WO2003006952A3 - Method and apparatus for manipulating a sample - Google Patents

Method and apparatus for manipulating a sample Download PDF

Info

Publication number
WO2003006952A3
WO2003006952A3 PCT/US2002/022442 US0222442W WO03006952A3 WO 2003006952 A3 WO2003006952 A3 WO 2003006952A3 US 0222442 W US0222442 W US 0222442W WO 03006952 A3 WO03006952 A3 WO 03006952A3
Authority
WO
WIPO (PCT)
Prior art keywords
tips
cantilever
tip
sample
manipulating
Prior art date
Application number
PCT/US2002/022442
Other languages
French (fr)
Other versions
WO2003006952A2 (en
Inventor
Ami Chand
Kevin J Kjoller
Kenneth L Babcock
Michael K Harris
Original Assignee
Veeco Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instr Inc filed Critical Veeco Instr Inc
Priority to AU2002327245A priority Critical patent/AU2002327245A1/en
Publication of WO2003006952A2 publication Critical patent/WO2003006952A2/en
Publication of WO2003006952A3 publication Critical patent/WO2003006952A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques

Abstract

A method and apparatus for manipulating the surface of a sample including a cantilever (140), a first tip (120) mounted on the cantilever, and a second tip (130) mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips (120, 130) are configured to form a first position characterized in that the tips (120, 130) combine to form an imaging tip and the first and the second tips (120, 130) separated to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferably extend downwardly from the cantilever (140) substantially perpendicular thereto.
PCT/US2002/022442 2001-07-13 2002-07-12 Method and apparatus for manipulating a sample WO2003006952A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002327245A AU2002327245A1 (en) 2001-07-13 2002-07-12 Method and apparatus for manipulating a sample

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/904,634 2001-07-13
US09/904,634 US6862921B2 (en) 2001-03-09 2001-07-13 Method and apparatus for manipulating a sample

Publications (2)

Publication Number Publication Date
WO2003006952A2 WO2003006952A2 (en) 2003-01-23
WO2003006952A3 true WO2003006952A3 (en) 2003-10-16

Family

ID=25419478

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/022442 WO2003006952A2 (en) 2001-07-13 2002-07-12 Method and apparatus for manipulating a sample

Country Status (3)

Country Link
US (3) US6862921B2 (en)
AU (1) AU2002327245A1 (en)
WO (1) WO2003006952A2 (en)

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69721986T2 (en) * 1997-08-27 2004-02-12 Imec Vzw Stylus configuration, manufacturing process and use of styluses
KR100825907B1 (en) * 2000-05-13 2008-04-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 A method of manufacturing a semiconductor device
WO2002063235A2 (en) * 2001-02-02 2002-08-15 Renishaw Plc Machine tool probe
US6753969B2 (en) * 2001-03-29 2004-06-22 Geogia Tech Research Corporation Microinterferometer for measuring distance with improved sensitivity
US6955078B2 (en) * 2001-03-30 2005-10-18 Xidex Corporation Caliper method, system, and apparatus
US7247895B2 (en) * 2001-07-26 2007-07-24 The Board Of Trustees Of The University Of Illinois Electrostatic nanolithography probe actuation device and method
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
US6677697B2 (en) * 2001-12-06 2004-01-13 Veeco Instruments Inc. Force scanning probe microscope
JP4051440B2 (en) * 2002-03-06 2008-02-27 独立行政法人産業技術総合研究所 Cell manipulation device and method
US7518737B2 (en) * 2002-03-29 2009-04-14 Georgia Tech Research Corp. Displacement-measuring optical device with orifice
US7440117B2 (en) * 2002-03-29 2008-10-21 Georgia Tech Research Corp. Highly-sensitive displacement-measuring optical device
US7116430B2 (en) 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
US20030201654A1 (en) * 2002-04-26 2003-10-30 Ellis Matthew D. Microgripper having linearly actuated grasping mechanisms
US6891170B1 (en) * 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
US7168301B2 (en) * 2002-07-02 2007-01-30 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
US6995380B2 (en) * 2003-03-13 2006-02-07 Ascend Instruments, Llc End effector for supporting a microsample
JP4024710B2 (en) * 2003-04-15 2007-12-19 エスアイアイ・ナノテクノロジー株式会社 Method for manufacturing a split probe
US6862924B2 (en) * 2003-05-02 2005-03-08 Board Of Trustees Operating Michigan State University Augmenting reality system for real-time nanomanipulation using atomic force microscopy
DE10322005B4 (en) * 2003-05-16 2016-04-28 Nanotools Gmbh Method for the automated production of functional objects with a three-dimensional nanostructure and device and image analysis means for carrying out the method
US7096568B1 (en) 2003-07-10 2006-08-29 Zyvex Corporation Method of manufacturing a microcomponent assembly
WO2005031789A2 (en) * 2003-09-23 2005-04-07 Zyvex Corporation Method, system and device for microscopic examination employing fib-prepared sample grasping element
US7735358B2 (en) * 2003-11-17 2010-06-15 Insitutec, Inc. Self-sensing tweezer devices and associated methods for micro and nano-scale manipulation and assembly
US7025619B2 (en) * 2004-02-13 2006-04-11 Zyvex Corporation Sockets for microassembly
US7934417B2 (en) * 2004-02-20 2011-05-03 Markus Hund Scanning probe microscope
TW200531420A (en) 2004-02-20 2005-09-16 Zyvex Corp Positioning device for microscopic motion
JP2005251745A (en) * 2004-02-23 2005-09-15 Zyvex Corp Probe operation of charged particle beam device
US7081630B2 (en) * 2004-03-12 2006-07-25 Zyvex Corporation Compact microcolumn for automated assembly
US6956219B2 (en) * 2004-03-12 2005-10-18 Zyvex Corporation MEMS based charged particle deflector design
US7326293B2 (en) * 2004-03-26 2008-02-05 Zyvex Labs, Llc Patterned atomic layer epitaxy
US7297946B2 (en) * 2004-08-16 2007-11-20 Board Of Trustees Operating Michigan State University Automated nanoassembly
US7849515B2 (en) * 2004-11-22 2010-12-07 National University Corporation Kagawa University Nanotweezer and scanning probe microscope equipped with nanotweezer
US7485847B2 (en) * 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
US7314382B2 (en) 2005-05-18 2008-01-01 Zyvex Labs, Llc Apparatus and methods of manufacturing and assembling microscale and nanoscale components and assemblies
EP1748447B1 (en) * 2005-07-28 2008-10-22 Interuniversitair Microelektronica Centrum ( Imec) Dual tip atomic force microscopy probe and method for producing such a probe
US7170055B1 (en) * 2005-08-18 2007-01-30 The Board Of Trustees Of The Leland Stanford Junior University Nanotube arrangements and methods therefor
FI20055525A (en) * 2005-09-30 2007-03-31 Oulun Yliopisto Systems and methods for processing microscopic objects and computer software products
KR100759559B1 (en) * 2005-11-21 2007-09-18 삼성에스디아이 주식회사 Manufacturing method of barrier ribs for flat display panel
US7647848B2 (en) * 2005-11-29 2010-01-19 Drexel University Integrated system for simultaneous inspection and manipulation
CN1979126B (en) * 2005-12-07 2012-08-22 国际商业机器公司 Method and device for analysis of a sample
US7207119B1 (en) * 2005-12-08 2007-04-24 International Business Machines Corporation Controller
WO2007133585A2 (en) * 2006-05-11 2007-11-22 Anasys Instruments Quantitative calorimetry signal for sub-micron scale thermal analysis
JP2009192216A (en) * 2006-07-28 2009-08-27 National Institute For Materials Science Scanning type probe microscope and method of measuring its probe relative position
KR100761059B1 (en) * 2006-09-29 2007-09-21 파크시스템스 주식회사 Scanning probe microscope being able to measure samples having overhang structure
US7770439B2 (en) * 2006-10-17 2010-08-10 Veeco Instruments Inc. Method and apparatus of scanning a sample using a scanning probe microscope
US7605377B2 (en) * 2006-10-17 2009-10-20 Zyvex Corporation On-chip reflectron and ion optics
JP2008111735A (en) * 2006-10-31 2008-05-15 Sii Nanotechnology Inc Sample operation apparatus
US7875528B2 (en) * 2007-02-07 2011-01-25 International Business Machines Corporation Method, system, program product for bonding two circuitry-including substrates and related stage
JP4224109B2 (en) * 2007-03-02 2009-02-12 コーア株式会社 Laminated body and method for producing the same
US8904560B2 (en) * 2007-05-07 2014-12-02 Bruker Nano, Inc. Closed loop controller and method for fast scanning probe microscopy
JP4900594B2 (en) * 2007-06-01 2012-03-21 エスアイアイ・ナノテクノロジー株式会社 Sample handling device
JP4503633B2 (en) * 2007-06-22 2010-07-14 アオイ電子株式会社 AFM tweezers and scanning probe microscope
DE102007034854A1 (en) * 2007-07-24 2009-01-29 Jpk Instruments Ag Method and device for automated measurement and combination of image acquisition and force measurement
DE102007052610A1 (en) * 2007-11-05 2009-05-07 Advanced Micro Devices, Inc., Sunnyvale Nanoprobe tip for advanced scanning probe microscopy with a layered probe material structured by lithography and / or ion beam techniques
US8108943B2 (en) * 2007-11-30 2012-01-31 California Institute Of Technology Method and system for near-field spectroscopy using targeted deposition of nanoparticles
US8485025B2 (en) * 2007-12-14 2013-07-16 InSituTec, LLC Standing wave fibers for the detection of nucleic acids
JP2009192370A (en) * 2008-02-14 2009-08-27 Sii Nanotechnology Inc Conductivity measuring apparatus and conductivity measuring method
WO2009140439A1 (en) * 2008-05-13 2009-11-19 Nanoink, Inc. Nanomanufacturing devices and methods
US8177422B2 (en) * 2008-08-15 2012-05-15 Anasys Instruments Transition temperature microscopy
US20100116038A1 (en) * 2008-11-12 2010-05-13 International Business Machines Corporation Feedback- enhanced thermo-electric topography sensing
US8979149B2 (en) 2009-02-17 2015-03-17 Yu Sun Device for grasping and active release of micro and nano objects
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
WO2011068960A2 (en) * 2009-12-02 2011-06-09 Northwestern University Block copolymer-assisted nanolithography
US20120047610A1 (en) 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
US8549660B2 (en) 2010-04-09 2013-10-01 Boise State University Cantilever-based optical fiber probe interfacial force microscope for partial immersion in liquid
EP2477038A1 (en) * 2011-01-14 2012-07-18 Centre National de la Recherche Scientifique Near-field optical probe manufacturing using organo-mineral material and sol-gel process
US9575307B2 (en) * 2012-03-29 2017-02-21 Board Of Trustees Of Michigan State University Non-vector space sensing and control systems and methods for video rate imaging and manipulation
JP5787923B2 (en) * 2013-03-15 2015-09-30 株式会社東芝 Microprobe and method of manufacturing microprobe
CN105510638B (en) * 2014-09-24 2018-10-19 中国科学院宁波材料技术与工程研究所 Probe, preparation method and detection method in a kind of scanning probe microscopy
DE102016107059B4 (en) 2015-07-17 2022-12-22 Infineon Technologies Dresden Gmbh Integrated semiconductor device and manufacturing process
DE102017006115A1 (en) * 2017-06-28 2019-01-03 Christoph Hiller Further increase the effectiveness of computers
WO2020033958A1 (en) * 2018-08-10 2020-02-13 Bruker Nano, Inc. High speed atomic force profilometry of large areas

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343042A (en) * 1991-06-20 1994-08-30 Basf Aktiengesellschaft Selective modification of individual nanometer and subnamometer structures in the surface of a solid
US5461907A (en) * 1993-03-23 1995-10-31 Regents Of The University Of California Imaging, cutting, and collecting instrument and method
WO1998005920A1 (en) * 1996-08-08 1998-02-12 William Marsh Rice University Macroscopically manipulable nanoscale devices made from nanotube assemblies

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4539089A (en) 1984-06-29 1985-09-03 International Business Machines Corporation Method for depositing material with nanometer dimensions
US4878213A (en) 1984-09-14 1989-10-31 Xerox Corporation System for recording and readout of information at atomic scale densities and method therefor
US4943719A (en) 1989-01-17 1990-07-24 The Board Of Trustees Of The Leland Stanford University Microminiature cantilever stylus
US4987312A (en) 1989-11-07 1991-01-22 International Business Machines Corporation Process for repositioning atoms on a surface using a scanning tunneling microscope
US5077473A (en) 1990-07-26 1991-12-31 Digital Instruments, Inc. Drift compensation for scanning probe microscopes using an enhanced probe positioning system
US5204531A (en) * 1992-02-14 1993-04-20 Digital Instruments, Inc. Method of adjusting the size of the area scanned by a scanning probe
GB9213423D0 (en) 1992-06-24 1992-08-05 Hitachi Europ Ltd Nanofabricated structures
US5252835A (en) 1992-07-17 1993-10-12 President And Trustees Of Harvard College Machining oxide thin-films with an atomic force microscope: pattern and object formation on the nanometer scale
US5327625A (en) 1992-08-13 1994-07-12 Massachusetts Institute Of Technology Apparatus for forming nanometric features on surfaces
US5504338A (en) 1993-06-30 1996-04-02 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method using low-voltage and/or low-current scanning probe lithography
US5557156A (en) * 1994-12-02 1996-09-17 Digital Instruments, Inc. Scan control for scanning probe microscopes
US5831181A (en) 1995-09-29 1998-11-03 The Regents Of The University Of California Automated tool for precision machining and imaging
US5854487A (en) 1997-02-28 1998-12-29 Park Scientific Instruments Scanning probe microscope providing unobstructed top down and bottom up views
US6038916A (en) 1997-07-22 2000-03-21 Digital Instruments Method and apparatus for measuring energy dissipation by a probe during operation of an atomic force microscope
JP2000028342A (en) * 1998-07-15 2000-01-28 Mitsutoyo Corp Drive device for measurement instrument
US6181097B1 (en) 1999-02-11 2001-01-30 Institute Of Materials Research And Engineering High precision three-dimensional alignment system for lithography, fabrication and inspection
US6189374B1 (en) 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343042A (en) * 1991-06-20 1994-08-30 Basf Aktiengesellschaft Selective modification of individual nanometer and subnamometer structures in the surface of a solid
US5461907A (en) * 1993-03-23 1995-10-31 Regents Of The University Of California Imaging, cutting, and collecting instrument and method
WO1998005920A1 (en) * 1996-08-08 1998-02-12 William Marsh Rice University Macroscopically manipulable nanoscale devices made from nanotube assemblies

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GUTHOLD ET AL.: "Controlled manipulation of molecular samples with the nanomanipulator", IEEE/ASME TRANSACTIONS ON MECHATRONICS, vol. 5, no. 2, June 2000 (2000-06-01), pages 189 - 198, XP002965408 *
MIRKIN: "Nanotechnology: tweezers for the nanotool kit", SCIENCE, vol. 286, no. 5447, 10 December 1999 (1999-12-10), pages 2095 - 2096, XP002965409, Retrieved from the Internet <URL:www.sciencemag.org> *

Also Published As

Publication number Publication date
US20050145021A1 (en) 2005-07-07
WO2003006952A2 (en) 2003-01-23
US6862921B2 (en) 2005-03-08
US7040147B2 (en) 2006-05-09
US7334460B2 (en) 2008-02-26
AU2002327245A1 (en) 2003-01-29
US20060243034A1 (en) 2006-11-02
US20020125427A1 (en) 2002-09-12

Similar Documents

Publication Publication Date Title
WO2003006952A3 (en) Method and apparatus for manipulating a sample
EP1336835A4 (en) Conductive probe for scanning microscope and machining method using the same
EP1278056A4 (en) Probe for scanning microscope produced by focused ion beam machining
EP0347739A3 (en) Scanning tunneling microscope and surface topographic observation method
WO2002013236A3 (en) Method and apparatus for removing unwanted substance from semiconductor wafer
EP2500076A3 (en) Structure and method for handling magnetic particles in biological assays
WO2004022108A3 (en) Surgical instrument for moving a vertebra
WO2004082830A3 (en) Sample manipulation system
WO1999035505A3 (en) Method for removing accumulated solder from probe card probing features
DE60141150D1 (en) DEVICE FOR EXAMINING THE WAFER SURFACE AND METHOD FOR STUDYING THE WAFER SURFACE
AU2001273730A1 (en) Sample for simultaneously conducting electro-chemical and topographic near-fieldmicroscopy
EP1235137A3 (en) Method for flagging and relating information in a computer system
EP1469322A3 (en) Electronic magnetoresistive sensor biasing
EP1271135A3 (en) System and method for deconvoluting the effect of topography on scanning probe microscopy measurements
AU2001217208A1 (en) An imaging mmethod and apparatus for the non-destructie analysis of paintings and monuments
WO2004075204A3 (en) Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts
WO2003042627A3 (en) Field effect transistor sensor for a screen probe microscope
AU2001284072A1 (en) A device for determining the size distribution of aerosol particles
EP0892272A3 (en) Method and apparatus for measuring the mean square value of an electrical signal
EP0864871A3 (en) Cleaning method, device and tool for board electrical-test probes and board electrical-test device and method
WO2001081891A3 (en) Sampler for eliminating particle-related artifacts for flue gas measurement
EP0895073A3 (en) Device for measuring a crack in a workpiece
EP0395447A3 (en) Surface potential measuring system
AU7340996A (en) Wafer probe card having micro tips and manufacturing method thereof
EP0857961A3 (en) Sample preparing apparatus used with preparation disk with filter

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PH PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LU MC NL PT SE SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP