WO2005018864A3 - Capillary with contained inner chamfer - Google Patents

Capillary with contained inner chamfer Download PDF

Info

Publication number
WO2005018864A3
WO2005018864A3 PCT/US2004/023657 US2004023657W WO2005018864A3 WO 2005018864 A3 WO2005018864 A3 WO 2005018864A3 US 2004023657 W US2004023657 W US 2004023657W WO 2005018864 A3 WO2005018864 A3 WO 2005018864A3
Authority
WO
WIPO (PCT)
Prior art keywords
capillary
bonding
working tip
inner chamfer
annular chamfer
Prior art date
Application number
PCT/US2004/023657
Other languages
French (fr)
Other versions
WO2005018864A2 (en
WO2005018864A8 (en
WO2005018864B1 (en
Inventor
Gil Perlberg
Arie Bahalul
Dan Mironescu
Moshe Amsalem
Jon Brunner
Original Assignee
Kulicke & Soffa Investments
Gil Perlberg
Arie Bahalul
Dan Mironescu
Moshe Amsalem
Jon Brunner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kulicke & Soffa Investments, Gil Perlberg, Arie Bahalul, Dan Mironescu, Moshe Amsalem, Jon Brunner filed Critical Kulicke & Soffa Investments
Priority to JP2005518338A priority Critical patent/JP2006512788A/en
Priority to KR20047015437A priority patent/KR100668491B1/en
Publication of WO2005018864A2 publication Critical patent/WO2005018864A2/en
Publication of WO2005018864A3 publication Critical patent/WO2005018864A3/en
Publication of WO2005018864A8 publication Critical patent/WO2005018864A8/en
Publication of WO2005018864B1 publication Critical patent/WO2005018864B1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004Wire welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004Wire welding
    • B23K20/005Capillary welding
    • B23K20/007Ball bonding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/32Wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/4501Shape
    • H01L2224/45012Cross-sectional shape
    • H01L2224/45015Cross-sectional shape being circular
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124Aluminium (Al) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45147Copper (Cu) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/4845Details of ball bonds
    • H01L2224/48451Shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301Capillary
    • H01L2224/78302Shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/852Applying energy for connecting
    • H01L2224/85201Compression bonding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/852Applying energy for connecting
    • H01L2224/85201Compression bonding
    • H01L2224/85205Ultrasonic bonding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01023Vanadium [V]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01039Yttrium [Y]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/0104Zirconium [Zr]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01074Tungsten [W]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01327Intermediate phases, i.e. intermetallics compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/014Solder alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/049Nitrides composed of metals from groups of the periodic table
    • H01L2924/04955th Group
    • H01L2924/04953TaN
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress

Abstract

A bonding tool for bonding a fine wire to bonding pads having a very fine pitch is disclosed. The bonding tool comprises a working tip (404) at an end thereof. The working tip includes an annular chamfer (413) formed at an inner portion of the end of the working tip, the inner annular chamfer having an angle (414) of less than about 60 degrees. The inner annular chamfer is coupled to a lower portion of a cylindrical passage formed (424) in the bonding tool.
PCT/US2004/023657 2003-08-12 2004-07-22 Capillary with contained inner chamfer WO2005018864A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005518338A JP2006512788A (en) 2003-08-12 2004-07-22 Capillary with internal bevel
KR20047015437A KR100668491B1 (en) 2003-08-12 2004-07-22 Capillary with contained inner chamfer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/639,302 US6910612B2 (en) 2001-07-17 2003-08-12 Capillary with contained inner chamfer
US10/639,302 2003-08-12

Publications (4)

Publication Number Publication Date
WO2005018864A2 WO2005018864A2 (en) 2005-03-03
WO2005018864A3 true WO2005018864A3 (en) 2005-04-28
WO2005018864A8 WO2005018864A8 (en) 2005-06-23
WO2005018864B1 WO2005018864B1 (en) 2005-07-28

Family

ID=34216321

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/023657 WO2005018864A2 (en) 2003-08-12 2004-07-22 Capillary with contained inner chamfer

Country Status (7)

Country Link
US (2) US6910612B2 (en)
JP (1) JP2006512788A (en)
KR (1) KR100668491B1 (en)
CN (1) CN100540200C (en)
MY (1) MY128845A (en)
TW (1) TW200507123A (en)
WO (1) WO2005018864A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6910612B2 (en) * 2001-07-17 2005-06-28 Kulicke & Soffa Investments, Inc. Capillary with contained inner chamfer
US7249702B2 (en) * 2003-12-04 2007-07-31 Kulicke And Soffa Industries, Inc. Multi-part capillary
US7407080B2 (en) * 2004-04-02 2008-08-05 Chippac, Inc. Wire bond capillary tip
US7320425B2 (en) * 2004-05-12 2008-01-22 Kulicke And Soffa Industries, Inc. Low-profile capillary for wire bonding
US7597231B2 (en) * 2006-04-10 2009-10-06 Small Precision Tools Inc. Wire bonding capillary tool having multiple outer steps
US20080314963A1 (en) * 2006-07-03 2008-12-25 Kulicke And Soffa Industries, Inc. Bonding Tool With Improved Finish
JP5893266B2 (en) * 2011-05-13 2016-03-23 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method thereof
US20130213552A1 (en) * 2012-02-20 2013-08-22 Branson Ultrasonics Corporation Vibratory welder having low thermal conductivity tool
JP5510691B2 (en) * 2012-09-26 2014-06-04 Toto株式会社 Bonding capillary
US9093515B2 (en) 2013-07-17 2015-07-28 Freescale Semiconductor, Inc. Wire bonding capillary with working tip protrusion
USD797826S1 (en) 2015-02-03 2017-09-19 Coorstek, Inc. Ceramic bonding tool with textured tip
USD797171S1 (en) * 2015-02-03 2017-09-12 Coorstek, Inc. Ceramic bonding tool with textured tip
USD797172S1 (en) * 2015-02-03 2017-09-12 Coorstek, Inc. Ceramic bonding tool with textured tip
CN109890514A (en) * 2016-07-26 2019-06-14 莫列斯有限公司 Capillary suitable for droplet generator
USD868123S1 (en) 2016-12-20 2019-11-26 Coorstek, Inc. Wire bonding wedge tool
CN107301989A (en) * 2017-06-06 2017-10-27 深圳国民飞骧科技有限公司 A kind of method for determining bonding wire chip surface pad spacing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186315A (en) * 1997-12-19 1999-07-09 Hitachi Ltd Wire-bonding device and manufacture of semiconductor device using thereof
US6325269B1 (en) * 1997-12-19 2001-12-04 Toto Ltd. Wire bonding capillary
US20030015567A1 (en) * 2001-07-17 2003-01-23 Gil Perlberg Ultra fine pitch capillary
US20040094606A1 (en) * 2001-07-17 2004-05-20 Gil Perlberg Capillary with contained inner chamfer

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3917148A (en) 1973-10-19 1975-11-04 Technical Devices Inc Welding tip
US3971499A (en) 1974-09-03 1976-07-27 Tribotech Bonding tool
US4405074A (en) 1981-08-31 1983-09-20 Kulicke And Soffa Industries Inc. Composite bonding tool and method of making same
JPS63239959A (en) 1987-03-27 1988-10-05 Toshiba Corp Wire bonding capillary
JPH01201933A (en) 1988-02-08 1989-08-14 Mitsubishi Electric Corp Wire bonding and device therefor
US4974767A (en) 1988-04-25 1990-12-04 Texas Instruments Incorporated Double cone wire bonding capillary
JPH01273325A (en) * 1988-04-25 1989-11-01 Toshiba Corp Manufacture of capillary and semiconductor device using the capillary
JPH0672050B2 (en) 1990-10-12 1994-09-14 株式会社東芝 Bonding capillaries and optical connector parts
JPH08509380A (en) * 1993-04-23 1996-10-08 アリアド・ファーマシューティカルズ・インコーポレイテッド Human Syk
US5485949A (en) 1993-04-30 1996-01-23 Matsushita Electric Industrial Co., Ltd. Capillary for a wire bonding apparatus and a method for forming an electric connection bump using the capillary
US5437405A (en) 1994-08-22 1995-08-01 National Semiconductor Corporation Method and apparatus for stitch bonding of wires to integrated circuit bonding pads
US5421503A (en) 1994-08-24 1995-06-06 Kulicke And Soffa Investments, Inc. Fine pitch capillary bonding tool
US5465899A (en) 1994-10-14 1995-11-14 Texas Instruments Incorporated Method and apparatus for fine pitch wire bonding using a shaved capillary
US5558270A (en) 1995-01-06 1996-09-24 Kulicke And Soffa Investments, Inc Fine pitch capillary/wedge bonding tool
US5662261A (en) 1995-04-11 1997-09-02 Micron Technology, Inc. Wire bonding capillary
GB9512917D0 (en) * 1995-06-24 1995-08-30 Philton Polythene Converters L Container bulkhead assembly
JPH09162223A (en) 1995-12-08 1997-06-20 Can Electron:Kk Wire bonding capillary
DE69739065D1 (en) 1996-02-26 2008-12-11 Texas Instruments Inc Connections in integrated circuits
JP3333399B2 (en) 1996-08-21 2002-10-15 株式会社新川 Capillary for wire bonding equipment
DE69729759T2 (en) 1996-10-01 2005-07-07 Matsushita Electric Industrial Co., Ltd., Kadoma Integrated circuit or board with a bump electrode and process for its manufacture
US5954260A (en) 1996-12-17 1999-09-21 Texas Instruments Incorporated Fine pitch bonding technique
US6065667A (en) 1997-01-15 2000-05-23 National Semiconductor Corporation Method and apparatus for fine pitch wire bonding
US6213378B1 (en) 1997-01-15 2001-04-10 National Semiconductor Corporation Method and apparatus for ultra-fine pitch wire bonding
JP3440190B2 (en) * 1997-03-06 2003-08-25 株式会社新川 Wire bonding method
US5931368A (en) * 1997-03-28 1999-08-03 Kulicke And Soffa Investments, Inc Long life bonding tool
WO1998049121A1 (en) 1997-04-25 1998-11-05 Kyocera Corporation Semiconductive zirconia sinter and destaticizing member comprising semiconductive zirconia sinter
US5871141A (en) 1997-05-22 1999-02-16 Kulicke And Soffa, Investments, Inc. Fine pitch bonding tool for constrained bonding
US6155474A (en) 1997-12-16 2000-12-05 Texas Instruments Incorporated Fine pitch bonding technique
JPH11251357A (en) 1998-03-06 1999-09-17 Hitachi Ltd Wire bonding method and apparatus
US6354479B1 (en) 1999-02-25 2002-03-12 Sjm Technologies Dissipative ceramic bonding tip
US6651864B2 (en) 1999-02-25 2003-11-25 Steven Frederick Reiber Dissipative ceramic bonding tool tip
US6278191B1 (en) * 1999-05-28 2001-08-21 National Semiconductor Corporation Bond pad sealing using wire bonding
KR100334242B1 (en) 2000-04-17 2002-05-03 이강열 Capillary sintered compound to bonding wire, method for fabricating a capillary sintered body to bonding wire and method for fabricating the capillary
US6523733B2 (en) 2000-04-28 2003-02-25 Kulicke & Soffa Investments Inc. Controlled attenuation capillary
US6497356B2 (en) 2000-04-28 2002-12-24 Kulicke & Soffa Investments, Inc. Controlled attenuation capillary with planar surface
JP2001351934A (en) * 2000-06-08 2001-12-21 Mitsubishi Materials Corp Capillary for forming stud bump
US7083757B2 (en) * 2001-02-28 2006-08-01 Billiet Romain L Method of making semiconductor bonding tools

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186315A (en) * 1997-12-19 1999-07-09 Hitachi Ltd Wire-bonding device and manufacture of semiconductor device using thereof
US6325269B1 (en) * 1997-12-19 2001-12-04 Toto Ltd. Wire bonding capillary
US20030015567A1 (en) * 2001-07-17 2003-01-23 Gil Perlberg Ultra fine pitch capillary
US20040094606A1 (en) * 2001-07-17 2004-05-20 Gil Perlberg Capillary with contained inner chamfer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 12 29 October 1999 (1999-10-29) *

Also Published As

Publication number Publication date
CN100540200C (en) 2009-09-16
US20040094606A1 (en) 2004-05-20
WO2005018864A2 (en) 2005-03-03
WO2005018864A8 (en) 2005-06-23
US20050121494A1 (en) 2005-06-09
JP2006512788A (en) 2006-04-13
MY128845A (en) 2007-02-28
KR100668491B1 (en) 2007-01-16
CN1717294A (en) 2006-01-04
US6910612B2 (en) 2005-06-28
TW200507123A (en) 2005-02-16
US7004369B2 (en) 2006-02-28
KR20040099374A (en) 2004-11-26
WO2005018864B1 (en) 2005-07-28

Similar Documents

Publication Publication Date Title
WO2005018864A3 (en) Capillary with contained inner chamfer
WO2003009335A3 (en) Ultra fine pitch capillary
MY122875A (en) Bonding tool with polymer coating
WO2008109524A3 (en) System and method for increased stand-off height in stud bumping process
EP1273272B8 (en) Fixing device for bone portions
EP2078616A3 (en) Writing component comprising a porous nib
HK1078333A1 (en) Tamperproof screw, combination with screwdriver bit, and headrer punch for manufacturing tamperproof screw
EP1782901A3 (en) Hole saw having a drill bit
MY122922A (en) Controlled attenuation capillary
EP1920855A3 (en) Die
MY126182A (en) Controlled attenuation capillary with planar surface
CA2460855A1 (en) Two-flute twist drill
DE59900622D1 (en) Punching rivet
EP1277887A3 (en) Displacement drilling tool and equipment using said tool
MY129362A (en) Efficient energy transfer capillary
EP1563935A3 (en) Spindle structure of a machine tool
CA2380250A1 (en) Thread-forming screw
CA2343987A1 (en) Directional flow nozzle retention body
TW200721333A (en) Two-step high bottleneck type capillary for wire bonding device
WO2003060337A3 (en) Ball joint with dual tapered connection
TW200636893A (en) Method for producing a wire connection
CA2512739A1 (en) Punched/stamped rivet
EP1116889A3 (en) Longitudinally divided screw
SG133508A1 (en) Capillary for a bonding tool
WO2008114589A1 (en) Flareless-type pipe fitting, refrigerating device, and water-heating device

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 1-2004-501566

Country of ref document: PH

WWE Wipo information: entry into national phase

Ref document number: 1020047015437

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 2005518338

Country of ref document: JP

WWP Wipo information: published in national office

Ref document number: 1020047015437

Country of ref document: KR

AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

WWE Wipo information: entry into national phase

Ref document number: 20048007768

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application
CFP Corrected version of a pamphlet front page

Free format text: UNDER (57) PUBLISHED ABSTRACT REPLACED BY CORRECT ABSTRACT

B Later publication of amended claims

Effective date: 20050504

122 Ep: pct application non-entry in european phase
WWG Wipo information: grant in national office

Ref document number: 1020047015437

Country of ref document: KR