WO2002071438A3 - Capillary discharge plasma apparatus and method for surface treatment using the same - Google Patents

Capillary discharge plasma apparatus and method for surface treatment using the same Download PDF

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Publication number
WO2002071438A3
WO2002071438A3 PCT/US2002/005303 US0205303W WO02071438A3 WO 2002071438 A3 WO2002071438 A3 WO 2002071438A3 US 0205303 W US0205303 W US 0205303W WO 02071438 A3 WO02071438 A3 WO 02071438A3
Authority
WO
WIPO (PCT)
Prior art keywords
same
surface treatment
discharge plasma
plasma apparatus
capillary
Prior art date
Application number
PCT/US2002/005303
Other languages
French (fr)
Other versions
WO2002071438A2 (en
Inventor
Steven Kim
Dong Woo Yu
Seok-Kyun Song
Seungdeok Kim
Original Assignee
Plasmion Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasmion Corp filed Critical Plasmion Corp
Publication of WO2002071438A2 publication Critical patent/WO2002071438A2/en
Publication of WO2002071438A3 publication Critical patent/WO2002071438A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes

Abstract

A plasma treatment apparatus for a workpiece includes a metal electrode, a capillary dielectric having first and second sides and coupled to the metal electrode through the first side, wherein the capillary dielectric has at least one capillary, a shield body surrounding the metal electrode and the first side of the capillary dielectric, wherein the shield body has first and second end portions, and a gas supplier providing gas to the metal electrode.
PCT/US2002/005303 2001-03-02 2002-02-21 Capillary discharge plasma apparatus and method for surface treatment using the same WO2002071438A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/796,488 2001-03-02
US09/796,488 US20020122896A1 (en) 2001-03-02 2001-03-02 Capillary discharge plasma apparatus and method for surface treatment using the same

Publications (2)

Publication Number Publication Date
WO2002071438A2 WO2002071438A2 (en) 2002-09-12
WO2002071438A3 true WO2002071438A3 (en) 2003-03-06

Family

ID=25168302

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/005303 WO2002071438A2 (en) 2001-03-02 2002-02-21 Capillary discharge plasma apparatus and method for surface treatment using the same

Country Status (2)

Country Link
US (2) US20020122896A1 (en)
WO (1) WO2002071438A2 (en)

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US8641977B2 (en) 2011-05-09 2014-02-04 Ozonica Limited Disinfection of packaged articles

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US7192553B2 (en) * 1999-12-15 2007-03-20 Plasmasol Corporation In situ sterilization and decontamination system using a non-thermal plasma discharge
KR20030031879A (en) * 1999-12-15 2003-04-23 스티븐스 인스티튜트 오프 테크놀로지 Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions
US7094322B1 (en) 1999-12-15 2006-08-22 Plasmasol Corporation Wall Township Use of self-sustained atmospheric pressure plasma for the scattering and absorption of electromagnetic radiation
US6923890B2 (en) * 1999-12-15 2005-08-02 Plasmasol Corporation Chemical processing using non-thermal discharge plasma
US6955794B2 (en) 1999-12-15 2005-10-18 Plasmasol Corporation Slot discharge non-thermal plasma apparatus and process for promoting chemical reaction
US20020122896A1 (en) * 2001-03-02 2002-09-05 Skion Corporation Capillary discharge plasma apparatus and method for surface treatment using the same
WO2003005397A2 (en) * 2001-07-02 2003-01-16 Plasmasol Corporation A novel electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same
US20040050684A1 (en) * 2001-11-02 2004-03-18 Plasmasol Corporation System and method for injection of an organic based reagent into weakly ionized gas to generate chemically active species
EP1451850A2 (en) * 2001-11-02 2004-09-01 Plasmasol Corporation Non-thermal plasma slit discharge apparatus
CA2553804A1 (en) * 2004-01-22 2005-08-04 Plasmasol Corporation Capillary-in-ring electrode gas discharge generator for producing a weakly ionized gas and method for using the same
EP1715898A4 (en) * 2004-01-22 2007-05-30 Plasmasol Corp Modular sterilization system
US7068226B1 (en) * 2004-03-29 2006-06-27 The United States Of America As Represented By The Secretary Of The Air Force Pulsed plasma antenna
US20070048176A1 (en) * 2005-08-31 2007-03-01 Plasmasol Corporation Sterilizing and recharging apparatus for batteries, battery packs and battery powered devices
DE102006019664B4 (en) * 2006-04-27 2017-01-05 Leibniz-Institut für Plasmaforschung und Technologie e.V. Cold plasma hand-held device for the plasma treatment of surfaces
TWI345431B (en) * 2006-09-14 2011-07-11 Ind Tech Res Inst Processing system and plasma generation device thereof
CN101146397B (en) * 2006-09-14 2012-06-27 财团法人工业技术研究院 Processing system and palsm generation device
DE102008008614A1 (en) * 2008-02-12 2009-08-13 Leibniz-Institut für Plasmaforschung und Technologie e.V. Plama device for the selective treatment of electroporated cells
WO2009133193A1 (en) * 2008-05-02 2009-11-05 Oerlikon Trading Ag, Truebbach Plasma treatment apparatus and method for plasma-assisted treatment of substrates
US20110000432A1 (en) * 2008-06-12 2011-01-06 Atomic Energy Council - Institute Of Nuclear Energy Research One atmospheric pressure non-thermal plasma reactor with dual discharging-electrode structure
DE102008033941A1 (en) * 2008-07-18 2010-01-28 Innovent E.V. Method for coating
DE102008033939A1 (en) * 2008-07-18 2010-01-21 Innovent E.V. Method of coating
GB0906091D0 (en) 2009-04-07 2009-05-20 Snowball Malcolm R None invasive disinfector
ES2528734T3 (en) 2009-08-03 2015-02-12 Leibniz-Institut für Plasmaforschung und Technologie e.V. Device for generating a cold plasma jet
DE102009028190A1 (en) * 2009-08-03 2011-02-10 Leibniz-Institut für Plasmaforschung und Technologie e.V. Cold plasma beam producing device i.e. plasma hand-held device, for microplasma treatment of materials for e.g. cosmetic purpose, has high frequency-generator, coil, body and high voltage-electrode integrally arranged in metal housing
DE102010011643A1 (en) * 2010-03-16 2011-09-22 Christian Buske Apparatus and method for the plasma treatment of living tissue
JP5191524B2 (en) * 2010-11-09 2013-05-08 株式会社新川 Plasma device and manufacturing method thereof
GB2500680B (en) * 2012-03-29 2017-04-19 Ozonica Ltd Apparatus and method for disinfection of packaged articles
KR102622868B1 (en) * 2016-11-28 2024-01-08 엘지디스플레이 주식회사 Roll to roll fabrication apparatus for preventing thermal impact
KR101813558B1 (en) * 2017-04-12 2018-01-03 주식회사 서린메디케어 Skin treatment apparatus using fractional plasma
US11122790B2 (en) * 2019-12-30 2021-09-21 Nbs Tek Llc Cold plasma method and apparatus for eradication of the taxonomic class insecta
EP4120942A1 (en) * 2020-03-19 2023-01-25 Caps Medical Ltd. Plasma system with a plurality of plasma generating sites
DE102020208754B3 (en) * 2020-07-14 2021-12-09 Aerocom Gmbh & Co. Communicationssysteme Disinfection system for pneumatic tube systems

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8641977B2 (en) 2011-05-09 2014-02-04 Ozonica Limited Disinfection of packaged articles
US9597422B2 (en) 2011-05-09 2017-03-21 Ozonica Limited Disinfection of packaged articles

Also Published As

Publication number Publication date
WO2002071438A2 (en) 2002-09-12
US20040036397A1 (en) 2004-02-26
US20020122896A1 (en) 2002-09-05

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