WO2003034452A1 - Condensateur a capacitance variable - Google Patents
Condensateur a capacitance variable Download PDFInfo
- Publication number
- WO2003034452A1 WO2003034452A1 PCT/JP2002/010485 JP0210485W WO03034452A1 WO 2003034452 A1 WO2003034452 A1 WO 2003034452A1 JP 0210485 W JP0210485 W JP 0210485W WO 03034452 A1 WO03034452 A1 WO 03034452A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- variable capacitance
- capacitor device
- capacitance capacitor
- capacitor electrodes
- conductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
- H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/450,867 US6885537B2 (en) | 2001-10-18 | 2002-10-09 | Capacitor apparatus of the capacity variable type |
KR10-2003-7008067A KR20040049295A (ko) | 2001-10-18 | 2002-10-09 | 용량 가변형 캐패시터 장치 |
US11/104,908 US7002787B2 (en) | 2001-10-18 | 2005-04-13 | Capacitor apparatus of the capacity variable type |
US11/107,002 US6970340B2 (en) | 2001-10-18 | 2005-04-14 | Capacitor apparatus of the capacity variable type |
US11/112,686 US6961228B2 (en) | 2001-10-18 | 2005-04-23 | Capacitor apparatus of the capacity variable type |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001321026A JP3890952B2 (ja) | 2001-10-18 | 2001-10-18 | 容量可変型キャパシタ装置 |
JP2001-321026 | 2001-10-18 |
Related Child Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10450867 A-371-Of-International | 2002-10-09 | ||
US11/104,908 Continuation US7002787B2 (en) | 2001-10-18 | 2005-04-13 | Capacitor apparatus of the capacity variable type |
US11/107,002 Continuation US6970340B2 (en) | 2001-10-18 | 2005-04-14 | Capacitor apparatus of the capacity variable type |
US11/112,686 Continuation US6961228B2 (en) | 2001-10-18 | 2005-04-23 | Capacitor apparatus of the capacity variable type |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003034452A1 true WO2003034452A1 (fr) | 2003-04-24 |
Family
ID=19138320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/010485 WO2003034452A1 (fr) | 2001-10-18 | 2002-10-09 | Condensateur a capacitance variable |
Country Status (5)
Country | Link |
---|---|
US (4) | US6885537B2 (ja) |
JP (1) | JP3890952B2 (ja) |
KR (1) | KR20040049295A (ja) |
CN (1) | CN1316525C (ja) |
WO (1) | WO2003034452A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100540820B1 (ko) * | 2004-01-12 | 2006-01-11 | 엘지이노텍 주식회사 | 인버터의 커패시턴스 가변 방법 |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100549003B1 (ko) * | 2004-02-04 | 2006-02-02 | 삼성전자주식회사 | 넓은 튜닝 범위를 갖는 멤스 튜너블 커패시터 및 그것을제조하는 방법 |
EP1585219A1 (en) | 2004-04-06 | 2005-10-12 | Seiko Epson Corporation | A micro-flap type nano/micro mechanical device and fabrication method thereof |
WO2005117042A1 (ja) * | 2004-05-31 | 2005-12-08 | Fujitsu Limited | 可変キャパシタ及びその製造方法 |
US7657242B2 (en) * | 2004-09-27 | 2010-02-02 | Qualcomm Mems Technologies, Inc. | Selectable capacitance circuit |
US7653371B2 (en) * | 2004-09-27 | 2010-01-26 | Qualcomm Mems Technologies, Inc. | Selectable capacitance circuit |
US7345867B2 (en) * | 2005-11-18 | 2008-03-18 | Alps Electric Co., Ltd | Capacitive pressure sensor and method of manufacturing the same |
JP5399075B2 (ja) * | 2005-12-22 | 2014-01-29 | エプコス アクチエンゲゼルシャフト | 直列接続されたキャパシタを有するmemsデバイス装置 |
WO2007096940A1 (ja) | 2006-02-20 | 2007-08-30 | Fujitsu Limited | 半導体回路 |
EP1999772B1 (en) * | 2006-03-08 | 2020-05-06 | Wispry, Inc. | Micro-electro-mechanical system mems variable capacitor |
US7454967B2 (en) * | 2006-07-10 | 2008-11-25 | Lv Sensors, Inc. | Signal conditioning methods and circuits for a capacitive sensing integrated tire pressure sensor |
JP5232378B2 (ja) | 2006-10-31 | 2013-07-10 | 株式会社アドバンテスト | 可変容量素子、共振器および変調器 |
JP4910679B2 (ja) * | 2006-12-21 | 2012-04-04 | 株式会社ニコン | 可変キャパシタ、可変キャパシタ装置、高周波回路用フィルタ及び高周波回路 |
KR100947942B1 (ko) * | 2007-12-10 | 2010-03-15 | 주식회사 동부하이텍 | 반도체 소자의 캐패시터, 그 형성 방법 |
US8362853B2 (en) * | 2009-06-19 | 2013-01-29 | Qualcomm Incorporated | Tunable MEMS resonators |
JP2011018831A (ja) * | 2009-07-10 | 2011-01-27 | Toshiba Corp | 可変容量素子 |
JP2011044556A (ja) * | 2009-08-20 | 2011-03-03 | Toshiba Corp | プログラマブルアクチュエータ及びそのプログラミング方法 |
JP5204066B2 (ja) * | 2009-09-16 | 2013-06-05 | 株式会社東芝 | Memsデバイス |
JP5338615B2 (ja) * | 2009-10-27 | 2013-11-13 | 富士通株式会社 | 可変容量デバイスおよび可変容量素子の駆動方法 |
WO2011058826A1 (ja) * | 2009-11-11 | 2011-05-19 | 株式会社村田製作所 | 可変容量装置 |
CN102725808B (zh) * | 2010-01-28 | 2016-01-20 | 株式会社村田制作所 | 可变电容装置 |
WO2011096460A1 (ja) * | 2010-02-08 | 2011-08-11 | 株式会社村田製作所 | 可変容量素子 |
JP5418316B2 (ja) | 2010-03-11 | 2014-02-19 | 富士通株式会社 | Memsデバイス |
JP5569689B2 (ja) * | 2010-10-15 | 2014-08-13 | ソニー株式会社 | 可変容量装置、アンテナモジュールおよび通信装置 |
WO2012056889A1 (ja) * | 2010-10-29 | 2012-05-03 | 株式会社村田製作所 | 可変容量装置 |
KR101262606B1 (ko) * | 2011-11-24 | 2013-05-08 | 엘지이노텍 주식회사 | 커패시터 및 이의 제조방법 |
JP2013211650A (ja) * | 2012-03-30 | 2013-10-10 | Seiko Epson Corp | Mems振動子およびmems振動子の製造方法 |
KR101359578B1 (ko) * | 2012-06-27 | 2014-02-12 | 한국과학기술원 | 멤즈 가변 커패시터 |
KR101393787B1 (ko) * | 2012-06-29 | 2014-05-12 | 엘지이노텍 주식회사 | 커패시터 및 이의 제조방법 |
JP6183957B2 (ja) * | 2014-05-15 | 2017-08-23 | 日本電信電話株式会社 | 光変調装置 |
JP6515677B2 (ja) * | 2014-07-24 | 2019-05-22 | ソニー株式会社 | コンタクト構造体、及び該コンタクト構造体を用いた生体試料用電気的測定装置 |
JP2016059191A (ja) * | 2014-09-11 | 2016-04-21 | ソニー株式会社 | 静電型デバイス |
CN105712290B (zh) * | 2014-12-04 | 2017-09-29 | 无锡华润上华半导体有限公司 | Mems静电驱动器的制作方法 |
CN109081302B (zh) * | 2018-07-13 | 2020-10-16 | 潍坊歌尔微电子有限公司 | 一种微通道加工方法、微通道 |
CN111750905B (zh) * | 2019-03-29 | 2023-05-09 | 财团法人工业技术研究院 | 可调整感应电容值的微机电感测装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0982569A (ja) * | 1995-09-20 | 1997-03-28 | Murata Mfg Co Ltd | 可変容量コンデンサ |
JPH09153436A (ja) * | 1995-11-30 | 1997-06-10 | Murata Mfg Co Ltd | 可変容量コンデンサ |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5557495A (en) * | 1994-09-29 | 1996-09-17 | Harris Corporation | Variable capacitor and method |
US5982608A (en) * | 1998-01-13 | 1999-11-09 | Stmicroelectronics, Inc. | Semiconductor variable capacitor |
US6242989B1 (en) * | 1998-09-12 | 2001-06-05 | Agere Systems Guardian Corp. | Article comprising a multi-port variable capacitor |
US6396677B1 (en) * | 2000-05-17 | 2002-05-28 | Xerox Corporation | Photolithographically-patterned variable capacitor structures and method of making |
US6377438B1 (en) * | 2000-10-23 | 2002-04-23 | Mcnc | Hybrid microelectromechanical system tunable capacitor and associated fabrication methods |
US6856499B2 (en) * | 2003-03-28 | 2005-02-15 | Northrop Gurmman Corporation | MEMS variable inductor and capacitor |
-
2001
- 2001-10-18 JP JP2001321026A patent/JP3890952B2/ja not_active Expired - Fee Related
-
2002
- 2002-10-09 US US10/450,867 patent/US6885537B2/en not_active Expired - Fee Related
- 2002-10-09 KR KR10-2003-7008067A patent/KR20040049295A/ko active IP Right Grant
- 2002-10-09 CN CNB028031881A patent/CN1316525C/zh not_active Expired - Fee Related
- 2002-10-09 WO PCT/JP2002/010485 patent/WO2003034452A1/ja active Application Filing
-
2005
- 2005-04-13 US US11/104,908 patent/US7002787B2/en not_active Expired - Fee Related
- 2005-04-14 US US11/107,002 patent/US6970340B2/en not_active Expired - Fee Related
- 2005-04-23 US US11/112,686 patent/US6961228B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0982569A (ja) * | 1995-09-20 | 1997-03-28 | Murata Mfg Co Ltd | 可変容量コンデンサ |
JPH09153436A (ja) * | 1995-11-30 | 1997-06-10 | Murata Mfg Co Ltd | 可変容量コンデンサ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100540820B1 (ko) * | 2004-01-12 | 2006-01-11 | 엘지이노텍 주식회사 | 인버터의 커패시턴스 가변 방법 |
Also Published As
Publication number | Publication date |
---|---|
US20050190526A1 (en) | 2005-09-01 |
US20050180089A1 (en) | 2005-08-18 |
US6970340B2 (en) | 2005-11-29 |
US6961228B2 (en) | 2005-11-01 |
KR20040049295A (ko) | 2004-06-11 |
US20050254195A1 (en) | 2005-11-17 |
JP3890952B2 (ja) | 2007-03-07 |
US20040075158A1 (en) | 2004-04-22 |
CN1476619A (zh) | 2004-02-18 |
JP2003124063A (ja) | 2003-04-25 |
CN1316525C (zh) | 2007-05-16 |
US6885537B2 (en) | 2005-04-26 |
US7002787B2 (en) | 2006-02-21 |
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