WO2003036238A3 - Position encoder with scale calibration - Google Patents

Position encoder with scale calibration Download PDF

Info

Publication number
WO2003036238A3
WO2003036238A3 PCT/US2002/028691 US0228691W WO03036238A3 WO 2003036238 A3 WO2003036238 A3 WO 2003036238A3 US 0228691 W US0228691 W US 0228691W WO 03036238 A3 WO03036238 A3 WO 03036238A3
Authority
WO
WIPO (PCT)
Prior art keywords
scale
correction
coefficients
position encoder
scale calibration
Prior art date
Application number
PCT/US2002/028691
Other languages
French (fr)
Other versions
WO2003036238A2 (en
Inventor
Donald L Grimes
Stuart E Schechter
Donald K Mitchell
Original Assignee
Microe Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microe Systems Corp filed Critical Microe Systems Corp
Publication of WO2003036238A2 publication Critical patent/WO2003036238A2/en
Publication of WO2003036238A3 publication Critical patent/WO2003036238A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)

Abstract

There is provided a measurement system in which the calibration data (170a, 170b, 177) is easily incorporated into or obtained by the position sensing and/or displacement sensing system's processing unit (300). A scale-based encoder (10) has a signal processor that corrects for scale inaccuracy based on a limited set of correction coefficients. The correction coefficients are the slopes and offsets that define a piecewise linear correction curve corresponding to the errors inherent in the scale. Several ways for communicating the coefficients to the processor are envisioned. Correction is applicable to linear or rotary encoder.
PCT/US2002/028691 2001-09-19 2002-09-10 Position encoder with scale calibration WO2003036238A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/955,287 2001-09-19
US09/955,287 US6686585B2 (en) 2001-09-19 2001-09-19 Position encoder with scale calibration

Publications (2)

Publication Number Publication Date
WO2003036238A2 WO2003036238A2 (en) 2003-05-01
WO2003036238A3 true WO2003036238A3 (en) 2003-10-16

Family

ID=25496618

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/028691 WO2003036238A2 (en) 2001-09-19 2002-09-10 Position encoder with scale calibration

Country Status (2)

Country Link
US (1) US6686585B2 (en)
WO (1) WO2003036238A2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1761428A (en) * 2003-03-20 2006-04-19 松下电器产业株式会社 Ultrasonic probe and ultrasonographic device
US7126109B2 (en) * 2004-06-14 2006-10-24 Gsi Group Corporation Encoder scale error compensation employing comparison among multiple detectors
JP5021244B2 (en) * 2006-07-03 2012-09-05 株式会社ミツトヨ Displacement detection encoder
US7840372B2 (en) 2007-07-06 2010-11-23 The University Of British Columbia Self-calibration method and apparatus for on-axis rotary encoders
US7852969B2 (en) * 2007-07-30 2010-12-14 Mitutoyo Corporation System and method for dynamic calibration of a quadrature encoder
US8384570B2 (en) * 2009-05-27 2013-02-26 Active Precision, Inc. Encoder interpolator with enhanced precision
JP5866629B2 (en) * 2011-10-25 2016-02-17 株式会社ミツトヨ Displacement detector, scale calibration method, and scale calibration program
JP6381184B2 (en) * 2013-07-09 2018-08-29 キヤノン株式会社 Calibration method, measuring apparatus, exposure apparatus, and article manufacturing method
GB201312484D0 (en) * 2013-07-12 2013-08-28 Trw Ltd Rotary encoder
US20150323345A1 (en) * 2014-05-12 2015-11-12 Avago Technologies General Ip (Singapore) Pte. Ltd. Encoder System With Error Detection And Signal Conditioning Circuits
US10422666B2 (en) * 2016-12-23 2019-09-24 Mitutoyo Corporation Electronic position encoder and method for reducing short range errors
CN109307586B (en) * 2018-11-02 2020-02-18 长飞光纤光缆股份有限公司 Calibration method of optical fiber preform measuring device
TWI735337B (en) * 2020-09-11 2021-08-01 由田新技股份有限公司 Linear displacement calibration method and inspection apparatus using the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4507647A (en) * 1980-04-30 1985-03-26 Tokyo Kagaku Kikai K.K. Encoder
US4631520A (en) * 1984-06-08 1986-12-23 Dynamics Research Corporation Position encoder compensation system
US6242906B1 (en) * 1999-05-10 2001-06-05 Mitutoyo Corporation Systems and methods for calibrating an absolute position encoder

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4912468A (en) 1985-12-04 1990-03-27 Dynamics Research Corporation Non-linear error correction system
US6029363A (en) 1998-04-03 2000-02-29 Mitutoyo Corporation Self-calibrating position transducer system and method
US6304825B1 (en) * 1999-01-19 2001-10-16 Xerox Corporation Rotary encoder error compensation system and method for photoreceptor surface motion sensing and control
US6356219B1 (en) 2001-03-05 2002-03-12 Aerotech, Inc. Calibrated encoder multiplier

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4507647A (en) * 1980-04-30 1985-03-26 Tokyo Kagaku Kikai K.K. Encoder
US4631520A (en) * 1984-06-08 1986-12-23 Dynamics Research Corporation Position encoder compensation system
US6242906B1 (en) * 1999-05-10 2001-06-05 Mitutoyo Corporation Systems and methods for calibrating an absolute position encoder

Also Published As

Publication number Publication date
WO2003036238A2 (en) 2003-05-01
US20030052260A1 (en) 2003-03-20
US6686585B2 (en) 2004-02-03

Similar Documents

Publication Publication Date Title
WO2003036238A3 (en) Position encoder with scale calibration
EP1619476B1 (en) Encoder and signal adjustment method for the same
WO2001022873A8 (en) Sensor with digital signature of data relating to sensor
DE69107586D1 (en) Device for correcting drift errors of a yaw rate sensor.
WO2002027354A3 (en) Noncontacting position indicating system
US20020143279A1 (en) Angle sensor for orthopedic rehabilitation device
TW200630591A (en) Encoder signal processor and processing method
AU2001227690A1 (en) Abbe error correction system and method
EP1382951A3 (en) Torque-Testtool
AU2001280266A1 (en) Pointer tool
WO2006104745A3 (en) Touch location determination with error correction for sensor movement
EP2239566A3 (en) Calibration techniques for a continuous analyte sensor
WO2005011488A3 (en) Multipurpose sensor port
WO2004090507A3 (en) Apparatus and method for correcting errors generated by a laser with non-ideal tuning characteristics
EP1037020A3 (en) Optical motion detection
CA2395722A1 (en) Angle sensor for orthopedic rehabilitation device
EP1111345A3 (en) Position measuring device
EP1369565A3 (en) Electronic control throttle valve apparatus, non-contact rotation angle detecting apparatus and signal processing apparatus for Hall element
WO2008073721A3 (en) Sensor system and method
WO2000000787A3 (en) Method for calibrating an angle sensor and navigation system with an angle sensor
EP1398244A3 (en) Steering wheel angle sensor
WO2000029812A3 (en) Piezo-resistive position indicator
TW200732630A (en) Encoder signal processing device
WO2003100355A3 (en) Linear variable differential transformer with digital electronics
WO2002004895A3 (en) Optical position sensor and position determination method

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG UZ VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LU MC NL PT SE SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP