WO2004003624A1 - A method and device for modulating a light beam and having an improved gamma response - Google Patents
A method and device for modulating a light beam and having an improved gamma response Download PDFInfo
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- WO2004003624A1 WO2004003624A1 PCT/US2003/015348 US0315348W WO2004003624A1 WO 2004003624 A1 WO2004003624 A1 WO 2004003624A1 US 0315348 W US0315348 W US 0315348W WO 2004003624 A1 WO2004003624 A1 WO 2004003624A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
Definitions
- This invention relates to a method and device for modulating a light beam. More specifically, this invention relates to a light modulator that is electro-mechanically biased in order to more efficiently modulate optical signals by having an improved gamma response.
- the relationship between an applied signal (usually a voltage) and the resulting output illumination intensity is referred to as the response function or transfer function.
- ⁇ gamma
- the best image reproduction can be obtained by matching the display device gamma to the manner in which the image was originally recorded, referred to as the source or content gamma.
- Conventional image source gamma values are in the range of 2 to 3.
- Embodiments of the present invention include an apparatus having an improved, tunable gamma response.
- the apparatus comprises a light modulator having a plurality of spaced-apart elements, having alternating active elements and passive elements lying in a first plane; a gamma controller; and a displacement controller.
- the gamma controller applies a gamma voltage to a substrate, creating an electro-static field that pulls the spaced-apart elements to a bias plane parallel to the first plane and preferably closer to the substrate.
- the plurality of spaced-apart elements all lie in the bias plane, and a light beam impinging on the plurality of spaced-apart elements will be substantially reflected so that the plurality of spaced-apart elements act as a specular mirror.
- a low-noise optical receiver that accepts only diffracted light (a first-order receiver) will detect a signal having a substantially zero illumination intensity.
- the displacement controller applies a displacement voltage to the active elements.
- the active elements are moved to a second plane substantially parallel to the bias plane and preferably closer to the substrate so that a light beam impinging on the light modulator will be substantially diffracted.
- a first-order receiver will now detect a signal having a non-zero illumination intensity.
- the illumination intensity of the detected signal is proportional to the displacement voltage raised to an exponential power known as the gamma response.
- the gamma response is between approximately 1.75 and 3.0.
- Figure 1 schematically illustrates a representative light modulator.
- Figure 2 illustrates a cross-section of the light modulator of Figure 1 with the elongated elements in a first plane.
- Figure 3 illustrates a cross-section of the light modulator of Figure 1 with a gamma voltage applied to the substrate so that the elongated elements are displaced to a bias plane.
- Figure 4 illustrates a cross section of the light modulator of Figure 1, an incident light beam, and a reflected light beam R.
- Figure 5 illustrates a cross section of the light modulator of Figure 1, an incident light beam, and diffracted wavefronts.
- Figure 6a is a graph showing the relationship between a displacement voltage and the deflection of an active element of the light modulator of Figure 1.
- Figure 6b is a graph showing the relationship between the deflection illustrated in
- Figure 6c is a graph showing the convolution of the graph in Figure 6a with the graph in Figure 6b, and thus shows the relationship between the displacement voltage and the resulting illumination intensity for the light modulator of Figure 1.
- Figure 7 is a graph showing the relationship between the displacement voltage and the deflection from the bias plane of an active element of the light modulator of Figure 1 for gamma voltages equal to 0 volts, -1 volt, -2 volts, and -3 volts. 3
- Figure 8 is the graph of Figure 7 drawn with both the displacement voltage and the deflection from the bias plane of an active element of the light modulator of Figure 1 plotted on a logarithmic scale.
- Figure 9 is a graph showing the relationship between the displacement voltage and the normalized first-order diffraction intensity for the light modulator of Figure 1 for gamma voltages equal to 0 volts, -1 volt, -2 volts, and -3 volts.
- Figure 10 is the graph of Figure 9 drawn with both the displacement voltage and the normalized first-order diffraction intensity for the light modulator of Figure 1 plotted on a logarithmic scale.
- Figure 11 is a graph showing the relationship between gamma voltages and a gamma for light modulators.
- Embodiments of the present invention include a light modulator that modulates light beams and has a tunable gamma response.
- a light modulator In a light modulator, light impinges on a plurality of elongated spaced-apart elements.
- an input signal such as a displacement voltage to the alternate spaced-apart (active) elements, the active elements are selectively deformed (bent) so that the impinging light is either substantially reflected or substantially diffracted.
- a low-noise optical receiver that accepts only first-order diffracted light (a first- order receiver), such as a Schlieren optical system, will thus detect light having a non-zero illumination intensity I, when the light beam is substantially diffracted, and will detect light having little or no illumination intensity 1 ⁇ when the light is substantially reflected.
- the exponent for the transfer relationship between the input signal and the illumination intensity I is called the gamma response.
- Applying the present invention to a light modulator will provide a light modulator that has a tunable gamma response.
- the relationship between the displacement voltage and the illumination intensity can be optimally tuned to fit various needs.
- the first-order receiver may be coupled with many devices that use modulated light or devices that modulate light to deliver information optically.
- the device may, for example, be used in high-definition image displays, which use modulated light beams to illuminate individual pixels on projection displays and computer-to-plate products; optical switches, which use modulated light beams to route optical data to destination ports on routers or to redundant equipment during system failures; dynamic gain equalizers, which use modulated light beams to correct imbalances in the power of optical signals transmitted over optical fibers; and dynamically tunable filters, which use modulated light beams to filter out signals within a variable range of wavelengths.
- the light modulator 20 according to an embodiment of the present invention is schematically illustrated in Figure 1.
- the light modulator 20 preferably comprises elongated elements 32 suspended by first and second posts, 34 and 36, above a substrate 38.
- the elongated elements 32 each comprise a conducting and reflecting surface 40.
- the substrate 38 comprises a conductor 42.
- the light modulator 20 operates to produce modulated light selected from a reflection mode and a diffraction mode.
- the light modulator 20 comprises the elongated elements 32.
- the elongated elements 32 are formed parallel to one another to lie substantially in a first plane.
- the elongated elements 32 each comprise a conducting and reflecting surface 40 and a resilient material 44.
- the substrate 38 comprises the conductor 42.
- an electrical gamma voltage is applied to the conductor 42 of the substrate 38.
- the elongated elements 32 lie substantially in the first plane.
- the gamma voltage generates an electrostatic field that bends the elongated elements 32, displacing them toward the substrate 38.
- the elongated elements 32 are displaced slightly, substantially to a bias plane parallel to the first plane and to a gap length G ( Figure 3) above the substrate 38. As described in more detail below, this displacement provides an improved gamma response for the light modulator 20.
- Figure 2 shows a cross-section of the light modulator 20 of Figure 1, with no gamma voltage applied to the substrate 38 (i.e., to the conductor 42 of the substrate 38).
- Figure 2 shows that the elongated elements 32 lie substantially in a first plane 15.
- Figure 3 shows the light modulator 20 of Figure 2 with a gamma voltage applied to the substrate 38 and a zero voltage applied to the elongated elements 32.
- Figure 3 shows that the elongated elements 32 have been displaced a distance H closer to the substrate 38, to a second (bias) plane 16, substantially parallel to the first plane.
- the bias plane 16 lies a distance G above the substrate 38.
- the distances G and H in Figure 3 are not drawn to scale but are shown as exaggerated distances merely for illustration. In practice, the distance H is a small fraction of the distance G.
- Figure 4 depicts the light modulator 20 in the reflection mode.
- the conducting and reflecting surfaces 40 of the elongated elements 32 lie in the bias plane 16 so that the incident light I reflects from the elongated elements 32 to produce the reflected light R.
- a gamma voltage is applied to the substrate 38 and a zero voltage is applied to the elongated elements 32.
- Figure 5 depicts the light modulator 20 in the diffraction mode.
- an electrical displacement voltage causes alternate ones of the elongated elements 32 to move from the bias plane 16 to a second plane 17, closer to the substrate 38. That portion of the elongated elements moved to the second plane in response to the displacement voltage are called the active elements; the remainder of the elongated elements 32 are called the passive elements.
- the displacement voltage is applied to the reflecting and conducting surfaces 40 of the active elements of the elongated elements 32.
- the displacement voltage results in a height difference of preferably about a quarter wavelength ⁇ /4 of the incident light I between the alternating active elements and the passive elements of the elongated elements 32 to achieve maximum diffraction.
- the height difference of the quarter wavelength ⁇ /4 produces diffracted light including plus one and minus one diffraction orders, D +1 and D.,.
- a displacement voltage applied to the active elements will cause the light modulator 20 to move from a reflection mode to a diffraction mode.
- any reference to a height of ⁇ /4 includes heights that are an odd multiple of ⁇ /4; any reference to a height of zero includes heights that are an even multiple of ⁇ /4.
- Figures 4 and 5 depict the light modulator 20 in the reflection and diffraction modes, respectively.
- the incident light I both reflects and diffracts, producing the reflected light R and the diffracted light including the plus one and minus one diffraction orders, D +1 and D.,.
- the light modulator 20 produces a variable reflectivity.
- conducting and reflecting surface 40 can be replaced by a multilayer dielectric reflector and a conducting element where the conducting element is buried within each of the elongated elements 32.
- each pixel is a group of two of the elongated elements 32.
- each pixel is a group of more elongated elements 32.
- pixel is used here in the context of an element of a light modulator rather than its more specific definition of a picture element of a display.
- Light modulators are further described, for example, in U.S. Patent Number 5,311,360, titled “METHOD AND APPARATUS FOR MODULATING A LIGHT BEAM,” issued May 10, 1994, to Bloom et. al; and in U.S. Patent Number 5,841,579, titled “FLAT DIFFRACTION GRATING LIGHT VALVE,” issued November 24, 1998, to Bloom et. al. , both of which are incorporated herein by reference.
- Figure 6a is a graph depicting the relationship between the voltage V applied to an active element (the displacement voltage) and the distance d that the active element is displaced toward the substrate 38 when zero voltage is applied to the substrate.
- Figure 6a illustrates that the distance d is related to the displacement voltage V approximately by the equation, d « V 2 .
- Figure 6a shows that the displacement d is nearly zero for displacement voltages V below some intermediate voltage V 0 , and disproportionately large for displacement voltages V above a critical voltage V,.
- the light modulator is usually operated at displacement voltages less than V,.
- Figure 6b shows the relationship between d and the corresponding illumination intensity I, detected, for example, by a low-noise optical receiver that accepts only first-order diffracted light, such as a Schlieren optical system.
- Figure 6b illustrates that the illumination intensity I, varies according to the formula I, « sin 2 (2 ⁇ d/ ⁇ ), where ⁇ is the wavelength of the incident light beam and d is the distance between the active elements and the passive elements.
- Figure 6b shows, among other things, that for small deflections d equal or nearly equal to zero, the corresponding illumination intensity l is zero.
- Figure 6c depicts the convolution of the graphs of Figures 6a and 6b, showing the relationship between the displacement voltage V and the illumination intensity I
- Figure 6c shows that for small displacement voltages V the corresponding illumination intensities I, are small and that for large displacement voltages V the corresponding illumination intensities I x are large.
- Figure 6c further illustrates a maximum intensity 50 corresponding to a voltage sufficient to deflect an active element from the bias plane to the substrate a distance equal to one-fourth the wavelength of an incident light beam ( ⁇ /4).
- the input signals may, for example, be binary- weighted voltages, but it will be appreciated that any form of input signal may be used.
- the gamma voltage may be any voltage (positive, negative, or zero) so long as the voltage difference between the gamma voltage V , and a displacement voltage V (V - V g ) is sufficient to generate an electrostatic field between the elongated elements 32 and the substrate 38.
- the gamma voltage V g is equal to -5 volts.
- the voltage difference between the voltage applied to the elongated elements and the voltage applied to the substrate (0 volts - (-5) volts, or +5 volts) is sufficient to draw the elongated elements 32 to a bias plane, closer to the substrate 38.
- the displacement voltage V may range from 0 volts, which places the light modulator in a reflection mode, to 10 volts, which places the light modulator in a diffraction mode.
- the gamma voltage V g is equal to -3 volts.
- the voltage difference between the voltage applied to the elongated elements and the voltage applied to the substrate (0 volts - (-3) volts, or +3 volts) is sufficient to draw the elongated elements 32 to a bias plane, closer to the substrate 38.
- the displacement voltage V may thus range from 0 volts, which places the light modulator in a reflection mode, to 12 volts, which places the light modulator in a diffraction mode.
- the gamma voltage V g is equal to 0 volts.
- a positive voltage V may then be applied to the elongated elements 32 so that the voltage difference between the elongated elements 32 and the substrate 38 (V volts - 0 volts, or +V volts) is sufficient to generate an electrostatic potential that draws the elongated elements 32 to a bias plane, closer to the substrate 38.
- the light modulator would then be in a reflection mode.
- An additional voltage applied to the active elements would draw the active elements to a second plane, closer to the substrate, placing the light modulator in a diffraction mode.
- embodiments of the present invention can function with a gamma voltage applied to either the substrate or to the elongated elements so that a voltage difference is generated, drawing the active elements to a bias plane, preferably closer to the substrate.
- the light modulator in the above embodiments functions as a three-terminal device with an electrostatic potential being generated between the active elements and the substrate, as well as an electrostatic potential being generated between the passive elements and the substrate.
- the light modulator 20 illustrated in Figure 1 operates most efficiently when the height of the second plane above the substrate 38 is greater than 2/3 the gap distance G between the bias plane and the substrate 38.
- the active elements may crash into the common plane 38 and irreparably damage the light modulator.
- the displacement voltage that displaces the active elements to a second plane a distance of approximately (2/3)G above the substrate 38 is termed V snap , also called the switching voltage.
- V snap also called the switching voltage.
- the height of the second plane above the substrate is approximately (3/4)G. It will be appreciated that increasing the gap distance G would increase V snap and thus decrease the chance of damage.
- Embodiments in accordance with the present invention also provide a light modulator with a tunable gamma response by applying a range of gamma voltages to the substrate 38.
- a range of gamma voltages to the substrate 38.
- the deflection d of an active element of the elongated elements 32 is related to the displacement voltage V, the gamma voltage, V , the gap length G, and the voltage at which the element is brought to the substrate, V snap , by the empirically derived expression given in Equation (1):
- the illumination intensity I varies as the displacement voltage V, the function d(V) described in the Equation (1), V g , and ⁇ , the wavelength of the incident light beam, by the Equation (2):
- the expression d(V - V g ) refers to the total deflection of an active element in a diffraction mode, that is the deflection to the bias plane plus the deflection distance of ⁇ /4.
- the expression d(0 - V g ) refers to the deflection of a passive element from the first plane to the bias plane, that is the distance H depicted in Figure 3.
- Figures 7-10 were generated for the light modulator 20 of Figure 1, using Equations
- FIG. 7 depicts four graphs, Graphs 100-103, each depicting the relationship between the displacement voltage V volts and the corresponding displacement (in nanometers) from the bias plane of an elongated element to which the displacement voltage is applied.
- Graphs 100-103 illustrate that by decreasing the gamma voltage V , a given displacement voltage will have correspondingly larger displacements d.
- the slope of the Graph 100 is zero at this point.
- the slope of the Graph 103 is positive at this point.
- the slope of the displacement voltage V versus displacement of the elongated elements d increases. That is, small displacement voltages can generate appreciably larger displacements d. As described below, this in turn can produce light modulators with decreasing gamma values.
- Figure 8 depicts Graphs 110-113, each illustrating the relationship between the displacement voltage V and the displacement d of the active elements from the bias plane, as shown in Figure 7.
- Graphs 110-113 differ from Graphs 100-103, respectively, in Figure 7, only in that Graphs 110-113 plot each axis on a logarithmic scale.
- Figure 9 depicts Graphs 120-123, which illustrate the relationship between the displacement voltage V and the corresponding normalized first-order diffraction intensity, Iasca for the light modulator of Figure 1 for a variety of gamma voltages.
- a point denoting the maximum intensity, corresponding to a deflection d of one-fourth the wavelength of the incident light beam, is not illustrated because it is outside the range depicted in Figure 9.
- Point 121a denotes the maximum intensity, corresponding to a deflection d of one-fourth the wavelength of the incident light beam.
- Point 122a denotes the maximum intensity, corresponding to a deflection d of one-fourth the wavelength of the incident light beam.
- Point 123a denotes the maximum intensity, corresponding to a deflection d of one-fourth the wavelength of the incident light beam.
- Graphs 120-123 thus illustrate that by decreasing the gamma voltage (and thus drawing the elongated elements to a bias plane closer to the substrate), a given displacement voltage will produce larger illumination intensities. This relationship is further illustrated in Figure 10.
- FIG. 10 depicts Graphs 130-133, which illustrate the relationship between the displacement voltage V and the corresponding normalized first-order diffraction intensity, I,, for the light modulator of Figure 1 for a variety of gamma voltages.
- BS differ from the Graphs 120-123 in Figure 9, respectively, in that Graphs 130-133 plot each axis on a logarithmic scale.
- the slope of each of the Graphs 130-133 is given by the Equation 3:
- Equation 3 defines the relationship between the displacement voltage and the first-order diffraction intensity I, which defines the gamma of the light modulator.
- the slope of this graph, and hence the gamma response, is approximately 2.5.
- Graphs 130-133 thus illustrate that by varying the gamma voltage V g of a light modulator, the transfer relationship and thus the gamma response can be tuned.
- Figure 11 depicts a graph that plots the gamma voltage V g and the corresponding gamma response value ( ⁇ ) for a light modulator.
- the graph in Figure 11 assumes positive displacement voltages. It will be appreciated, however, that other voltages may be applied since the light modulator uses voltage differences and not absolute voltages to operate.
- Figure 11 illustrates that by varying the gamma voltage for the light modulator of Figure 1, the gamma response can be tuned to take on a range of values.
- a light modulator having a tunable gamma response has many applications. For example, an image generated for a first device having a first gamma response can be displayed on a second device tuned to have the first gamma response.
- the resulting image generated on the second device can thus be tuned to appear as it did on the first device, or it may be tuned to have any manner of contrasting images. It will be appreciated that a light modulator having a tunable gamma response may have other uses in products that use modulated light.
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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EP03726884A EP1540405A4 (en) | 2002-06-28 | 2003-05-14 | A method and device for modulating a light beam and having an improved gamma response |
AU2003229297A AU2003229297A1 (en) | 2002-06-28 | 2003-05-14 | A method and device for modulating a light beam and having an improved gamma response |
JP2004517560A JP2005531808A (en) | 2002-06-28 | 2003-05-14 | Method and apparatus for modulating a light beam and having an improved gamma response |
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US10/187,137 US6714337B1 (en) | 2002-06-28 | 2002-06-28 | Method and device for modulating a light beam and having an improved gamma response |
US10/187,137 | 2002-06-28 |
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PCT/US2003/015348 WO2004003624A1 (en) | 2002-06-28 | 2003-05-14 | A method and device for modulating a light beam and having an improved gamma response |
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US (1) | US6714337B1 (en) |
EP (1) | EP1540405A4 (en) |
JP (1) | JP2005531808A (en) |
CN (1) | CN100380169C (en) |
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WO (1) | WO2004003624A1 (en) |
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KR100892068B1 (en) * | 2005-11-03 | 2009-04-06 | 삼성전기주식회사 | Scanning color display apparatus which can control gamma, color image controlling method and recordable medium thereof |
US7355714B2 (en) * | 2005-12-29 | 2008-04-08 | Xerox Corporation | Reconfigurable MEMS fabry-perot tunable matrix filter systems and methods |
CN107561685B (en) * | 2017-09-30 | 2020-10-02 | Oppo广东移动通信有限公司 | Optical filter, lens module and imaging module |
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- 2003-05-14 JP JP2004517560A patent/JP2005531808A/en active Pending
- 2003-05-14 WO PCT/US2003/015348 patent/WO2004003624A1/en active Application Filing
- 2003-05-14 AU AU2003229297A patent/AU2003229297A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
---|---|
EP1540405A1 (en) | 2005-06-15 |
JP2005531808A (en) | 2005-10-20 |
CN1678940A (en) | 2005-10-05 |
CN100380169C (en) | 2008-04-09 |
EP1540405A4 (en) | 2007-05-30 |
US6714337B1 (en) | 2004-03-30 |
AU2003229297A1 (en) | 2004-01-19 |
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