WO2004061899A3 - Monitoring material buildup on system components by optical emission - Google Patents

Monitoring material buildup on system components by optical emission Download PDF

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Publication number
WO2004061899A3
WO2004061899A3 PCT/US2003/039109 US0339109W WO2004061899A3 WO 2004061899 A3 WO2004061899 A3 WO 2004061899A3 US 0339109 W US0339109 W US 0339109W WO 2004061899 A3 WO2004061899 A3 WO 2004061899A3
Authority
WO
WIPO (PCT)
Prior art keywords
system components
material buildup
emitters
light emission
fluorescent light
Prior art date
Application number
PCT/US2003/039109
Other languages
French (fr)
Other versions
WO2004061899A2 (en
Inventor
Audunn Ludviksson
Eric J Strang
Original Assignee
Tokyo Electron Ltd
Audunn Ludviksson
Eric J Strang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Audunn Ludviksson, Eric J Strang filed Critical Tokyo Electron Ltd
Priority to AU2003296395A priority Critical patent/AU2003296395A1/en
Priority to JP2004565287A priority patent/JP4763293B2/en
Publication of WO2004061899A2 publication Critical patent/WO2004061899A2/en
Publication of WO2004061899A3 publication Critical patent/WO2004061899A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence

Abstract

A method and system are provided for monitoring material buildup on system components in a plasma processing system. The system components contain emitters that are capable of producing characteristic fluorescent light emission when exposed to a plasma. The method utilizes optical emission to monitor fluorescent light emission from the emitters for determining system component status. The method can evaluate material buildup on system components in a plasma, by monitoring fluorescent light emission from the emitters. Consumable system components that can be monitored using the method include rings, shields, electrodes, baffles, and liners.
PCT/US2003/039109 2002-12-31 2003-12-24 Monitoring material buildup on system components by optical emission WO2004061899A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2003296395A AU2003296395A1 (en) 2002-12-31 2003-12-24 Monitoring material buildup on system components by optical emission
JP2004565287A JP4763293B2 (en) 2002-12-31 2003-12-24 Monitoring material adhesion to system components by light radiation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/331,349 US6806949B2 (en) 2002-12-31 2002-12-31 Monitoring material buildup on system components by optical emission
US10/331,349 2002-12-31

Publications (2)

Publication Number Publication Date
WO2004061899A2 WO2004061899A2 (en) 2004-07-22
WO2004061899A3 true WO2004061899A3 (en) 2004-12-16

Family

ID=32654710

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/039109 WO2004061899A2 (en) 2002-12-31 2003-12-24 Monitoring material buildup on system components by optical emission

Country Status (4)

Country Link
US (1) US6806949B2 (en)
JP (1) JP4763293B2 (en)
AU (1) AU2003296395A1 (en)
WO (1) WO2004061899A2 (en)

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Also Published As

Publication number Publication date
US6806949B2 (en) 2004-10-19
AU2003296395A1 (en) 2004-07-29
AU2003296395A8 (en) 2004-07-29
JP4763293B2 (en) 2011-08-31
JP2006512769A (en) 2006-04-13
WO2004061899A2 (en) 2004-07-22
US20040125359A1 (en) 2004-07-01

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