WO2004093151A3 - Tray carrier with ultraphobic surfaces - Google Patents
Tray carrier with ultraphobic surfaces Download PDFInfo
- Publication number
- WO2004093151A3 WO2004093151A3 PCT/US2004/011540 US2004011540W WO2004093151A3 WO 2004093151 A3 WO2004093151 A3 WO 2004093151A3 US 2004011540 W US2004011540 W US 2004011540W WO 2004093151 A3 WO2004093151 A3 WO 2004093151A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ultraphobic
- carrier
- contaminants
- drying
- liquid
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L9/00—Supporting devices; Holding devices
- B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
- B01L9/527—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips for microfluidic devices, e.g. used for lab-on-a-chip
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
- B08B17/06—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
- B08B17/06—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement
- B08B17/065—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement the surface having a microscopic surface pattern to achieve the same effect as a lotus flower
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
- F15D1/00—Influencing flow of fluids
- F15D1/02—Influencing flow of fluids in pipes or conduits
- F15D1/06—Influencing flow of fluids in pipes or conduits by influencing the boundary layer
- F15D1/065—Whereby an element is dispersed in a pipe over the whole length or whereby several elements are regularly distributed in a pipe
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L13/00—Cleaning or rinsing apparatus
- B01L13/02—Cleaning or rinsing apparatus for receptacle or instruments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/16—Surface properties and coatings
- B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
- B01L2300/165—Specific details about hydrophobic, oleophobic surfaces
- B01L2300/166—Suprahydrophobic; Ultraphobic; Lotus-effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L9/00—Supporting devices; Holding devices
- B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0235—Containers
- B65G2201/0258—Trays, totes or bins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006510044A JP2006524615A (en) | 2003-04-15 | 2004-04-14 | Tray carrier with super water-repellent surface |
EP04750127A EP1622819A4 (en) | 2003-04-15 | 2004-04-14 | Tray carrier with ultraphobic surfaces |
CA002522913A CA2522913A1 (en) | 2003-04-15 | 2004-04-14 | Tray carrier with ultraphobic surfaces |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46296303P | 2003-04-15 | 2003-04-15 | |
US60/462,963 | 2003-04-15 | ||
US10/454,740 US6938774B2 (en) | 2003-04-15 | 2003-06-03 | Tray carrier with ultraphobic surfaces |
US10/454,740 | 2003-06-03 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2004093151A2 WO2004093151A2 (en) | 2004-10-28 |
WO2004093151A3 true WO2004093151A3 (en) | 2005-03-03 |
WO2004093151B1 WO2004093151B1 (en) | 2005-04-14 |
Family
ID=33162174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/011540 WO2004093151A2 (en) | 2003-04-15 | 2004-04-14 | Tray carrier with ultraphobic surfaces |
Country Status (7)
Country | Link |
---|---|
US (2) | US6938774B2 (en) |
EP (1) | EP1622819A4 (en) |
JP (1) | JP2006524615A (en) |
KR (1) | KR20060003002A (en) |
CA (1) | CA2522913A1 (en) |
TW (1) | TW200510093A (en) |
WO (1) | WO2004093151A2 (en) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6911276B2 (en) * | 2003-04-15 | 2005-06-28 | Entegris, Inc. | Fuel cell with ultraphobic surfaces |
US6938774B2 (en) * | 2003-04-15 | 2005-09-06 | Entegris, Inc. | Tray carrier with ultraphobic surfaces |
US6845788B2 (en) * | 2003-04-15 | 2005-01-25 | Entegris, Inc. | Fluid handling component with ultraphobic surfaces |
JP4295712B2 (en) | 2003-11-14 | 2009-07-15 | エーエスエムエル ネザーランズ ビー.ブイ. | Lithographic apparatus and apparatus manufacturing method |
US20070062594A1 (en) * | 2005-09-16 | 2007-03-22 | Extrand Charles W | Microfluidic device with anisotropic wetting surfaces |
US20070065702A1 (en) * | 2005-09-16 | 2007-03-22 | Extrand Charles W | Fuel cell with anisotropic wetting surfaces |
US20070065637A1 (en) * | 2005-09-16 | 2007-03-22 | Extrand Charles W | Carrier with anisotropic wetting surfaces |
GB0801820D0 (en) * | 2008-02-01 | 2008-03-05 | Univ Coventry | Container for waste electrical and electronic equipment |
US11786036B2 (en) | 2008-06-27 | 2023-10-17 | Ssw Advanced Technologies, Llc | Spill containing refrigerator shelf assembly |
US8286561B2 (en) | 2008-06-27 | 2012-10-16 | Ssw Holding Company, Inc. | Spill containing refrigerator shelf assembly |
CA2739920C (en) | 2008-10-07 | 2017-12-12 | Ross Technology Corporation | Spill-resistant surfaces having hydrophobic and oleophobic borders |
MX343584B (en) | 2009-11-04 | 2016-11-10 | Ssw Holding Co Inc | Cooking appliance surfaces having spill containment pattern and methods of making the same. |
TW201118022A (en) * | 2009-11-27 | 2011-06-01 | Domintech Co Ltd | Method of delivering electronic component |
BR112012023312A2 (en) | 2010-03-15 | 2019-09-24 | Ross Tech Corporation | plunger and hydrophobic surface production methods |
RU2445518C1 (en) * | 2010-07-30 | 2012-03-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования"Ульяновский государственный технический университет" | Method of reducing friction of turbulent gas flow |
RU2445519C1 (en) * | 2010-07-30 | 2012-03-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Surface flown over by turbulent gas flow |
BR112013021231A2 (en) | 2011-02-21 | 2019-09-24 | Ross Tech Corporation | superhydrophobic and oleophobic coatings with low voc bonding systems |
DE102011085428A1 (en) | 2011-10-28 | 2013-05-02 | Schott Ag | shelf |
EP2791255B1 (en) | 2011-12-15 | 2017-11-01 | Ross Technology Corporation | Composition and coating for superhydrophobic performance |
WO2014003852A2 (en) | 2012-06-25 | 2014-01-03 | Ross Technology Corporation | Elastomeric coatings having hydrophobic and/or oleophobic properties |
US9406325B2 (en) | 2013-07-30 | 2016-08-02 | Seagate Technology Llc | Slider cleaning and carrier tray |
CN104517882B (en) * | 2013-09-30 | 2018-11-30 | 韩华泰科株式会社 | Width adjustable tray bracket component |
US10517415B2 (en) | 2017-01-18 | 2019-12-31 | The Boeing Company | Tray table trays |
CN107336798A (en) * | 2017-07-26 | 2017-11-10 | 弘大科技(北京)股份公司 | The super thin antifouling surface structure of drag reduction with retention layer self-repair function |
WO2019099156A1 (en) * | 2017-11-15 | 2019-05-23 | Laitram, L.L.C. | Superhydrophobic plastic conveyor components and methods for their molding |
CN112335349B (en) * | 2018-06-18 | 2022-05-03 | 株式会社富士 | Nozzle management device and nozzle management method |
CN109760918A (en) * | 2019-01-25 | 2019-05-17 | 安徽永锋防护科技股份有限公司 | A kind of EPP backing plate that chemical corrosion resistance is strong |
CN114305012A (en) * | 2021-12-06 | 2022-04-12 | 重庆大学 | Architectural design mobile station |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5788304A (en) * | 1996-05-17 | 1998-08-04 | Micron Technology, Inc. | Wafer carrier having both a rigid structure and resistance to corrosive environments |
US6079565A (en) * | 1998-12-28 | 2000-06-27 | Flouroware, Inc. | Clipless tray |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3354022A (en) * | 1964-03-31 | 1967-11-21 | Du Pont | Water-repellant surface |
WO1992018320A1 (en) | 1991-04-15 | 1992-10-29 | Rijksuniversiteit Groningen | Method for modifying fluorine-containing plastic, modified plastic and bio-material containing this plastic |
US5252835A (en) * | 1992-07-17 | 1993-10-12 | President And Trustees Of Harvard College | Machining oxide thin-films with an atomic force microscope: pattern and object formation on the nanometer scale |
US5900160A (en) | 1993-10-04 | 1999-05-04 | President And Fellows Of Harvard College | Methods of etching articles via microcontact printing |
US5609907A (en) | 1995-02-09 | 1997-03-11 | The Penn State Research Foundation | Self-assembled metal colloid monolayers |
US5674592A (en) * | 1995-05-04 | 1997-10-07 | Minnesota Mining And Manufacturing Company | Functionalized nanostructured films |
US6518168B1 (en) | 1995-08-18 | 2003-02-11 | President And Fellows Of Harvard College | Self-assembled monolayer directed patterning of surfaces |
US5725788A (en) | 1996-03-04 | 1998-03-10 | Motorola | Apparatus and method for patterning a surface |
AU727973B2 (en) | 1996-05-15 | 2001-01-04 | Hyperion Catalysis International Inc. | Rigid porous carbon structures, methods of making, methods of using and products containing same |
US6683783B1 (en) * | 1997-03-07 | 2004-01-27 | William Marsh Rice University | Carbon fibers formed from single-wall carbon nanotubes |
US6455021B1 (en) | 1998-07-21 | 2002-09-24 | Showa Denko K.K. | Method for producing carbon nanotubes |
JP4074018B2 (en) | 1998-12-22 | 2008-04-09 | 東芝松下ディスプレイテクノロジー株式会社 | Thin film patterning method |
US6652669B1 (en) * | 1998-12-24 | 2003-11-25 | Sunyx Surface Nanotechnologies Gmbh | Method for producing an ultraphobic surface on an aluminum base |
EP1144127A1 (en) | 1998-12-24 | 2001-10-17 | Bayer Aktiengesellschaft | Method for producing an ultraphobic surface by sand blasting |
JP3751778B2 (en) | 1999-04-26 | 2006-03-01 | 日本板硝子株式会社 | Method for producing sol-gel molded product |
US6209555B1 (en) * | 1999-04-27 | 2001-04-03 | Imtec Acculine, Inc. | Substrate cassette for ultrasonic cleaning |
US6312303B1 (en) | 1999-07-19 | 2001-11-06 | Si Diamond Technology, Inc. | Alignment of carbon nanotubes |
EP1129990A1 (en) * | 2000-02-25 | 2001-09-05 | Lucent Technologies Inc. | Process for controlled growth of carbon nanotubes |
US6444254B1 (en) | 2000-03-03 | 2002-09-03 | Duke University | Microstamping activated polymer surfaces |
WO2001079142A1 (en) | 2000-04-14 | 2001-10-25 | Nanogate Technologies Gmbh | Ceramic material surface with hydrophobic or ultraphobic properties and method for the production thereof |
DE10026299A1 (en) | 2000-05-26 | 2001-11-29 | Sunyx Surface Nanotechnologies | Substrate with a low light-scattering, ultraphobic surface and process for its production |
DE10028772B4 (en) | 2000-06-07 | 2005-03-17 | Technische Universität Dresden | Aluminum material with ultrahydrophobic surface, process for its preparation and use |
US6815363B2 (en) * | 2000-08-11 | 2004-11-09 | The Regents Of The University Of California | Method for nanomachining high aspect ratio structures |
KR100376768B1 (en) * | 2000-08-23 | 2003-03-19 | 한국과학기술연구원 | Parallel and selective growth and connection method of carbon nanotubes on the substrates for electronic-spintronic device applications |
JP2002333870A (en) * | 2000-10-31 | 2002-11-22 | Matsushita Electric Ind Co Ltd | Liquid crystal display device, el display device and drive method therefor and display pattern evaluation method of subpixel |
US6423372B1 (en) | 2000-12-13 | 2002-07-23 | North Carolina State University | Tailoring the grafting density of organic modifiers at solid/liquid interfaces |
US6403388B1 (en) | 2001-01-05 | 2002-06-11 | Advanced Micro Devices, Inc. | Nanomachining method for integrated circuits |
KR20030007470A (en) | 2001-02-01 | 2003-01-23 | 니혼 이타가라스 가부시키가이샤 | Method of manufacturing article with specified surface shape |
JP3991602B2 (en) * | 2001-03-02 | 2007-10-17 | 富士ゼロックス株式会社 | Carbon nanotube structure manufacturing method, wiring member manufacturing method, and wiring member |
DE60228943D1 (en) | 2001-04-10 | 2008-10-30 | Harvard College | MICROLINS FOR PROJECTION SLITHOGRAPHY AND ITS PRODUCTION PROCESS |
US6699525B2 (en) * | 2001-04-16 | 2004-03-02 | The Board Of Trustees Of Western Michigan University | Method of forming carbon nanotubes and apparatus therefor |
US6938774B2 (en) * | 2003-04-15 | 2005-09-06 | Entegris, Inc. | Tray carrier with ultraphobic surfaces |
-
2003
- 2003-06-03 US US10/454,740 patent/US6938774B2/en not_active Expired - Fee Related
-
2004
- 2004-04-14 EP EP04750127A patent/EP1622819A4/en not_active Withdrawn
- 2004-04-14 JP JP2006510044A patent/JP2006524615A/en active Pending
- 2004-04-14 CA CA002522913A patent/CA2522913A1/en not_active Abandoned
- 2004-04-14 WO PCT/US2004/011540 patent/WO2004093151A2/en not_active Application Discontinuation
- 2004-04-14 KR KR1020057019529A patent/KR20060003002A/en not_active Application Discontinuation
- 2004-04-15 TW TW093110483A patent/TW200510093A/en unknown
-
2005
- 2005-09-06 US US11/220,360 patent/US20060032781A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5788304A (en) * | 1996-05-17 | 1998-08-04 | Micron Technology, Inc. | Wafer carrier having both a rigid structure and resistance to corrosive environments |
US6079565A (en) * | 1998-12-28 | 2000-06-27 | Flouroware, Inc. | Clipless tray |
Non-Patent Citations (1)
Title |
---|
See also references of EP1622819A4 * |
Also Published As
Publication number | Publication date |
---|---|
CA2522913A1 (en) | 2004-10-28 |
US6938774B2 (en) | 2005-09-06 |
EP1622819A4 (en) | 2006-06-14 |
JP2006524615A (en) | 2006-11-02 |
US20060032781A1 (en) | 2006-02-16 |
EP1622819A2 (en) | 2006-02-08 |
KR20060003002A (en) | 2006-01-09 |
WO2004093151B1 (en) | 2005-04-14 |
TW200510093A (en) | 2005-03-16 |
WO2004093151A2 (en) | 2004-10-28 |
US20040206662A1 (en) | 2004-10-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2004093151A3 (en) | Tray carrier with ultraphobic surfaces | |
WO2004093152A3 (en) | Carrier with ultraphobic surfaces | |
ATE283119T1 (en) | METHOD FOR REMOVAL OF SURFACE CONTAMINATION | |
ATE467462T1 (en) | DEVICE, SYSTEM AND METHOD FOR THE SURFACE TREATMENT OF SUBSTRATES | |
CO5180603A1 (en) | IMPROVED CLEANING PANOS | |
RU2007105348A (en) | SILICON OXYCARBIDE COATING HAVING LONG-TERM HYDROPHILIC PROPERTIES | |
EP0618288B1 (en) | Compositions comprising pentafluorobutane and use thereof | |
PL1952427T3 (en) | Apparatus and method for wet-chemical processing of flat, thin substrates in a continuous method | |
HUP0003336A2 (en) | Wipes having a substrate with a discontinuous pattern of a high internal phase inverse emulsion disposed thereon and process of making | |
CA2067267A1 (en) | Composition containing 1,1,1,3,3-pentafluorobutane and methanol for the cleaning or drying of solid surfaces | |
JP2010064487A (en) | Instrument containing thermal conduction promoting metal, and its coating method | |
WO2005001888A3 (en) | Device and method for cleaning objects used to produce semiconductors, especially transport and cleaning containers for wafers | |
CO5130005A1 (en) | ANTIPERSPIRING MATERIAL AND COMPOSITIONS CONTAINING THEM | |
JP2003264169A5 (en) | ||
EP1288717A3 (en) | Phase shift mask blank, phase shift mask, and method of manufacture | |
CA2150408A1 (en) | Azeotrope and azeotrope-like compositions of octamethyltrisiloxane | |
WO2008102603A1 (en) | Substrate processing apparatus and substrate processing method | |
TW200608326A (en) | System and method for creating graphics on glass surfaces | |
MY144528A (en) | Method for manufacturing information recording medium glass substrate | |
TR200003860T2 (en) | The process for cleaning the carpet. | |
JP2008253940A (en) | Method for cleaning surface of religious corporeal object | |
WO2000007220A3 (en) | Wet processing methods for the manufacture of electronic components using ozonated process fluids | |
WO2007144378A3 (en) | Cleaning device and cleaning process for a plasma reactor | |
CA2554471A1 (en) | Self-powered settling and evaporation tank apparatus | |
JPS6469014A (en) | Method of cleaning semiconductor substrate |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
B | Later publication of amended claims |
Effective date: 20050216 |
|
DPEN | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed from 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2522913 Country of ref document: CA |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020057019529 Country of ref document: KR Ref document number: 2006510044 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2004750127 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 20048166228 Country of ref document: CN |
|
WWP | Wipo information: published in national office |
Ref document number: 1020057019529 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 2004750127 Country of ref document: EP |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 2004750127 Country of ref document: EP |