WO2004008592A3 - Remote uv laser system and methods of use - Google Patents
Remote uv laser system and methods of use Download PDFInfo
- Publication number
- WO2004008592A3 WO2004008592A3 PCT/US2003/022177 US0322177W WO2004008592A3 WO 2004008592 A3 WO2004008592 A3 WO 2004008592A3 US 0322177 W US0322177 W US 0322177W WO 2004008592 A3 WO2004008592 A3 WO 2004008592A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- coupled
- laser system
- oscillator cavity
- harmonic generator
- remote
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
- H01S3/1112—Passive mode locking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06729—Peculiar transverse fibre profile
- H01S3/06741—Photonic crystal fibre, i.e. the fibre having a photonic bandgap
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
- H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/163—Solid materials characterised by a crystal matrix
- H01S3/1671—Solid materials characterised by a crystal matrix vanadate, niobate, tantalate
- H01S3/1673—YVO4 [YVO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2316—Cascaded amplifiers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004521886A JP2005533380A (en) | 2002-07-12 | 2003-07-11 | Remote UV laser system and method of use |
EP03764718A EP1540782A4 (en) | 2002-07-12 | 2003-07-11 | Remote uv laser system and methods of use |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/194,439 US6822978B2 (en) | 1999-05-27 | 2002-07-12 | Remote UV laser system and methods of use |
US10/194,439 | 2002-07-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004008592A2 WO2004008592A2 (en) | 2004-01-22 |
WO2004008592A3 true WO2004008592A3 (en) | 2004-04-15 |
Family
ID=30114748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/022177 WO2004008592A2 (en) | 2002-07-12 | 2003-07-11 | Remote uv laser system and methods of use |
Country Status (4)
Country | Link |
---|---|
US (2) | US6822978B2 (en) |
EP (1) | EP1540782A4 (en) |
JP (1) | JP2005533380A (en) |
WO (1) | WO2004008592A2 (en) |
Families Citing this family (40)
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US6822978B2 (en) * | 1999-05-27 | 2004-11-23 | Spectra Physics, Inc. | Remote UV laser system and methods of use |
US6587487B2 (en) * | 2000-12-19 | 2003-07-01 | Photonics Industries International, Inc. | Harmonic laser |
US6697390B2 (en) * | 2002-02-01 | 2004-02-24 | Spectra Physics Lasers, Inc. | Extended lifetime harmonic generator |
GB2395353B (en) * | 2002-02-18 | 2004-10-13 | Univ Southampton | Pulsed light sources |
US7103076B2 (en) * | 2002-10-24 | 2006-09-05 | Matsushita Electric Industrial Co., Ltd. | Ultrashort pulsed laser and optical head using the same |
US7088749B2 (en) * | 2003-01-06 | 2006-08-08 | Miyachi Unitek Corporation | Green welding laser |
US7352456B2 (en) * | 2003-04-08 | 2008-04-01 | Kla-Tencor Technologies Corp. | Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimes |
EP1697729B1 (en) * | 2003-09-04 | 2010-11-10 | KLA-Tencor Corporation | Methods for inspection of a specimen using different inspection parameters |
EP1517415A1 (en) * | 2003-09-18 | 2005-03-23 | Leica Geosystems AG | Geodetic apparatus with laser source |
US7280570B2 (en) * | 2003-12-15 | 2007-10-09 | Leica Microsystems | Device for generating a light beam including multiple wavelengths |
JP5255838B2 (en) * | 2004-08-25 | 2013-08-07 | ケーエルエー−テンカー コーポレイション | Fiber amplifier based light source for semiconductor inspection |
US7924892B2 (en) * | 2004-08-25 | 2011-04-12 | Kla-Tencor Technologies Corporation | Fiber amplifier based light source for semiconductor inspection |
US7295739B2 (en) * | 2004-10-20 | 2007-11-13 | Kla-Tencor Technologies Corporation | Coherent DUV illumination for semiconductor wafer inspection |
DE102005017607A1 (en) * | 2005-04-16 | 2006-10-19 | Leica Microsystems Cms Gmbh | Apparatus and method for providing shortwave light |
US7492803B2 (en) * | 2005-06-10 | 2009-02-17 | Hewlett-Packard Development Company, L.P. | Fiber-coupled single photon source |
US20080013586A1 (en) * | 2005-09-06 | 2008-01-17 | Spence David E | Narrow band diode pumping of laser gain materials |
US7440176B2 (en) * | 2006-02-17 | 2008-10-21 | Newport Corporation | Bi-directionally pumped optical fiber lasers and amplifiers |
US7457328B2 (en) * | 2006-05-17 | 2008-11-25 | Battelle Memorial Institute | Polarization methods for diode laser excitation of solid state lasers |
US8130800B2 (en) | 2006-05-17 | 2012-03-06 | Battelle Memorial Institute | Mode-locked solid state lasers using diode laser excitation |
US7680170B2 (en) * | 2006-06-15 | 2010-03-16 | Oclaro Photonics, Inc. | Coupling devices and methods for stacked laser emitter arrays |
US7866897B2 (en) * | 2006-10-06 | 2011-01-11 | Oclaro Photonics, Inc. | Apparatus and method of coupling a fiber optic device to a laser |
US20080090396A1 (en) * | 2006-10-06 | 2008-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Light exposure apparatus and method for making semiconductor device formed using the same |
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US8804246B2 (en) | 2008-05-08 | 2014-08-12 | Ii-Vi Laser Enterprise Gmbh | High brightness diode output methods and devices |
US20100278200A1 (en) * | 2009-05-04 | 2010-11-04 | Coherent, Inc. | External frequency-quadruped 1064 nm mode-locked laser |
US20120055909A1 (en) * | 2009-05-15 | 2012-03-08 | Hideaki Miyake | Method of laser-welding and method of manufacturing battery including the same |
JP6050684B2 (en) * | 2010-01-22 | 2016-12-21 | ニューポート コーポレーション | Widely tunable optical parametric oscillator |
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US8644357B2 (en) | 2011-01-11 | 2014-02-04 | Ii-Vi Incorporated | High reliability laser emitter modules |
US8804233B2 (en) * | 2011-08-09 | 2014-08-12 | Ofs Fitel, Llc | Fiber assembly for all-fiber delivery of high energy femtosecond pulses |
CN102545027B (en) * | 2012-02-10 | 2013-08-21 | 厦门大学 | Yb: YAG (yttrium aluminum garnet) and Cr, Yb: YAG self-Q-switching laser |
US9425575B2 (en) * | 2013-06-11 | 2016-08-23 | Halliburton Energy Services, Inc. | Generating broadband light downhole for wellbore application |
JP6069133B2 (en) * | 2013-08-30 | 2017-02-01 | 株式会社日立ハイテクノロジーズ | Defect inspection apparatus and defect inspection method |
EP2961012A1 (en) * | 2014-06-26 | 2015-12-30 | Light Speed Marker, S.L. | Laser system for modifying objects |
JP6261471B2 (en) * | 2014-07-31 | 2018-01-17 | 株式会社キーエンス | Laser processing equipment |
US10317281B2 (en) * | 2015-12-29 | 2019-06-11 | Oak Analytics | Compact spectrometer |
EP3549212A4 (en) | 2016-12-04 | 2020-08-05 | Newport Corporation | High-power mode-locked laser system and methods of use |
CN110197990A (en) * | 2019-06-28 | 2019-09-03 | 华中科技大学 | A kind of optics frequency tripling booster |
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US5909306A (en) * | 1996-02-23 | 1999-06-01 | President And Fellows Of Harvard College | Solid-state spectrally-pure linearly-polarized pulsed fiber amplifier laser system useful for ultraviolet radiation generation |
US6185253B1 (en) * | 1997-10-31 | 2001-02-06 | Lucent Technology, Inc. | Perceptual compression and robust bit-rate control system |
US6421573B1 (en) * | 1999-05-27 | 2002-07-16 | Spectra Physics Lasers, Inc. | Quasi-continuous wave lithography apparatus and method |
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-
2002
- 2002-07-12 US US10/194,439 patent/US6822978B2/en not_active Expired - Fee Related
-
2003
- 2003-07-11 EP EP03764718A patent/EP1540782A4/en not_active Withdrawn
- 2003-07-11 WO PCT/US2003/022177 patent/WO2004008592A2/en not_active Application Discontinuation
- 2003-07-11 JP JP2004521886A patent/JP2005533380A/en active Pending
-
2004
- 2004-11-05 US US10/982,664 patent/US20050094679A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5909306A (en) * | 1996-02-23 | 1999-06-01 | President And Fellows Of Harvard College | Solid-state spectrally-pure linearly-polarized pulsed fiber amplifier laser system useful for ultraviolet radiation generation |
US6185253B1 (en) * | 1997-10-31 | 2001-02-06 | Lucent Technology, Inc. | Perceptual compression and robust bit-rate control system |
US6421573B1 (en) * | 1999-05-27 | 2002-07-16 | Spectra Physics Lasers, Inc. | Quasi-continuous wave lithography apparatus and method |
Also Published As
Publication number | Publication date |
---|---|
US20030008448A1 (en) | 2003-01-09 |
JP2005533380A (en) | 2005-11-04 |
EP1540782A2 (en) | 2005-06-15 |
US6822978B2 (en) | 2004-11-23 |
US20050094679A1 (en) | 2005-05-05 |
WO2004008592A2 (en) | 2004-01-22 |
EP1540782A4 (en) | 2005-09-07 |
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