WO2002055973A3 - High-absorption wide-band pixel for bolometer arrays - Google Patents

High-absorption wide-band pixel for bolometer arrays Download PDF

Info

Publication number
WO2002055973A3
WO2002055973A3 PCT/US2001/050465 US0150465W WO02055973A3 WO 2002055973 A3 WO2002055973 A3 WO 2002055973A3 US 0150465 W US0150465 W US 0150465W WO 02055973 A3 WO02055973 A3 WO 02055973A3
Authority
WO
WIPO (PCT)
Prior art keywords
band pixel
bolometer arrays
absorption wide
absorption
wide
Prior art date
Application number
PCT/US2001/050465
Other languages
French (fr)
Other versions
WO2002055973A2 (en
Inventor
Barrett E Cole
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25021543&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2002055973(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Priority to IL15669301A priority Critical patent/IL156693A0/en
Priority to KR10-2003-7008906A priority patent/KR20030063489A/en
Priority to EP01998112A priority patent/EP1346196A2/en
Priority to JP2002556581A priority patent/JP2004527731A/en
Publication of WO2002055973A2 publication Critical patent/WO2002055973A2/en
Publication of WO2002055973A3 publication Critical patent/WO2002055973A3/en
Priority to IL156693A priority patent/IL156693A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Abstract

A microbolometer array has pixels with a thin platform of silicon dioxide having a metal absorber layer, and having a resonant gap with a substrate reflector. The pixel resistor of vanadium oxide has low total resistance with metal contacts on opposite edges.
PCT/US2001/050465 2000-12-29 2001-12-20 High-absorption wide-band pixel for bolometer arrays WO2002055973A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IL15669301A IL156693A0 (en) 2000-12-29 2001-12-20 High-absorption wide-band pixel for bolometer arrays
KR10-2003-7008906A KR20030063489A (en) 2000-12-29 2001-12-20 High-absorption wide-band pixel for bolometer array
EP01998112A EP1346196A2 (en) 2000-12-29 2001-12-20 High-absorption wide-band pixel for bolometer arrays
JP2002556581A JP2004527731A (en) 2000-12-29 2001-12-20 High absorption broadband pixels for bolometer arrays
IL156693A IL156693A (en) 2000-12-29 2003-06-29 High-absorption wide-band pixel for bolometer arrays

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/751,338 US6621083B2 (en) 2000-12-29 2000-12-29 High-absorption wide-band pixel for bolometer arrays
US09/751,338 2000-12-29

Publications (2)

Publication Number Publication Date
WO2002055973A2 WO2002055973A2 (en) 2002-07-18
WO2002055973A3 true WO2002055973A3 (en) 2003-02-06

Family

ID=25021543

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/050465 WO2002055973A2 (en) 2000-12-29 2001-12-20 High-absorption wide-band pixel for bolometer arrays

Country Status (8)

Country Link
US (1) US6621083B2 (en)
EP (1) EP1346196A2 (en)
JP (1) JP2004527731A (en)
KR (2) KR20080093165A (en)
CN (1) CN100397056C (en)
IL (2) IL156693A0 (en)
TW (1) TW561249B (en)
WO (1) WO2002055973A2 (en)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2826725B1 (en) * 2001-06-28 2004-02-27 Commissariat Energie Atomique MICROBOLOMETERS RESISTANT TO TEMPERATURES OF HIGH SCENES.
WO2004069547A2 (en) * 2003-01-31 2004-08-19 Mikron Infrared, Inc. Apparatus for thermal imaging
US7378655B2 (en) * 2003-04-11 2008-05-27 California Institute Of Technology Apparatus and method for sensing electromagnetic radiation using a tunable device
FR2875298B1 (en) * 2004-09-16 2007-03-02 Commissariat Energie Atomique THERMAL DETECTOR FOR ELECTROMAGNETIC RADIATION COMPRISING AN ABSORBENT MEMBRANE FIXED IN SUSPENSION
JP4721141B2 (en) 2006-03-17 2011-07-13 日本電気株式会社 Thermal infrared solid-state image sensor
US8097850B2 (en) * 2006-05-25 2012-01-17 Panasonic Electric Works Co., Ltd. Infrared sensor
KR100785738B1 (en) * 2006-06-19 2007-12-18 한국과학기술원 Bolometer
US9027025B2 (en) 2007-04-17 2015-05-05 Oracle International Corporation Real-time database exception monitoring tool using instance eviction data
US7825381B2 (en) * 2007-06-29 2010-11-02 Agiltron, Inc. Micromechanical device for infrared sensing
DE102007031959B4 (en) 2007-07-10 2009-11-26 Institut Für Photonische Technologien E.V. Terahertz video camera
DE102008017585B4 (en) * 2008-04-07 2010-03-04 Diehl Bgt Defence Gmbh & Co. Kg Image sensor system
US8123815B2 (en) 2008-11-24 2012-02-28 Biomet Manufacturing Corp. Multiple bearing acetabular prosthesis
US7842533B2 (en) * 2009-01-07 2010-11-30 Robert Bosch Gmbh Electromagnetic radiation sensor and method of manufacture
US9128895B2 (en) * 2009-02-19 2015-09-08 Oracle International Corporation Intelligent flood control management
US8308810B2 (en) 2009-07-14 2012-11-13 Biomet Manufacturing Corp. Multiple bearing acetabular prosthesis
US9165086B2 (en) 2010-01-20 2015-10-20 Oracle International Corporation Hybrid binary XML storage model for efficient XML processing
KR101713280B1 (en) 2011-03-03 2017-03-08 삼성전자주식회사 Electrical energy generator
FR2977937B1 (en) 2011-07-15 2013-08-16 Centre Nat Rech Scient BOLOMETRIC DETECTOR WITH IMPROVED PERFORMANCES
EP2581721B1 (en) 2011-10-10 2019-05-08 Samsung Electronics Co., Ltd Infrared thermal detector and method of manufacturing the same
KR101861147B1 (en) 2011-11-08 2018-05-28 삼성전자주식회사 Infrared detector
US9274005B2 (en) * 2012-08-23 2016-03-01 Robert Bosch Gmbh Device and method for increasing infrared absorption in MEMS bolometers
US9006661B1 (en) 2012-10-31 2015-04-14 Exelis, Inc. Compact THz focal plane imaging array with integrated context imaging sensors and antennae matrix
US9297700B2 (en) * 2012-12-03 2016-03-29 Analog Devices, Inc. Photonic sensor and a method of manufacturing such a sensor
KR101902920B1 (en) 2012-12-11 2018-10-01 삼성전자주식회사 Infrared detector including broadband surface plasmon resonator
KR102040149B1 (en) 2013-02-01 2019-11-04 삼성전자주식회사 Infrared detector
US9195048B1 (en) 2013-03-05 2015-11-24 Exelis, Inc. Terahertz tunable filter with microfabricated mirrors
US9234797B1 (en) 2013-03-05 2016-01-12 Exelis, Inc. Compact THz imaging detector with an integrated micro-spectrometer spectral tuning matrix
CN103263255B (en) * 2013-05-25 2014-09-24 慈溪迈思特电子科技有限公司 Method for processing data of human body infrared temperature sensor
US9945729B2 (en) 2014-06-04 2018-04-17 Flir Systems, Inc. Systems and methods for enhanced bolometer response
US10222265B2 (en) * 2016-08-19 2019-03-05 Obsidian Sensors, Inc. Thermomechanical device for measuring electromagnetic radiation
KR101776027B1 (en) * 2017-01-09 2017-09-07 ㈜시리우스 The infrared sensor having a shared anchor structure including micro bolometers
FR3097046B1 (en) * 2019-06-05 2021-05-21 Lynred Microbolometer with reduced pixel pitch
FR3097047B1 (en) * 2019-06-05 2021-05-14 Lynred Microbolometer with filtering function
TWI724708B (en) 2019-12-24 2021-04-11 財團法人工業技術研究院 Microelectromechanical infrared sensing appartus having stoppers

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0534768A1 (en) * 1991-09-27 1993-03-31 Texas Instruments Incorporated Uncooled infrared detector and method for forming the same
US5688699A (en) * 1996-01-16 1997-11-18 Raytheon Company Microbolometer
WO2000033040A1 (en) * 1998-11-27 2000-06-08 Daewoo Electronics Co., Ltd. Bolometer with a zinc oxide bolometer element

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286976A (en) * 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
US5288649A (en) 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
FR2736654B1 (en) 1995-07-13 1997-08-22 Commissariat Energie Atomique METHOD FOR MANUFACTURING RIGID FLOATING MICROSTRUCTURE ELEMENTS AND DEVICE EQUIPPED WITH SUCH ELEMENTS
WO2000012985A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including an absorber made of a material having a low deposition-temperature and a low heat-conductivity
CN1118103C (en) * 1998-10-21 2003-08-13 李韫言 Thermal radiation infrared sensor for fine machining
US6144285A (en) * 1999-09-13 2000-11-07 Honeywell International Inc. Thermal sensor and method of making same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0534768A1 (en) * 1991-09-27 1993-03-31 Texas Instruments Incorporated Uncooled infrared detector and method for forming the same
US5688699A (en) * 1996-01-16 1997-11-18 Raytheon Company Microbolometer
WO2000033040A1 (en) * 1998-11-27 2000-06-08 Daewoo Electronics Co., Ltd. Bolometer with a zinc oxide bolometer element

Also Published As

Publication number Publication date
KR20030063489A (en) 2003-07-28
CN100397056C (en) 2008-06-25
KR20080093165A (en) 2008-10-20
CN1492992A (en) 2004-04-28
US6621083B2 (en) 2003-09-16
TW561249B (en) 2003-11-11
WO2002055973A2 (en) 2002-07-18
EP1346196A2 (en) 2003-09-24
IL156693A (en) 2007-03-08
US20030020017A1 (en) 2003-01-30
JP2004527731A (en) 2004-09-09
IL156693A0 (en) 2004-01-04

Similar Documents

Publication Publication Date Title
WO2002055973A3 (en) High-absorption wide-band pixel for bolometer arrays
CA2365454A1 (en) Semiconductor photodetection device
AU4852800A (en) Pixel structure having a bolometer with spaced apart absorber and transducer layers and an associated fabrication method
TW200640025A (en) Image sensor capable of adjusting focusing length for individual color and fabrication method thereof
WO2005096403A3 (en) Organic photoelectric conversion element utilizing an inorganic buffer layer placed between an electrode and the active material
WO2003049068A1 (en) Display apparatus using bidirectional two-terminal element and display apparatus manufacturing method
WO2003048843A3 (en) Electrochemical/electrocon trollable device electrode
AU2002310348A1 (en) Low-power, differential optical receiver in silicon on insulator
WO2008009850A3 (en) Glass type electrochemical/ electrically controllable device with variable optical and/or energetic characteristic
WO2003048836A8 (en) Display devices
AU2003208815A1 (en) Window element
WO2006023060A3 (en) Group iii nitride based quantum well light emitting device structures with an indium containing capping structure
DE69719592D1 (en) Active group antenna with auto calibration
WO2002008707A8 (en) Active or self-biasing micro-bolometer infrared detector
WO2006071913A3 (en) Electroluminescent devices including an optical spacer and methods of making same
WO2007051765A3 (en) Electrically programmable fuse
WO2003017342A3 (en) Method for the production of a self-adjusted structure on a semiconductor wafer
WO2002043148A3 (en) Micromachined infrared sensitive pixel and infrared imager
EP1102333A3 (en) Infra red sensor and method for fabricating the same
ATE246348T1 (en) ROLLING COUPLING
CA2381311A1 (en) Micro-bridge structure
WO2006083383A3 (en) Low temperature grown insulated gate phemt device
WO2005034207A3 (en) Varying carrier mobility on finfet active surfaces to achieve overall design goals
WO2001092428A3 (en) Heterostructure with rear-face donor doping
AU2001290283A1 (en) Dielectric thin film element, actuator comprising it, ink jet head, and ink jet recorder.

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
AK Designated states

Kind code of ref document: A3

Designated state(s): AE AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 156693

Country of ref document: IL

WWE Wipo information: entry into national phase

Ref document number: 2002556581

Country of ref document: JP

Ref document number: 1020037008906

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 2001998112

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1020037008906

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 018229131

Country of ref document: CN

WWP Wipo information: published in national office

Ref document number: 2001998112

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642