WO2004106221A3 - Microelectromechanical device packages with integral heaters - Google Patents

Microelectromechanical device packages with integral heaters Download PDF

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Publication number
WO2004106221A3
WO2004106221A3 PCT/US2004/014895 US2004014895W WO2004106221A3 WO 2004106221 A3 WO2004106221 A3 WO 2004106221A3 US 2004014895 W US2004014895 W US 2004014895W WO 2004106221 A3 WO2004106221 A3 WO 2004106221A3
Authority
WO
WIPO (PCT)
Prior art keywords
microelectromechanical device
package
device packages
microelectromechanical
integral
Prior art date
Application number
PCT/US2004/014895
Other languages
French (fr)
Other versions
WO2004106221A2 (en
Inventor
Terry Tarn
Original Assignee
Reflectivity Inc
Terry Tarn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc, Terry Tarn filed Critical Reflectivity Inc
Priority to EP04752025A priority Critical patent/EP1625095A2/en
Priority to JP2006533001A priority patent/JP2007524112A/en
Publication of WO2004106221A2 publication Critical patent/WO2004106221A2/en
Publication of WO2004106221A3 publication Critical patent/WO2004106221A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0172—Seals
    • B81C2203/0181—Using microheaters for bonding the lid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12044—OLED
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16195—Flat cap [not enclosing an internal cavity]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

Abstract

A microelectromechanical device package with integral a heater (220) and a method for packaging the micro-electromechanical device are disclosed in this invention. The microelectromechanical device package comprises a first package substrate (210) and second substrate (215), between which a microelectromechanical device, such as a micromirror array device is (105) located. In order to bonding the first and second package substrates so as to package the microelectromechanical device inside, a sealing medium layer (230) is deposited, and heated by the heater (220) so as to bond the first and second package substrates together.
PCT/US2004/014895 2003-05-22 2004-05-12 Microelectromechanical device packages with integral heaters WO2004106221A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP04752025A EP1625095A2 (en) 2003-05-22 2004-05-12 Microelectromechanical device packages with integral heaters
JP2006533001A JP2007524112A (en) 2003-05-22 2004-05-12 Micro-electromechanical device package integrated with heater

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/433,318 2003-05-22
US10/443,318 US20040232535A1 (en) 2003-05-22 2003-05-22 Microelectromechanical device packages with integral heaters

Publications (2)

Publication Number Publication Date
WO2004106221A2 WO2004106221A2 (en) 2004-12-09
WO2004106221A3 true WO2004106221A3 (en) 2005-12-15

Family

ID=33450381

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2004/014895 WO2004106221A2 (en) 2003-05-22 2004-05-12 Microelectromechanical device packages with integral heaters
PCT/US2004/016421 WO2004107829A2 (en) 2003-05-22 2004-05-24 A novel packaging method for microstructure and semiconductor devices

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2004/016421 WO2004107829A2 (en) 2003-05-22 2004-05-24 A novel packaging method for microstructure and semiconductor devices

Country Status (6)

Country Link
US (6) US20040232535A1 (en)
EP (2) EP1625095A2 (en)
JP (2) JP2007524112A (en)
KR (2) KR20060021324A (en)
CN (1) CN1806339A (en)
WO (2) WO2004106221A2 (en)

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