WO2005008708A3 - Rotational actuator or motor based on carbon nanotubes - Google Patents

Rotational actuator or motor based on carbon nanotubes Download PDF

Info

Publication number
WO2005008708A3
WO2005008708A3 PCT/US2004/022922 US2004022922W WO2005008708A3 WO 2005008708 A3 WO2005008708 A3 WO 2005008708A3 US 2004022922 W US2004022922 W US 2004022922W WO 2005008708 A3 WO2005008708 A3 WO 2005008708A3
Authority
WO
WIPO (PCT)
Prior art keywords
wall
nanotube
carbon nanotube
motor based
rotational actuator
Prior art date
Application number
PCT/US2004/022922
Other languages
French (fr)
Other versions
WO2005008708A2 (en
Inventor
Alexander K Zettl
Adam M Fennimore
Thomas D Yuzvinsky
Original Assignee
Univ California
Alexander K Zettl
Adam M Fennimore
Thomas D Yuzvinsky
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California, Alexander K Zettl, Adam M Fennimore, Thomas D Yuzvinsky filed Critical Univ California
Publication of WO2005008708A2 publication Critical patent/WO2005008708A2/en
Publication of WO2005008708A3 publication Critical patent/WO2005008708A3/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/724Devices having flexible or movable element
    • Y10S977/725Nanomotor/nanoactuator
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/724Devices having flexible or movable element
    • Y10S977/733Nanodiaphragm
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/734Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/742Carbon nanotubes, CNTs
    • Y10S977/752Multi-walled

Abstract

A rotational actuator/motor based on rotation of a carbon nanotube is disclosed. The carbon nanotube is provided with a rotor plate attached to an outer wall, which moves relative to an inner wall of the nanotube. After deposit of a nanotube on a silicon chip substrate, the entire structure may be fabricated by lithography using selected techniques adapted from silicon manufacturing technology. The structures to be fabricated may comprise a multiwall carbon nanotube (MWNT), two in plane stators (26, 28) and a gate stator (30) buried beneath the substrate surface. The MWNT is suspended between two anchor pads and comprises a rotator attached to an outer wall and arranged to move in response to electromagnetic inputs. The substrate is etched away to allow the rotor to freely rotate. Rotation may be either in a reciprocal or fully rotatable manner.
PCT/US2004/022922 2003-07-18 2004-07-16 Rotational actuator or motor based on carbon nanotubes WO2005008708A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US48848503P 2003-07-18 2003-07-18
US60/488,485 2003-07-18
US10/891,615 2004-07-15
US10/891,615 US7053520B2 (en) 2003-07-18 2004-07-15 Rotational actuator or motor based on carbon nanotubes

Publications (2)

Publication Number Publication Date
WO2005008708A2 WO2005008708A2 (en) 2005-01-27
WO2005008708A3 true WO2005008708A3 (en) 2005-09-29

Family

ID=34083436

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/022922 WO2005008708A2 (en) 2003-07-18 2004-07-16 Rotational actuator or motor based on carbon nanotubes

Country Status (2)

Country Link
US (2) US7053520B2 (en)
WO (1) WO2005008708A2 (en)

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US7863798B2 (en) * 2004-10-04 2011-01-04 The Regents Of The University Of California Nanocrystal powered nanomotor
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US7636101B2 (en) * 2005-02-09 2009-12-22 Microvision, Inc. MEMS scanner adapted to a laser printer
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US7884525B2 (en) * 2006-08-03 2011-02-08 Massachusetts Institute Of Technology Carbon nanotube based compliant mechanism
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US10191082B1 (en) * 2007-01-30 2019-01-29 Victor B. Kley Carbon nanotube probes and structures and methods of measurement
US7863799B1 (en) * 2007-03-02 2011-01-04 AG Microsystems Inc. Micro electro mechanical system using comb and parallel plate actuation
US8421305B2 (en) * 2007-04-17 2013-04-16 The University Of Utah Research Foundation MEMS devices and systems actuated by an energy field
US20080284463A1 (en) * 2007-05-17 2008-11-20 Texas Instruments Incorporated programmable circuit having a carbon nanotube
US7924495B1 (en) * 2007-06-04 2011-04-12 Xtreme Energetics, Inc. Active-matrix sun tracker
US8337141B2 (en) * 2008-02-14 2012-12-25 The Charles Stark Draper Laboratory, Inc. Rotary nanotube bearing structure and methods for manufacturing and using the same
US20100229265A1 (en) * 2008-03-26 2010-09-09 Sungho Jin Probe system comprising an electric-field-aligned probe tip and method for fabricating the same
US8632879B2 (en) * 2008-04-25 2014-01-21 The University Of Kentucky Research Foundation Lightweight thermal management material for enhancement of through-thickness thermal conductivity
US10358535B2 (en) 2008-04-25 2019-07-23 The University Of Kentucky Research Foundation Thermal interface material
CN101576646B (en) * 2008-05-06 2012-09-19 鸿富锦精密工业(深圳)有限公司 Micro-actuator component, micro-actuator and lens module
TWI409568B (en) * 2008-05-23 2013-09-21 Hon Hai Prec Ind Co Ltd Micro-actuator component, micro-actuator and lens module
WO2010014650A2 (en) * 2008-07-29 2010-02-04 Honda Motor Co., Ltd. Preferential growth of single-walled carbon nanotubes with metallic conductivity
FR2950332B1 (en) * 2009-09-18 2011-10-28 Commissariat Energie Atomique COMPRISING AN ELECTROMECHANICAL COMPONENT FOR A MICRO- OR NANO-SYSTEM COMPRISING A COMPONENT-ROTATING AXIS ROD AND COVERED WITH GRAPHENE
EP2402082A3 (en) * 2010-06-29 2017-01-25 Imec Method for forming a catalyst suitable for growth of carbon nanotubes
US9395343B2 (en) * 2011-11-04 2016-07-19 Danmarks Tekniske Universitet Resonant fiber based aerosol particle sensor and method
CN103780127B (en) * 2013-04-15 2015-11-25 北京纳米能源与系统研究所 A kind of friction nanometer power generator
US10241321B1 (en) * 2015-05-06 2019-03-26 Sciperio, Inc Monolithic adaptive optical/RF reflector
CN105197870B (en) * 2015-09-30 2017-03-22 西交利物浦大学 Submicron/nano motor driven by spin-polarized current and manufacturing method of motor
WO2019044900A1 (en) * 2017-08-29 2019-03-07 株式会社ExH Electric power transmission system, and manufacturing method for electric power transmission system
CN113199155B (en) * 2020-01-16 2022-04-22 清华大学 Precision torsion balance and preparation method thereof
CN113570844B (en) * 2020-04-28 2022-09-09 清华大学 Laser remote control switch system

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Also Published As

Publication number Publication date
US20070114880A1 (en) 2007-05-24
US20050017598A1 (en) 2005-01-27
WO2005008708A2 (en) 2005-01-27
US7053520B2 (en) 2006-05-30
US7453183B2 (en) 2008-11-18

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