WO2005037446A3 - Applying imprinting material to substrates employing electromagnetic fields - Google Patents
Applying imprinting material to substrates employing electromagnetic fields Download PDFInfo
- Publication number
- WO2005037446A3 WO2005037446A3 PCT/US2004/034465 US2004034465W WO2005037446A3 WO 2005037446 A3 WO2005037446 A3 WO 2005037446A3 US 2004034465 W US2004034465 W US 2004034465W WO 2005037446 A3 WO2005037446 A3 WO 2005037446A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- imprinting material
- electromagnetic fields
- employing electromagnetic
- applying
- substrates employing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Abstract
The present invention comprises a method for applying a liquid, such as imprinting material, to a substrate that features use of an electromagnetic field to rapidly spread the liquid over a desired portion of the substrate, while confining the same to the desired region.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/687,562 | 2003-10-16 | ||
US10/687,562 US7261830B2 (en) | 2003-10-16 | 2003-10-16 | Applying imprinting material to substrates employing electromagnetic fields |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005037446A2 WO2005037446A2 (en) | 2005-04-28 |
WO2005037446A3 true WO2005037446A3 (en) | 2005-07-28 |
Family
ID=34465546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/034465 WO2005037446A2 (en) | 2003-10-16 | 2004-10-18 | Applying imprinting material to substrates employing electromagnetic fields |
Country Status (4)
Country | Link |
---|---|
US (1) | US7261830B2 (en) |
MY (1) | MY137912A (en) |
TW (1) | TWI253434B (en) |
WO (1) | WO2005037446A2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2270592B1 (en) * | 2000-07-17 | 2015-09-02 | Board of Regents, The University of Texas System | Method of forming a pattern on a substrate |
US6908861B2 (en) * | 2002-07-11 | 2005-06-21 | Molecular Imprints, Inc. | Method for imprint lithography using an electric field |
US20050084804A1 (en) * | 2003-10-16 | 2005-04-21 | Molecular Imprints, Inc. | Low surface energy templates |
US7360851B1 (en) | 2006-02-15 | 2008-04-22 | Kla-Tencor Technologies Corporation | Automated pattern recognition of imprint technology |
CN102438841A (en) * | 2009-03-23 | 2012-05-02 | 因特瓦克公司 | A process for optimization of island to trench ratio in patterned media |
Citations (5)
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US3757846A (en) * | 1958-11-28 | 1973-09-11 | H Herman | Method and apparatus for effecting electromagnetic displacement of fluids |
US4512386A (en) * | 1982-11-12 | 1985-04-23 | Swiss Aluminium Ltd. | Adjustable mold for electromagnetic casting |
US4982796A (en) * | 1988-10-18 | 1991-01-08 | Arch Development Corp. | Electromagnetic confinement for vertical casting or containing molten metal |
US20010026714A1 (en) * | 2000-03-31 | 2001-10-04 | Tsutomu Uezono | Image forming apparatus and image forming method |
US20030215577A1 (en) * | 2002-05-16 | 2003-11-20 | Willson Carlton Grant | Method and system for fabricating nanoscale patterns in light curable compositions using an electric field |
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IT1068535B (en) * | 1975-11-03 | 1985-03-21 | Ibm | APPARATUS AND GRAPHIC ELECTROLYTE PROCESS |
US4512848A (en) * | 1984-02-06 | 1985-04-23 | Exxon Research And Engineering Co. | Procedure for fabrication of microstructures over large areas using physical replication |
US4731155A (en) * | 1987-04-15 | 1988-03-15 | General Electric Company | Process for forming a lithographic mask |
US5028366A (en) * | 1988-01-12 | 1991-07-02 | Air Products And Chemicals, Inc. | Water based mold release compositions for making molded polyurethane foam |
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US7758794B2 (en) * | 2001-10-29 | 2010-07-20 | Princeton University | Method of making an article comprising nanoscale patterns with reduced edge roughness |
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US20040036201A1 (en) * | 2000-07-18 | 2004-02-26 | Princeton University | Methods and apparatus of field-induced pressure imprint lithography |
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US6713238B1 (en) * | 1998-10-09 | 2004-03-30 | Stephen Y. Chou | Microscale patterning and articles formed thereby |
AU1444800A (en) | 1998-10-09 | 2000-05-01 | Trustees Of Princeton University, The | Microscale patterning and articles formed thereby |
US6334960B1 (en) * | 1999-03-11 | 2002-01-01 | Board Of Regents, The University Of Texas System | Step and flash imprint lithography |
US6517995B1 (en) * | 1999-09-14 | 2003-02-11 | Massachusetts Institute Of Technology | Fabrication of finely featured devices by liquid embossing |
CA2395760A1 (en) * | 1999-12-23 | 2001-06-28 | University Of Massachusetts | Methods and apparatus for forming submicron patterns on films |
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US6908861B2 (en) * | 2002-07-11 | 2005-06-21 | Molecular Imprints, Inc. | Method for imprint lithography using an electric field |
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US7750059B2 (en) * | 2002-12-04 | 2010-07-06 | Hewlett-Packard Development Company, L.P. | Polymer solution for nanoimprint lithography to reduce imprint temperature and pressure |
EP1606834B1 (en) * | 2003-03-27 | 2013-06-05 | Korea Institute Of Machinery & Materials | Uv nanoimprint lithography process using elementwise embossed stamp |
CN100526052C (en) | 2003-06-09 | 2009-08-12 | 普林斯顿大学知识产权和技术许可办公室 | Imprint lithography with improved monitoring and control and apparatus therefor |
-
2003
- 2003-10-16 US US10/687,562 patent/US7261830B2/en not_active Expired - Fee Related
-
2004
- 2004-10-18 MY MYPI20044279A patent/MY137912A/en unknown
- 2004-10-18 WO PCT/US2004/034465 patent/WO2005037446A2/en active Application Filing
- 2004-10-18 TW TW093131518A patent/TWI253434B/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3757846A (en) * | 1958-11-28 | 1973-09-11 | H Herman | Method and apparatus for effecting electromagnetic displacement of fluids |
US4512386A (en) * | 1982-11-12 | 1985-04-23 | Swiss Aluminium Ltd. | Adjustable mold for electromagnetic casting |
US4982796A (en) * | 1988-10-18 | 1991-01-08 | Arch Development Corp. | Electromagnetic confinement for vertical casting or containing molten metal |
US20010026714A1 (en) * | 2000-03-31 | 2001-10-04 | Tsutomu Uezono | Image forming apparatus and image forming method |
US20030215577A1 (en) * | 2002-05-16 | 2003-11-20 | Willson Carlton Grant | Method and system for fabricating nanoscale patterns in light curable compositions using an electric field |
Also Published As
Publication number | Publication date |
---|---|
WO2005037446A2 (en) | 2005-04-28 |
US20050082253A1 (en) | 2005-04-21 |
TW200519034A (en) | 2005-06-16 |
MY137912A (en) | 2009-03-31 |
US7261830B2 (en) | 2007-08-28 |
TWI253434B (en) | 2006-04-21 |
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