WO2004097464A3 - Multiple-core planar optical waveguides and methods of fabrication and use thereof - Google Patents

Multiple-core planar optical waveguides and methods of fabrication and use thereof Download PDF

Info

Publication number
WO2004097464A3
WO2004097464A3 PCT/US2004/013290 US2004013290W WO2004097464A3 WO 2004097464 A3 WO2004097464 A3 WO 2004097464A3 US 2004013290 W US2004013290 W US 2004013290W WO 2004097464 A3 WO2004097464 A3 WO 2004097464A3
Authority
WO
WIPO (PCT)
Prior art keywords
core
waveguide
waveguide core
planar optical
fabrication
Prior art date
Application number
PCT/US2004/013290
Other languages
French (fr)
Other versions
WO2004097464A2 (en
Inventor
Henry A Blauvelt
David W Vernooy
Joel S Paslaski
Original Assignee
Xponent Photonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xponent Photonics Inc filed Critical Xponent Photonics Inc
Publication of WO2004097464A2 publication Critical patent/WO2004097464A2/en
Publication of WO2004097464A3 publication Critical patent/WO2004097464A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1223—Basic optical elements, e.g. light-guiding paths high refractive index type, i.e. high-contrast waveguides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler

Abstract

A multiple-core planar optical waveguide comprises: a substantially planar waveguide substrate (802); a lower waveguide core (811); an upper waveguide core (812); lower cladding (820a) between the substrate (802) and the lower waveguide core (811); and upper cladding (820c) aobe the upper waveguide core (812). At least a portion the upper waveguide (812) core is positioned above and substantially parallel to at least a portion of the lower waveguide core (811). The lower and upper claddings have refractive indices less than refractive indices of the lower and upper waveguide cores. The width of the lower waveguide core is substantially larger than its thickness along at least a portion of its length, and is substantially flat along that portion of its length, thereby yielding a substantially flat surface for forming at least a portion of the upper waveguide core (812).
PCT/US2004/013290 2003-04-29 2004-04-29 Multiple-core planar optical waveguides and methods of fabrication and use thereof WO2004097464A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US46679903P 2003-04-29 2003-04-29
US60/466,799 2003-04-29
US10/609,018 2003-06-27
US10/609,018 US6975798B2 (en) 2002-07-05 2003-06-27 Waveguides assembled for transverse-transfer of optical power

Publications (2)

Publication Number Publication Date
WO2004097464A2 WO2004097464A2 (en) 2004-11-11
WO2004097464A3 true WO2004097464A3 (en) 2005-08-18

Family

ID=33423624

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/013290 WO2004097464A2 (en) 2003-04-29 2004-04-29 Multiple-core planar optical waveguides and methods of fabrication and use thereof

Country Status (2)

Country Link
US (3) US6975798B2 (en)
WO (1) WO2004097464A2 (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6987913B2 (en) 2001-10-30 2006-01-17 Xponent Photonics Inc Optical junction apparatus and methods employing optical power transverse-transfer
US6975798B2 (en) * 2002-07-05 2005-12-13 Xponent Photonics Inc Waveguides assembled for transverse-transfer of optical power
US7120336B2 (en) 2002-08-29 2006-10-10 Micron Technology, Inc. Resonator for thermo optic device
US7020365B2 (en) * 2002-08-29 2006-03-28 Micron Technology, Inc. Resistive heater for thermo optic device
US7006746B2 (en) 2002-08-29 2006-02-28 Micron Technology, Inc. Waveguide for thermo optic device
US7184643B2 (en) 2003-04-29 2007-02-27 Xponent Photonics Inc Multiple-core planar optical waveguides and methods of fabrication and use thereof
US7164838B2 (en) 2005-02-15 2007-01-16 Xponent Photonics Inc Multiple-core planar optical waveguides and methods of fabrication and use thereof
US20070147761A1 (en) * 2005-10-07 2007-06-28 Kwakernaak Martin H Amorphous silicon waveguides on lll/V substrates with barrier layer
WO2008048369A2 (en) * 2006-03-31 2008-04-24 Massachusetts Institute Of Technology Method and apparatus for modulation using a conductive waveguide
US7865053B2 (en) * 2006-12-29 2011-01-04 Alcatel-Lucent Usa Inc. Multi-semiconductor slab electro-optic modulator and process for using the same
JP5893005B2 (en) 2010-04-28 2016-03-23 華為技術有限公司Ｈｕａｗｅｉ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏ．，Ｌｔｄ． Bidirectional optoelectronic device and method for adjusting to minimum crosstalk penalty
US20130230274A1 (en) * 2012-03-05 2013-09-05 Gregory Alan Fish Photonic flexible interconnect
JP6114570B2 (en) * 2013-02-15 2017-04-12 富士通株式会社 Spot size converter, light source, optical transmitter, optical receiver, and optical transceiver
JP6247824B2 (en) * 2013-02-15 2017-12-13 富士通株式会社 Optical waveguide, optical interposer and light source
GB201313282D0 (en) * 2013-07-25 2013-09-11 Ibm Optically pumpable waveguide amplifier with amplifier having tapered input and output
US9423578B2 (en) 2013-08-01 2016-08-23 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device and method of manufacturing
US9759864B2 (en) 2014-02-28 2017-09-12 Ciena Corporation Spot-size converter for optical mode conversion and coupling between two waveguides
US10663663B2 (en) 2014-02-28 2020-05-26 Ciena Corporation Spot-size converter for optical mode conversion and coupling between two waveguides
EP3111262B1 (en) 2014-02-28 2022-05-04 Ciena Corporation High index element-based spot-size converter for optical mode conversion and evanescent coupling between two waveguides
US9509119B2 (en) 2015-01-13 2016-11-29 Futurewei Technologies, Inc. Tunable laser with a cascaded filter and comb reflector
CN108345066B (en) * 2018-01-27 2019-12-06 西安电子科技大学 intermediate infrared oxyfluoride glass ceramic Y-shaped waveguide beam splitter and preparation method thereof
CN110456451B (en) * 2019-08-14 2020-09-04 中国科学院微电子研究所 Preparation method of area thick film silicon nitride
US11567261B2 (en) * 2021-02-11 2023-01-31 Globalfoundries U.S. Inc. Metamaterial edge couplers in the back-end-of-line stack of a photonics chip
US20230393339A1 (en) * 2022-06-07 2023-12-07 Globalfoundries U.S. Inc. Light coupling between stacked photonics chips

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6034983A (en) * 1994-12-27 2000-03-07 Fujitsu Limited Method of fabricating compound semiconductor device and optical semiconductor device
US6330378B1 (en) * 2000-05-12 2001-12-11 The Trustees Of Princeton University Photonic integrated detector having a plurality of asymmetric waveguides
US6483863B2 (en) * 2001-01-19 2002-11-19 The Trustees Of Princeton University Asymmetric waveguide electroabsorption-modulated laser
US6600847B2 (en) * 2001-11-05 2003-07-29 Quantum Photonics, Inc Semiconductor optical device with improved efficiency and output beam characteristics

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3506569A1 (en) * 1985-02-25 1986-08-28 Manfred Prof. Dr. 7900 Ulm Börner INTEGRATED RESONATOR MATRIX FOR WAVELENGTH SELECTIVE SEPARATION OR JOINING CHANNELS IN THE FREQUENCY AREA OF OPTICAL MESSAGE TECHNOLOGY
FR2660439B1 (en) * 1990-03-27 1993-06-04 Thomson Csf GUIDING STRUCTURE INTEGRATED IN THREE DIMENSIONS AND ITS MANUFACTURING METHOD.
US6487350B1 (en) * 1998-07-16 2002-11-26 Brookhaven Science Associates Multi-clad black display panel
DE19849862C1 (en) * 1998-10-29 2000-04-06 Alcatel Sa Thermo-optical switch has polymer light conductor with temperature control arrangement at coupling points with two optical glass conductors in parallel plane
US6385376B1 (en) * 1998-10-30 2002-05-07 The Regents Of The University Of California Fused vertical coupler for switches, filters and other electro-optic devices
JP2000321452A (en) 1999-05-11 2000-11-24 Oki Electric Ind Co Ltd Optical waveguide element and manufacture thereof
WO2002021176A1 (en) 2000-09-05 2002-03-14 At & T Corp. A method for fabricating optical devices by assembling multiple wafers containing planar optical waveguides
JP4008649B2 (en) 2000-09-27 2007-11-14 沖電気工業株式会社 Optical device
FR2821135B1 (en) * 2001-02-21 2003-06-27 Zodiac Int DEVICE FOR FIXING A FLEXIBLE LINK ON AN INFLATABLE PIPE OF A PNEUMATIC BOAT
US6912330B2 (en) 2001-05-17 2005-06-28 Sioptical Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6744953B2 (en) 2001-09-07 2004-06-01 Agilent Technologies, Inc. Planar optical waveguide with alignment structure
US6987913B2 (en) * 2001-10-30 2006-01-17 Xponent Photonics Inc Optical junction apparatus and methods employing optical power transverse-transfer
US6870992B2 (en) 2001-11-23 2005-03-22 Xponent Photonics Inc Alignment apparatus and methods for transverse optical coupling
EP1376170A3 (en) 2002-06-19 2004-12-29 Matsushita Electric Industrial Co., Ltd. Optical waveguide, optical module, and method for producing same module
US6975798B2 (en) 2002-07-05 2005-12-13 Xponent Photonics Inc Waveguides assembled for transverse-transfer of optical power
US6981806B2 (en) 2002-07-05 2006-01-03 Xponent Photonics Inc Micro-hermetic packaging of optical devices
US7184643B2 (en) 2003-04-29 2007-02-27 Xponent Photonics Inc Multiple-core planar optical waveguides and methods of fabrication and use thereof
WO2004097474A1 (en) 2003-04-29 2004-11-11 Xponent Photonics Inc Surface-mounted photodetector for an optical waveguide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6034983A (en) * 1994-12-27 2000-03-07 Fujitsu Limited Method of fabricating compound semiconductor device and optical semiconductor device
US6330378B1 (en) * 2000-05-12 2001-12-11 The Trustees Of Princeton University Photonic integrated detector having a plurality of asymmetric waveguides
US6483863B2 (en) * 2001-01-19 2002-11-19 The Trustees Of Princeton University Asymmetric waveguide electroabsorption-modulated laser
US6600847B2 (en) * 2001-11-05 2003-07-29 Quantum Photonics, Inc Semiconductor optical device with improved efficiency and output beam characteristics

Also Published As

Publication number Publication date
US6975798B2 (en) 2005-12-13
US7394954B2 (en) 2008-07-01
WO2004097464A2 (en) 2004-11-11
US20040052467A1 (en) 2004-03-18
US7136564B2 (en) 2006-11-14
US20070081781A1 (en) 2007-04-12
US20060088266A1 (en) 2006-04-27

Similar Documents

Publication Publication Date Title
WO2004097464A3 (en) Multiple-core planar optical waveguides and methods of fabrication and use thereof
WO2002004999A3 (en) Graded index waveguide
US7397995B2 (en) Multiple-core planar optical waveguides and methods of fabrication and use thereof
HK1080948A1 (en) Multi-mode interference optical waveguide device
WO2005069939A3 (en) Liquid crystal waveguide having refractive shapes for dynamically controlling light
WO2002025337A3 (en) Low-loss waveguide and method of making same
WO2002042808A3 (en) Optical waveguide multimode to single mode transformer
WO2004088724A3 (en) Permanent light coupling arrangement and method for use with thin silicon optical waveguides
TW200628863A (en) Optical waveguide devices and method of making the same
EP1219983A3 (en) Polarization independent optical waveguide circuit
ATE243853T1 (en) PLANAR OPTICAL WAVEGUIDES WITH TWO GROOVES
US20160246003A1 (en) Layer Having a Non-linear Taper and Method of Fabrication
WO2005052641A3 (en) Optical waveguides and methods thereof
WO2004008200A3 (en) Photonic crystal waveguide
WO2003079053A3 (en) High density integrated optical chip with low index difference and high index difference waveguide functions
EP1225459A3 (en) Surface smoothing by spin coating technique for an opto-electronic component
EP1116966A3 (en) Polarization independent silica based optical waveguide
WO2001081962A3 (en) A multilayer integrated optical device and a method of fabrication thereof
EP1536252A4 (en) Photonic crystal optical waveguide
EP0358414A3 (en) Optical waveguide
WO2003034114A3 (en) Planar waveguide facet profiling
TW200500667A (en) Optical wave-guide chip and optical component comprising same
WO2004045030A3 (en) Planar optical wave-guide with dielectric mirrors
US7346238B2 (en) Grating into a high index contrast strip or channel waveguide
WO2006017485A3 (en) Photonic crystal resonator apparatus with improved out of plane coupling

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase