WO2002018884A3 - Microsensor for measuring velocity and angular direction of an incoming air stream - Google Patents

Microsensor for measuring velocity and angular direction of an incoming air stream Download PDF

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Publication number
WO2002018884A3
WO2002018884A3 PCT/US2001/027041 US0127041W WO0218884A3 WO 2002018884 A3 WO2002018884 A3 WO 2002018884A3 US 0127041 W US0127041 W US 0127041W WO 0218884 A3 WO0218884 A3 WO 0218884A3
Authority
WO
WIPO (PCT)
Prior art keywords
air stream
incoming air
velocity
angular direction
microsensor
Prior art date
Application number
PCT/US2001/027041
Other languages
French (fr)
Other versions
WO2002018884A2 (en
Inventor
Ulrich Bonne
Steve R Weeres
Ernie A Satrem
David Kubisiak
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Priority to JP2002523561A priority Critical patent/JP2004507753A/en
Priority to KR1020037003156A priority patent/KR100825998B1/en
Priority to EP01968294A priority patent/EP1314042B1/en
Priority to DE60129992T priority patent/DE60129992T2/en
Publication of WO2002018884A2 publication Critical patent/WO2002018884A2/en
Publication of WO2002018884A3 publication Critical patent/WO2002018884A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Abstract

A rugged microsensor assembly is disclosed that measures both the velocity and angular direction of an incoming air stream. The microsensor assembly includes at least two flow sensors, each orientated to measure a different velocity component of the incoming air stream. The velocity components are related by the geometry between the sensors, and the angular direction and velocity of the incoming air stream are determined by examining the measured velocity components. The preferred sensor is a fully passivated thermal differential microanemometer with back contacts, designed to operate in harsh environments.
PCT/US2001/027041 2000-09-01 2001-08-30 Microsensor for measuring velocity and angular direction of an incoming air stream WO2002018884A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002523561A JP2004507753A (en) 2000-09-01 2001-08-30 Microsensor for measuring velocity and angular direction of incident airflow
KR1020037003156A KR100825998B1 (en) 2000-09-01 2001-08-30 Microsensor for measuring velocity and angular direction of an incoming air stream
EP01968294A EP1314042B1 (en) 2000-09-01 2001-08-30 Microsensor for measuring velocity and angular direction of an incoming air stream
DE60129992T DE60129992T2 (en) 2000-09-01 2001-08-30 MICROSENSOR FOR MEASURING SPEED AND DIRECTION ANGLE OF AN AIRFLOW

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/653,399 US6502459B1 (en) 2000-09-01 2000-09-01 Microsensor for measuring velocity and angular direction of an incoming air stream
US09/653,399 2000-09-01

Publications (2)

Publication Number Publication Date
WO2002018884A2 WO2002018884A2 (en) 2002-03-07
WO2002018884A3 true WO2002018884A3 (en) 2002-06-20

Family

ID=24620710

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/027041 WO2002018884A2 (en) 2000-09-01 2001-08-30 Microsensor for measuring velocity and angular direction of an incoming air stream

Country Status (7)

Country Link
US (1) US6502459B1 (en)
EP (1) EP1314042B1 (en)
JP (1) JP2004507753A (en)
KR (1) KR100825998B1 (en)
AT (1) ATE370418T1 (en)
DE (1) DE60129992T2 (en)
WO (1) WO2002018884A2 (en)

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Also Published As

Publication number Publication date
ATE370418T1 (en) 2007-09-15
KR100825998B1 (en) 2008-04-29
DE60129992T2 (en) 2008-05-15
JP2004507753A (en) 2004-03-11
WO2002018884A2 (en) 2002-03-07
US6502459B1 (en) 2003-01-07
EP1314042B1 (en) 2007-08-15
DE60129992D1 (en) 2007-09-27
KR20030064396A (en) 2003-07-31
EP1314042A2 (en) 2003-05-28

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