WO2005033747A3 - Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy - Google Patents

Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy Download PDF

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Publication number
WO2005033747A3
WO2005033747A3 PCT/US2004/032023 US2004032023W WO2005033747A3 WO 2005033747 A3 WO2005033747 A3 WO 2005033747A3 US 2004032023 W US2004032023 W US 2004032023W WO 2005033747 A3 WO2005033747 A3 WO 2005033747A3
Authority
WO
WIPO (PCT)
Prior art keywords
interferometric
standing wave
images
frequency components
spatial frequency
Prior art date
Application number
PCT/US2004/032023
Other languages
French (fr)
Other versions
WO2005033747A2 (en
Inventor
Henry Allen Hill
Original Assignee
Zetetic Inst
Henry Allen Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry Allen Hill filed Critical Zetetic Inst
Publication of WO2005033747A2 publication Critical patent/WO2005033747A2/en
Publication of WO2005033747A3 publication Critical patent/WO2005033747A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation

Abstract

A method of measuring properties of a substrate, the method involving: illuminating a spot on the substrate with a standing wave measurement beam to generate a return measurement beam, the standing wave measurement beam characterized by a standing wave pattern; generating an electrical signal from the return measurement beam; causing the standing wave pattern to be at a succession of different positions on the surface of the substrate; and for each of the succession of different positions of the standing wave pattern, acquiring measurement data from the electrical signal.
PCT/US2004/032023 2003-10-01 2004-09-30 Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy WO2005033747A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US50767503P 2003-10-01 2003-10-01
US60/507,675 2003-10-01

Publications (2)

Publication Number Publication Date
WO2005033747A2 WO2005033747A2 (en) 2005-04-14
WO2005033747A3 true WO2005033747A3 (en) 2007-05-31

Family

ID=34421647

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/032023 WO2005033747A2 (en) 2003-10-01 2004-09-30 Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy

Country Status (3)

Country Link
US (1) US7312877B2 (en)
TW (1) TW200528705A (en)
WO (1) WO2005033747A2 (en)

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US7940449B2 (en) * 2009-06-11 2011-05-10 Alces Technology, Inc. Compact display system

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US5666917A (en) * 1995-06-06 1997-09-16 Ford Global Technologies, Inc. System and method for idle speed control

Also Published As

Publication number Publication date
TW200528705A (en) 2005-09-01
WO2005033747A2 (en) 2005-04-14
US7312877B2 (en) 2007-12-25
US20050206909A1 (en) 2005-09-22

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