WO2005010566A3 - A micromirror having reduced space between hinge and mirror plate of the micromirror - Google Patents

A micromirror having reduced space between hinge and mirror plate of the micromirror Download PDF

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Publication number
WO2005010566A3
WO2005010566A3 PCT/US2004/023139 US2004023139W WO2005010566A3 WO 2005010566 A3 WO2005010566 A3 WO 2005010566A3 US 2004023139 W US2004023139 W US 2004023139W WO 2005010566 A3 WO2005010566 A3 WO 2005010566A3
Authority
WO
WIPO (PCT)
Prior art keywords
hinge
micromirror
array
micromirrors
mirror
Prior art date
Application number
PCT/US2004/023139
Other languages
French (fr)
Other versions
WO2005010566A2 (en
Inventor
Satyadev R Patel
Andrew G Huibers
Original Assignee
Reflectivity Inc
Satyadev R Patel
Andrew G Huibers
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc, Satyadev R Patel, Andrew G Huibers filed Critical Reflectivity Inc
Priority to JP2006521158A priority Critical patent/JP2007503598A/en
Publication of WO2005010566A2 publication Critical patent/WO2005010566A2/en
Publication of WO2005010566A3 publication Critical patent/WO2005010566A3/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements

Abstract

A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
PCT/US2004/023139 2003-07-24 2004-07-19 A micromirror having reduced space between hinge and mirror plate of the micromirror WO2005010566A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006521158A JP2007503598A (en) 2003-07-24 2004-07-19 Micro mirror with reduced space between micro mirror hinge and mirror plate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/627,303 2003-07-24
US10/627,303 US6980347B2 (en) 2003-07-03 2003-07-24 Micromirror having reduced space between hinge and mirror plate of the micromirror

Publications (2)

Publication Number Publication Date
WO2005010566A2 WO2005010566A2 (en) 2005-02-03
WO2005010566A3 true WO2005010566A3 (en) 2007-01-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/023139 WO2005010566A2 (en) 2003-07-24 2004-07-19 A micromirror having reduced space between hinge and mirror plate of the micromirror

Country Status (6)

Country Link
US (1) US6980347B2 (en)
JP (1) JP2007503598A (en)
KR (1) KR20060040721A (en)
CN (1) CN1973235A (en)
TW (1) TW200519452A (en)
WO (1) WO2005010566A2 (en)

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Also Published As

Publication number Publication date
US6980347B2 (en) 2005-12-27
WO2005010566A2 (en) 2005-02-03
CN1973235A (en) 2007-05-30
KR20060040721A (en) 2006-05-10
US20050088719A1 (en) 2005-04-28
JP2007503598A (en) 2007-02-22
TW200519452A (en) 2005-06-16

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