WO2004018908A3 - Mems-based fluid valve device - Google Patents

Mems-based fluid valve device Download PDF

Info

Publication number
WO2004018908A3
WO2004018908A3 PCT/US2003/026038 US0326038W WO2004018908A3 WO 2004018908 A3 WO2004018908 A3 WO 2004018908A3 US 0326038 W US0326038 W US 0326038W WO 2004018908 A3 WO2004018908 A3 WO 2004018908A3
Authority
WO
WIPO (PCT)
Prior art keywords
valve device
fluid valve
passages
mems
based fluid
Prior art date
Application number
PCT/US2003/026038
Other languages
French (fr)
Other versions
WO2004018908A2 (en
Inventor
James E Sanford
Original Assignee
James E Sanford
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by James E Sanford filed Critical James E Sanford
Priority to AU2003272225A priority Critical patent/AU2003272225A1/en
Publication of WO2004018908A2 publication Critical patent/WO2004018908A2/en
Publication of WO2004018908A3 publication Critical patent/WO2004018908A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028—Valves having multiple inlets or outlets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications

Abstract

A fluid valve device formed of MEMS devices includes a generally-planar semiconductor substrate (102) having one or more apertures (100/210) to provide passages for fluids, gases, or the like. Movable gate elements (104/214) alternately cover or expose such apertures to either block or open such passages. Actuators (110) in the form of miniature electromagnets (112/114) repel or attract the gate elements to open or close the passages. The fluid valve device may be used to control fluid (216), or in aspiration systems used to suction fluids.
PCT/US2003/026038 2002-08-20 2003-08-20 Mems-based fluid valve device WO2004018908A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003272225A AU2003272225A1 (en) 2002-08-20 2003-08-20 Mems-based fluid valve device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/224,882 2002-08-20
US10/224,882 US7106493B2 (en) 1999-07-27 2002-08-20 MEMS-based valve device

Publications (2)

Publication Number Publication Date
WO2004018908A2 WO2004018908A2 (en) 2004-03-04
WO2004018908A3 true WO2004018908A3 (en) 2004-12-09

Family

ID=31946286

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/026038 WO2004018908A2 (en) 2002-08-20 2003-08-20 Mems-based fluid valve device

Country Status (3)

Country Link
US (1) US7106493B2 (en)
AU (1) AU2003272225A1 (en)
WO (1) WO2004018908A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7665670B2 (en) * 2004-03-25 2010-02-23 Siemens Industry, Inc. Method and apparatus for an integrated distributed MEMS based control system
US7610910B2 (en) * 2004-03-25 2009-11-03 Siemens Building Technologies, Inc. Method and apparatus for controlling building component characteristics
US7548833B2 (en) * 2004-03-25 2009-06-16 Siemens Building Technologies, Inc. Method and apparatus for graphical display of a condition in a building system with a mobile display unit
US7263838B2 (en) * 2004-10-27 2007-09-04 Raytheon Corporation Pulse tube cooler with internal MEMS flow controller
US10215047B2 (en) 2015-12-28 2019-02-26 General Electric Company Actuation system utilizing MEMS technology
US10190702B2 (en) * 2016-03-15 2019-01-29 Dunan Microstaq, Inc. MEMS based solenoid valve
EP3637171A1 (en) 2018-10-09 2020-04-15 Trilite Technologies GmbH Apparatus for projecting a light spot

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5449146A (en) * 1994-11-07 1995-09-12 The Conair Group, Inc. Gate valve for particulate materials
US6190034B1 (en) * 1995-10-03 2001-02-20 Danfoss A/S Micro-mixer and mixing method
US6318402B1 (en) * 2000-05-25 2001-11-20 Richard Ladeira Pneumatic tank truck closure apparatus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4283259A (en) 1979-05-08 1981-08-11 International Business Machines Corporation Method for maskless chemical and electrochemical machining
JPS5928337A (en) 1982-08-09 1984-02-15 Hitachi Ltd Projection aligner
US5225771A (en) 1988-05-16 1993-07-06 Dri Technology Corp. Making and testing an integrated circuit using high density probe points
US5109149A (en) 1990-03-15 1992-04-28 Albert Leung Laser, direct-write integrated circuit production system
US5062689A (en) * 1990-08-21 1991-11-05 Koehler Dale R Electrostatically actuatable light modulating device
US5298939A (en) 1991-11-04 1994-03-29 Swanson Paul A Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
US5459098A (en) 1992-10-19 1995-10-17 Marietta Energy Systems, Inc. Maskless laser writing of microscopic metallic interconnects
US5607601A (en) 1995-02-02 1997-03-04 The Aerospace Corporation Method for patterning and etching film layers of semiconductor devices
US5691541A (en) 1996-05-14 1997-11-25 The Regents Of The University Of California Maskless, reticle-free, lithography
US5994816A (en) 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5781331A (en) 1997-01-24 1998-07-14 Roxburgh Ltd. Optical microshutter array
US5808384A (en) 1997-06-05 1998-09-15 Wisconsin Alumni Research Foundation Single coil bistable, bidirectional micromechanical actuator
US6121626A (en) 1998-09-17 2000-09-19 Vanguard International Semiconductor Corporation Method and system of exposure with a universal dynamic mask and charge coupled device image feedback control

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5449146A (en) * 1994-11-07 1995-09-12 The Conair Group, Inc. Gate valve for particulate materials
US6190034B1 (en) * 1995-10-03 2001-02-20 Danfoss A/S Micro-mixer and mixing method
US6318402B1 (en) * 2000-05-25 2001-11-20 Richard Ladeira Pneumatic tank truck closure apparatus

Also Published As

Publication number Publication date
US20030058515A1 (en) 2003-03-27
US7106493B2 (en) 2006-09-12
AU2003272225A1 (en) 2004-03-11
WO2004018908A2 (en) 2004-03-04
AU2003272225A8 (en) 2004-03-11

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