WO2002066251A2 - Printing plates - Google Patents
Printing plates Download PDFInfo
- Publication number
- WO2002066251A2 WO2002066251A2 PCT/IB2002/000441 IB0200441W WO02066251A2 WO 2002066251 A2 WO2002066251 A2 WO 2002066251A2 IB 0200441 W IB0200441 W IB 0200441W WO 02066251 A2 WO02066251 A2 WO 02066251A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- plate
- substrate
- pattern definition
- pattern
- Prior art date
Links
- 238000007639 printing Methods 0.000 title claims abstract description 43
- 239000000463 material Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000005530 etching Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 235000012239 silicon dioxide Nutrition 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 2
- 230000001154 acute effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000011521 glass Substances 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/207—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a prefabricated paste pattern, ink pattern or powder pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
- B41C1/00—Forme preparation
- B41C1/02—Engraving; Heads therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
- B41N1/00—Printing plates or foils; Materials therefor
- B41N1/12—Printing plates or foils; Materials therefor non-metallic other than stone, e.g. printing plates or foils comprising inorganic materials in an organic matrix
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
- B41N3/00—Preparing for use and conserving printing surfaces
- B41N3/003—Preparing for use and conserving printing surfaces of intaglio formes, e.g. application of a wear-resistant coating, such as chrome, on the already-engraved plate or cylinder; Preparing for reuse, e.g. removing of the Ballard shell; Correction of the engraving
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/06—Thermal details
- H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0113—Female die used for patterning or transferring, e.g. temporary substrate having recessed pattern
Definitions
- the present invention relates to printing plates, and more particularly, to such plates for use in the fabrication of electronic circuitry.
- Printing techniques enable materials to be directly deposited onto the substrate in a desired pattern, affording a much higher throughput of substrates.
- One such technique employs gravure or intaglio printing plates which have the pattern to be printed sunk into their surface.
- intaglios for printing images or text onto paper are normally formed of either a metal block or a polymer plate mounted onto a metal sheet.
- a metal plate is relatively resistant to wear during use, but when printing fine features on a scale required for electronic circuitry, for example line widths below 20 ⁇ m, the grain structure of the metal may have a detrimental effect on the printing quality.
- a polymer plate does not produce these grain structure artefacts, but its wear resistance is poor.
- An additional consideration when printing fine features is the relative expansion properties of the printing plate and the substrate. If they are not sufficiently closely matched, temperature fluctuations may cause misalignment between different layers printed on the substrate.
- AMLCDs active matrix liquid crystal displays
- the thermal expansion properties of a metal plate would be quite different to those of the glass substrate.
- a polymer plate would be a better match, but this difference may still have a substantial effect.
- a printing plate formed of the same glass as the substrate would be an ideal match.
- the present invention provides a printing plate for use in fabricating electronic circuitry on a substrate, comprising a body layer, and a non-metallic pattern definition layer over the body layer having a printing pattern anisotropically etched into its outer surface.
- the material forming the body layer and thus the bulk of the plate may therefore be selected to provide a sufficiently accurate match to the thermal expansion properties of the substrate, whilst the material forming the pattern definition layer may be chosen for its etch properties.
- a sufficiently accurate match of thermal expansion properties or reference to two materials having substantially the same thermal expansion properties concerns their properties over the temperature range to which the printing plate and substrate may be subjected during the printing process, the match being sufficiently close for any relative expansion to have a negligible effect on the alignment of printed patterns over that temperature range.
- the use of an anisotropic etch process enables the formation of a pattern having relatively steep side walls which in turn allows fine features to be printed.
- the angle between a normal to the plate and the upper portion of the side walls of the pattern (referred to as the release surface angle) is approximately 25° or less.
- An angle of around 10° or less is preferable for particularly fine patterns.
- the pattern definition layer may comprise material selected from polyimide, silicon dioxide, silicon nitride, and sol gel materials.
- the plate may also include a wear resistant layer over the pattern definition layer, which is more resistant to wear than the pattern definition layer.
- the body layer is formed of material selected substantially to match the thermal expansion properties of the substrate.
- the body layer may comprise glass or quartz.
- the present invention further provides a method of forming a printing plate for use in fabricating electronic circuitry on a substrate, comprising providing a body layer, depositing an additional non-metallic layer over the body layer, providing a mask layer over the pattern definition layer, and anisotropically etching a printing pattern into the outer surface of the pattern definition layer.
- the step of providing a mask layer preferably comprises the steps of depositing a metal layer over the pattern definition layer, and patterning the metal layer.
- the invention additionally provides a method for fabricating electronic circuitry on a substrate using a printing plate of the form described above, wherein the body layer of the plate is formed of material having thermal expansion characteristics substantially the same as those of the substrate.
- the body layer is formed of the same material as the substrate.
- Figures 1A and 1B show two stages in a conventional process of offset intaglio printing
- Figure 2 shows a partial cross-section through a printing plate prior to etching of its surface, an intermediate stage in the fabrication of a plate embodying the present invention
- Figure 3 shows a partial cross-section through the printing plate of Figure 2 after etching has taken place
- Figure 4 shows a partial cross-section through a printing plate which includes a wear resistant layer.
- Figures 1A and 1B illustrate two stages of a known intaglio offset printing process.
- the pattern to be printed is etched into the surface of a printing plate 2 as shown in Figure 1A.
- Ink 4 is then supplied to the recesses 6 of the pattern.
- the inked plate is moved relative to a transfer cylinder 8 so that the cylinder rolls over the plate and picks up the pattern of ink.
- the cylinder is then rolled over a substrate 10 (see Figure 1 B), transferring the pattern thereto.
- ink may be transferred from the plate by direct application of the plate to a substrate.
- FIG. 1 shows a printing plate at an intermediate stage in the fabrication of a plate embodying the present invention.
- It comprises a body layer 12, an additional non-metallic pattern definition layer 14 thereover, a metal layer 16 over the pattern definition layer 14, and a layer of photoresist 18 uppermost.
- the photoresist layer 18 is patterned and then the metal layer 16 is etched to form an in-situ mask for the etching of the pattern definition layer 14, as shown in Figure 2. It may be advantageous to carry out etching of the metal layer and the pattern definition layer in the same process, thereby avoiding the need to break the vacuum.
- the material forming the body layer 12 can be selected such that its thermal expansion properties closely match those of the substrate to be printed.
- the substrate may consist of glass or a flexible polymer, for example.
- the body layer 12 forms the bulk of the printing plate as the pattern definition layer 14 is relatively thin, and so the body layer substantially dictates the plate's thermal expansion properties.
- the pattern definition layer 14 is formed of a hard, scratch resistant material which is suitable for etching using anisotropic etching processes. It may comprise material selected from polyimide, silicon dioxide, silicon nitride, and sol gel materials. A layer of silicon dioxide or silicon nitride may be sputtered onto the plate. Polymers may typically be spun on or sheet printed. Examples of suitable sol gel materials are a methyltrimethoxysilane (MeTMS) matrix filled with silicon dioxide particles of around 20 nm diameter and monoaluminophosphate layers filled with titanium dioxide and titanium nitride particles.
- MeTMS methyltrimethoxysilane
- Anisotropic etching processes form relatively steep sided features, compared to isotropic techniques, such as conventional wet etching. Accordingly, dry etching processes such as reactive ion etching, sputtering or plasma etching are suitable.
- oxygen alone, or a mix of oxygen with CHF 3 or CF 4 or both may be used to reactive ion etch polyimide, silicon dioxide and silicon nitride with sufficiently well defined results.
- the addition of around 5% of CHF 3 or CF 4 to oxygen has been found to assist in controlling the wall steepness.
- An enlarged, partial cross-section through the printing plate of Figure 2 after etching has taken place is illustrated in Figure 3. It shows a groove 20 etched into the outer surface of pattern definition layer 14.
- the depth 22 of the groove may typically be around 10 to 30 ⁇ m, whilst the width may be varied over a wide range, from 10 ⁇ m or less, up to 100 ⁇ m or more.
- the material of layer 14 may be etched back to some extent beneath the metal layer 16. This results in deviation of the side walls 26 from perpendicular relative to the plane of the plate by an angle 28.
- the ability to form steep sides enables smaller feature sizes to be made. It will be appreciated that the size of the angle 28 depends on the combination of the material chosen to form layer 14 and the etchant gas selected. An angle of 25° or less has been found to give good results.
- the metal layer 16 may typically be deposited by sputtering or evaporation. Plating techniques may also be used. It may be formed of aluminium for example and have a thickness 30 of around 250 nm. A metal is selected which does not react significantly with the etchant gases.
- the thickness of the layer may vary depending on the metal used. It has been realised that the portion of this metal layer which extends beyond the side walls 26 owing to etching back of layer 14 tends to fold down over the side walls during the etching process, as illustrated in Figure 3 by dotted portions 32 and 34 if it is sufficiently thin. After the etching step has been completed, the remainder of the photoresist 18 and the metal layer 16 are removed. The folding over of the edge portions of the metal layer results in a relatively smooth surface on the side walls adjacent the outer surface of the layer 14 compared to the remainder of the groove surface. This may assist in the clean release of printing material from the groove during a printing process.
- the material used to form the pattern definition layer of a plate may not be sufficiently scratch and/or wear resistant for a particular application or high volume production.
- it may be coated with a conformal layer 36 of more scratch and/or wear resistant material after the printing pattern has been etched into its surface.
- a suitable material for the wear resistant layer 36 may be silicon nitride or silicon dioxide. These materials may be deposited by PECVD or sputtering for example. A wear resistant layer thickness of around 0.25 ⁇ m may typically be suitable.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002565790A JP2004518563A (en) | 2001-02-23 | 2002-02-13 | Printing plate |
KR1020027014003A KR20020093927A (en) | 2001-02-23 | 2002-02-13 | Printing plates |
EP02710271A EP1363776A2 (en) | 2001-02-23 | 2002-02-13 | Printing plates |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0104611.9A GB0104611D0 (en) | 2001-02-23 | 2001-02-23 | Printing plates |
GB0104611.9 | 2001-02-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002066251A2 true WO2002066251A2 (en) | 2002-08-29 |
WO2002066251A3 WO2002066251A3 (en) | 2002-12-05 |
Family
ID=9909439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IB2002/000441 WO2002066251A2 (en) | 2001-02-23 | 2002-02-13 | Printing plates |
Country Status (8)
Country | Link |
---|---|
US (1) | US6703313B2 (en) |
EP (1) | EP1363776A2 (en) |
JP (1) | JP2004518563A (en) |
KR (1) | KR20020093927A (en) |
CN (1) | CN1231102C (en) |
GB (1) | GB0104611D0 (en) |
TW (1) | TWI245595B (en) |
WO (1) | WO2002066251A2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7908967B2 (en) | 2005-08-25 | 2011-03-22 | Lg Display Co., Ltd. | Method for manufacturing printing plate |
US8673428B2 (en) | 2006-12-27 | 2014-03-18 | Hitachi Chemical Company, Ltd. | Engraved plate and substrate with conductor layer pattern using the same |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006040942A1 (en) * | 2004-10-08 | 2006-04-20 | Matsushita Electric Industrial Co., Ltd. | Multilayer circuit board manufacturing method |
KR100641006B1 (en) * | 2004-11-04 | 2006-11-02 | 엘지.필립스 엘시디 주식회사 | Printing Plate |
KR100716304B1 (en) * | 2005-06-30 | 2007-05-08 | 엘지.필립스 엘시디 주식회사 | Printing plate of liquid crystal display and method for printing using the same |
EP1908599A1 (en) * | 2005-07-25 | 2008-04-09 | Think Laboratory Co., Ltd. | Gravure platemaking roll and process for producing the same |
WO2007132755A1 (en) * | 2006-05-16 | 2007-11-22 | Think Laboratory Co., Ltd. | Gravure roll and process for producing the same |
JPWO2007135900A1 (en) * | 2006-05-23 | 2009-10-01 | 株式会社シンク・ラボラトリー | Gravure plate making roll and method for producing the same |
JP4967765B2 (en) * | 2007-04-05 | 2012-07-04 | 日立化成工業株式会社 | Intaglio and manufacturing method thereof |
US8136936B2 (en) * | 2007-08-20 | 2012-03-20 | Moore Wallace North America, Inc. | Apparatus and methods for controlling application of a substance to a substrate |
KR101477299B1 (en) * | 2008-06-03 | 2014-12-29 | 동우 화인켐 주식회사 | Intaglio for gravure offset printing apparatus and fabrication method thereof |
RU2494202C2 (en) * | 2009-03-31 | 2013-09-27 | Андрей Виленович Любомирский | Facing panel (versions) |
JP2014130267A (en) * | 2012-12-28 | 2014-07-10 | Think Laboratory Co Ltd | Gravure cylinder and method for manufacturing the same |
CN116080252A (en) * | 2023-02-02 | 2023-05-09 | 苏州蓝昇精密制版科技有限公司 | Screen printing plate and screen printing plate preparation method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2198085A (en) * | 1986-11-29 | 1988-06-08 | Stc Plc | Printing apparatus and process |
US5201268A (en) * | 1990-12-25 | 1993-04-13 | Matsushita Electric Industrial Co., Ltd. | Intaglio printing process and its application |
US5221562A (en) * | 1989-05-02 | 1993-06-22 | Praxair S.T. Technology, Inc. | Liquid transfer articles and method for producing them |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3181461A (en) * | 1963-05-23 | 1965-05-04 | Howard A Fromson | Photographic plate |
US4542089A (en) * | 1981-09-08 | 1985-09-17 | Minnesota Mining And Manufacturing Company | Lithographic substrate and its process of manufacture |
CA1260754A (en) * | 1983-12-26 | 1989-09-26 | Teiji Majima | Method for forming patterns and apparatus used for carrying out the same |
JPS6391245A (en) * | 1986-10-06 | 1988-04-21 | Toppan Printing Co Ltd | Photogravure making method |
US4707218A (en) * | 1986-10-28 | 1987-11-17 | International Business Machines Corporation | Lithographic image size reduction |
JP2867464B2 (en) | 1989-09-20 | 1999-03-08 | 凸版印刷株式会社 | Printing plate |
AU8282691A (en) * | 1990-07-20 | 1992-02-18 | McGrew, Steven P. | Embossing tool |
JPH04186229A (en) | 1990-11-20 | 1992-07-03 | Matsushita Electric Ind Co Ltd | Transparent electrode with auxiliary electrode and its manufacture |
JPH04332694A (en) | 1991-05-08 | 1992-11-19 | Matsushita Electric Ind Co Ltd | Intaglio and preparation thereof |
JP2502852B2 (en) | 1991-09-02 | 1996-05-29 | 松下電器産業株式会社 | Intaglio and its manufacturing method |
US5352634A (en) | 1992-03-23 | 1994-10-04 | Brody Thomas P | Process for fabricating an active matrix circuit |
JPH05323111A (en) | 1992-05-18 | 1993-12-07 | Toshiba Corp | Production of color filter |
JPH0671853A (en) * | 1992-08-25 | 1994-03-15 | Dainippon Printing Co Ltd | Formation of fine pattern |
US6136508A (en) * | 1997-03-13 | 2000-10-24 | Kodak Polychrome Graphics Llc | Lithographic printing plates with a sol-gel layer |
-
2001
- 2001-02-23 GB GBGB0104611.9A patent/GB0104611D0/en not_active Ceased
-
2002
- 2002-01-24 US US10/056,098 patent/US6703313B2/en not_active Expired - Fee Related
- 2002-02-13 EP EP02710271A patent/EP1363776A2/en not_active Withdrawn
- 2002-02-13 JP JP2002565790A patent/JP2004518563A/en active Pending
- 2002-02-13 KR KR1020027014003A patent/KR20020093927A/en not_active Application Discontinuation
- 2002-02-13 CN CNB028003888A patent/CN1231102C/en not_active Expired - Fee Related
- 2002-02-13 WO PCT/IB2002/000441 patent/WO2002066251A2/en not_active Application Discontinuation
- 2002-02-20 TW TW091103062A patent/TWI245595B/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2198085A (en) * | 1986-11-29 | 1988-06-08 | Stc Plc | Printing apparatus and process |
US5221562A (en) * | 1989-05-02 | 1993-06-22 | Praxair S.T. Technology, Inc. | Liquid transfer articles and method for producing them |
US5201268A (en) * | 1990-12-25 | 1993-04-13 | Matsushita Electric Industrial Co., Ltd. | Intaglio printing process and its application |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 012, no. 325 (M-737), 5 September 1988 (1988-09-05) & JP 63 091245 A (TOPPAN PRINTING CO LTD), 21 April 1988 (1988-04-21) * |
PATENT ABSTRACTS OF JAPAN vol. 017, no. 368 (M-1443), 12 July 1993 (1993-07-12) & JP 05 057867 A (MATSUSHITA ELECTRIC IND CO LTD), 9 March 1993 (1993-03-09) * |
PATENT ABSTRACTS OF JAPAN vol. 018, no. 317 (M-1622), 16 June 1994 (1994-06-16) & JP 06 071853 A (DAINIPPON PRINTING CO LTD), 15 March 1994 (1994-03-15) * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7908967B2 (en) | 2005-08-25 | 2011-03-22 | Lg Display Co., Ltd. | Method for manufacturing printing plate |
US8186271B2 (en) | 2005-08-25 | 2012-05-29 | Lg Display Co., Ltd. | Method for manufacturing printing plate |
US8673428B2 (en) | 2006-12-27 | 2014-03-18 | Hitachi Chemical Company, Ltd. | Engraved plate and substrate with conductor layer pattern using the same |
Also Published As
Publication number | Publication date |
---|---|
GB0104611D0 (en) | 2001-04-11 |
KR20020093927A (en) | 2002-12-16 |
JP2004518563A (en) | 2004-06-24 |
CN1457627A (en) | 2003-11-19 |
EP1363776A2 (en) | 2003-11-26 |
TWI245595B (en) | 2005-12-11 |
US20020119665A1 (en) | 2002-08-29 |
WO2002066251A3 (en) | 2002-12-05 |
CN1231102C (en) | 2005-12-07 |
US6703313B2 (en) | 2004-03-09 |
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