WO2004062050A3 - Method and apparatus for generating a membrane target for laser produced plasma - Google Patents
Method and apparatus for generating a membrane target for laser produced plasma Download PDFInfo
- Publication number
- WO2004062050A3 WO2004062050A3 PCT/US2003/041694 US0341694W WO2004062050A3 WO 2004062050 A3 WO2004062050 A3 WO 2004062050A3 US 0341694 W US0341694 W US 0341694W WO 2004062050 A3 WO2004062050 A3 WO 2004062050A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membranes
- target
- membrane
- illumination
- advantageous
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003303542A AU2003303542A1 (en) | 2003-01-02 | 2003-12-31 | Method and apparatus for generating a membrane target for laser produced plasma |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43764703P | 2003-01-02 | 2003-01-02 | |
US60/437,647 | 2003-01-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004062050A2 WO2004062050A2 (en) | 2004-07-22 |
WO2004062050A3 true WO2004062050A3 (en) | 2005-02-10 |
Family
ID=32713212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/041694 WO2004062050A2 (en) | 2003-01-02 | 2003-12-31 | Method and apparatus for generating a membrane target for laser produced plasma |
Country Status (3)
Country | Link |
---|---|
US (1) | US6977383B2 (en) |
AU (1) | AU2003303542A1 (en) |
WO (1) | WO2004062050A2 (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7465946B2 (en) * | 2004-03-10 | 2008-12-16 | Cymer, Inc. | Alternative fuels for EUV light source |
DE10219173A1 (en) * | 2002-04-30 | 2003-11-20 | Philips Intellectual Property | Process for the generation of extreme ultraviolet radiation |
WO2005094318A2 (en) * | 2004-03-29 | 2005-10-13 | Jmar Research, Inc. | Morphology and spectroscopy of nanoscale regions using x-rays generated by laser produced plasma |
EP1775756B1 (en) * | 2004-06-24 | 2011-09-21 | Nikon Corporation | Euv light source, euv exposure equipment and semiconductor device manufacturing method |
US7302043B2 (en) * | 2004-07-27 | 2007-11-27 | Gatan, Inc. | Rotating shutter for laser-produced plasma debris mitigation |
JPWO2006075535A1 (en) * | 2005-01-12 | 2008-06-12 | 株式会社ニコン | Laser plasma EUV light source, target member, tape member, target member manufacturing method, target supply method, and EUV exposure apparatus |
US7449703B2 (en) * | 2005-02-25 | 2008-11-11 | Cymer, Inc. | Method and apparatus for EUV plasma source target delivery target material handling |
DE102005023060B4 (en) * | 2005-05-19 | 2011-01-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Gas discharge radiation source, in particular for EUV radiation |
CN100498420C (en) * | 2005-11-04 | 2009-06-10 | 中国科学院电工研究所 | Fragment isolator for plasma light source of extreme ultraviolet laser |
JP5075389B2 (en) * | 2006-10-16 | 2012-11-21 | ギガフォトン株式会社 | Extreme ultraviolet light source device |
JP5386799B2 (en) * | 2007-07-06 | 2014-01-15 | 株式会社ニコン | EUV light source, EUV exposure apparatus, EUV light emission method, EUV exposure method, and electronic device manufacturing method |
US20090218521A1 (en) * | 2008-02-08 | 2009-09-03 | Nikon Corporation | Gaseous neutral density filters and related methods |
JP5657535B2 (en) * | 2008-07-18 | 2015-01-21 | コーニンクレッカ フィリップス エヌ ヴェ | Extreme ultraviolet radiation generator including contaminant traps |
US8976932B2 (en) * | 2010-07-09 | 2015-03-10 | Bsr Co., Ltd. | X-ray generating device |
WO2013107860A1 (en) * | 2012-01-19 | 2013-07-25 | Technische Universität Dresden | Arrangement and method for generating accelerated particles from targets for radiotherapy |
JP6010438B2 (en) * | 2012-11-27 | 2016-10-19 | 浜松ホトニクス株式会社 | Quantum beam generating apparatus, quantum beam generating method, and laser fusion apparatus |
TWI605788B (en) * | 2016-10-26 | 2017-11-21 | 財團法人工業技術研究院 | Laser apparatus |
US10887973B2 (en) * | 2018-08-14 | 2021-01-05 | Isteq B.V. | High brightness laser-produced plasma light source |
RU2670273C2 (en) * | 2017-11-24 | 2018-10-22 | Общество с ограниченной ответственностью "РнД-ИСАН" | Device and method for emission generation from laser plasma |
US10880982B2 (en) * | 2018-07-31 | 2020-12-29 | Taiwan Semiconductor Manufacturing Company Ltd. | Light generation system using metal-nonmetal compound as precursor and related light generation method |
US11310902B2 (en) * | 2018-08-27 | 2022-04-19 | Dana-Farber Cancer Institute, Inc. | Compact multi-isotope solid target system utilizing liquid retrieval |
CN113728410A (en) * | 2019-04-26 | 2021-11-30 | Euv实验室有限公司 | X-ray source with rotating liquid metal target |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040171017A1 (en) * | 2001-07-02 | 2004-09-02 | Giuseppe Firrao | Method to distribute liquids containing molecules in solution and to deposit said molecules on solid supports, and relative device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5577091A (en) * | 1994-04-01 | 1996-11-19 | University Of Central Florida | Water laser plasma x-ray point sources |
US5459771A (en) * | 1994-04-01 | 1995-10-17 | University Of Central Florida | Water laser plasma x-ray point source and apparatus |
US6377651B1 (en) * | 1999-10-11 | 2002-04-23 | University Of Central Florida | Laser plasma source for extreme ultraviolet lithography using a water droplet target |
US6831963B2 (en) * | 2000-10-20 | 2004-12-14 | University Of Central Florida | EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
-
2003
- 2003-12-31 US US10/750,022 patent/US6977383B2/en not_active Expired - Fee Related
- 2003-12-31 WO PCT/US2003/041694 patent/WO2004062050A2/en not_active Application Discontinuation
- 2003-12-31 AU AU2003303542A patent/AU2003303542A1/en not_active Abandoned
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040171017A1 (en) * | 2001-07-02 | 2004-09-02 | Giuseppe Firrao | Method to distribute liquids containing molecules in solution and to deposit said molecules on solid supports, and relative device |
Also Published As
Publication number | Publication date |
---|---|
AU2003303542A8 (en) | 2004-07-29 |
WO2004062050A2 (en) | 2004-07-22 |
AU2003303542A1 (en) | 2004-07-29 |
US20040200977A1 (en) | 2004-10-14 |
US6977383B2 (en) | 2005-12-20 |
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