WO2003105208A1

WO2003105208A1 - Cleaning and drying device

Info

Publication number: WO2003105208A1
Application number: PCT/JP2003/007314
Authority: WO
Inventors: 野辺　進太郎; 今川　進
Original assignee: 株式会社ダン・タクマ; 株式会社稲本製作所
Priority date: 2002-06-11
Filing date: 2003-06-10
Publication date: 2003-12-18
Also published as: JP2004066212A

Abstract

A cleaning and drying device for cleaning and drying in a short time a cassette for receiving a semiconductor wafer or a resin-made container that receives electronic parts and precision machine parts when they are transported and stored. The device is compact and has considerably smaller installation area than conventionally required. A rotation drum (1) is installed in a cleaning vessel, and one or more detachable baskets (2) that receive part-receiving containers (7), etc. are installed in the rotation drum (1) or the part-receiving containers (7), etc. are directly received in the rotation drum (1). Cleaning is performed as the rotation drum (1) is rotated, after that water-removing and drying are carried out by rotating the rotation drum (1) at a high speed, and then drying with hot air is performed.

Description

,

TECHNICAL FIELD The present invention relates to a cleaning / drying apparatus for cleaning a storage tray for storing semiconductors and mechanical parts such as electric components with a cleaning liquid, and drying by taking in drying air.

Akita

2. Description of the Related Art A shelf for storing electronic parts and precision machine parts for storing and transporting these parts and the like A tray for manufacturing a semiconductor device and a cassette for storing semiconductor wafers (hereinafter referred to as a “storage container, etc.”) adhere to particles. If they are contaminated by water, they are washed, dried and reused.

Conventionally, as shown in Fig. 8, storage containers and the like are placed on a belt conveyor 101 as shown in Fig. 8, and pure water is sprayed in several stages from a jet nozzle, that is, regeneration. Perform spray cleaning 102 consisting of primary cleaning with pure water and secondary cleaning (finish cleaning) with ultrapure water. Next, a series of water drainage drying 103, in which compressed air is generated from a blower and sprayed into a storage container or the like with an air nozzle, followed by hot air drying 104 to 104 ° C to 65 ° C After the above steps, washing and drying are performed. In addition, instead of spray cleaning 102, as shown in FIG.

(1) 105, washing, washing tank (2) The tank is immersed in 106 for washing, and the washing is performed in a rinsing tank 107.

However, with the conventional cleaning method in which parts storage containers and the like are placed on a belt conveyor and pure water is sprayed in several stages from the jet nozzle, the area occupied by the cleaning device becomes large, Consumption was also high. Draining and drying with an air nozzle is often Therefore, a large amount of air was required, so that the draining and drying area had to take a long distance, and the occupied area of the draining and drying equipment had to be larger than that of the washing equipment. Therefore, it is not unusual for the length of a conventional cleaning and drying device for component storage containers and the like to usually reach about 10 m, and for that reason, the cleaning and drying amount per unit time must be relatively large. Could not.

Therefore, initial costs and running costs due to capital investment were also high, and the cost of cleaning component storage containers and the like became large, and the merits of cleaning and regeneration were small. Disclosure of the invention

In the washing and drying apparatus according to the present invention, a rotating drum is installed in the washing tank, and one or more detachable baskets accommodating a plurality of component storage containers and the like are installed in the rotating drum, or the rotating drum is installed. It is characterized in that parts storage containers and the like are stored directly in the inside, washing is performed while rotating the rotating drum, and then the rotating drum is rotated at a high speed to drain, dewater, and dry. Washing, draining, dehydrating, and drying are performed in the same tank so that the entire apparatus is compacted, and draining, dehydrating, and drying are performed by centrifugal force.

A rotating drum is installed in the washing tank, and one or more detachable baskets containing a plurality of component storage containers are installed in the rotating drum. The invention is characterized in that, after draining and dewatering, in order to shorten the drying time, drying is performed by blowing hot air.

In the present invention, in order to prevent heat energy for drying of the drying device from being taken away by the cleaning liquid,? A rotating drum is installed in the pre-cleaning tank, and one or more removable baskets containing a plurality of component storage containers are installed in the rotating drum, and the rotating drum is installed. _gWashing while rotating the rotating drum, draining and dewatering by rotating the rotating drum at high speed, then transferring to a drying device equipped with a rotating drum and spraying hot air to dry The equipment and the drying equipment are installed separately and side by side. According to the present invention, a rotating drum is installed in a cleaning tank, and a plurality of component housing containers are installed in the rotating drum in order to be able to wash and dry the component housing container of any shape and size. It is characterized in that a fixed frame that can be divided into one or a plurality of baskets of any shape and any size that can be attached and detached and that houses any of them is provided.

In the present invention, a rotating drum is installed in a cleaning tank, and one or a plurality of semiconductor wafer cassettes can be stored in the rotating drum. After the semiconductor wafer cassette is washed while rotating the rotating drum, the rotating drum is rotated. It is characterized in that it is drained, dehydrated and dried by rotating at a high speed. The high-speed rotation for the dewatering, dehydration and drying is set to 350 to 800 RPM.

In order to increase the cleaning efficiency and reduce the consumption of pure water, the present invention is characterized by comprising at least two stages of a cleaning step of performing a primary cleaning followed by a secondary cleaning (rinse cleaning) as a final cleaning. I do. Use pure water or an aqueous detergent solution or alkaline water as the cleaning solution for the primary cleaning, and use ultrapure water for the secondary cleaning.

The present invention is characterized in that the cleaning liquid is stored in the lower portion of the rotary drum for cleaning as primary cleaning in order to save the cleaning water, and the cleaning water is evenly distributed to the parts storage container and the like. The cleaning is performed by spraying a cleaning liquid from a substantially central portion of the rotating drum. The cleaning liquid jet nozzle for jetting the cleaning liquid is characterized in that the rotary shaft of the rotary drum is a hollow shaft, and the hollow rotary shaft is also used as a nozzle for jetting the cleaning liquid.

In the present invention, when cleaning the component storage container and the like, the rotating drum is rotated at a low speed. After that, when draining and dewatering, washing is performed by changing the rotation speed of the rotating drum in at least two stages of high-speed rotation, and then draining and dewatering is performed. 50 RPM, and during draining and dewatering, 350-800 RPM.

In the present invention, a rotation position detecting device is provided on the rotating drum to facilitate loading and unloading of the basket into and from the washing tank of the washing and drying device, and when the rotating drum is stopped after washing and drying, the rotation of the rotating drum is constantly stopped. Fins or brushes are provided on the outer surface of the rotating drum to clean the inner wall of the washing tank, and the cleaning sludge attached to the inner wall of the washing tank is wiped off by rotation of the rotating drum. It is characterized by having functions.

In order to shorten the drying time and realize clean drying, according to the present invention, a rotating drum is installed in a drying device tank, and a component storage container or the like to be dried is installed in the rotating drum. Hot air is supplied into the drying tank through the HEPA filter 14 provided above the nozzle, or the nozzle is provided on the rotating shaft of the rotary drum by replacing the filter with the filter provided above, It is characterized in that a hot air is blown out to this nozzle shaft. A line filter 15 is provided upstream of the nozzle shaft.

In addition, the part storage container is placed on a belt conveyor and pure water is sprayed in several stages from the jet nozzle. It is characterized by storing a plurality of parts storage containers and the like in a dedicated basket, spray cleaning the cleaning liquid or immersion cleaning in a cleaning tank using ultrasonic waves or hot water, and then performing centrifugal dewatering and drying. According to this washing and drying method, the area occupied by the drying area can be reduced, and the drying efficiency can be increased and the throughput can be increased by centrifugal drying. - _g It is characterized by drying by hot air after centrifugal dehydration and drying. Drying efficiency can be further improved. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a view showing the inside of a washing tank of the washing and drying apparatus of the present invention, FIG. 2 is a view showing an embodiment of the first washing and drying apparatus of the present invention, and FIG. FIG. 4 is a view showing an embodiment of a second washing / drying apparatus of the present invention, FIG. 4 is a view showing an embodiment of a drying apparatus of the present invention, and FIG. FIG. 6 is a diagram showing an embodiment of the washing / drying device of FIG. 3, FIG. 6 is a diagram showing an embodiment of the fourth washing / drying device of the present invention, FIG. 7 is a diagram of FIG. FIG. 8 is a view of the centrifugal dewatering and drying apparatus as viewed from the arrow, FIG. 8 is a view showing the configuration of a conventional first washing and drying apparatus, and FIG. 9 is a view of a conventional second washing and drying apparatus. FIG. 3 is a diagram illustrating a configuration. BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing a concept of an embodiment of the present invention. A basket holding a plurality of component storage containers 7 is installed and fixed along the periphery on a rotating drum 1 in a washing tank (not shown). While rotating the rotating drum 1 in the washing tank, a process of rapidly supplying pure water into the washing tank, storing a certain amount of water, and performing rotary washing is adopted.

Alternatively, a fixed frame that can be divided into one or more baskets of any shape and size that can be detached and housed in a rotating drum and that house a plurality of component storage containers 7 etc. shall be provided.

Further, the cleaning liquid 3 is stored in the bottom of the rotary drum 1 and slowly rotated in the direction of the arrow, so that the component storage containers 7 are sequentially immersed in the cleaning liquid 3 for cleaning. As cleaning solution 3 Use pure water, water-based detergent, or alkaline water.

If the amount of water supplied to the deionized water system is small, a deionized water storage circulation system will be installed to shorten the time for storing water in the washing tank. The pure water storage circulation tank consists of a pure water circulation pump, a filtration filter, and a water storage tank. If pure water is stagnated, it tends to decay. Therefore, a system that always bypasses and filters when not in use.

As a first embodiment of the present invention, a separate type washing and drying apparatus of a washing apparatus for a component storage container and the like and a drying apparatus will be specifically described.

In FIG. 2, a basket 2 holding a plurality of component storage containers 7 on a rotating drum 1 is carried in and installed along the circumferential direction as shown in FIG. The cleaning liquid injection nozzle 10 is fixed to the cleaning tank 5 and is disposed so as to be located substantially at the center of rotation of the rotating drum 1.

After closing the tank lid 6, the rotating drum 1 is rotated by the rotating shaft 4 in the direction of the arrow. As shown in Fig. 1, primary cleaning is performed by immersing regenerated pure water in the cleaning liquid 3 stored in the lower part of the cleaning tank, or by regenerating pure water from the injection nozzle 10 using the shower 9 for about 4 minutes. Perform cleaning. For example, used pure water is recycled as pure water through a filter. In the primary cleaning, the cleaning liquid may be replaced with regenerated pure water, or an aqueous detergent or alkaline ionized water may be used together with the purified water.

At the time of washing, the parts storage container 7 of the basket 2 is rotated by the rotating drum 1 over the entire inside of the washing tank 5, so that the spraying of the washing liquid becomes uniform, and the washing effect is further increased by the rotating water flow. Next, a switching valve (not shown) is used to switch from regeneration pure water or detergent to ultrapure water, and the shower 9 is used to perform secondary cleaning with ultrapure water for about 2 minutes. The required supply of pure water is about 15 liters / min. The rotation speed of the rotating drum 1 is set to 10 to 50 RPM in these washings.

Next, the cleaning liquid shower 9 from the injection nozzle 10 is stopped, and the rotation of the rotating drum 1 is stopped. _{The η} inversion number is set at 350 to 800 RPM, and the water is drained, dehydrated and dried for 3 minutes by centrifugal force. In this way, when cleaning the component storage container and the like, the rotary drum is rotated at a low speed, and then, when performing 7Κ dewatering, the rotating speed of the rotary drum is changed to at least two stages of high-speed rotation for cleaning, draining and dewatering. .

In addition, a mechanism is provided to provide a fin or brush 11 made of rubber or resin on the outer peripheral wall or side surface of the rotary drum 1 to wipe off cleaning sludge adhering to the inner wall in the cleaning tank. In the cleaning apparatus shown in FIG. 3, a rotary injection nozzle (for cleaning liquid) 8 having a hollow rotary shaft is used instead of the injection nozzle 10 shown in FIG. A cleaning liquid shower 9 is sprayed from a rotary spray nozzle (for cleaning liquid) 8 toward a parts container 7.

Conventionally, draining and dewatering can be performed more efficiently in a short time than draining and dehydrating by blowing high-pressure air with a blower that has been generally used. In addition, the entire device can be made compact without the need for a long draining / drying / drying area. The required cleaning time for these parts storage containers 7 is 0.5 minutes, primary cleaning 4 minutes, secondary cleaning 2 minutes, draining 3 minutes, unloading 0.5 minutes for parts storage containers 7 It is.

Then, open the tank lid 6 of the washing machine 1 Α, take out the basket 2 containing the parts storage container 7 etc., and carry the basket 2 into the drying device 1 C shown in Fig. 4 and the rotating drum 1 of the drying tank 1 2. Transfer. Close the tank lid 6, rotate the rotary drum 1, and blow hot air 16 from the rotary shaft injection nozzle 13 through the HEPA filter 14 and / or line filter 15 for about 9 minutes. The hot air temperature for hot air drying is 60 ° C to 65 ° C, and the rotating drum 1 is rotated at 10 to 50 RPM. Further, the air volume is set to ³ 0~5 O m 3 / min. The time required for drying these parts storage containers 7 is about 10 minutes in total: 0.5 minutes for loading the parts storage container 7, 9 minutes for hot air drying, and 0.5 minutes for unloading.

The present invention provides for drainage dewatering by rotation, and thus via a filter. The _g dry warm air Air one was is obtained by realizing a clean dry.

The reason why the cleaning device 1A and the drying device 1C are separated and independent is to perform a series of cleaning and drying steps by increasing the thermal efficiency so that the cleaning liquid does not take heat energy from the drying device 1C. In addition, a rotating position detecting device is provided on the rotating drum 1 so that the rotating drum 1 is always stopped at a fixed position when the rotating drum 1 is stopped, so that the basket 2 containing the component storage containers 7 can be easily loaded and unloaded. I did it.

Next, as a second embodiment of the present invention, a cleaning / drying apparatus in which a cleaning apparatus and a drying apparatus for the component storage container 7 and the like 7 are integrated will be described.

As shown in Fig. 3, the initial equipment investment cost and the area occupied by the cleaning / drying device are reduced, and the cleaning device 1B is designed to further reduce the cleaning / drying cost. A cleaning and drying apparatus having a body shape will be specifically described. A plurality of baskets 2 containing parts storage containers 7 are installed in the direction around the rotating drum 1. As shown in FIG. 1, they are arranged and installed as in the case of the above-mentioned separate type of the washing device and the drying device. In addition, the washing process by washing with a washing solution and the washing by dewatering, dehydration and drying are the same as those of the separate type.

After draining, dehydrating and drying, leave it in the same washing tank (ie, without moving basket 2 to another) 60 ° (: ~ 65 ° C hot air) through a line filter 15 through a rotary spray nozzle Then, rotate the rotating drum 1 at 10 to 50 RPM to dry the parts container 7 for about 9 minutes After hot air drying, open the tank lid 6 and take out the basket 2 from the rotating drum 1.

Next, as a third embodiment of the present invention, a cleaning / drying apparatus in which a cleaning apparatus and a drying apparatus for a single semiconductor wafer cassette are integrated will be described.

In FIG. 2, a plurality of semiconductor wafer cassettes are placed in a dedicated basket and set on the rotating drum 1, or the semiconductor wafer cassettes are directly placed on the rotating drum 1. _Put it in _g and fix it. As the primary cleaning, the rotating drum 1 is rotated, and the semiconductor wafer cassette is sequentially immersed in the cleaning liquid 3 stored in the lower portion of the cleaning tank. Alternatively, the cleaning liquid shower 9 is sprayed from the rotary spray nozzle 8 toward the semiconductor wafer cassette for about 4 minutes. Next, ultrapure water is rotated by a switching valve (not shown) from the spray nozzle 8 as an ultrapure water shower 9, and the secondary washing of the semiconductor wafer cassette and 净 (finish washing) are performed for about 2 minutes. During this time, the rotating drum 1 is rotated at a rotation speed of 10 to 50 RPM.

Thereafter, the ultrapure water shower 9 is stopped, the rotation speed of the rotary drum 1 is increased to about 400 RPM, and draining, dehydration and drying are performed. After draining and dewatering for about 3 minutes, the rotation speed is maintained at about 400 RPM, and an air shower is sprayed from the rotary injection nozzle through the line filter 15 to achieve clean drying. In addition, even when the parts storage container is placed on a belt conveyor and pure water is sprayed in several stages from a jet nozzle, or when immersion cleaning using a cleaning tank is adopted, one or more parts may be used. The storage container is stored in a special basket, spray cleaning of the cleaning liquid or immersion cleaning in a cleaning tank using ultrasonic waves or hot water, and then centrifugal removal [7] drying. According to this washing and drying method, the area occupied by the drying area can be reduced as compared with the conventional method, and the drying efficiency can be increased and the throughput can be increased by centrifugal drying.

After centrifugal dehydration and drying, drying with warm air is performed. The drying efficiency can be further increased.

As shown in Fig. 5, the storage containers are placed on the belt conveyor 101 as shown in Fig. 5, and pure water is sprayed from the jet nozzle in several stages, that is, primary cleaning with regenerated pure water Spray cleaning 102 consisting of secondary cleaning (finish cleaning) with ultrapure water is performed. Also, instead of spray cleaning 102, as shown in FIG. _{1 () The} ultrasonic washing tank is immersed in the washing tank (1) 105 and the washing tank (2) 106 for washing, and further washed in the rinsing tank 107.

The storage container or the like washed by any of the above two types of washing methods is automatically centrifugally dehydrated and dried by the centrifugal drying device 18 by the basket carrier 17. The drying time is shortened, and as a result, the washing / drying processing per unit time can be improved. In addition, compared to blower drying, the area occupied by the drying device can be significantly reduced, and the area occupied by the floor as a whole of the washing and drying device can be significantly reduced. Fig. 7 is a plan view of the centrifugal dryer 18 in Figs. 5 and 6, as viewed from the arrow. Industrial applicability

As described above, according to the present invention, since the washing, draining, dehydrating and drying are performed in the same tank, the entire apparatus can be compacted, the area occupied by the floor of the washing and drying apparatus can be significantly reduced, and the centrifugal force can be reduced. Drainage dehydration is performed at high speed to perform dewatering dehydration drying. Also, after dewatering, the drying time can be reduced because hot air is blown to dry.

After draining and dewatering by high-speed rotation, transfer to a drying device equipped with a rotating drum, blow it with hot air and dry it.Dry the drying device so that the washing device and drying device can be installed separately and independently. The thermal energy for the cleaning can not be taken away by the cleaning liquid.

A rotating drum is installed in the washing tank, and a basket of any shape and size, which contains a plurality of parts storage containers etc. in the rotating drum, is divided into one or more parts. It should be possible to wash and dry parts storage containers of such shapes and sizes. _{u It} consists of at least two stages of cleaning, which is a secondary cleaning (rinse cleaning) as a final cleaning after the primary cleaning. Also, pure water or aqueous detergent solution or Al-Lion water is used as the cleaning liquid for the primary cleaning. The use of water and ultrapure water as secondary cleaning increases the cleaning efficiency and reduces the consumption of pure water. The washing liquid is stored in the lower part of the rotating drum in the washing tank for washing, so that washing water can be saved as primary washing, and washing can be performed by spraying the washing liquid from almost the center of rotation in the rotating drum. Therefore, the washing water can be evenly distributed to the parts storage container and the like.

The rotating drum is rotated at a low speed when washing the parts storage container, etc., and then, when draining and dewatering, the rotating speed of the rotating drum is changed at least in two stages of high-speed rotation. Washing, draining and dewatering can be performed immediately.

A rotating position detector is provided on the rotating drum, and when the rotating drum is stopped after washing and drying, the rotating drum is always stopped at a fixed rotation stop position. Can be In addition, a fin or a brush is provided on the outer surface of the rotating drum, and the washing sludge attached to the inner wall of the washing tank is removed by rotating the rotating drum, so that the inner wall of the washing tank can be automatically cleaned.

The hot air supplied to the drying unit is supplied through a HEPA filter or a line filter, so that clean drying can be performed.

Centrifugal dewatering and drying can reduce the occupied area on the floor even in the case of spray cleaning of cleaning liquid or immersion cleaning equipment using a cleaning tank with ultrasonic waves or warm water. Drying can be performed, increasing the washing and drying capacity.

Claims

A rotating drum is installed in the washing tank, and one or more detachable baskets containing a plurality of component storage containers are installed in the rotating drum, or inside the rotating drum. After washing while rotating the rotating drum, the rotating drum is rotated at high speed to drain, dehydrate and dry. A rotating drum is set in the washing tank, and the rotating drum is installed. One or more detachable baskets containing a plurality of parts storage containers etc. are installed inside, and the washing is performed while rotating the rotating drum, and then the rotating drum is rotated at high speed to drain and drain water. A washing and drying apparatus characterized by spraying hot air to dry. A rotating drum is installed in the washing tank, and one or more detachable baskets containing a plurality of component storage containers are installed in the rotating drum, and the washing is performed while rotating the rotating drum. The drum is dehydrated by rotating the drum at high speed, then transferred to a drying device equipped with a rotating drum, and dried by spraying warm air on the drying device. Dry

4. A rotating drum is installed in the washing tank, and one or more baskets of any shape and size can be divided and installed, each housing a plurality of component storage containers and the like in the rotating drum. 4. A rotating frame is provided in the cleaning tank, and one or a plurality of semiconductor wafer cassettes can be stored in the rotating drum, wherein a fixed frame is provided. After washing the cassette while rotating the rotating drum, the rotating drum is rotated at high speed to drain and dehydrate. A washing and drying apparatus characterized by drying.

6. The washing / drying apparatus according to claim 1, wherein a high-speed rotation for dewatering / drying is 350 to 800 RPM.

7. The cleaning / drying apparatus according to claim 1, comprising at least two stages of a cleaning step of performing a secondary cleaning as a final cleaning after the primary cleaning.

8. The cleaning apparatus according to claim 6, wherein the primary washing is performed by storing a washing liquid in a lower portion of the rotating drum for washing.

9. The cleaning apparatus according to claim 1, wherein cleaning is performed by spraying a cleaning liquid from a substantially rotation center portion in the rotary drum.

10. The cleaning apparatus according to claim 1, wherein the rotary shaft of the rotary drum is a hollow shaft, and the hollow rotary shaft is also used as a nozzle for ejecting a cleaning liquid.

11. The cleaning apparatus according to claim 1, wherein pure water, an aqueous detergent liquid, or alkaline ionized water is used as a cleaning liquid for the primary cleaning, and ultrapure water is used for the secondary cleaning.

12. When washing the parts storage container, etc., rotate the rotating drum at a low speed, and then, when draining and dewatering, change the rotating speed of the rotating drum to at least two stages of rotating at high speed. The cleaning device according to any one of claims 1 to 5, characterized in that:

13. The washing and drying apparatus according to claim 11, wherein the rotation speed of the rotating drum is 10 to 50 RPM during washing and 350 to 800 RPM during draining and dewatering.

14. The rotating drum is provided with a rotating position detecting device, and when the rotating drum is stopped after washing and drying, the rotating drum is always stopped at a fixed rotation stop position.

15. Provide fins or brushes on the outer surface of the rotating drum to attach to the inner wall of the washing tank. A function of removing the washed sludge by rotating the rotary drum.

Washing / drying apparatus according to 1).

A rotating drum is installed in the drying device tank, a component storage container to be dried is installed in the rotating drum, and hot air is supplied to the drying device tank through a filter provided above the drying device tank. 4. The drying device according to claim 3, wherein:

The cleaning and drying apparatus according to any one of claims 1 to 5, wherein a jet nozzle hole is provided on a rotation shaft of the rotary drum to form a nozzle shaft, and the nozzle shaft is jetted with hot air.

—A washing / drying device that stores one or more parts storage containers in a special basket, spray-washes the washing solution or immerses and cleans it in a washing tank using ultrasonic waves or hot water, and then performs centrifugal dehydration drying.

18. The washing and drying apparatus according to claim 17, wherein drying by hot air is performed after the centrifugal dehydration and drying.