WO2004092830A3 - Liquid jet and recovery system for immersion lithography - Google Patents

Liquid jet and recovery system for immersion lithography Download PDF

Info

Publication number
WO2004092830A3
WO2004092830A3 PCT/US2004/010071 US2004010071W WO2004092830A3 WO 2004092830 A3 WO2004092830 A3 WO 2004092830A3 US 2004010071 W US2004010071 W US 2004010071W WO 2004092830 A3 WO2004092830 A3 WO 2004092830A3
Authority
WO
WIPO (PCT)
Prior art keywords
nozzles
immersion lithography
exposure region
liquid jet
serve
Prior art date
Application number
PCT/US2004/010071
Other languages
French (fr)
Other versions
WO2004092830A2 (en
Inventor
W Thomas Novak
Andrew J Hazelton
Douglas C Watson
Original Assignee
Nippon Kogaku Kk
W Thomas Novak
Andrew J Hazelton
Douglas C Watson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2006509591A priority Critical patent/JP4582089B2/en
Application filed by Nippon Kogaku Kk, W Thomas Novak, Andrew J Hazelton, Douglas C Watson filed Critical Nippon Kogaku Kk
Publication of WO2004092830A2 publication Critical patent/WO2004092830A2/en
Publication of WO2004092830A3 publication Critical patent/WO2004092830A3/en
Priority to US11/236,759 priority patent/US7443482B2/en
Priority to US11/808,850 priority patent/US7932989B2/en
Priority to US12/232,513 priority patent/US8059258B2/en
Priority to US12/923,948 priority patent/US20110031416A1/en
Priority to US13/200,982 priority patent/US20120019792A1/en
Priority to US14/283,827 priority patent/US9304409B2/en
Priority to US15/086,675 priority patent/US9785057B2/en
Priority to US15/723,628 priority patent/US10185222B2/en
Priority to US16/234,264 priority patent/US20190129311A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

Abstract

A liquid jet and recovery system for an immersion lithography apparatus (100) has arrays of nozzles arranged to have their openings located proximal to an exposure region through which an image pattern is projected on a workpiece (W) such as a wafer. These nozzles are each adapted to serve selectively either as a source nozzle (21) for supplying a fluid (7) into the exposure region or as a recovery nozzle (23) for recovering the fluid from the exposure region. A fluid controlling device (14) functions to cause nozzles on selected one or more sides of the exposure region to serve as source nozzles and those on selected one or more of the remaining sides to serve as recovery nozzles such that a desired flow pattern can be established for the convenience of immersion lithography.
PCT/US2004/010071 2003-04-11 2004-04-01 Liquid jet and recovery system for immersion lithography WO2004092830A2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2006509591A JP4582089B2 (en) 2003-04-11 2004-04-01 Liquid jet recovery system for immersion lithography
US11/236,759 US7443482B2 (en) 2003-04-11 2005-09-28 Liquid jet and recovery system for immersion lithography
US11/808,850 US7932989B2 (en) 2003-04-11 2007-06-13 Liquid jet and recovery system for immersion lithography
US12/232,513 US8059258B2 (en) 2003-04-11 2008-09-18 Liquid jet and recovery system for immersion lithography
US12/923,948 US20110031416A1 (en) 2003-04-11 2010-10-15 Liquid jet and recovery system for immersion lithography
US13/200,982 US20120019792A1 (en) 2003-04-11 2011-10-06 Liquid jet and recovery system for immersion lithography
US14/283,827 US9304409B2 (en) 2003-04-11 2014-05-21 Liquid jet and recovery system for immersion lithography
US15/086,675 US9785057B2 (en) 2003-04-11 2016-03-31 Liquid jet and recovery system for immersion lithography
US15/723,628 US10185222B2 (en) 2003-04-11 2017-10-03 Liquid jet and recovery system for immersion lithography
US16/234,264 US20190129311A1 (en) 2003-04-11 2018-12-27 Liquid jet and recovery system for immersion lithography

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US46278603P 2003-04-11 2003-04-11
US60/462,786 2003-04-11

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/236,759 Continuation US7443482B2 (en) 2003-04-11 2005-09-28 Liquid jet and recovery system for immersion lithography

Publications (2)

Publication Number Publication Date
WO2004092830A2 WO2004092830A2 (en) 2004-10-28
WO2004092830A3 true WO2004092830A3 (en) 2005-06-16

Family

ID=33299990

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/010071 WO2004092830A2 (en) 2003-04-11 2004-04-01 Liquid jet and recovery system for immersion lithography

Country Status (3)

Country Link
US (9) US7443482B2 (en)
JP (1) JP4582089B2 (en)
WO (1) WO2004092830A2 (en)

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US9256136B2 (en) 2010-04-22 2016-02-09 Asml Netherlands B.V. Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply

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US20120019792A1 (en) 2012-01-26
US20180024442A1 (en) 2018-01-25
US9304409B2 (en) 2016-04-05
US9785057B2 (en) 2017-10-10
US10185222B2 (en) 2019-01-22
US20060023183A1 (en) 2006-02-02
US20160209762A1 (en) 2016-07-21
US8059258B2 (en) 2011-11-15
WO2004092830A2 (en) 2004-10-28
JP4582089B2 (en) 2010-11-17
US7443482B2 (en) 2008-10-28
US20140253888A1 (en) 2014-09-11
US20110031416A1 (en) 2011-02-10
US20090051888A1 (en) 2009-02-26

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