WO2003085674A3 - Synthetic-ferrimagnet sense-layer for high density mram applications - Google Patents

Synthetic-ferrimagnet sense-layer for high density mram applications Download PDF

Info

Publication number
WO2003085674A3
WO2003085674A3 PCT/US2003/007843 US0307843W WO03085674A3 WO 2003085674 A3 WO2003085674 A3 WO 2003085674A3 US 0307843 W US0307843 W US 0307843W WO 03085674 A3 WO03085674 A3 WO 03085674A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
synthetic
high density
mram applications
ferrimagnet
Prior art date
Application number
PCT/US2003/007843
Other languages
French (fr)
Other versions
WO2003085674A2 (en
Inventor
James G Deak
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Priority to EP03746039A priority Critical patent/EP1490877B1/en
Priority to DE60325948T priority patent/DE60325948D1/en
Priority to KR1020047015785A priority patent/KR100624762B1/en
Priority to JP2003582772A priority patent/JP2005522044A/en
Priority to AU2003225795A priority patent/AU2003225795A1/en
Publication of WO2003085674A2 publication Critical patent/WO2003085674A2/en
Publication of WO2003085674A3 publication Critical patent/WO2003085674A3/en

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/14Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
    • G11C11/15Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1659Cell access
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1673Reading or sensing circuits or methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/3218Exchange coupling of magnetic films via an antiferromagnetic interface

Abstract

An magnetic memory element is provided in which a magnetic sense layer is formed of two ferromagnetic material layers separated by a spacer layer. The two ferromagnetic layers are formed as a synthetic ferrimagnet with stray field coupling and antiferromagnetic exchange coupling across the spacer layer.
PCT/US2003/007843 2002-04-03 2003-03-14 Synthetic-ferrimagnet sense-layer for high density mram applications WO2003085674A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP03746039A EP1490877B1 (en) 2002-04-03 2003-03-14 Synthetic-ferrimagnet sense-layer for high density mram applications
DE60325948T DE60325948D1 (en) 2002-04-03 2003-03-14 SYNTHETIC FERRIMAGNET LIGHTING LAYER FOR HIGH DENSITY MRAM USES
KR1020047015785A KR100624762B1 (en) 2002-04-03 2003-03-14 Synthetic-ferrimagnet sense-layer for high density mram applications
JP2003582772A JP2005522044A (en) 2002-04-03 2003-03-14 Synthetic ferrimagnetic sense layer for high density MRAM applications
AU2003225795A AU2003225795A1 (en) 2002-04-03 2003-03-14 Synthetic-ferrimagnet sense-layer for high density mram applications

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/114,249 US6728132B2 (en) 2002-04-03 2002-04-03 Synthetic-ferrimagnet sense-layer for high density MRAM applications
US10/114,249 2002-04-03

Publications (2)

Publication Number Publication Date
WO2003085674A2 WO2003085674A2 (en) 2003-10-16
WO2003085674A3 true WO2003085674A3 (en) 2004-02-12

Family

ID=28673684

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/007843 WO2003085674A2 (en) 2002-04-03 2003-03-14 Synthetic-ferrimagnet sense-layer for high density mram applications

Country Status (10)

Country Link
US (2) US6728132B2 (en)
EP (2) EP1490877B1 (en)
JP (1) JP2005522044A (en)
KR (1) KR100624762B1 (en)
CN (1) CN100576344C (en)
AT (1) ATE421756T1 (en)
AU (1) AU2003225795A1 (en)
DE (1) DE60325948D1 (en)
TW (1) TWI287871B (en)
WO (1) WO2003085674A2 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10214159B4 (en) * 2002-03-28 2008-03-20 Qimonda Ag Method for producing a reference layer for MRAM memory cells
US7054118B2 (en) * 2002-03-28 2006-05-30 Nve Corporation Superparamagnetic field sensing devices
US6724652B2 (en) * 2002-05-02 2004-04-20 Micron Technology, Inc. Low remanence flux concentrator for MRAM devices
US6885576B2 (en) * 2002-08-13 2005-04-26 Micron Technology, Inc. Closed flux magnetic memory
JP2004111437A (en) * 2002-09-13 2004-04-08 Toshiba Corp Magnetic storage device
JP2004179483A (en) * 2002-11-28 2004-06-24 Hitachi Ltd Nonvolatile magnetic memory
US7002228B2 (en) 2003-02-18 2006-02-21 Micron Technology, Inc. Diffusion barrier for improving the thermal stability of MRAM devices
US7020009B2 (en) * 2003-05-14 2006-03-28 Macronix International Co., Ltd. Bistable magnetic device using soft magnetic intermediary material
US6865105B1 (en) * 2003-09-22 2005-03-08 Hewlett-Packard Development Company, L.P. Thermal-assisted switching array configuration for MRAM
US7310265B2 (en) 2003-10-14 2007-12-18 Agency For Science, Technology And Research Magnetic memory device
US7045838B2 (en) * 2003-10-31 2006-05-16 International Business Machines Corporation Techniques for coupling in semiconductor devices and magnetic device using these techniques
US7053430B2 (en) * 2003-11-12 2006-05-30 Honeywell International Inc. Antiferromagnetic stabilized storage layers in GMRAM storage devices
US7602000B2 (en) * 2003-11-19 2009-10-13 International Business Machines Corporation Spin-current switched magnetic memory element suitable for circuit integration and method of fabricating the memory element
US7072209B2 (en) * 2003-12-29 2006-07-04 Micron Technology, Inc. Magnetic memory having synthetic antiferromagnetic pinned layer
US7105372B2 (en) * 2004-01-20 2006-09-12 Headway Technologies, Inc. Magnetic tunneling junction film structure with process determined in-plane magnetic anisotropy
US7183893B2 (en) * 2004-02-04 2007-02-27 Seagate Technology Llc TMR sensor with oxidized alloy barrier layer and method for forming the same
TWI283477B (en) * 2004-11-16 2007-07-01 Ind Tech Res Inst Magnetic random access memory with lower switching field
TWI278989B (en) * 2004-12-29 2007-04-11 Ind Tech Res Inst Magnetic random access memory with lower switching field through indirect exchange coupling
TWI277761B (en) * 2006-03-20 2007-04-01 Univ Nat Yunlin Sci & Tech Method for measuring hysteresis curve and anisotropic energy of magnetic memory units
US8300456B2 (en) * 2006-12-06 2012-10-30 Nec Corporation Magnetic random access memory and method of manufacturing the same
US7486551B1 (en) * 2007-04-03 2009-02-03 Grandis, Inc. Method and system for providing domain wall assisted switching of magnetic elements and magnetic memories using such magnetic elements
CN102270736B (en) * 2010-06-01 2014-02-05 中国科学院物理研究所 Magnetic nano-multilayer film used for magnetic sensor and manufacturing method for magnetic nano-multilayer film
JP5786341B2 (en) * 2010-09-06 2015-09-30 ソニー株式会社 Memory element and memory device
JP2012209358A (en) * 2011-03-29 2012-10-25 Renesas Electronics Corp Magnetic storage element and magnetic storage device
EP2775480B1 (en) * 2013-03-07 2018-11-14 Crocus Technology S.A. Self-referenced TAS-MRAM cell that can be read with reduced power consumption
EP3104187A1 (en) * 2015-06-09 2016-12-14 International Iberian Nanotechnology Laboratory Magnetoresistive sensor
KR102433703B1 (en) * 2015-11-30 2022-08-19 에스케이하이닉스 주식회사 Electronic device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1182713A2 (en) * 2000-08-21 2002-02-27 Matsushita Electric Industrial Co., Ltd. Magneto-resistive element

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173873A (en) 1990-06-28 1992-12-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High speed magneto-resistive random access memory
US5650958A (en) 1996-03-18 1997-07-22 International Business Machines Corporation Magnetic tunnel junctions with controlled magnetic response
US5764567A (en) * 1996-11-27 1998-06-09 International Business Machines Corporation Magnetic tunnel junction device with nonferromagnetic interface layer for improved magnetic field response
US5768181A (en) 1997-04-07 1998-06-16 Motorola, Inc. Magnetic device having multi-layer with insulating and conductive layers
DE69835475D1 (en) * 1997-04-28 2006-09-21 Canon Kk Magnetic thin film memory element using the GMR effect and magnetic thin film memory
US5966012A (en) 1997-10-07 1999-10-12 International Business Machines Corporation Magnetic tunnel junction device with improved fixed and free ferromagnetic layers
US5982658A (en) 1997-10-31 1999-11-09 Honeywell Inc. MRAM design to reduce dissimilar nearest neighbor effects
US6252796B1 (en) * 1998-08-14 2001-06-26 U.S. Philips Corporation Device comprising a first and a second ferromagnetic layer separated by a non-magnetic spacer layer
US6219212B1 (en) 1998-09-08 2001-04-17 International Business Machines Corporation Magnetic tunnel junction head structure with insulating antiferromagnetic layer
US6365286B1 (en) * 1998-09-11 2002-04-02 Kabushiki Kaisha Toshiba Magnetic element, magnetic memory device, magnetoresistance effect head, and magnetic storage system
US6436526B1 (en) * 1999-06-17 2002-08-20 Matsushita Electric Industrial Co., Ltd. Magneto-resistance effect element, magneto-resistance effect memory cell, MRAM and method for performing information write to or read from the magneto-resistance effect memory cell
US6166948A (en) 1999-09-03 2000-12-26 International Business Machines Corporation Magnetic memory array with magnetic tunnel junction memory cells having flux-closed free layers
JP2001156357A (en) * 1999-09-16 2001-06-08 Toshiba Corp Magneto-resistance effect element and magnetic recording element
JP3891540B2 (en) * 1999-10-25 2007-03-14 キヤノン株式会社 Magnetoresistive memory, method for recording / reproducing information recorded in magnetoresistive memory, and MRAM
US6233172B1 (en) * 1999-12-17 2001-05-15 Motorola, Inc. Magnetic element with dual magnetic states and fabrication method thereof
JP2001196658A (en) * 2000-01-07 2001-07-19 Fujitsu Ltd Magnetic element and magnetic memory device
US6590806B1 (en) * 2000-03-09 2003-07-08 Hewlett-Packard Development Company, L.P. Multibit magnetic memory element
US6469926B1 (en) * 2000-03-22 2002-10-22 Motorola, Inc. Magnetic element with an improved magnetoresistance ratio and fabricating method thereof
EP1187103A3 (en) * 2000-08-04 2003-01-08 Matsushita Electric Industrial Co., Ltd. Magnetoresistance effect device, head, and memory element
US6404674B1 (en) * 2001-04-02 2002-06-11 Hewlett Packard Company Intellectual Property Administrator Cladded read-write conductor for a pinned-on-the-fly soft reference layer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1182713A2 (en) * 2000-08-21 2002-02-27 Matsushita Electric Industrial Co., Ltd. Magneto-resistive element

Also Published As

Publication number Publication date
TW200306004A (en) 2003-11-01
JP2005522044A (en) 2005-07-21
TWI287871B (en) 2007-10-01
ATE421756T1 (en) 2009-02-15
KR100624762B1 (en) 2006-09-19
CN1647208A (en) 2005-07-27
DE60325948D1 (en) 2009-03-12
EP2053613A1 (en) 2009-04-29
US20030189842A1 (en) 2003-10-09
EP1490877B1 (en) 2009-01-21
US6946302B2 (en) 2005-09-20
EP1490877A2 (en) 2004-12-29
KR20040101391A (en) 2004-12-02
CN100576344C (en) 2009-12-30
AU2003225795A8 (en) 2003-10-20
US20040152218A1 (en) 2004-08-05
US6728132B2 (en) 2004-04-27
AU2003225795A1 (en) 2003-10-20
WO2003085674A2 (en) 2003-10-16

Similar Documents

Publication Publication Date Title
WO2003085674A3 (en) Synthetic-ferrimagnet sense-layer for high density mram applications
WO2007035786A3 (en) Magnetic devices having stabilized free ferromagnetic layer or multilayered free ferromagnetic layer
WO2008050045A3 (en) Magnetic device with perpendicular magnetisation and comprising an interaction-compensating intermediate layer
WO2003034437A3 (en) Writing to a mram element comprising a synthetic antiferromagnetic layer
EP1061592A3 (en) Magneto-resistance effect element, and its use as memory element
WO2005067472A3 (en) Synthetic antiferromagnet structures for use in mtjs in mram technology
WO2009019949A1 (en) Magnetic random access memory and method for manufacturing the same
WO2008099626A1 (en) Magnetoresistance effect element and magnetic random access memory
WO2009054180A1 (en) Magnetoresistive effect element and magnetic random access memory
SG153012A1 (en) Magnetic element with thermally-assisted writing
TW200626922A (en) Magnetic sensor using giant magnetoresistive elements and method for manufacturing the same
MY122799A (en) Laminated magnetic recording media with antiferromagnetically coupled layers as the individual magnetic layers in the laminate
WO2009060749A1 (en) Magnetoresistive element and magnetic random access memory
WO2005020242A3 (en) Magnetic memory element utilizing spin transfer switching and storing multiple bits
TW200629272A (en) Magnetic memory and its manufacturing method
WO2005079528A3 (en) Spin transfer magnetic element having low saturation magnetization free layers
EP1494295A4 (en) Magnetoresistance effect element and magnetic memory device
WO2002073226A3 (en) Tunnel junction and charge perpendicular-to-plane magnetic recording sensors and method of manufacture
JP2011137811A5 (en)
WO2004063760A3 (en) Magnetostatically coupled magnetic elements utilizing spin transfer and an mram device using the magnetic element
WO2008105095A1 (en) Vertical magnetic recording medium and magnetic recorder
WO2004044595A3 (en) Magnetic field sensor with augmented magnetoresistive sensing layer
TW200608041A (en) Extraordinary magnetoresistive sensor with perpendicular magnetic biasing by an antiferromagnetic/ferromagnetic exchange-coupled structure
WO2009078202A1 (en) Magnetic memory element, method for driving the magnetic memory element, and nonvolatile storage device
DE60139682D1 (en) MAGNETIC MULTILAYER STRUCTURE WITH IMPROVED MAGNETIC FIELD AREA

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PH PL PT RO RU SC SD SE SG SK SL TJ TM TN TR TT TZ UA UG UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2003746039

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 20038075857

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 2003582772

Country of ref document: JP

Ref document number: 1020047015785

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 1020047015785

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 2003746039

Country of ref document: EP