WO2002023155A3 - Surface particle detector - Google Patents

Surface particle detector Download PDF

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Publication number
WO2002023155A3
WO2002023155A3 PCT/US2001/029162 US0129162W WO0223155A3 WO 2002023155 A3 WO2002023155 A3 WO 2002023155A3 US 0129162 W US0129162 W US 0129162W WO 0223155 A3 WO0223155 A3 WO 0223155A3
Authority
WO
WIPO (PCT)
Prior art keywords
particle counter
scanner
conduit
particle
airstream
Prior art date
Application number
PCT/US2001/029162
Other languages
French (fr)
Other versions
WO2002023155A2 (en
Inventor
Donald G Lutz
Daniel Duggan
Original Assignee
Pentagon Technologies Group In
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pentagon Technologies Group In filed Critical Pentagon Technologies Group In
Priority to IL15486301A priority Critical patent/IL154863A0/en
Priority to AU2001292756A priority patent/AU2001292756A1/en
Priority to KR1020037003620A priority patent/KR100633724B1/en
Priority to JP2002527755A priority patent/JP3920216B2/en
Priority to AT01973148T priority patent/ATE541201T1/en
Priority to EP01973148A priority patent/EP1325303B1/en
Publication of WO2002023155A2 publication Critical patent/WO2002023155A2/en
Publication of WO2002023155A3 publication Critical patent/WO2002023155A3/en
Priority to IL154863A priority patent/IL154863A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/00584—Control arrangements for automatic analysers
    • G01N35/00722—Communications; Identification
    • G01N35/00732—Identification of carriers, materials or components in automatic analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N2001/222—Other features
    • G01N2001/2223—Other features aerosol sampling devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N2015/1486—Counting the particles

Abstract

A surface particle detector that includes a scanner probe (92) slidable over a surface, a particle counter (82) for counting particles passed therethrough, and a conduit including a pair of tubes (38,40) connected between the scanner probe and the particle counter. The particle counter includes a pump (80) for creating an airstream for drawing particles from the surface, through the scanner and conduit, to the particle counter, and back to the scanner. A sensor (78) measures the airstream flow rate, and a controller controls the pump speed based upon the sensed airstream flow rate. The conduit attaches to the particle counter via a first connector, which contains electronic indicia identifying the type of scanner attached to the other end of the conduit. The controller controls the particle counter in response to the detected electronic indicia. The particle counter also includes a removable filter cartridge with a filter element that captures the counted particles for laboratory analysis.
PCT/US2001/029162 2000-09-13 2001-09-12 Surface particle detector WO2002023155A2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IL15486301A IL154863A0 (en) 2000-09-13 2001-09-12 Surface particle detector
AU2001292756A AU2001292756A1 (en) 2000-09-13 2001-09-12 Surface particle detector
KR1020037003620A KR100633724B1 (en) 2000-09-13 2001-09-12 Surface particle detector
JP2002527755A JP3920216B2 (en) 2000-09-13 2001-09-12 Surface particle detector
AT01973148T ATE541201T1 (en) 2000-09-13 2001-09-12 SURFACE PARTICLE DETECTOR
EP01973148A EP1325303B1 (en) 2000-09-13 2001-09-12 Surface particle detector
IL154863A IL154863A (en) 2000-09-13 2003-03-11 Surface particle detector

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US23226700P 2000-09-13 2000-09-13
US60/232,267 2000-09-13
US09/952,900 2001-09-11
US09/952,900 US7010991B2 (en) 2000-09-13 2001-09-11 Surface particle detector

Publications (2)

Publication Number Publication Date
WO2002023155A2 WO2002023155A2 (en) 2002-03-21
WO2002023155A3 true WO2002023155A3 (en) 2002-06-13

Family

ID=26925822

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/029162 WO2002023155A2 (en) 2000-09-13 2001-09-12 Surface particle detector

Country Status (8)

Country Link
US (1) US7010991B2 (en)
EP (1) EP1325303B1 (en)
JP (1) JP3920216B2 (en)
KR (1) KR100633724B1 (en)
CN (1) CN100439898C (en)
AT (1) ATE541201T1 (en)
AU (1) AU2001292756A1 (en)
WO (1) WO2002023155A2 (en)

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US9228785B2 (en) 2010-05-04 2016-01-05 Alexander Poltorak Fractal heat transfer device
US10852069B2 (en) 2010-05-04 2020-12-01 Fractal Heatsink Technologies, LLC System and method for maintaining efficiency of a fractal heat sink
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JP5827515B2 (en) * 2011-07-28 2015-12-02 株式会社アルバック Particle measuring device
JP6506025B2 (en) 2011-12-27 2019-04-24 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． User replaceable filter for gas sampling system
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US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
US9677990B2 (en) * 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
CN103276368A (en) * 2013-04-28 2013-09-04 上海华力微电子有限公司 Particle pollution monitoring system and chemical vapor deposition device
WO2017095585A1 (en) * 2015-12-04 2017-06-08 Applied Materials, Inc. Method and apparatus for surface nanoparticle measurement
EP3420346A1 (en) * 2016-02-24 2019-01-02 Becton Dickinson France System and method for inspecting a transparent cylinder
US10725061B2 (en) * 2017-02-03 2020-07-28 Pentagon Technologies Group, Inc. Modulated air surface particle detector
US10712355B2 (en) * 2017-06-20 2020-07-14 Pentagon Technologies Group, Inc. High resolution surface particle detector
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CN112639444A (en) 2018-09-04 2021-04-09 粒子监测系统有限公司 Detecting nanoparticles on production equipment and surfaces
US11029295B2 (en) * 2018-10-11 2021-06-08 Tintoria Piana Us, Inc. Voctron: a low weight portable air sampling device
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Also Published As

Publication number Publication date
EP1325303A2 (en) 2003-07-09
JP2004512503A (en) 2004-04-22
EP1325303A4 (en) 2007-07-25
US20020083780A1 (en) 2002-07-04
KR20030034179A (en) 2003-05-01
US7010991B2 (en) 2006-03-14
JP3920216B2 (en) 2007-05-30
KR100633724B1 (en) 2006-10-13
ATE541201T1 (en) 2012-01-15
AU2001292756A1 (en) 2002-03-26
WO2002023155A2 (en) 2002-03-21
EP1325303B1 (en) 2012-01-11
CN100439898C (en) 2008-12-03
CN1531646A (en) 2004-09-22

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