WO2005020434A3 - Shell type actuator - Google Patents

Shell type actuator Download PDF

Info

Publication number
WO2005020434A3
WO2005020434A3 PCT/US2004/027162 US2004027162W WO2005020434A3 WO 2005020434 A3 WO2005020434 A3 WO 2005020434A3 US 2004027162 W US2004027162 W US 2004027162W WO 2005020434 A3 WO2005020434 A3 WO 2005020434A3
Authority
WO
WIPO (PCT)
Prior art keywords
motion
disc
shell type
type actuator
substrate
Prior art date
Application number
PCT/US2004/027162
Other languages
French (fr)
Other versions
WO2005020434A2 (en
Inventor
Maxim Zalalutdinov
Robert B Reichenbach
Keith Aubin
Brian H Houston
Jeevak M Parpia
Harold G Craighead
Original Assignee
Cornell Res Foundation Inc
Naval Res Lab
Maxim Zalalutdinov
Robert B Reichenbach
Keith Aubin
Brian H Houston
Jeevak M Parpia
Harold G Craighead
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cornell Res Foundation Inc, Naval Res Lab, Maxim Zalalutdinov, Robert B Reichenbach, Keith Aubin, Brian H Houston, Jeevak M Parpia, Harold G Craighead filed Critical Cornell Res Foundation Inc
Priority to EP04786550A priority Critical patent/EP1661245A2/en
Publication of WO2005020434A2 publication Critical patent/WO2005020434A2/en
Publication of WO2005020434A3 publication Critical patent/WO2005020434A3/en
Priority to US11/358,299 priority patent/US7812502B2/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03D—DEMODULATION OR TRANSFERENCE OF MODULATION FROM ONE CARRIER TO ANOTHER
    • H03D1/00—Demodulation of amplitude-modulated oscillations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03C—MODULATION
    • H03C1/00—Amplitude modulation
    • H03C1/46—Modulators with mechanically-driven or acoustically-driven parts
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03D—DEMODULATION OR TRANSFERENCE OF MODULATION FROM ONE CARRIER TO ANOTHER
    • H03D1/00—Demodulation of amplitude-modulated oscillations
    • H03D1/02—Details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03D—DEMODULATION OR TRANSFERENCE OF MODULATION FROM ONE CARRIER TO ANOTHER
    • H03D3/00—Demodulation of angle-, frequency- or phase- modulated oscillations
    • H03D3/34—Demodulation of angle-, frequency- or phase- modulated oscillations by means of electromechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lasers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

A micromechanical resonator (400, 1125) is formed on a substrate (120). The resonator has a partial spherical shell (110) clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectable out-of-plane motion. A laser (1110) is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.
PCT/US2004/027162 2003-08-20 2004-08-20 Shell type actuator WO2005020434A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP04786550A EP1661245A2 (en) 2003-08-20 2004-08-20 Shell type actuator
US11/358,299 US7812502B2 (en) 2003-08-20 2006-02-20 Shell type actuator

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US49643103P 2003-08-20 2003-08-20
US49643003P 2003-08-20 2003-08-20
US49642103P 2003-08-20 2003-08-20
US60/496,421 2003-08-20
US60/496,430 2003-08-20
US60/496,431 2003-08-20

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/358,299 Continuation US7812502B2 (en) 2003-08-20 2006-02-20 Shell type actuator

Publications (2)

Publication Number Publication Date
WO2005020434A2 WO2005020434A2 (en) 2005-03-03
WO2005020434A3 true WO2005020434A3 (en) 2005-05-06

Family

ID=34222368

Family Applications (3)

Application Number Title Priority Date Filing Date
PCT/US2004/027162 WO2005020434A2 (en) 2003-08-20 2004-08-20 Shell type actuator
PCT/US2004/027226 WO2005035436A2 (en) 2003-08-20 2004-08-20 Mems device annealing by laser
PCT/US2004/027229 WO2005020482A2 (en) 2003-08-20 2004-08-20 Thermal-mechanical signal processing

Family Applications After (2)

Application Number Title Priority Date Filing Date
PCT/US2004/027226 WO2005035436A2 (en) 2003-08-20 2004-08-20 Mems device annealing by laser
PCT/US2004/027229 WO2005020482A2 (en) 2003-08-20 2004-08-20 Thermal-mechanical signal processing

Country Status (4)

Country Link
US (4) US7812502B2 (en)
EP (2) EP1661240B1 (en)
CN (2) CN101015120B (en)
WO (3) WO2005020434A2 (en)

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EP1661240B1 (en) 2003-08-20 2013-01-02 Cornell Research Foundation, Inc. Thermal-mechanical signal processing
DE102004011030B4 (en) * 2004-03-04 2006-04-13 Siemens Ag Cover with integrated polymer actuator for deformation of the same
US7280078B2 (en) * 2004-11-20 2007-10-09 Scenterra, Inc. Sensor for detecting high frequency signals
EP1825560A4 (en) * 2004-11-20 2010-09-15 Kenneth E Salsman Device for emission of high frequency signals
CN101472835B (en) * 2006-04-19 2012-01-25 康奈尔研究基金会 Methods and systems for object identification and for authentication
DE102008013098B4 (en) * 2007-04-02 2012-02-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical system with temperature stabilization
US20100086735A1 (en) * 2008-10-03 2010-04-08 The United States Of America As Represented By The Secretary Of The Navy Patterned Functionalization of Nanomechanical Resonators for Chemical Sensing
JP4858547B2 (en) * 2009-01-09 2012-01-18 株式会社デンソー Semiconductor device and manufacturing method thereof
US8158448B2 (en) * 2009-04-27 2012-04-17 The Boeing Company Resonator and methods of making resonators
US9036951B2 (en) 2010-01-26 2015-05-19 Cornell University Silicon acousto-optic modulator structure and method
US10285396B2 (en) 2014-07-03 2019-05-14 William K. Boyd Game tracking device
US10782249B2 (en) * 2015-12-14 2020-09-22 Zedna Ab Crack structures, tunneling junctions using crack structures and methods of making same
US10686425B2 (en) * 2017-06-30 2020-06-16 Texas Instruments Incorporated Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
US10615772B2 (en) 2017-06-30 2020-04-07 Texas Instruments Incorporated Acoustic wave resonators having Fresnel surfaces
US10622966B2 (en) 2017-07-26 2020-04-14 Texas Instruments Incorporated Bulk acoustic wave resonators having a phononic crystal acoustic mirror
US10855251B2 (en) 2017-08-08 2020-12-01 Texas Instruments Incorporated Unreleased plane acoustic wave resonators
CN111811426B (en) * 2020-06-29 2021-07-30 中国人民解放军军事科学院国防科技创新研究院 Method and device for regulating and controlling micro-electromechanical system structure
CN112047296B (en) * 2020-09-18 2022-07-29 南开大学 Method for realizing bidirectional atomic switch by thermal expansion of light-operated substrate

Citations (4)

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Publication number Priority date Publication date Assignee Title
EP0451992A2 (en) * 1990-04-11 1991-10-16 Wisconsin Alumni Research Foundation Detection of vibrations of a microbeam through a shell
US6271052B1 (en) * 2000-10-19 2001-08-07 Axsun Technologies, Inc. Process for integrating dielectric optical coatings into micro-electromechanical devices
US20020086455A1 (en) * 2000-12-21 2002-07-04 Martin Franosch Method for the manufacture of micro-mechanical components
US20020126387A1 (en) * 2001-01-10 2002-09-12 Hiroichi Ishikawa Optical multilayer structure material and process for producing the same, light switching device, and image display apparatus

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Also Published As

Publication number Publication date
US20060239635A1 (en) 2006-10-26
CN101015120A (en) 2007-08-08
WO2005020434A2 (en) 2005-03-03
EP1661240B1 (en) 2013-01-02
CN101015120B (en) 2010-12-22
US20120058741A1 (en) 2012-03-08
WO2005035436A2 (en) 2005-04-21
WO2005020482A3 (en) 2005-06-23
US20060238239A1 (en) 2006-10-26
EP1661240A2 (en) 2006-05-31
WO2005020482A2 (en) 2005-03-03
US8072117B2 (en) 2011-12-06
EP1661245A2 (en) 2006-05-31
CN1951007A (en) 2007-04-18
US8330323B2 (en) 2012-12-11
WO2005035436A3 (en) 2005-11-10
US7812502B2 (en) 2010-10-12
US20070109656A1 (en) 2007-05-17

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