WO2005048313A2 - Methods and systems for handling workpieces in a vacuum-based semiconductor handling system - Google Patents
Methods and systems for handling workpieces in a vacuum-based semiconductor handling system Download PDFInfo
- Publication number
- WO2005048313A2 WO2005048313A2 PCT/US2004/037672 US2004037672W WO2005048313A2 WO 2005048313 A2 WO2005048313 A2 WO 2005048313A2 US 2004037672 W US2004037672 W US 2004037672W WO 2005048313 A2 WO2005048313 A2 WO 2005048313A2
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- WIPO (PCT)
- Prior art keywords
- arm
- robotic
- ofthe
- handling
- robotic arm
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006539863A JP5226215B2 (en) | 2003-11-10 | 2004-11-10 | Method and system for processing a product being processed in a semiconductor processing system under vacuum |
EP04818697.7A EP1684951B1 (en) | 2003-11-10 | 2004-11-10 | System for handling workpieces in a vacuum-based semiconductor handling system |
IL175518A IL175518A0 (en) | 2003-11-10 | 2006-05-09 | Methods and systems for handling workpieces in a vacuum-based semiconductor handling system |
US11/382,491 US8439623B2 (en) | 2003-11-10 | 2006-05-10 | Linear semiconductor processing facilities |
US11/846,290 US7959403B2 (en) | 2003-11-10 | 2007-08-28 | Linear semiconductor processing facilities |
US13/158,883 US8807905B2 (en) | 2003-11-10 | 2011-06-13 | Linear semiconductor processing facilities |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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US51882303P | 2003-11-10 | 2003-11-10 | |
US60/518,823 | 2003-11-10 | ||
US60764904P | 2004-09-07 | 2004-09-07 | |
US60/607,649 | 2004-09-07 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US10/985,834 Continuation-In-Part US7458763B2 (en) | 2003-11-10 | 2004-11-10 | Mid-entry load lock for semiconductor handling system |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/382,491 Continuation-In-Part US8439623B2 (en) | 2003-11-10 | 2006-05-10 | Linear semiconductor processing facilities |
US11/846,290 Continuation-In-Part US7959403B2 (en) | 2003-11-10 | 2007-08-28 | Linear semiconductor processing facilities |
Publications (2)
Publication Number | Publication Date |
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WO2005048313A2 true WO2005048313A2 (en) | 2005-05-26 |
WO2005048313A3 WO2005048313A3 (en) | 2006-03-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/037672 WO2005048313A2 (en) | 2003-11-10 | 2004-11-10 | Methods and systems for handling workpieces in a vacuum-based semiconductor handling system |
Country Status (7)
Country | Link |
---|---|
US (12) | US20050113964A1 (en) |
EP (1) | EP1684951B1 (en) |
JP (2) | JP5226215B2 (en) |
KR (1) | KR20070008533A (en) |
IL (1) | IL175518A0 (en) |
SG (1) | SG132670A1 (en) |
WO (1) | WO2005048313A2 (en) |
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Also Published As
Publication number | Publication date |
---|---|
US8807905B2 (en) | 2014-08-19 |
SG132670A1 (en) | 2007-06-28 |
JP2007511104A (en) | 2007-04-26 |
US8944738B2 (en) | 2015-02-03 |
IL175518A0 (en) | 2006-09-05 |
KR20070008533A (en) | 2007-01-17 |
JP2011101035A (en) | 2011-05-19 |
US20150221534A1 (en) | 2015-08-06 |
US7210246B2 (en) | 2007-05-01 |
US20050120578A1 (en) | 2005-06-09 |
JP5226215B2 (en) | 2013-07-03 |
US8029225B2 (en) | 2011-10-04 |
US8439623B2 (en) | 2013-05-14 |
US20060263177A1 (en) | 2006-11-23 |
US20050118009A1 (en) | 2005-06-02 |
EP1684951A4 (en) | 2011-05-25 |
US20120014769A1 (en) | 2012-01-19 |
EP1684951B1 (en) | 2014-05-07 |
US7959403B2 (en) | 2011-06-14 |
US20120148374A1 (en) | 2012-06-14 |
JP5373760B2 (en) | 2013-12-18 |
US7422406B2 (en) | 2008-09-09 |
US20080085173A1 (en) | 2008-04-10 |
US20050223837A1 (en) | 2005-10-13 |
US20050113964A1 (en) | 2005-05-26 |
US20050113976A1 (en) | 2005-05-26 |
US20050111956A1 (en) | 2005-05-26 |
WO2005048313A3 (en) | 2006-03-02 |
EP1684951A2 (en) | 2006-08-02 |
US20090067958A1 (en) | 2009-03-12 |
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