality of head structures in one batch
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching

Abstract

A process for finishing a disc drive slider (22, 23) in which a pressure generator (38) applies multiple pressures (36) to the back surface of one slider while the front surface (25) of the one slider contacts a lapping surface (24) to form a finished front surface of the slider (22). The slider (22) is part of a substrate (20) having multiple unfinished sliders (22) formed in it. An etch process is used to etch trenches (32) in the substrate (20) aligned between the sliders (22) and to form webs (34) joining the sliders (22) together. After the sliders (22) are finished by lapping, the webs (34) are removed to separate the sliders (22). The multiple sliders are conveniently held together during the finished process and the etching process avoids damage to the sliders (22).
PCT/US2001/021561 2000-07-13 2001-07-09 Process and apparatus for finishing a magnetic slider WO2002007154A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR10-2003-7000501A KR100525568B1 (en) 2000-07-13 2001-07-09 Process and apparatus for finishing a magnetic slider
AU2001273273A AU2001273273A1 (en) 2000-07-13 2001-07-09 Process and apparatus for finishing a magnetic slider
GB0301026A GB2380049B (en) 2000-07-13 2001-07-09 Process and apparatus for finishing a magnetic slider
JP2002512974A JP4091419B2 (en) 2000-07-13 2001-07-09 Process and apparatus for finishing a magnetic slider

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US21826200P 2000-07-13 2000-07-13
US60/218,262 2000-07-13

Publications (2)

Publication Number Publication Date
WO2002007154A2 WO2002007154A2 (en) 2002-01-24
WO2002007154A3 true WO2002007154A3 (en) 2002-08-29

Family

ID=22814407

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/021561 WO2002007154A2 (en) 2000-07-13 2001-07-09 Process and apparatus for finishing a magnetic slider

Country Status (6)

Country Link
US (2) US6551173B2 (en)
JP (1) JP4091419B2 (en)
KR (1) KR100525568B1 (en)
AU (1) AU2001273273A1 (en)
GB (1) GB2380049B (en)
WO (1) WO2002007154A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2380049B (en) * 2000-07-13 2004-01-07 Seagate Technology Llc Process and apparatus for finishing a magnetic slider
US6994608B1 (en) 2004-11-12 2006-02-07 Hitachi Global Storage Technologies Netherlands, B.V. Methods of manufacturing sliders
US8077632B2 (en) * 2005-01-20 2011-12-13 Citrix Systems, Inc. Automatic LAN/WAN port detection
US7450342B2 (en) * 2005-03-14 2008-11-11 Seagate Technology Llc Composite head-electrical conditioner assembly
US7643250B2 (en) 2006-01-27 2010-01-05 Hitachi Global Storage Technologies Netherlands B.V. Pad slider design for on-slider ELGs
US8248729B2 (en) * 2006-11-16 2012-08-21 Hitachi Global Storage Technologies, Netherlands B.V. Slider with hook-shaped air compression mechanisms near trailing edge corners
US8087973B1 (en) 2008-08-19 2012-01-03 Western Digital (Fremont), Llc Slider with leading edge blend and conformal step features
US8254057B1 (en) 2012-02-08 2012-08-28 Hitachi Global Storage Technologies Netherlands B.V. Detecting wedge angle with a third electric lapping guide (ELG) during manufacture of a magnetic head
US9387568B1 (en) * 2013-02-27 2016-07-12 Western Digital Technologies, Inc. Systems and methods for correcting fabrication error in magnetic recording heads using magnetic write width measurements
US9242340B1 (en) 2013-03-12 2016-01-26 Western Digital Technologies, Inc. Method to stress relieve a magnetic recording head transducer utilizing ultrasonic cavitation
US11389924B2 (en) * 2018-06-18 2022-07-19 Seagate Technology Llc Methods of lapping while heating one or more features, and related sliders, row bars, and systems

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55135322A (en) * 1979-04-11 1980-10-22 Fujitsu Ltd Manufacture of thin-film magnetic head
JPS58194164A (en) * 1982-05-04 1983-11-12 Hitachi Ltd Manufacture of magnetic head
US4418472A (en) * 1981-11-23 1983-12-06 Xerox Corporation Method of delineating thin film magnetic head arrays
JPS644906A (en) * 1987-06-26 1989-01-10 Hitachi Ltd Production of magnetic head
JPH03263604A (en) * 1990-03-13 1991-11-25 Fujitsu Ltd Production of magnetic head
US5951371A (en) * 1996-11-04 1999-09-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
US6027397A (en) * 1997-04-25 2000-02-22 International Business Machines Corporation Dual element lapping guide system
US6045431A (en) * 1997-12-23 2000-04-04 Speedfam Corporation Manufacture of thin-film magnetic heads

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US4477968A (en) * 1982-09-30 1984-10-23 Magnetic Peripherals Inc. Method for using a machining sensor
US5267107A (en) * 1991-06-28 1993-11-30 Seagate Technology, Inc. Laminated magnetic transducer
US5739048A (en) * 1994-05-23 1998-04-14 International Business Machines Corporation Method for forming rows of partially separated thin film elements
US5722155A (en) * 1996-01-11 1998-03-03 Seagate Technology, Inc. Machining guide method for magnetic recording reproduce heads
US5796551A (en) * 1996-10-16 1998-08-18 International Business Machines Corporation Landing pads for air bearing sliders and method for making the same
US5755612A (en) * 1996-10-28 1998-05-26 Seagate Technology, Inc. Small foot machining guide for recording heads
GB2342221B (en) * 1997-07-29 2001-12-12 Seagate Technology Low mass disc drive suspension
US6106736A (en) * 1997-09-04 2000-08-22 International Business Machines Corporation Planarization process and apparatus for the etch definition of magnetic head air bearing surfaces
US6093083A (en) * 1998-05-06 2000-07-25 Advanced Imaging, Inc. Row carrier for precision lapping of disk drive heads and for handling of heads during the slider fab operation
JP2000311876A (en) * 1999-04-27 2000-11-07 Hitachi Ltd Method and device for manufacturing wiring board
GB2380049B (en) * 2000-07-13 2004-01-07 Seagate Technology Llc Process and apparatus for finishing a magnetic slider

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55135322A (en) * 1979-04-11 1980-10-22 Fujitsu Ltd Manufacture of thin-film magnetic head
US4418472A (en) * 1981-11-23 1983-12-06 Xerox Corporation Method of delineating thin film magnetic head arrays
JPS58194164A (en) * 1982-05-04 1983-11-12 Hitachi Ltd Manufacture of magnetic head
JPS644906A (en) * 1987-06-26 1989-01-10 Hitachi Ltd Production of magnetic head
JPH03263604A (en) * 1990-03-13 1991-11-25 Fujitsu Ltd Production of magnetic head
US5951371A (en) * 1996-11-04 1999-09-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
US6027397A (en) * 1997-04-25 2000-02-22 International Business Machines Corporation Dual element lapping guide system
US6045431A (en) * 1997-12-23 2000-04-04 Speedfam Corporation Manufacture of thin-film magnetic heads

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 005, no. 005 (P - 044) 14 January 1981 (1981-01-14) *
PATENT ABSTRACTS OF JAPAN vol. 008, no. 042 (P - 256) 23 February 1984 (1984-02-23) *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 167 (P - 861) 20 April 1989 (1989-04-20) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 070 (P - 1315) 20 February 1992 (1992-02-20) *

Also Published As

Publication number Publication date
GB0301026D0 (en) 2003-02-19
KR100525568B1 (en) 2005-11-03
KR20030078057A (en) 2003-10-04
US20030148715A1 (en) 2003-08-07
AU2001273273A1 (en) 2002-01-30
JP2004504685A (en) 2004-02-12
US20020009949A1 (en) 2002-01-24
US6843705B2 (en) 2005-01-18
JP4091419B2 (en) 2008-05-28
US6551173B2 (en) 2003-04-22
GB2380049A (en) 2003-03-26
GB2380049B (en) 2004-01-07
WO2002007154A2 (en) 2002-01-24

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