WO2003088445A3 - Apparatus and method for arc detection - Google Patents

Apparatus and method for arc detection Download PDF

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Publication number
WO2003088445A3
WO2003088445A3 PCT/US2003/011301 US0311301W WO03088445A3 WO 2003088445 A3 WO2003088445 A3 WO 2003088445A3 US 0311301 W US0311301 W US 0311301W WO 03088445 A3 WO03088445 A3 WO 03088445A3
Authority
WO
WIPO (PCT)
Prior art keywords
power
supply circuit
power supply
arc detection
related parameter
Prior art date
Application number
PCT/US2003/011301
Other languages
French (fr)
Other versions
WO2003088445A2 (en
Inventor
Paul R Buda
Original Assignee
Schneider Automation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schneider Automation filed Critical Schneider Automation
Priority to MXPA04010005A priority Critical patent/MXPA04010005A/en
Priority to CA2476320A priority patent/CA2476320C/en
Publication of WO2003088445A2 publication Critical patent/WO2003088445A2/en
Publication of WO2003088445A3 publication Critical patent/WO2003088445A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Abstract

An apparatus and technique are provided for generating a plasma using a power supply circuit and arc detection arrangement. The power supply circuit has a cathode enclosed in a chamber, and is adapted to generate a power-related parameter. The arc detection arrangement is communicatively coupled to the power supply circuit and adapted to assess the severity of arcing in the chamber by comparing the power-related parameter to at least one threshold. According to various implementations, arc occurrences, arcing duration, intensity and/or energy are measured responsive to comparing the power-related parameter to the at least one threshold. According to further implementations, the above-mentioned measured quantities are accumulated and/or further processed.
PCT/US2003/011301 2002-04-12 2003-04-11 Apparatus and method for arc detection WO2003088445A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MXPA04010005A MXPA04010005A (en) 2002-04-12 2003-04-11 Apparatus and method for arc detection.
CA2476320A CA2476320C (en) 2002-04-12 2003-04-11 Apparatus and method for arc detection

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/121,445 US6736944B2 (en) 2002-04-12 2002-04-12 Apparatus and method for arc detection
US10/121,445 2002-04-12

Publications (2)

Publication Number Publication Date
WO2003088445A2 WO2003088445A2 (en) 2003-10-23
WO2003088445A3 true WO2003088445A3 (en) 2004-03-04

Family

ID=29248300

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/011301 WO2003088445A2 (en) 2002-04-12 2003-04-11 Apparatus and method for arc detection

Country Status (4)

Country Link
US (2) US6736944B2 (en)
CA (1) CA2476320C (en)
MX (1) MXPA04010005A (en)
WO (1) WO2003088445A2 (en)

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Also Published As

Publication number Publication date
US20030205460A1 (en) 2003-11-06
US20040182697A1 (en) 2004-09-23
MXPA04010005A (en) 2005-02-17
WO2003088445A2 (en) 2003-10-23
CA2476320A1 (en) 2003-10-23
US6736944B2 (en) 2004-05-18
CA2476320C (en) 2011-11-29

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