WO2004023521A3 - Apparatus and method for detecting photon emissions from transistors - Google Patents

Apparatus and method for detecting photon emissions from transistors Download PDF

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Publication number
WO2004023521A3
WO2004023521A3 PCT/US2003/027267 US0327267W WO2004023521A3 WO 2004023521 A3 WO2004023521 A3 WO 2004023521A3 US 0327267 W US0327267 W US 0327267W WO 2004023521 A3 WO2004023521 A3 WO 2004023521A3
Authority
WO
WIPO (PCT)
Prior art keywords
transistors
analysis
correlation
emitted
photons
Prior art date
Application number
PCT/US2003/027267
Other languages
French (fr)
Other versions
WO2004023521A2 (en
Inventor
Romain Desplats
Philippe Perdu
Coupanec Patricia Le
William K Lo
Steven Kasapi
Original Assignee
Credence Systems Corp
Romain Desplats
Philippe Perdu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Credence Systems Corp, Romain Desplats, Philippe Perdu filed Critical Credence Systems Corp
Priority to AU2003268319A priority Critical patent/AU2003268319A1/en
Publication of WO2004023521A2 publication Critical patent/WO2004023521A2/en
Publication of WO2004023521A3 publication Critical patent/WO2004023521A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits

Abstract

A method (Figure 2) for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions (200). After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor (230). After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
PCT/US2003/027267 2002-09-03 2003-08-29 Apparatus and method for detecting photon emissions from transistors WO2004023521A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003268319A AU2003268319A1 (en) 2002-09-03 2003-08-29 Apparatus and method for detecting photon emissions from transistors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/234,231 US6891363B2 (en) 2002-09-03 2002-09-03 Apparatus and method for detecting photon emissions from transistors
US10/234,231 2002-09-03

Publications (2)

Publication Number Publication Date
WO2004023521A2 WO2004023521A2 (en) 2004-03-18
WO2004023521A3 true WO2004023521A3 (en) 2004-10-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/027267 WO2004023521A2 (en) 2002-09-03 2003-08-29 Apparatus and method for detecting photon emissions from transistors

Country Status (3)

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US (4) US6891363B2 (en)
AU (1) AU2003268319A1 (en)
WO (1) WO2004023521A2 (en)

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Also Published As

Publication number Publication date
WO2004023521A2 (en) 2004-03-18
US20050146321A1 (en) 2005-07-07
US6891363B2 (en) 2005-05-10
US20040041575A1 (en) 2004-03-04
US20060108997A1 (en) 2006-05-25
US7439730B2 (en) 2008-10-21
AU2003268319A1 (en) 2004-03-29
AU2003268319A8 (en) 2004-03-29
US7323862B2 (en) 2008-01-29
US7038442B2 (en) 2006-05-02
US20060181268A1 (en) 2006-08-17

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