WO2003088367A2 - Integrated active photonic device and photodetector - Google Patents

Integrated active photonic device and photodetector Download PDF

Info

Publication number
WO2003088367A2
WO2003088367A2 PCT/GB2003/001461 GB0301461W WO03088367A2 WO 2003088367 A2 WO2003088367 A2 WO 2003088367A2 GB 0301461 W GB0301461 W GB 0301461W WO 03088367 A2 WO03088367 A2 WO 03088367A2
Authority
WO
WIPO (PCT)
Prior art keywords
region
contact
bandgap
photodetector
substrate
Prior art date
Application number
PCT/GB2003/001461
Other languages
French (fr)
Other versions
WO2003088367A3 (en
WO2003088367A8 (en
Inventor
Stephen Najda
Original Assignee
Intense Photonics Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intense Photonics Limited filed Critical Intense Photonics Limited
Priority to JP2003585190A priority Critical patent/JP4564755B2/en
Priority to EP03718927A priority patent/EP1493191A2/en
Priority to US10/510,802 priority patent/US7251407B2/en
Priority to AU2003222962A priority patent/AU2003222962A1/en
Publication of WO2003088367A2 publication Critical patent/WO2003088367A2/en
Publication of WO2003088367A3 publication Critical patent/WO2003088367A3/en
Publication of WO2003088367A8 publication Critical patent/WO2003088367A8/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H01S5/0264Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
    • H01L31/125Composite devices with photosensitive elements and electroluminescent elements within one single body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/16Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
    • H01S5/162Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface with window regions made by diffusion or disordening of the active layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/16Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
    • H01S5/164Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface with window regions comprising semiconductor material with a wider bandgap than the active layer

Definitions

  • the present invention relates to monolithic integration of photonic devices, such as semiconductor lasers and optical amplifiers, with photodetectors.
  • Photonic devices such as semiconductor lasers, optical modulators and optical amplifiers are widely used in modern telecorrrmunication systems. It is desirable to monitor the optical output of such photonic devices on chip. This is especially desirable when multiple devices are integrated onto one chip, and more than one optical device has to be monitored.
  • the gain of a laser or amplifier can be affected by a number of factors, including: i) environmental effects, such as temperature, humidity, changes in wavelength and polarisation etc; ii) device degradation, due to crystalline defects, deterioration of contacts, etc; and iii) misalignment of optical coupling elements due to shock, strain, etc.
  • a photodetector can be positioned at the back facet of the laser.
  • the facets of a semiconductor laser are typically coated with a highly reflective (HR) coating, having a reflection coefficient, R, of up to ⁇ 95% on the back facet and an anti-reflection (AR) coating with R ⁇ 5% on the front facet.
  • HR highly reflective
  • AR anti-reflection
  • the photodetector can measure the light escaping from the back facet (R ⁇ 95%) and hence monitor the device.
  • US 5,134,671 describes a monolithic integrated optical amplifier and photodetector.
  • the optical amplifier and photodetector are integrated on the same substrate, the photodetector being optically coupled to the optical amplifier via a branching waveguide having low radiative loss and low back reflectivity. This is achieved with a difficult manufacturing process to form the Y-shaped waveguide with a branch of the waveguide having a gradual decrease in the effective refractive index such as to decrease the difference between the refractive indices at the optical interface of the truncated wedge tip to avoid optical coupling of the amplifier.
  • the disadvantage with the process described is that four growth steps are required to construct the device, including an overgrowth to deposit the passive waveguide region.
  • the different growth steps considerably increase the device fabrication difficulty, hence reduce yields and increase costs.
  • the present invention provides an active photonic device and photodetector integrated on a single substrate, the photodetector adapted for monitoring an output of the active device, comprising: a semiconductor substrate; an optically active region formed on the substrate including a first electrical contact thereon for initiating emission of photons and/or modulation of photons within the optically active region; an optical confinement structure generally defining a principal optical path through the device and through said optically active region; a photodetector structure formed on the substrate including a second electrical contact displaced from and substantially electrically insulated from the first contact, overlying a part of the principal optical path, for receiving carriers generated by said emitted photons.
  • the present invention provides an active photonic device and photodetector integrated on a single substrate, the photodetector adapted for monitoring an output of the active device, comprising: a semiconductor substrate; an optically active region formed on the substrate including a first electrical contact thereon; a non-branching optical confinement structure generally defining an optical path through the device and through said optically active region; a photodetector structure formed on the substrate including a second electrical contact displaced from and electrically insulated from the first contact for receiving carriers generated by photons in the optically active region.
  • the present invention provides an active photonic device and characterisation contact integrated on a single substrate, the characterisation contact for enabling detection of a degree of bandgap shift in the device, comprising: a semiconductor substrate; an optically active region formed on the substrate and comprising a semiconductor medium having a first bandgap, and including a first electrical contact thereon for initiating emission of photons and/or modulation of photons within the optically active region; a bandgap shifted region formed on the substrate and comprising a semiconductor medium having a second bandgap shifted from said first bandgap; a characterisation contact formed on the substrate, displaced from and substantially electrically insulated from the first electrical contact, at least a part of the characterisation contact overlying the bandgap shifted region.
  • the present invention provides a method of determining a degree of bandgap shift introduced between a first region of semiconductor medium and a second region of semiconductor medium, comprising the steps of: forming a photonic device on a substrate, including a first region in which the semiconductor medium has a first bandgap, and a second region in which the semiconductor medium has a second bandgap shifted from said first bandgap; depositing a first contact in said first region for operating said photonic device; depositing a second contact at least partially overlying said second region; and electrically biassing said second contact to generate an electroluminescence signal in the semiconductor medium indicative of the magnitude of at least said second bandgap.
  • the present invention provides a method of determining a degree of bandgap shift introduced between a first region of semiconductor medium and a second region of semiconductor medium, comprising the steps of: forming a photonic device on a substrate, including a first region in which the semiconductor medium has a first bandgap, and a second region in which the semiconductor medium has a second bandgap shifted from said first bandgap; depositing a first contact in said first region for operating said photonic device; depositing a second contact at least partially overlying said second region; and optically stimulating said second region to generate electroluminescence in the semiconductor medium; electrically biassing said second contact so as to draw a photodetection current indicative of the magnitude of at least said second bandgap.
  • active photonic device is intended to encompass all optically active semiconductor devices deploying electrical charge injection techniques to generate photons or to modulate photons in an optically active region of the semiconductor.
  • the invention is particularly suited for monolithic integration of multiple optical devices on a single chip for telecommunication applications.
  • the invention can be applied to the monitoring of any active photonic device as defined above, including lasers, amplifiers and light emitting diodes.
  • the devices may be formed in any suitable semiconducting medium, particularly III-V and II-VI material systems.
  • Figure 1 shows a schematic transverse cross section of a laser device having a photodetector contact positioned laterally adjacent to an optical confinement structure of the laser device
  • Figure 2a shows a schematic top view of the laser device of figure 1, in which the photodetector contact partially overlies a bandgap shifted region
  • Figure 2b shows a schematic top view of a laser device in which the photodetector contact is positioned within the optical confinement structure and partially overlying the bandgap shifted region
  • Figure 2c shows a schematic top view of the laser device similar to figure 2b, but with the photodetector contact positioned at the highly reflective coating end of the device;
  • Figure 2d shows a schematic top view of the laser device similar to figure 2a, but with the photodetector contact positioned at the highly reflective coating end of the device;
  • Figure 2e shows a schematic top view of the laser device similar to figure 2b, but with the photodetector contacts positioned entirely within the bandgap shifted regions
  • Figure 2f shows a schematic top view of the laser device similar to figure 2e, but with the photodetector contacts positioned entirely outside the bandgap shifted regions;
  • Figure 3 a shows a schematic diagram of the band gap at the facet end of the device of figure 1; and Figure 3b shows a schematic diagram of the band gap at the facet end of the device of figure 1, with the photodetector operating in forward bias mode.
  • the present invention provides for monolithic integration of an active photonic device such as a semiconductor laser or optical amplifier and a photodetector device.
  • the invention describes a simple monolithic solution to monitor, and hence enable control of, the output power of a semiconductor laser diode.
  • the invention is particularly advantageous for large scale integration of multiple lasers or optical amplifiers on chip.
  • a semiconductor laser 10 comprises an optically active region 11, including a waveguide portion 16 extending therethrough.
  • the optically active region 11 provides a semiconductor medium having a suitable band gap, in which carriers may be injected to create photons or modulate photon behaviour when operating in forward bias mode, using techniques well known in the art.
  • Optically passive regions 12, 15, having an increased band gap, are formed at each end of the waveguide portion 16, preferably using quantum well intermixing techniques, although any suitable method of locally increasing the bandgap is also acceptable.
  • the intermixed regions 12, 15 (or, more generally, the bandgap shifted regions) define non-absorbing mirrors (NAMs).
  • NAMs non-absorbing mirrors
  • the NAM 12 is provided with an anti-reflective (AR) coating 13
  • the NAM 15 is provided with a high reflectivity (HR) coating 14.
  • AR anti-reflective
  • HR high reflectivity
  • a typical semiconductor laser diode is fabricated by etching the waveguide portion 16, using conventional processing techniques, as a ridge 18.
  • the ridge is typically between 1 and 2 ⁇ m in height and width and of the order of 1000 ⁇ m in length.
  • the ridge contains the major part of the optical field distribution 1 and substantially confines the electrical injection current 2 and 3.
  • the principles of the invention can be applied in the context of any suitable optical confinement structure in a semiconductor medium, including buried heterostructures.
  • a p-type contact 21 is deposited on top of the ridge 18 to facilitate the current injection into the device 10.
  • An n-type contact 5 is provided on the bottom of the device on or in the substrate.
  • the body of the device is formed in conventional manner with an intrinsic optically active layer 7 generally confined by respective p- and n-type optically conducting layers 4 and 6.
  • the p-type optically conducting layer 4 is typically of the order of 200 nm thick. Current is injected across the contacts 21 and 5; electrons and holes recombine in the optically active layer 7 to create photons.
  • the ridge 18 constrains the optical mode of the device.
  • the geometry of the p-type contact 21 and ridge effectively determine the lateral extent of a principal optical pathway 23 that passes through the device 10 between the facets at coatings 13 and 14.
  • the expression principal optical pathway is used to indicate the pathway through the semiconductor medium in which the substantial part of the optical field distribution 1 passes, and will be determined by, though not necessarily coextensive with, the optical confinement structure. This is due to the fact that significant leakage of the optical field 1 occurs out of the ridge waveguide 18 as shown in figure 1.
  • the optical confinement structure, and thus the principal optical pathway 23 is substantially linear, as shown in the figures. Still more preferably, the optical confinement structure, and thus the principal optical pathway, is non-branching.
  • the optical confinement structure may provide for a single optical mode of operation.
  • a further p-type contact 22 is deposited laterally separated from the ridge contact, to provide a photodetector contact.
  • this further p-type contact 22 is deposited at the same time as the laser p-type ridge contact 21.
  • the photodetector comprises a photodiode, and this photodiode contact 22 is located sufficiently close to the ridge contact 21 that there is overlap with the optical field generated by the active region of the laser. However, the photodiode contact is located sufficiently far from the ridge contact to limit current spreading of the injection current 2 (see figure 1). Thus, the photodetector contact is positioned such that it at least partially overlies a small part of the principal optical pathway through the device, but is laterally separated from the optical confinement structure, eg. ridge 18.
  • the relative position of the contacts 21 and 22 is such as to ensure that the optically active device and the photodetector: (a) are sufficiently far apart that there is no serious electrical cross-talk between devices; (b) are sufficiently close together that there is enough light to generate a photocurrent and hence signal in the photodiode; and (c) do not seriously interfere to compromise the performance of the optically active device, for example by way of optical feedback into a laser.
  • the lateral separation distance of the contacts 21 and 22 is of the order of 10 ⁇ m.
  • the photodiode is preferably also positioned at least partly over the passive (bandgap shifted) region 12 and the active region 11, and close to the laser output facet 13 as best seen in figure 2a.
  • the photodiode contact 20 is shown in figure 2a at the optical output end of the laser (ie. adjacent to the AR coating 13 of the NAM 12), the photodetector 20 can also be located adjacent to the HR coating 14 of the NAM 15, as shown in figure 2d.
  • photodetector 30 With reference to figure 2b, an alternative configuration of photodetector 30 is shown.
  • the contact 31 for the photodiode 30 is located directly on top of the ridge 18 in longitudinal alignment with, but spaced from, the ridge contact 21.
  • the photodiode contact 31 is shown in figure 2b at the optical output end of the laser (ie. adjacent to the AR coating 13 of the NAM 12), the photodetector contact 35 can also be located adjacent to the HR coating 14 of the NAM 15, as shown in figure 2c.
  • the photodetector can be provided in similar manner in an optical amplifier in which both ends of the device 10 are provided with an AR coating.
  • the photodetector contact 22, 40 is shown laterally offset from the ridge 18. As best viewed in figure 1, the contact is positioned to overlap the 'tail' of the optical field distribution, but sufficiently far away from the current injection 2 into the active region to avoid significant interference therewith, as previously described.
  • the photo detectors 20, 30, 35, 40 are weakly coupled to the active regions 16 of the lasers such that a very small proportion of the optical radiation from the laser active region can be monitored without deleteriously affecting the performance of the laser.
  • the ridge contact 21 will supply an injection current in the region of several hundreds of microamps whereas the photodetector contact 22 will only need to draw a detection current in the region of picoamps to nanoamps, ie. a current approximately of the order of 10 4 - 10 8 times smaller.
  • the photodiode contact 20 is driven in reverse bias mode such that photons from the 'tail' of the optical field 1 can generate carriers in the band and hence create a photocurrent which can be measured.
  • the relative power that is 'tapped' out, which determines the responsivity of the detector, can easily be controlled by the distance between the photodiode and ridge.
  • the advantage of measuring the photocurrent by this method is that there is effectively no loss to 'tap-off optical power and there is no optical coupling mechanism between the laser 10 and the detector 20 that can create an additional cavity effect that could have a deleterious effect on the optical performance of the laser.
  • the reflectivity of this facet may be increased from the conventional figure of R ⁇ 95% to a maximum value of R > 99.9%. An increase in output power of the device of ⁇ 5% is therefore possible.
  • the photodiode contact 22, 40 has been placed off-set to the side of the ridge, towards the AR coating of the device, or towards the HR coating 14 of the device.
  • the photodetector contact 31, 35, 50, 51, 60, 61 is placed on the optical confinement structure (eg. ridge 18) but longitudinally separated from the ridge contact to a sufficient distance to ensure adequate electrical isolation therefrom.
  • the operation of the photodetector in reverse bias mode is similar to that previously described in connection with figures 2a and 2d, although the photodetector of course is positioned at or close to the peak of the optical field distribution 1 in the principal optical path.
  • the photodetector contact is positioned straddling the bandgap shifted region 12 and the non-shifted region 11. This enables the photodetector contact 22, 31, 35 to be used to inject carriers (using a forward bias mode of operation) into the bandgap shifted / non-shifted regions of the device to monitor the effectiveness of the intermixing process used to create the bandgap shift.
  • This EL signature can provide an in-situ characterisation technique to measure the size of the intermixed regions during the manufacturing process.
  • Figure 3a shows a schematic of the band-gap of the facet ends of the device of figures 2a to 2f.
  • the photodiode contact 22, 31, 36 or 40 is located overlapping the bandgap shifted (intermixed) region 12 or 15 and the non- shifted region 11 of the device 10 in a passive section of the device spaced apart from the active region contact 21.
  • Photons generated in the optically active region 11 of the device cause corresponding electron and hole currents 32, 33 that can be measured by the photodetector 20, 30.
  • the photodiode contact 22, 31 or 36 is shown driven in forward bias mode to create carrier current 37, 38 to generate electroluminescence in the bandgap shifted / non-shifted regions of the device.
  • an electrical current is injected to generate an electroluminescence signal.
  • an external optical source can be used to stimulate emission of photons of different wavelengths from the bandgap shifted / non-shifted regions.
  • the photodetector contact can then be operated in reverse bias mode, again to detect photocurrents corresponding to each of the bandgap shifted and non-shifted regions in order to determine a degree of quantum well intermixing during the fabrication process.
  • this optical stimulation and reverse bias photodetection mode of operation can be effected on an uncleaved wafer and therefore provide for characterisation of the QWI manufacturing process for each laser device fabricated on the wafer.
  • the photodetector contact 60, 61 has been placed wholly within the optically active region 11, on the ridge either at the AR coating end, or the HR coating end, or both.
  • the photodetector contact for use in the reverse bias photodiode mode, the photodetector contact must be positioned sufficiently far from the ridge contact to achieve adequate electrical isolation.
  • electrical isolation may be particularly effected by inclusion of an electrical isolation structure in the semiconductor medium between the two contacts 21 and 60 or 21 and 61.
  • adequate electrical isolation is assured by the bandgap shifted region in which the photodetector contact 50 or 51 resides.
  • the p-type metallisation of the ridge contact 18 and adjacent photodetector contact 22, 31, 36, 40, 50, 60 etc can be deposited simultaneously to improve the manufacturability of the device.
  • the exact configuration and location of the active photonic device with respect to the photodiode is dependent on the particular application. For example, a higher power laser diode would require a photodiode with the same level of detectivity as for a low power laser and thus can be positioned further away from the laser.
  • the responsivity of the detector can be of the order of O.lmA/mW or less.
  • the responsivity of the detector can be changed by varying the distance from the optical source. If the distance between the active photonic device and photodetector is short such that electrical cross-talk could occur, then electrical isolation can be obtained by using conventional isolation techniques, such as a shallow etch and/or ion implantation.
  • the diode contact is deposited adjacent to (and preferably at the same time as) the p-type ridge contact 18. Thus, there need be no additional processing steps than used in making a laser or amplifier.
  • the photodetector 20 can be fully integrated with multiple laser devices on the same chip.
  • the device can operate as a photodiode to monitor the optical power on the back facet and / or the front facet.
  • the device can monitor the effectiveness of the NAM by operating in reverse bias.
  • the EL emission measurement can determine the band-gap shift.
  • the back reflector can have a reflectivity value of up to 99.9%. Therefore the forward output power can be increased by approximately 5% over devices which position a photodetector behind the back facet. 9) The photodetector does not significantly influence the performance of the active photonic device.
  • the preferred implementation of the photodetector described above is in conjunction with an active device having an optical confinement structure for operating in a single optical mode of operation, the principles can also be applied to multimode devices, optical amplifiers and light emitting diodes.

Abstract

An active photonic semiconductor device, such as a laser, optical amplifier or LED, is monolithically integrated with a photodetector. The device includes an optically active region formed on a substrate including a first electrical contact for initiating emission of photons within the optically active region; an optical confinement structure generally defining a principal optical path through the device and through said optically active region; and a photodetector structure formed on the substrate including a second electrical contact displaced from and substantially electrically insulated from the first contact, overlying a part of the principal optical path, for receiving carriers generated by said emitted photons. The photodetector is preferably positioned to cover an intermixed / non-intermixed region close to a facet of the device and also close to the active region of the device. The photodetector is weakly coupled to the optical confinement structure such that a very small proportion of the optical radiation can be monitored without deleteriously affecting the performance of the device.

Description

INTEGRATED ACTIVE PHOTONIC DEVICE AND PHOTODETECTOR
The present invention relates to monolithic integration of photonic devices, such as semiconductor lasers and optical amplifiers, with photodetectors.
Photonic devices, such as semiconductor lasers, optical modulators and optical amplifiers are widely used in modern telecorrrmunication systems. It is desirable to monitor the optical output of such photonic devices on chip. This is especially desirable when multiple devices are integrated onto one chip, and more than one optical device has to be monitored.
However, it is problematic to control or monitor the output of an optical device output because the gain of a laser or amplifier can be affected by a number of factors, including: i) environmental effects, such as temperature, humidity, changes in wavelength and polarisation etc; ii) device degradation, due to crystalline defects, deterioration of contacts, etc; and iii) misalignment of optical coupling elements due to shock, strain, etc.
At present, bulk detectors and couplers are used to monitor and control a semiconductor laser or amplifier, but these prove to be expensive, lossy and impractical for large scale monolithic integration.
For a semiconductor laser, a photodetector can be positioned at the back facet of the laser. The facets of a semiconductor laser are typically coated with a highly reflective (HR) coating, having a reflection coefficient, R, of up to ~ 95% on the back facet and an anti-reflection (AR) coating with R ~ 5% on the front facet. The photodetector can measure the light escaping from the back facet (R ~ 95%) and hence monitor the device.
For a semiconductor optical amplifier, no facet is available for monitoring by a photodetector, since both the front and back facets are employed for ingress and egress of optical radiation. Therefore, one solution, as taught in US 5,134,671, is to employ an integrated branching waveguide, such as a Y- junction waveguide, to tap off a fraction of the output power to feed to a photodetector, to monitor the amplifier.
US 5,134,671 describes a monolithic integrated optical amplifier and photodetector. The optical amplifier and photodetector are integrated on the same substrate, the photodetector being optically coupled to the optical amplifier via a branching waveguide having low radiative loss and low back reflectivity. This is achieved with a difficult manufacturing process to form the Y-shaped waveguide with a branch of the waveguide having a gradual decrease in the effective refractive index such as to decrease the difference between the refractive indices at the optical interface of the truncated wedge tip to avoid optical coupling of the amplifier.
Due to fabrication / device limitations, practical Y-junction waveguides have truncated wedge tips. See, for example, Sasaki et. al. Electronic Letters, Vol. 17, No.3, ppl36-8 (1989). However, a blunted Y-junction tip, which inhibits a substantial amount of optical back-reflection to the optical amplifier, restricts the monolithic integration of a coupled optical amplifier and monitoring photodetector.
A 1.3 μm laser with an integrated power monitor using a directional coupling optical power tap is described in U. Koren et al, IEEE Photonics Tech. Letters, Vol. 8, No. 3, p364 (1996). This work describes a Y-junction optical tap using a passive dual waveguide directional coupler next to the back HR facet of the cavity.
The disadvantage with the process described is that four growth steps are required to construct the device, including an overgrowth to deposit the passive waveguide region. The different growth steps considerably increase the device fabrication difficulty, hence reduce yields and increase costs.
It is an object of the present invention to provide a photonic device such as a semiconductor laser or amplifier with an integrated photodetection device that is easy to manufacture. It is a further object of the present invention to provide such a device in which the interference with the optically active lasing or amplifying device by the photodetection device is reduced over prior art systems.
It is a further object of the present invention to provide a photodetection device integrated onto the same substrate as a photonic device and positioned in relation to a bandgap shifted portion of the device, that can be used to test the bandgap shift.
According to one aspect, the present invention provides an active photonic device and photodetector integrated on a single substrate, the photodetector adapted for monitoring an output of the active device, comprising: a semiconductor substrate; an optically active region formed on the substrate including a first electrical contact thereon for initiating emission of photons and/or modulation of photons within the optically active region; an optical confinement structure generally defining a principal optical path through the device and through said optically active region; a photodetector structure formed on the substrate including a second electrical contact displaced from and substantially electrically insulated from the first contact, overlying a part of the principal optical path, for receiving carriers generated by said emitted photons.
According to another aspect, the present invention provides an active photonic device and photodetector integrated on a single substrate, the photodetector adapted for monitoring an output of the active device, comprising: a semiconductor substrate; an optically active region formed on the substrate including a first electrical contact thereon; a non-branching optical confinement structure generally defining an optical path through the device and through said optically active region; a photodetector structure formed on the substrate including a second electrical contact displaced from and electrically insulated from the first contact for receiving carriers generated by photons in the optically active region.
According to a further aspect the present invention provides an active photonic device and characterisation contact integrated on a single substrate, the characterisation contact for enabling detection of a degree of bandgap shift in the device, comprising: a semiconductor substrate; an optically active region formed on the substrate and comprising a semiconductor medium having a first bandgap, and including a first electrical contact thereon for initiating emission of photons and/or modulation of photons within the optically active region; a bandgap shifted region formed on the substrate and comprising a semiconductor medium having a second bandgap shifted from said first bandgap; a characterisation contact formed on the substrate, displaced from and substantially electrically insulated from the first electrical contact, at least a part of the characterisation contact overlying the bandgap shifted region.
According to another aspect, the present invention provides a method of determining a degree of bandgap shift introduced between a first region of semiconductor medium and a second region of semiconductor medium, comprising the steps of: forming a photonic device on a substrate, including a first region in which the semiconductor medium has a first bandgap, and a second region in which the semiconductor medium has a second bandgap shifted from said first bandgap; depositing a first contact in said first region for operating said photonic device; depositing a second contact at least partially overlying said second region; and electrically biassing said second contact to generate an electroluminescence signal in the semiconductor medium indicative of the magnitude of at least said second bandgap.
According to another aspect, the present invention provides a method of determining a degree of bandgap shift introduced between a first region of semiconductor medium and a second region of semiconductor medium, comprising the steps of: forming a photonic device on a substrate, including a first region in which the semiconductor medium has a first bandgap, and a second region in which the semiconductor medium has a second bandgap shifted from said first bandgap; depositing a first contact in said first region for operating said photonic device; depositing a second contact at least partially overlying said second region; and optically stimulating said second region to generate electroluminescence in the semiconductor medium; electrically biassing said second contact so as to draw a photodetection current indicative of the magnitude of at least said second bandgap.
Throughout the present specification, the expression "active photonic device" is intended to encompass all optically active semiconductor devices deploying electrical charge injection techniques to generate photons or to modulate photons in an optically active region of the semiconductor. The invention is particularly suited for monolithic integration of multiple optical devices on a single chip for telecommunication applications. However, the invention can be applied to the monitoring of any active photonic device as defined above, including lasers, amplifiers and light emitting diodes.
The devices may be formed in any suitable semiconducting medium, particularly III-V and II-VI material systems.
Embodiments of the present invention will now be described by way of example and with reference to the accompanying drawings in which:
Figure 1 shows a schematic transverse cross section of a laser device having a photodetector contact positioned laterally adjacent to an optical confinement structure of the laser device; Figure 2a shows a schematic top view of the laser device of figure 1, in which the photodetector contact partially overlies a bandgap shifted region;
Figure 2b shows a schematic top view of a laser device in which the photodetector contact is positioned within the optical confinement structure and partially overlying the bandgap shifted region; Figure 2c shows a schematic top view of the laser device similar to figure 2b, but with the photodetector contact positioned at the highly reflective coating end of the device;
Figure 2d shows a schematic top view of the laser device similar to figure 2a, but with the photodetector contact positioned at the highly reflective coating end of the device;
Figure 2e shows a schematic top view of the laser device similar to figure 2b, but with the photodetector contacts positioned entirely within the bandgap shifted regions; Figure 2f shows a schematic top view of the laser device similar to figure 2e, but with the photodetector contacts positioned entirely outside the bandgap shifted regions;
Figure 3 a shows a schematic diagram of the band gap at the facet end of the device of figure 1; and Figure 3b shows a schematic diagram of the band gap at the facet end of the device of figure 1, with the photodetector operating in forward bias mode.
The present invention provides for monolithic integration of an active photonic device such as a semiconductor laser or optical amplifier and a photodetector device. The invention describes a simple monolithic solution to monitor, and hence enable control of, the output power of a semiconductor laser diode. The invention is particularly advantageous for large scale integration of multiple lasers or optical amplifiers on chip.
With particular reference to figures 1 and 2a, a semiconductor laser 10 comprises an optically active region 11, including a waveguide portion 16 extending therethrough. The optically active region 11 provides a semiconductor medium having a suitable band gap, in which carriers may be injected to create photons or modulate photon behaviour when operating in forward bias mode, using techniques well known in the art. Optically passive regions 12, 15, having an increased band gap, are formed at each end of the waveguide portion 16, preferably using quantum well intermixing techniques, although any suitable method of locally increasing the bandgap is also acceptable.
The intermixed regions 12, 15 (or, more generally, the bandgap shifted regions) define non-absorbing mirrors (NAMs). On an optical output end of the laser 10, the NAM 12 is provided with an anti-reflective (AR) coating 13, and at the other end of the laser, the NAM 15 is provided with a high reflectivity (HR) coating 14. The use of intermixed facet ends to obtain the NAMs avoids catastrophic optical damage (COD) to the facets, allowing high power and long lifetime laser diodes to be fabricated.
A typical semiconductor laser diode is fabricated by etching the waveguide portion 16, using conventional processing techniques, as a ridge 18. The ridge is typically between 1 and 2 μm in height and width and of the order of 1000 μm in length. The ridge contains the major part of the optical field distribution 1 and substantially confines the electrical injection current 2 and 3. However, it will be understood that the principles of the invention can be applied in the context of any suitable optical confinement structure in a semiconductor medium, including buried heterostructures.
A p-type contact 21 is deposited on top of the ridge 18 to facilitate the current injection into the device 10. An n-type contact 5 is provided on the bottom of the device on or in the substrate. The body of the device is formed in conventional manner with an intrinsic optically active layer 7 generally confined by respective p- and n-type optically conducting layers 4 and 6. The p-type optically conducting layer 4 is typically of the order of 200 nm thick. Current is injected across the contacts 21 and 5; electrons and holes recombine in the optically active layer 7 to create photons. The ridge 18 constrains the optical mode of the device. The geometry of the p-type contact 21 and ridge effectively determine the lateral extent of a principal optical pathway 23 that passes through the device 10 between the facets at coatings 13 and 14.
The expression principal optical pathway is used to indicate the pathway through the semiconductor medium in which the substantial part of the optical field distribution 1 passes, and will be determined by, though not necessarily coextensive with, the optical confinement structure. This is due to the fact that significant leakage of the optical field 1 occurs out of the ridge waveguide 18 as shown in figure 1.
Preferably, the optical confinement structure, and thus the principal optical pathway 23, is substantially linear, as shown in the figures. Still more preferably, the optical confinement structure, and thus the principal optical pathway, is non-branching. The optical confinement structure may provide for a single optical mode of operation.
A further p-type contact 22 is deposited laterally separated from the ridge contact, to provide a photodetector contact. Preferably, to simplify the manufacturing process, this further p-type contact 22 is deposited at the same time as the laser p-type ridge contact 21.
In a preferred embodiment, the photodetector comprises a photodiode, and this photodiode contact 22 is located sufficiently close to the ridge contact 21 that there is overlap with the optical field generated by the active region of the laser. However, the photodiode contact is located sufficiently far from the ridge contact to limit current spreading of the injection current 2 (see figure 1). Thus, the photodetector contact is positioned such that it at least partially overlies a small part of the principal optical pathway through the device, but is laterally separated from the optical confinement structure, eg. ridge 18.
The relative position of the contacts 21 and 22 is such as to ensure that the optically active device and the photodetector: (a) are sufficiently far apart that there is no serious electrical cross-talk between devices; (b) are sufficiently close together that there is enough light to generate a photocurrent and hence signal in the photodiode; and (c) do not seriously interfere to compromise the performance of the optically active device, for example by way of optical feedback into a laser. In the preferred configuration of figure 2a, the lateral separation distance of the contacts 21 and 22 is of the order of 10 μm.
The photodiode is preferably also positioned at least partly over the passive (bandgap shifted) region 12 and the active region 11, and close to the laser output facet 13 as best seen in figure 2a. Although the photodiode contact 20 is shown in figure 2a at the optical output end of the laser (ie. adjacent to the AR coating 13 of the NAM 12), the photodetector 20 can also be located adjacent to the HR coating 14 of the NAM 15, as shown in figure 2d.
With reference to figure 2b, an alternative configuration of photodetector 30 is shown. In this embodiment, the contact 31 for the photodiode 30 is located directly on top of the ridge 18 in longitudinal alignment with, but spaced from, the ridge contact 21. Although the photodiode contact 31 is shown in figure 2b at the optical output end of the laser (ie. adjacent to the AR coating 13 of the NAM 12), the photodetector contact 35 can also be located adjacent to the HR coating 14 of the NAM 15, as shown in figure 2c.
It will be understood that the photodetector can be provided in similar manner in an optical amplifier in which both ends of the device 10 are provided with an AR coating. In the embodiments of figures 2a and 2d, the photodetector contact 22, 40 is shown laterally offset from the ridge 18. As best viewed in figure 1, the contact is positioned to overlap the 'tail' of the optical field distribution, but sufficiently far away from the current injection 2 into the active region to avoid significant interference therewith, as previously described.
The photo detectors 20, 30, 35, 40 are weakly coupled to the active regions 16 of the lasers such that a very small proportion of the optical radiation from the laser active region can be monitored without deleteriously affecting the performance of the laser. In a typical example, the ridge contact 21 will supply an injection current in the region of several hundreds of microamps whereas the photodetector contact 22 will only need to draw a detection current in the region of picoamps to nanoamps, ie. a current approximately of the order of 104 - 108 times smaller.
In photodiode mode, the photodiode contact 20 is driven in reverse bias mode such that photons from the 'tail' of the optical field 1 can generate carriers in the band and hence create a photocurrent which can be measured. The relative power that is 'tapped' out, which determines the responsivity of the detector, can easily be controlled by the distance between the photodiode and ridge.
The advantage of measuring the photocurrent by this method is that there is effectively no loss to 'tap-off optical power and there is no optical coupling mechanism between the laser 10 and the detector 20 that can create an additional cavity effect that could have a deleterious effect on the optical performance of the laser.
Because it is no longer necessary to place a photodetection device behind the HR coated facet 14 of the device, the reflectivity of this facet may be increased from the conventional figure of R ~ 95% to a maximum value of R > 99.9%. An increase in output power of the device of ~ 5% is therefore possible.
In the embodiments of figures 2a and 2d, the photodiode contact 22, 40 has been placed off-set to the side of the ridge, towards the AR coating of the device, or towards the HR coating 14 of the device. In figures 2b, 2c, 2e and 2f, the photodetector contact 31, 35, 50, 51, 60, 61 is placed on the optical confinement structure (eg. ridge 18) but longitudinally separated from the ridge contact to a sufficient distance to ensure adequate electrical isolation therefrom. The operation of the photodetector in reverse bias mode is similar to that previously described in connection with figures 2a and 2d, although the photodetector of course is positioned at or close to the peak of the optical field distribution 1 in the principal optical path.
In the examples of figures 2a to 2d, the photodetector contact is positioned straddling the bandgap shifted region 12 and the non-shifted region 11. This enables the photodetector contact 22, 31, 35 to be used to inject carriers (using a forward bias mode of operation) into the bandgap shifted / non-shifted regions of the device to monitor the effectiveness of the intermixing process used to create the bandgap shift.
By driving the photodetector contact in forward bias mode, photons will be generated at first and second wavelengths corresponding respectively to the bandgap shifted and non-shifted regions 12 and 11. If the laser device 10 is not operational, it is then possible to use an external photodetection device to observe the electro-luminescence (EL) signal generated, which can be received via the facet at AR coating 13. The relative separation of the two wavelengths of the EL signal provides a measure of the degree of bandgap shifting between the two regions 11 and 12. In the case of contact 40 (figure 2d), an EL signal generated may be received via the facet at HR coating 14 if this allows sufficient optical transmission for detection purposes. Of course, in an optical amplifier, this facet would have an AR coating.
This EL signature can provide an in-situ characterisation technique to measure the size of the intermixed regions during the manufacturing process.
Figure 3a shows a schematic of the band-gap of the facet ends of the device of figures 2a to 2f. The photodiode contact 22, 31, 36 or 40 is located overlapping the bandgap shifted (intermixed) region 12 or 15 and the non- shifted region 11 of the device 10 in a passive section of the device spaced apart from the active region contact 21. Photons generated in the optically active region 11 of the device cause corresponding electron and hole currents 32, 33 that can be measured by the photodetector 20, 30.
Alternatively, in figure 3b, the photodiode contact 22, 31 or 36 is shown driven in forward bias mode to create carrier current 37, 38 to generate electroluminescence in the bandgap shifted / non-shifted regions of the device.
In the described forward bias mode of operation of the photodiode, an electrical current is injected to generate an electroluminescence signal. In a further mode of operation, an external optical source can be used to stimulate emission of photons of different wavelengths from the bandgap shifted / non-shifted regions. The photodetector contact can then be operated in reverse bias mode, again to detect photocurrents corresponding to each of the bandgap shifted and non-shifted regions in order to determine a degree of quantum well intermixing during the fabrication process.
In will be understood that this optical stimulation and reverse bias photodetection mode of operation can be effected on an uncleaved wafer and therefore provide for characterisation of the QWI manufacturing process for each laser device fabricated on the wafer.
With further reference to figure 2f, the photodetector contact 60, 61 has been placed wholly within the optically active region 11, on the ridge either at the AR coating end, or the HR coating end, or both. In this arrangement, for use in the reverse bias photodiode mode, the photodetector contact must be positioned sufficiently far from the ridge contact to achieve adequate electrical isolation. Those skilled in the field will appreciate that electrical isolation may be particularly effected by inclusion of an electrical isolation structure in the semiconductor medium between the two contacts 21 and 60 or 21 and 61. By contrast, in the embodiment of figure 2e, adequate electrical isolation is assured by the bandgap shifted region in which the photodetector contact 50 or 51 resides.
In all of the described embodiments, the p-type metallisation of the ridge contact 18 and adjacent photodetector contact 22, 31, 36, 40, 50, 60 etc can be deposited simultaneously to improve the manufacturability of the device.
It will be understood that the exact configuration and location of the active photonic device with respect to the photodiode is dependent on the particular application. For example, a higher power laser diode would require a photodiode with the same level of detectivity as for a low power laser and thus can be positioned further away from the laser. The responsivity of the detector can be of the order of O.lmA/mW or less. The responsivity of the detector can be changed by varying the distance from the optical source. If the distance between the active photonic device and photodetector is short such that electrical cross-talk could occur, then electrical isolation can be obtained by using conventional isolation techniques, such as a shallow etch and/or ion implantation. Aspects of the invention provide the following advantages over the prior art devices.
1) The diode contact is deposited adjacent to (and preferably at the same time as) the p-type ridge contact 18. Thus, there need be no additional processing steps than used in making a laser or amplifier.
2) The photodetector 20 can be fully integrated with multiple laser devices on the same chip.
3) There is no need to fabricate a complex Y-junction waveguide.
4) Since manufacture of the device is by 'on-chip' processing, the reliability of the device will be improved over those that require attachment of discrete diode components.
5) The packaging process is simplified, thereby reducing manufacturing cost.
6) The device can operate as a photodiode to monitor the optical power on the back facet and / or the front facet.
7) The device can monitor the effectiveness of the NAM by operating in reverse bias. The EL emission measurement can determine the band-gap shift.
8) The back reflector can have a reflectivity value of up to 99.9%. Therefore the forward output power can be increased by approximately 5% over devices which position a photodetector behind the back facet. 9) The photodetector does not significantly influence the performance of the active photonic device.
Although the preferred implementation of the photodetector described above is in conjunction with an active device having an optical confinement structure for operating in a single optical mode of operation, the principles can also be applied to multimode devices, optical amplifiers and light emitting diodes.
Other embodiments are intentionally within the scope of the accompanying claims.

Claims

1. An active photonic device and photodetector integrated on a single substrate, the photodetector adapted for monitoring an output of the active device, comprising: a semiconductor substrate; an optically active region formed on the substrate including a first electrical contact thereon for initiating emission of photons and/or modulation of photons within the optically active region; an optical confinement structure generally defining a principal optical path through the device and through said optically active region; a photodetector structure formed on the substrate including a second electrical contact displaced from and substantially electrically insulated from the first contact, overlying a part of the principal optical path, for receiving carriers generated by said emitted photons.
2. The device of claim 1 in which the optical confinement structure is linear.
3. The device of claim 1 in which the optical confinement structure is non- branching.
4. The device of claim 1 in which the optical confinement structure has a single optical mode.
5 The device of claim 1 in which the second electrical contact is positioned on the substrate laterally offset from the axis of the principal optical path.
6. The device of claim 1 in which the second electrical contact is positioned on the substrate directly over the axis of the principal optical path and longitudinally separated from the first contact.
7. The device of claim 1 further including at least one bandgap shifted region in the optical path, having a larger band gap than in the optically active region, in which the second contact is positioned at least partly over the bandgap shifted region.
8. The device of claim 7 having bandgap shifted regions at each end of the optical paths.
9. The device of any preceding claim in which the optical confinement structure includes a ridge waveguide.
10. The device of claim 7 or claim 8 in which the bandgap shifted region is formed using intermixing techniques.
11. The device of any preceding claim in which the active photonic device is a laser, the optical confinement structure including a mirror at one end thereof having a reflection coefficient of substantially higher than 95%.
12. The device of claim 11 in which the mirror has a reflection coefficient of greater than or equal to 99.9%.
13. The device of any preceding claim further including an electrical isolation structure positioned between the first and second contacts.
14. An active photonic device and photodetector integrated on a single substrate, the photodetector adapted for monitoring an output of the active device, comprising: a semiconductor substrate; an optically active region formed on the substrate including a first electrical contact thereon; a non-branching optical confinement structure generally defining an optical path through the device and through said optically active region; a photodetector structure formed on the substrate including a second electrical contact displaced from and electrically insulated from the first contact for receiving carriers generated by photons in the optically active region.
15. An active photonic device and characterisation contact integrated on a single substrate, the characterisation contact for enabling detection of a degree of bandgap shift in the device, comprising: a semiconductor substrate; an optically active region formed on the substrate and comprising a semiconductor medium having a first bandgap, and including a first electrical contact thereon for initiating emission of photons and/or modulation of photons within the optically active region; a bandgap shifted region formed on the substrate and comprising a semiconductor medium having a second bandgap shifted from said first bandgap; a characterisation contact formed on the substrate, displaced from and substantially electrically insulated from the first electrical contact, at least a part of the characterisation contact overlying the bandgap shifted region.
16. The active photonic device of claim 15 wherein the characterisation contact entirely overlies the bandgap shifted region.
17. The active photonic device of claim 15 or claim 16 in which the characterisation contact is laterally offset from the first contact.
18. The active photonic device of claim 15, claim 16 or claim 17 in which the characterisation contact is adjacent an output facet of the active photonic device.
19. A method of determining a degree of bandgap shift introduced between a first region of semiconductor medium and a second region of semiconductor medium, comprising the steps of: forming a photonic device on a substrate, including a first region in which the semiconductor medium has a first bandgap, and a second region in which the semiconductor medium has a second bandgap shifted from said first bandgap; depositing a first contact in said first region for operating said photonic device; depositing a second contact at least partially overlying said second region; and electrically biassing said second contact to generate an electroluminescence signal in the semiconductor medium indicative of the magnitude of at least said second bandgap.
20. The method of claim 19 wherein the second contact is deposited overlying portions of both said first region and said second region, and in which the electroluminescence signal generated is indicative of a difference in magnitude between the first and second bandgaps.
21. A method of determining a degree of bandgap shift introduced between a first region of semiconductor medium and a second region of semiconductor medium, comprising the steps of: forming a photonic device on a substrate, including a first region in which the semiconductor medium has a first bandgap, and a second region in which the semiconductor medium has a second bandgap shifted from said first bandgap; depositing a first contact in said first region for operating said photonic device; depositing a second contact at least partially overlying said second region; and optically stimulating said second region to generate electroluminescence in the semiconductor medium; electrically biassing said second contact so as to draw a photodetection current indicative of the magnitude of at least said second bandgap.
22. The method of claim 21 wherein the second contact is deposited overlying portions of both said first region and said second region, and in which the photodetection current generated is indicative of a difference in magnitude between the first and second bandgaps.
PCT/GB2003/001461 2002-04-10 2003-04-03 Integrated active photonic device and photodetector WO2003088367A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003585190A JP4564755B2 (en) 2002-04-10 2003-04-03 Integrated active optical device and photodetector
EP03718927A EP1493191A2 (en) 2002-04-10 2003-04-03 Integrated active photonic device and photodetector
US10/510,802 US7251407B2 (en) 2002-04-10 2003-04-03 Integrated active photonic device and photodetector
AU2003222962A AU2003222962A1 (en) 2002-04-10 2003-04-03 Integrated active photonic device and photodetector

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0208211A GB2387481B (en) 2002-04-10 2002-04-10 Integrated active photonic device and photodetector
GB0208211.3 2002-04-10

Publications (3)

Publication Number Publication Date
WO2003088367A2 true WO2003088367A2 (en) 2003-10-23
WO2003088367A3 WO2003088367A3 (en) 2004-05-27
WO2003088367A8 WO2003088367A8 (en) 2005-01-13

Family

ID=9934551

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2003/001461 WO2003088367A2 (en) 2002-04-10 2003-04-03 Integrated active photonic device and photodetector

Country Status (5)

Country Link
US (1) US7251407B2 (en)
EP (1) EP1493191A2 (en)
JP (1) JP4564755B2 (en)
GB (1) GB2387481B (en)
WO (1) WO2003088367A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100544141C (en) * 2005-03-17 2009-09-23 中国科学院半导体研究所 The high speed photoelectronic device encapsulation structure of applying microwave photonic crystal co-planar waveguide
WO2013026655A1 (en) * 2011-08-25 2013-02-28 Osram Opto Semiconductors Gmbh Radiation‑emitting semiconductor component

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2387481B (en) 2002-04-10 2005-08-31 Intense Photonics Ltd Integrated active photonic device and photodetector
JP4411540B2 (en) * 2005-09-15 2010-02-10 ソニー株式会社 Semiconductor laser device
JP4352337B2 (en) * 2005-09-16 2009-10-28 ソニー株式会社 Semiconductor laser and semiconductor laser device
US7343061B2 (en) * 2005-11-15 2008-03-11 The Trustees Of Princeton University Integrated photonic amplifier and detector
EP2064785B9 (en) * 2006-09-20 2017-11-08 The Provost, Fellows, Foundation Scholars, & the other members of Board, of the College of the Holy & Undiv. Trinity of Queen Elizabeth near Dublin Vernier tuned coupled cavity ld having a ridge with voids for longitudinal mode suppression
US7826693B2 (en) 2006-10-26 2010-11-02 The Trustees Of Princeton University Monolithically integrated reconfigurable optical add-drop multiplexer
DE102007026925A1 (en) * 2007-02-28 2008-09-04 Osram Opto Semiconductors Gmbh Integrated trapezoidal laser arrangement, particularly integrated optical arrangement, has injector area and optical area expanded in injector area, which is coupled in cross section
US8916873B2 (en) 2011-09-14 2014-12-23 Infineon Technologies Ag Photodetector with controllable spectral response
US8975715B2 (en) * 2011-09-14 2015-03-10 Infineon Technologies Ag Photodetector and method for manufacturing the same
DE102012103549B4 (en) * 2012-04-23 2020-06-18 Osram Opto Semiconductors Gmbh Semiconductor laser light source with an edge-emitting semiconductor body and light-scattering partial area
JP2014236161A (en) * 2013-06-04 2014-12-15 古河電気工業株式会社 Semiconductor optical element, method for manufacturing the same, and integrated semiconductor optical element
EP3573103B1 (en) * 2017-02-03 2021-01-06 Huawei Technologies Co., Ltd. Photoelectric conversion apparatus
US11075503B2 (en) * 2019-07-02 2021-07-27 Microsoft Technology Licensing, Llc Integrated inter-cavity photodetector for laser power and threshold estimation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5252513A (en) * 1990-03-28 1993-10-12 Xerox Corporation Method for forming a laser and light detector on a semiconductor substrate
WO2001088993A2 (en) * 2000-05-19 2001-11-22 Mcmaster University A METHOD FOR LOCALLY MODIFYING THE EFFECTIVE BANDGAP ENERGY IN INDIUM GALLIUM ARSENIDE PHOSPHIDE (InGaAsP) QUANTUM WELL STRUCTURES

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186986A (en) * 1982-04-27 1983-11-01 Kokusai Denshin Denwa Co Ltd <Kdd> Distributed feedback semiconductor laser with monitor
JPH06105820B2 (en) * 1985-12-25 1994-12-21 国際電信電話株式会社 Distributed feedback type semiconductor laser with monitor
JPS63222485A (en) * 1987-03-12 1988-09-16 Kokusai Denshin Denwa Co Ltd <Kdd> Distributed feedback type semiconductor laser with monitor
US5040033A (en) * 1989-06-26 1991-08-13 At&T Bell Laboratories Optical amplifier-photodetector assemblage
US5134671A (en) * 1990-08-03 1992-07-28 At&T Bell Laboratories Monolithic integrated optical amplifier and photodetector
US5287376A (en) * 1992-12-14 1994-02-15 Xerox Corporation Independently addressable semiconductor diode lasers with integral lowloss passive waveguides
US5491712A (en) * 1994-10-31 1996-02-13 Lin; Hong Integration of surface emitting laser and photodiode for monitoring power output of surface emitting laser
US6406196B1 (en) * 1995-08-03 2002-06-18 Matsushita Electric Industrial Co., Ltd. Optical device and method for producing the same
JP4902044B2 (en) * 1999-09-24 2012-03-21 シャープ株式会社 Semiconductor laser device, optical transmission device, optical transmission system, electronic device, control device, connection connector, communication device, optical transmission method, and data transmission / reception method
DE10023956A1 (en) 2000-05-16 2001-11-22 Bosch Gmbh Robert Power semiconductor component with reduced surface field (RESURF) region between HV and LV sides
JP2002026451A (en) * 2000-07-10 2002-01-25 Mitsubishi Chemicals Corp Semiconductor optical device
GB2371405B (en) * 2001-01-23 2003-10-15 Univ Glasgow Improvements in or relating to semiconductor lasers
US6628686B1 (en) * 2001-11-16 2003-09-30 Fox-Tek, Inc Integrated multi-wavelength and wideband lasers
GB2387481B (en) 2002-04-10 2005-08-31 Intense Photonics Ltd Integrated active photonic device and photodetector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5252513A (en) * 1990-03-28 1993-10-12 Xerox Corporation Method for forming a laser and light detector on a semiconductor substrate
WO2001088993A2 (en) * 2000-05-19 2001-11-22 Mcmaster University A METHOD FOR LOCALLY MODIFYING THE EFFECTIVE BANDGAP ENERGY IN INDIUM GALLIUM ARSENIDE PHOSPHIDE (InGaAsP) QUANTUM WELL STRUCTURES

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
HOFSTETTER D ET AL: "MONOLITHICALLY INTEGRATED DBR LASER, DETECTOR, AND TRANSPARENT WAVEGUIDE FABRICATED IN A SINGLE GROWTH STEP" 1 September 1995 (1995-09-01) , IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, VOL. 7, NR. 9, PAGE(S) 1022-1024 XP000527507 ISSN: 1041-1135 the whole document *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100544141C (en) * 2005-03-17 2009-09-23 中国科学院半导体研究所 The high speed photoelectronic device encapsulation structure of applying microwave photonic crystal co-planar waveguide
WO2013026655A1 (en) * 2011-08-25 2013-02-28 Osram Opto Semiconductors Gmbh Radiation‑emitting semiconductor component
US9151893B2 (en) 2011-08-25 2015-10-06 Osram Opto Semiconductors Gmbh Radiation-emitting semiconductor component with a waveguide meeting a mirror surface perpendicularly and meeting a coupling-out surface obliquely

Also Published As

Publication number Publication date
WO2003088367A3 (en) 2004-05-27
US20050230722A1 (en) 2005-10-20
GB2387481A (en) 2003-10-15
JP2005522885A (en) 2005-07-28
GB0208211D0 (en) 2002-05-22
JP4564755B2 (en) 2010-10-20
GB2387481B (en) 2005-08-31
WO2003088367A8 (en) 2005-01-13
EP1493191A2 (en) 2005-01-05
US7251407B2 (en) 2007-07-31

Similar Documents

Publication Publication Date Title
US7251407B2 (en) Integrated active photonic device and photodetector
US8994004B2 (en) Hybrid silicon optoelectronic device and method of formation
US7199441B2 (en) Optical module device driven by a single power supply
US6459709B1 (en) Wavelength-tunable semiconductor laser diode
JPH04254380A (en) Monolithic integrated photoamplifier and photodetector
JP2005522885A6 (en) Integrated active optical device and photodetector
US10348059B2 (en) Light emitting element array and optical transmission device
US6613596B2 (en) Monolithically integrated photonic circuit
CA2014937C (en) Laser-photodetector assemblage
US5724462A (en) Integrated optical semiconductor device and optical gyroscope usinng the same
CN111033918B (en) Semiconductor optical integrated element
US6081636A (en) Wavelength division multiplexing optical transmission device and wavelength division multiplexing optical transmission system
JP3421999B2 (en) Optical functional device, optical integrated device including the same, and manufacturing method thereof
CN113169516A (en) Optical amplifier with larger dynamic range
Moehrle et al. Ultra-low threshold 1490 nm surface-emitting BH-DFB laser diode with integrated monitor photodiode
US11367997B2 (en) Semiconductor integrated optics element and production method therefor
EP1130708A1 (en) Semiconductor electro-absorption optical modulator integrated light emitting element and module, and optical transmission system
Talneau et al. Agile and fast switching monolithically integrated four wavelength selectable source at 1.55 μm
US20220255290A1 (en) Semiconductor laser device
JP2018098419A (en) Semiconductor laser, light source unit, communication system, and wavelength multiplex optical communication system
Koren et al. A 1.3-μm wavelength laser with an integrated output power monitor using a directional coupler optical power tap
JP4967700B2 (en) Optical semiconductor element
Chandrasekhar et al. Integrated directional couplers with photodetectors by hydride vapour phase epitaxy
KR100319775B1 (en) Single frequency semiconductor laser diode integrated with two monitor photodiodes having different absorption layers
Olsen et al. 1.3 µm LPE-and VPE-grown InGaAsP edge-emitting LED́s

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PH PL PT RO RU SC SD SE SG SK SL TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2003718927

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2003585190

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 20038131897

Country of ref document: CN

WWP Wipo information: published in national office

Ref document number: 2003718927

Country of ref document: EP

CFP Corrected version of a pamphlet front page
CR1 Correction of entry in section i

Free format text: IN PCT GAZETTE 43/2003 UNDER (30) REPLACE "US" BY "GB"

WWE Wipo information: entry into national phase

Ref document number: 10510802

Country of ref document: US