WO2004049012A3 - Method of manufacturing a spectral filter for green and longer wavelengths - Google Patents

Method of manufacturing a spectral filter for green and longer wavelengths Download PDF

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Publication number
WO2004049012A3
WO2004049012A3 PCT/US2003/032926 US0332926W WO2004049012A3 WO 2004049012 A3 WO2004049012 A3 WO 2004049012A3 US 0332926 W US0332926 W US 0332926W WO 2004049012 A3 WO2004049012 A3 WO 2004049012A3
Authority
WO
WIPO (PCT)
Prior art keywords
filters
semiconductor wafer
bandpass
green
manufacturing
Prior art date
Application number
PCT/US2003/032926
Other languages
French (fr)
Other versions
WO2004049012A2 (en
Inventor
Vladimir Kochergin
Philip Swinehart
Original Assignee
Lake Shore Cryotronics Inc
Vladimir Kochergin
Philip Swinehart
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lake Shore Cryotronics Inc, Vladimir Kochergin, Philip Swinehart filed Critical Lake Shore Cryotronics Inc
Priority to AU2003302230A priority Critical patent/AU2003302230A1/en
Publication of WO2004049012A2 publication Critical patent/WO2004049012A2/en
Publication of WO2004049012A3 publication Critical patent/WO2004049012A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1073—Beam splitting or combining systems characterized by manufacturing or alignment methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices

Abstract

A method of manufacture for optical spectral filters with omnidirectional properties in the visible, near IR, mid IR and/or far IR (infrared) spectral ranges is based an the formation of large arrays of coherently modulated waveguides by electrochemical etching of a semiconductor wafer to form a pore array. Further processing of said porous semiconductor wafer optimizes the filtering properties of such a material. The method of filter manufacturing is large scale compatible and economically favorable. The resulting exemplary non-limiting illustrative filters are stable, do not degrade over time, do not exhibit material delamination problems and offer superior transmittance for use as bandpass, band blocking and narrow-bandpass filters. Such filters are useful for a wide variety of applications including but not limited to spectroscopy, optical communications, astronomy and sensing.
PCT/US2003/032926 2002-10-16 2003-10-16 Method of manufacturing a spectral filter for green and longer wavelengths WO2004049012A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003302230A AU2003302230A1 (en) 2002-10-16 2003-10-16 Method of manufacturing a spectral filter for green and longer wavelengths

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41836102P 2002-10-16 2002-10-16
US60/418,361 2002-10-16

Publications (2)

Publication Number Publication Date
WO2004049012A2 WO2004049012A2 (en) 2004-06-10
WO2004049012A3 true WO2004049012A3 (en) 2005-02-03

Family

ID=32107921

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2003/032925 WO2004036265A2 (en) 2002-10-16 2003-10-16 Spectral filter for green and longer wavelengths
PCT/US2003/032926 WO2004049012A2 (en) 2002-10-16 2003-10-16 Method of manufacturing a spectral filter for green and longer wavelengths

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2003/032925 WO2004036265A2 (en) 2002-10-16 2003-10-16 Spectral filter for green and longer wavelengths

Country Status (4)

Country Link
US (3) US7045052B2 (en)
EP (1) EP1552328A4 (en)
AU (2) AU2003301367A1 (en)
WO (2) WO2004036265A2 (en)

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Also Published As

Publication number Publication date
EP1552328A4 (en) 2005-12-14
WO2004036265A3 (en) 2004-12-29
US20050199510A1 (en) 2005-09-15
US7628906B2 (en) 2009-12-08
AU2003302230A1 (en) 2004-06-18
US7139459B2 (en) 2006-11-21
US20040134879A1 (en) 2004-07-15
WO2004036265A2 (en) 2004-04-29
US7045052B2 (en) 2006-05-16
WO2004049012A2 (en) 2004-06-10
AU2003301367A1 (en) 2004-05-04
US20050276536A1 (en) 2005-12-15
EP1552328A2 (en) 2005-07-13
AU2003302230A8 (en) 2004-06-18
AU2003301367A8 (en) 2004-05-04

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