WO2005010566A3 - A micromirror having reduced space between hinge and mirror plate of the micromirror - Google Patents
A micromirror having reduced space between hinge and mirror plate of the micromirror Download PDFInfo
- Publication number
- WO2005010566A3 WO2005010566A3 PCT/US2004/023139 US2004023139W WO2005010566A3 WO 2005010566 A3 WO2005010566 A3 WO 2005010566A3 US 2004023139 W US2004023139 W US 2004023139W WO 2005010566 A3 WO2005010566 A3 WO 2005010566A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- hinge
- micromirror
- array
- micromirrors
- mirror
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006521158A JP2007503598A (en) | 2003-07-24 | 2004-07-19 | Micro mirror with reduced space between micro mirror hinge and mirror plate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/627,303 | 2003-07-24 | ||
US10/627,303 US6980347B2 (en) | 2003-07-03 | 2003-07-24 | Micromirror having reduced space between hinge and mirror plate of the micromirror |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005010566A2 WO2005010566A2 (en) | 2005-02-03 |
WO2005010566A3 true WO2005010566A3 (en) | 2007-01-18 |
Family
ID=34103248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/023139 WO2005010566A2 (en) | 2003-07-24 | 2004-07-19 | A micromirror having reduced space between hinge and mirror plate of the micromirror |
Country Status (6)
Country | Link |
---|---|
US (1) | US6980347B2 (en) |
JP (1) | JP2007503598A (en) |
KR (1) | KR20060040721A (en) |
CN (1) | CN1973235A (en) |
TW (1) | TW200519452A (en) |
WO (1) | WO2005010566A2 (en) |
Cited By (1)
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---|---|---|---|---|
US8964280B2 (en) | 2006-06-30 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
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US6965468B2 (en) * | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
TWI289708B (en) | 2002-12-25 | 2007-11-11 | Qualcomm Mems Technologies Inc | Optical interference type color display |
US7394140B2 (en) * | 2003-05-13 | 2008-07-01 | Texas Instruments Incorporated | Micromirror array device with electrostatically deflectable mirror plates |
US7064880B2 (en) * | 2003-09-25 | 2006-06-20 | Matsushita Electric Industrial Co., Ltd. | Projector and projection method |
US7342705B2 (en) | 2004-02-03 | 2008-03-11 | Idc, Llc | Spatial light modulator with integrated optical compensation structure |
US7706050B2 (en) * | 2004-03-05 | 2010-04-27 | Qualcomm Mems Technologies, Inc. | Integrated modulator illumination |
US8115986B2 (en) * | 2004-08-14 | 2012-02-14 | Silicon Quest Kabushiki-Kaisha | Mirror device comprising drive electrode equipped with stopper function |
US7813026B2 (en) * | 2004-09-27 | 2010-10-12 | Qualcomm Mems Technologies, Inc. | System and method of reducing color shift in a display |
US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
US20060132383A1 (en) * | 2004-09-27 | 2006-06-22 | Idc, Llc | System and method for illuminating interferometric modulator display |
US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
US20060193028A1 (en) * | 2005-02-28 | 2006-08-31 | Satyadev Patel | Method of repairing micromirrors in spatial light modulators |
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US8107155B2 (en) | 2006-10-06 | 2012-01-31 | Qualcomm Mems Technologies, Inc. | System and method for reducing visual artifacts in displays |
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KR20090094241A (en) * | 2006-10-06 | 2009-09-04 | 퀄컴 엠이엠스 테크놀로지스, 인크. | Thin light bar and method of manufacturing |
US7911672B2 (en) * | 2006-12-26 | 2011-03-22 | Zhou Tiansheng | Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
US7990339B2 (en) * | 2006-12-27 | 2011-08-02 | Silicon Quest Kabushiki-Kaisha | Deformable micromirror device |
CN101802678B (en) * | 2007-09-17 | 2014-03-12 | 高通Mems科技公司 | Semi-transparent/ transflective lighted interferometric devices |
US8941631B2 (en) | 2007-11-16 | 2015-01-27 | Qualcomm Mems Technologies, Inc. | Simultaneous light collection and illumination on an active display |
US8068710B2 (en) | 2007-12-07 | 2011-11-29 | Qualcomm Mems Technologies, Inc. | Decoupled holographic film and diffuser |
US8654061B2 (en) * | 2008-02-12 | 2014-02-18 | Qualcomm Mems Technologies, Inc. | Integrated front light solution |
US8118468B2 (en) | 2008-05-16 | 2012-02-21 | Qualcomm Mems Technologies, Inc. | Illumination apparatus and methods |
JP2011526053A (en) * | 2008-06-04 | 2011-09-29 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Reduction method of edge shadow for prism front light |
US8358266B2 (en) | 2008-09-02 | 2013-01-22 | Qualcomm Mems Technologies, Inc. | Light turning device with prismatic light turning features |
US20100051089A1 (en) * | 2008-09-02 | 2010-03-04 | Qualcomm Mems Technologies, Inc. | Light collection device with prismatic light turning features |
US8231257B2 (en) * | 2009-01-13 | 2012-07-31 | Qualcomm Mems Technologies, Inc. | Large area light panel and screen |
JP2012528361A (en) * | 2009-05-29 | 2012-11-12 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Lighting device for reflective display |
US8979349B2 (en) | 2009-05-29 | 2015-03-17 | Qualcomm Mems Technologies, Inc. | Illumination devices and methods of fabrication thereof |
US8238018B2 (en) * | 2009-06-01 | 2012-08-07 | Zhou Tiansheng | MEMS micromirror and micromirror array |
US20110169428A1 (en) * | 2010-01-08 | 2011-07-14 | Qualcomm Mems Technologies, Inc. | Edge bar designs to mitigate edge shadow artifact |
US8402647B2 (en) | 2010-08-25 | 2013-03-26 | Qualcomm Mems Technologies Inc. | Methods of manufacturing illumination systems |
US9036231B2 (en) | 2010-10-20 | 2015-05-19 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
US10551613B2 (en) | 2010-10-20 | 2020-02-04 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US9385634B2 (en) | 2012-01-26 | 2016-07-05 | Tiansheng ZHOU | Rotational type of MEMS electrostatic actuator |
JP6273109B2 (en) * | 2013-08-28 | 2018-01-31 | 株式会社ミツトヨ | Optical interference measurement device |
JP6558528B2 (en) * | 2015-03-30 | 2019-08-14 | 株式会社ニコン | Spatial light modulator and method of using the same, modulation method, exposure method and apparatus, and device manufacturing method |
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2003
- 2003-07-24 US US10/627,303 patent/US6980347B2/en not_active Expired - Lifetime
-
2004
- 2004-07-19 WO PCT/US2004/023139 patent/WO2005010566A2/en active Application Filing
- 2004-07-19 KR KR1020067001683A patent/KR20060040721A/en not_active Application Discontinuation
- 2004-07-19 JP JP2006521158A patent/JP2007503598A/en active Pending
- 2004-07-19 CN CNA2004800275776A patent/CN1973235A/en active Pending
- 2004-07-20 TW TW093121635A patent/TW200519452A/en unknown
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US5835256A (en) * | 1995-06-19 | 1998-11-10 | Reflectivity, Inc. | Reflective spatial light modulator with encapsulated micro-mechanical elements |
US6529310B1 (en) * | 1998-09-24 | 2003-03-04 | Reflectivity, Inc. | Deflectable spatial light modulator having superimposed hinge and deflectable element |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8964280B2 (en) | 2006-06-30 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
Also Published As
Publication number | Publication date |
---|---|
US6980347B2 (en) | 2005-12-27 |
WO2005010566A2 (en) | 2005-02-03 |
CN1973235A (en) | 2007-05-30 |
KR20060040721A (en) | 2006-05-10 |
US20050088719A1 (en) | 2005-04-28 |
JP2007503598A (en) | 2007-02-22 |
TW200519452A (en) | 2005-06-16 |
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