WO2004084607A3 - High smsr unidirectional etched lasers and low back-reflection photonic device - Google Patents

High smsr unidirectional etched lasers and low back-reflection photonic device Download PDF

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Publication number
WO2004084607A3
WO2004084607A3 PCT/US2004/008063 US2004008063W WO2004084607A3 WO 2004084607 A3 WO2004084607 A3 WO 2004084607A3 US 2004008063 W US2004008063 W US 2004008063W WO 2004084607 A3 WO2004084607 A3 WO 2004084607A3
Authority
WO
WIPO (PCT)
Prior art keywords
laser
photonic device
unidirectional
low back
lasers
Prior art date
Application number
PCT/US2004/008063
Other languages
French (fr)
Other versions
WO2004084607A2 (en
Inventor
Alex A Behfar
Alfred T Schremer Jr
Cristian B Stagarescu
Original Assignee
Binoptics Corp
Alex A Behfar
Alfred T Schremer Jr
Cristian B Stagarescu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Binoptics Corp, Alex A Behfar, Alfred T Schremer Jr, Cristian B Stagarescu filed Critical Binoptics Corp
Priority to EP04757753A priority Critical patent/EP1609221A4/en
Priority to JP2006507249A priority patent/JP2006521018A/en
Publication of WO2004084607A2 publication Critical patent/WO2004084607A2/en
Publication of WO2004084607A3 publication Critical patent/WO2004084607A3/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/028Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • H01S5/0287Facet reflectivity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068Stabilisation of laser output parameters
    • H01S5/06817Noise reduction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068Stabilisation of laser output parameters
    • H01S5/0683Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687Stabilising the frequency of the laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1021Coupled cavities
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1071Ring-lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1082Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region with a special facet structure, e.g. structured, non planar, oblique
    • H01S5/1085Oblique facets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/125Distributed Bragg reflector [DBR] lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0085Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for modulating the output, i.e. the laser beam is modulated outside the laser cavity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/065Mode locking; Mode suppression; Mode selection ; Self pulsating
    • H01S5/0656Seeding, i.e. an additional light input is provided for controlling the laser modes, for example by back-reflecting light from an external optical component
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1082Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region with a special facet structure, e.g. structured, non planar, oblique
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers

Abstract

Unidirectionality of lasers is enhanced by forming one or more etched gaps (78, 80) in the laser cavity. The gaps may be provided in any segment of a laser, such as any leg of a ring laser, or in one leg (62) of a V-shaped laser (60). A Brewster angle facet at the distal end of a photonic device coupled to the laser reduces back-reflection into the laser cavity. A distributed Bragg reflector is used at the output of a laser to enhance the side-mode suppression ratio of the laser.
PCT/US2004/008063 2003-03-19 2004-03-18 High smsr unidirectional etched lasers and low back-reflection photonic device WO2004084607A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP04757753A EP1609221A4 (en) 2003-03-19 2004-03-18 High smsr unidirectional etched lasers and low back-reflection photonic device
JP2006507249A JP2006521018A (en) 2003-03-19 2004-03-18 High SMSR unidirectional etching laser and low back reflection optical functional device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US45556203P 2003-03-19 2003-03-19
US60/455,562 2003-03-19

Publications (2)

Publication Number Publication Date
WO2004084607A2 WO2004084607A2 (en) 2004-10-07
WO2004084607A3 true WO2004084607A3 (en) 2005-06-16

Family

ID=33098064

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/008063 WO2004084607A2 (en) 2003-03-19 2004-03-18 High smsr unidirectional etched lasers and low back-reflection photonic device

Country Status (5)

Country Link
US (3) US7817702B2 (en)
EP (1) EP1609221A4 (en)
JP (1) JP2006521018A (en)
CN (1) CN100524980C (en)
WO (1) WO2004084607A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004084607A2 (en) 2003-03-19 2004-10-07 Binoptics Corporation High smsr unidirectional etched lasers and low back-reflection photonic device
US7656922B2 (en) * 2004-04-15 2010-02-02 Binoptics Corporation Multi-level integrated photonic devices
US11221764B2 (en) * 2010-01-29 2022-01-11 Mosys, Inc. Partitioned memory with shared memory resources and configurable functions
KR20140130674A (en) 2012-02-29 2014-11-11 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. Unidirectional ring lasers
EP4264344A1 (en) * 2020-12-18 2023-10-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical component

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4924476A (en) * 1987-12-04 1990-05-08 Cornell Research Foundation, Inc. Traveling wave semi-conductor laser
US5793521A (en) * 1992-09-21 1998-08-11 Sdl Inc. Differentially patterned pumped optical semiconductor gain media

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743485A (en) * 1980-08-13 1982-03-11 Agency Of Ind Science & Technol Semiconductor ring laser device
US4464762A (en) * 1982-02-22 1984-08-07 Bell Telephone Laboratories, Incorporated Monolithically integrated distributed Bragg reflector laser
US4575658A (en) * 1983-12-23 1986-03-11 Honeywell Inc. Power supply for a ring laser
JPS649679A (en) * 1987-07-02 1989-01-12 Kokusai Denshin Denwa Co Ltd Semiconductor laser of long resonator length
US4851368A (en) * 1987-12-04 1989-07-25 Cornell Research Foundation, Inc. Method of making travelling wave semi-conductor laser
JPH07109916B2 (en) * 1988-05-26 1995-11-22 浜松ホトニクス株式会社 Light intensity stabilizer
GB2228339B (en) * 1988-09-09 1992-07-08 Plessey Co Plc A waveguide corner
US4986661A (en) * 1988-09-21 1991-01-22 Rockwell International Corporation Solid state fiber optic semiconductor ring laser apparatus
US4952019A (en) * 1988-10-27 1990-08-28 General Electric Company Grating-coupled surface-emitting superluminescent device
US4965525A (en) * 1989-11-13 1990-10-23 Bell Communications Research, Inc. Angled-facet flared-waveguide traveling-wave laser amplifiers
US5031190A (en) * 1990-05-17 1991-07-09 Cornell Research Foundation, Inc. Optical logic using semiconductor ring lasers
US5132983A (en) * 1990-05-17 1992-07-21 Cornell Research Foundation, Inc. Optical logic using semiconductor ring lasers
US5088824A (en) * 1990-07-31 1992-02-18 Honeywell Inc. Laser beam control for a ring-laser gyro
US5088105A (en) * 1991-03-26 1992-02-11 Spectra Diode Laboratories, Inc. Optical amplifier with folded light path and laser-amplifier combination
US5241555A (en) * 1991-10-28 1993-08-31 Spitzer Mark B Semiconductor single crystal external ring resonator cavity laser and gyroscope
JPH05167197A (en) * 1991-12-18 1993-07-02 Hamamatsu Photonics Kk Optical semiconductor device
DE69315872T2 (en) * 1992-03-23 1998-05-20 Canon Kk Optical device and method using this device, which takes advantage of the change in a voltage drop across the two connection ends of a reinforcing region
US5327448A (en) * 1992-03-30 1994-07-05 The Board Of Trustees Of The University Of Illinois Semiconductor devices and techniques for controlled optical confinement
DE4212152A1 (en) * 1992-04-10 1993-10-14 Sel Alcatel Ag Tunable semiconductor laser
US5434426A (en) * 1992-09-10 1995-07-18 Kabushiki Kaisha Toshiba Optical interconnection device
EP0598966B1 (en) * 1992-11-24 1999-02-10 International Business Machines Corporation Optical waveguide isolator
US5392308A (en) * 1993-01-07 1995-02-21 Sdl, Inc. Semiconductor laser with integral spatial mode filter
US5504772A (en) * 1994-09-09 1996-04-02 Deacon Research Laser with electrically-controlled grating reflector
EP0755104A1 (en) * 1995-07-21 1997-01-22 Hewlett-Packard GmbH Method for adjusting a laser resonator
US5764681A (en) 1995-11-03 1998-06-09 Cornell Research Foundation, Inc. Directional control method and apparatus for ring laser
US6177710B1 (en) * 1996-06-13 2001-01-23 The Furukawa Electric Co., Ltd. Semiconductor waveguide type photodetector and method for manufacturing the same
US6075799A (en) * 1996-08-28 2000-06-13 Canon Kabushiki Kaisha Polarization selective semiconductor laser, optical transmitter using the same, optical communication system using the same and fabrication method of the same
US6543029B1 (en) 1999-09-29 2003-04-01 Emc Corporation Error corrector
EP1130717A3 (en) * 1999-12-06 2003-03-19 Fuji Photo Film Co., Ltd. Semiconductor laser light source with external cavity
JP3531917B2 (en) * 2000-07-12 2004-05-31 キヤノン株式会社 Ring laser
JP2002176224A (en) * 2000-12-07 2002-06-21 Fuji Photo Film Co Ltd Laser beam source
US6546029B2 (en) * 2001-03-15 2003-04-08 Ecole Polytechnique Federale De Lausanne Micro-electromechanically tunable vertical cavity photonic device and a method of fabrication thereof
DE60130193T2 (en) * 2001-05-02 2008-05-15 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Device for controlling the wavelength of a laser
US20030108080A1 (en) 2001-08-01 2003-06-12 Binoptics, Inc Unidirectional curved ring lasers
US20030026316A1 (en) * 2001-08-01 2003-02-06 Binoptics, Inc. Wavelength tunable ring lasers
US6680961B2 (en) * 2001-08-01 2004-01-20 Binoptics, Inc. Curved waveguide ring laser
WO2004084607A2 (en) 2003-03-19 2004-10-07 Binoptics Corporation High smsr unidirectional etched lasers and low back-reflection photonic device
EP1813975B1 (en) * 2003-03-31 2010-08-25 Nippon Telegraph And Telephone Corporation Optical semiconductor device and optical semiconductor integrated circuit
KR100539928B1 (en) * 2003-08-29 2005-12-28 삼성전자주식회사 Multi-wavelength light source and wavelength division multiplexing system using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4924476A (en) * 1987-12-04 1990-05-08 Cornell Research Foundation, Inc. Traveling wave semi-conductor laser
US5793521A (en) * 1992-09-21 1998-08-11 Sdl Inc. Differentially patterned pumped optical semiconductor gain media

Also Published As

Publication number Publication date
US10063028B2 (en) 2018-08-28
US7817702B2 (en) 2010-10-19
JP2006521018A (en) 2006-09-14
EP1609221A2 (en) 2005-12-28
EP1609221A4 (en) 2006-05-24
CN100524980C (en) 2009-08-05
US20150049777A1 (en) 2015-02-19
US20110019708A1 (en) 2011-01-27
US20040184506A1 (en) 2004-09-23
US8891576B2 (en) 2014-11-18
WO2004084607A2 (en) 2004-10-07
CN1795591A (en) 2006-06-28

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