WO2003016070A3 - Method and apparatus for supporting a polishing web - Google Patents

Method and apparatus for supporting a polishing web Download PDF

Info

Publication number
WO2003016070A3
WO2003016070A3 PCT/US2002/025665 US0225665W WO03016070A3 WO 2003016070 A3 WO2003016070 A3 WO 2003016070A3 US 0225665 W US0225665 W US 0225665W WO 03016070 A3 WO03016070 A3 WO 03016070A3
Authority
WO
WIPO (PCT)
Prior art keywords
platen
port
blocker valve
disposed
support surface
Prior art date
Application number
PCT/US2002/025665
Other languages
French (fr)
Other versions
WO2003016070A2 (en
Inventor
Timothy J Franklin
Dan A Marohl
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2003016070A2 publication Critical patent/WO2003016070A2/en
Publication of WO2003016070A3 publication Critical patent/WO2003016070A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B24B21/20—Accessories for controlling or adjusting the tracking or the tension of the grinding belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass

Abstract

Generally, a method and apparatus for supporting a web of polishing material (102). In one embodiment, the apparatus includes a platen (230) and a blocker valve (314). The platen includes a support surface adapted to support the polishing material and a port (284) fluidly coupled to the support surface. A housing that includes a supply port (304) and an exit port (306) has a venturi body (310) disposed therein. The blocker valve has a first state whereby a flow through the housing and blocker valve causes vacuum to be drawn through the port disposed in the platen by the venturi body. In another embodiment, the flow through the venturi (310) may be reversed by changing the state of the blocker valve to blow air through the port (284) disposed in the platen, thereby placing the polishing material and the support surface of the platen in a spaced-apart relation.
PCT/US2002/025665 2001-08-16 2002-08-12 Method and apparatus for supporting a polishing web WO2003016070A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/931,156 2001-08-16
US09/931,156 US6503131B1 (en) 2001-08-16 2001-08-16 Integrated platen assembly for a chemical mechanical planarization system

Publications (2)

Publication Number Publication Date
WO2003016070A2 WO2003016070A2 (en) 2003-02-27
WO2003016070A3 true WO2003016070A3 (en) 2003-04-03

Family

ID=25460302

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/025665 WO2003016070A2 (en) 2001-08-16 2002-08-12 Method and apparatus for supporting a polishing web

Country Status (3)

Country Link
US (2) US6503131B1 (en)
TW (1) TW544373B (en)
WO (1) WO2003016070A2 (en)

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US7697260B2 (en) * 2004-03-31 2010-04-13 Applied Materials, Inc. Detachable electrostatic chuck
US20060154569A1 (en) * 2005-01-11 2006-07-13 Terry Doyle Platen assembly utilizing magnetic slip ring
US7179159B2 (en) * 2005-05-02 2007-02-20 Applied Materials, Inc. Materials for chemical mechanical polishing
US20070212976A1 (en) * 2006-03-13 2007-09-13 Applied Materials, Inc. Smart polishing media assembly for planarizing substrates
US20070251832A1 (en) * 2006-04-27 2007-11-01 Applied Materials, Inc. Method and apparatus for electrochemical mechanical polishing of cu with higher liner velocity for better surface finish and higher removal rate during clearance
US7589950B2 (en) * 2006-10-13 2009-09-15 Applied Materials, Inc. Detachable electrostatic chuck having sealing assembly
EP2452779B1 (en) * 2010-11-16 2013-04-24 Supfina Grieshaber GmbH & Co. KG Device for determining the feed rate of a finishing belt
JP2014093420A (en) * 2012-11-02 2014-05-19 Toyota Motor Corp Jig for bonding wafer to support disk and semiconductor device manufacturing method using the same
CN103846788B (en) * 2014-03-07 2016-06-29 湖南永创机电设备有限公司 Improve the buffing machine of polished part suction type
SG11201906131WA (en) 2017-01-20 2019-08-27 Applied Materials Inc A thin plastic polishing article for cmp applications
JP7129166B2 (en) 2018-01-11 2022-09-01 株式会社荏原製作所 SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD
JP7287987B2 (en) 2018-06-27 2023-06-06 アプライド マテリアルズ インコーポレイテッド Temperature control for chemical mechanical polishing
US11717936B2 (en) * 2018-09-14 2023-08-08 Applied Materials, Inc. Methods for a web-based CMP system
US11897079B2 (en) 2019-08-13 2024-02-13 Applied Materials, Inc. Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity

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Also Published As

Publication number Publication date
TW544373B (en) 2003-08-01
US6503131B1 (en) 2003-01-07
US6837964B2 (en) 2005-01-04
US20030066604A1 (en) 2003-04-10
WO2003016070A2 (en) 2003-02-27

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