WO2005043176A3 - Probe testing structure - Google Patents
Probe testing structure Download PDFInfo
- Publication number
- WO2005043176A3 WO2005043176A3 PCT/US2004/030545 US2004030545W WO2005043176A3 WO 2005043176 A3 WO2005043176 A3 WO 2005043176A3 US 2004030545 W US2004030545 W US 2004030545W WO 2005043176 A3 WO2005043176 A3 WO 2005043176A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- testing structure
- probe testing
- probe
- calibration structure
- probing devices
- Prior art date
Links
- 239000000523 sample Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/04—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant in circuits having distributed constants, e.g. having very long conductors or involving high frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/26—Measuring noise figure; Measuring signal-to-noise ratio
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
- G01R35/007—Standards or reference devices, e.g. voltage or resistance standards, "golden references"
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/16—Auxiliary devices for mode selection, e.g. mode suppression or mode promotion; for mode conversion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
- H01P3/08—Microstrips; Strip lines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112004002022T DE112004002022T5 (en) | 2003-10-22 | 2004-09-15 | Measuring probe test structure |
EP04784414A EP1680813A2 (en) | 2003-10-22 | 2004-09-15 | Probe testing structure |
JP2006536629A JP2007509343A (en) | 2003-10-22 | 2004-09-15 | Probe test structure |
GB0608025A GB2423588B (en) | 2003-10-22 | 2004-09-15 | Probe testing structure |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US51366303P | 2003-10-22 | 2003-10-22 | |
US60/513,663 | 2003-10-22 | ||
US10/794,246 US7250626B2 (en) | 2003-10-22 | 2004-03-05 | Probe testing structure |
US10/794,246 | 2004-03-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005043176A2 WO2005043176A2 (en) | 2005-05-12 |
WO2005043176A3 true WO2005043176A3 (en) | 2005-12-15 |
Family
ID=34526887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/030545 WO2005043176A2 (en) | 2003-10-22 | 2004-09-15 | Probe testing structure |
Country Status (8)
Country | Link |
---|---|
US (2) | US7250626B2 (en) |
EP (1) | EP1680813A2 (en) |
JP (1) | JP2007509343A (en) |
KR (1) | KR20060096496A (en) |
DE (2) | DE112004002022T5 (en) |
GB (1) | GB2423588B (en) |
TW (1) | TW200517668A (en) |
WO (1) | WO2005043176A2 (en) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
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US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
DE10143173A1 (en) | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafer probe has contact finger array with impedance matching network suitable for wide band |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
US7250626B2 (en) * | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
JP2007517231A (en) | 2003-12-24 | 2007-06-28 | カスケード マイクロテック インコーポレイテッド | Active wafer probe |
WO2006031646A2 (en) | 2004-09-13 | 2006-03-23 | Cascade Microtech, Inc. | Double sided probing structures |
DE202007018733U1 (en) * | 2006-06-09 | 2009-03-26 | Cascade Microtech, Inc., Beaverton | Transducer for differential signals with integrated balun |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US7723999B2 (en) * | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
WO2008021907A2 (en) * | 2006-08-08 | 2008-02-21 | Tektronix, Inc. | Calibrated s-parameter measurements of probes |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
KR100808816B1 (en) * | 2007-08-10 | 2008-03-03 | 주식회사 파이컴 | Assembly for electric contacting and apparatus for inspecting electric condition having the same |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
CN101872002B (en) * | 2010-05-28 | 2016-01-20 | 上海华虹宏力半导体制造有限公司 | Probe detection device and method thereof |
US9000989B2 (en) * | 2011-08-17 | 2015-04-07 | Apple Inc. | Test system with adjustable radio-frequency probe array |
US8614508B2 (en) | 2011-09-21 | 2013-12-24 | Stats Chippac Ltd. | Integrated circuit system with test pads and method of manufacture thereof |
JP5900019B2 (en) * | 2012-02-29 | 2016-04-06 | 日亜化学工業株式会社 | Light emitting device holder |
TWI526132B (en) * | 2013-12-13 | 2016-03-11 | Mpi Corp | Correction film structure |
US9432064B2 (en) * | 2014-02-11 | 2016-08-30 | Introbotics Corporation | System and method for automated loss testing |
TWI509259B (en) * | 2014-03-18 | 2015-11-21 | Nat Applied Res Laboratories | Conductive type current probe |
US10180486B2 (en) | 2016-03-16 | 2019-01-15 | Formfactor Beaverton, Inc. | Test standards and methods for impedance calibration of a probe system, and probe systems that include the test standards or utilize the methods |
TWI750683B (en) * | 2020-06-02 | 2021-12-21 | 緯穎科技服務股份有限公司 | Signal testing device and signal testing method |
US11943886B2 (en) * | 2020-11-11 | 2024-03-26 | Te Connectivity Solutions Gmbh | Electronic assembly including a compression assembly for cable connector modules |
TWI747750B (en) * | 2021-02-25 | 2021-11-21 | 元智大學 | Calibration structure and calibration method for double-sided probing measurement |
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- 2004-09-15 JP JP2006536629A patent/JP2007509343A/en active Pending
- 2004-09-15 DE DE202004021017U patent/DE202004021017U1/en not_active Expired - Lifetime
- 2004-09-15 EP EP04784414A patent/EP1680813A2/en not_active Withdrawn
- 2004-09-15 WO PCT/US2004/030545 patent/WO2005043176A2/en active Application Filing
- 2004-09-15 KR KR1020067008509A patent/KR20060096496A/en not_active Application Discontinuation
- 2004-10-22 TW TW093132073A patent/TW200517668A/en unknown
-
2007
- 2007-06-20 US US11/820,877 patent/US8069491B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1986007493A1 (en) * | 1985-06-13 | 1986-12-18 | Plessey Overseas Limited | Calibration apparatus for integrated circuits |
JPH07273509A (en) * | 1994-04-04 | 1995-10-20 | Toshiba Corp | Manufacture of microwave circuit and printed circuit board |
US6023209A (en) * | 1996-07-05 | 2000-02-08 | Endgate Corporation | Coplanar microwave circuit having suppression of undesired modes |
Also Published As
Publication number | Publication date |
---|---|
EP1680813A2 (en) | 2006-07-19 |
US20050088191A1 (en) | 2005-04-28 |
KR20060096496A (en) | 2006-09-11 |
US20080218187A1 (en) | 2008-09-11 |
TW200517668A (en) | 2005-06-01 |
DE112004002022T5 (en) | 2006-09-21 |
DE202004021017U1 (en) | 2006-09-28 |
GB0608025D0 (en) | 2006-05-31 |
GB2423588A (en) | 2006-08-30 |
GB2423588B (en) | 2007-08-08 |
US7250626B2 (en) | 2007-07-31 |
WO2005043176A2 (en) | 2005-05-12 |
US8069491B2 (en) | 2011-11-29 |
JP2007509343A (en) | 2007-04-12 |
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