WO2005071842A3 - Frequency and/or phase compensated microelectromechanical oscillator - Google Patents
Frequency and/or phase compensated microelectromechanical oscillator Download PDFInfo
- Publication number
- WO2005071842A3 WO2005071842A3 PCT/US2004/034522 US2004034522W WO2005071842A3 WO 2005071842 A3 WO2005071842 A3 WO 2005071842A3 US 2004034522 W US2004034522 W US 2004034522W WO 2005071842 A3 WO2005071842 A3 WO 2005071842A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- frequency
- microelectromechanical resonator
- output signal
- microelectromechanical
- circuitry
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
- H03L7/08—Details of the phase-locked loop
- H03L7/081—Details of the phase-locked loop provided with an additional controlled phase shifter
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/022—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/02—Details
- H03B5/04—Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/022—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature
- H03L1/026—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature by using a memory for digitally storing correction values
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/022—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature
- H03L1/027—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature by using frequency conversion means which is variable with temperature, e.g. mixer, frequency divider, pulse add/substract logic circuit
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/04—Constructional details for maintaining temperature constant
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
- H03L7/07—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop using several loops, e.g. for redundant clock signal generation
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
- H03L7/08—Details of the phase-locked loop
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
- H03L7/16—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop
- H03L7/18—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop
- H03L7/197—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop a time difference being used for locking the loop, the counter counting between numbers which are variable in time or the frequency divider dividing by a factor variable in time, e.g. for obtaining fractional frequency division
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
- H03L7/16—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop
- H03L7/18—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop
- H03L7/197—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop a time difference being used for locking the loop, the counter counting between numbers which are variable in time or the frequency divider dividing by a factor variable in time, e.g. for obtaining fractional frequency division
- H03L7/1974—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop a time difference being used for locking the loop, the counter counting between numbers which are variable in time or the frequency divider dividing by a factor variable in time, e.g. for obtaining fractional frequency division for fractional frequency division
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2004800400634A CN1902824B (en) | 2004-01-09 | 2004-10-20 | Frequency and/or phase compensated microelectromechanical oscillator and related method |
JP2006549238A JP5129483B2 (en) | 2004-01-09 | 2004-10-20 | Microelectromechanical oscillator with frequency and / or phase compensation |
EP04795658.6A EP1706942B1 (en) | 2004-01-09 | 2004-10-20 | Frequency and/or phase compensated microelectromechanical oscillator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/754,985 US6995622B2 (en) | 2004-01-09 | 2004-01-09 | Frequency and/or phase compensated microelectromechanical oscillator |
US10/754,985 | 2004-01-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005071842A2 WO2005071842A2 (en) | 2005-08-04 |
WO2005071842A3 true WO2005071842A3 (en) | 2005-09-09 |
Family
ID=34739484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/034522 WO2005071842A2 (en) | 2004-01-09 | 2004-10-20 | Frequency and/or phase compensated microelectromechanical oscillator |
Country Status (6)
Country | Link |
---|---|
US (6) | US6995622B2 (en) |
EP (2) | EP3002878A1 (en) |
JP (1) | JP5129483B2 (en) |
KR (1) | KR101068325B1 (en) |
CN (1) | CN1902824B (en) |
WO (1) | WO2005071842A2 (en) |
Families Citing this family (187)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7845063B2 (en) | 2002-03-06 | 2010-12-07 | Piedek Technical Laboratory | Quartz crystal unit and method for manufacturing a quartz crystal unit and electronic apparatus |
US10284143B2 (en) | 2002-03-06 | 2019-05-07 | Piedek Technical Laboratory | Quartz crystal unit, quartz crystal oscillator and electronic apparatus |
US7528682B2 (en) * | 2002-03-06 | 2009-05-05 | Piedek Technical Laboratory | Electronic apparatus having display portion and oscillator and manufacturing method of the same |
US7791424B2 (en) * | 2002-10-15 | 2010-09-07 | Marvell World Trade Ltd. | Crystal oscillator emulator |
US20060113639A1 (en) * | 2002-10-15 | 2006-06-01 | Sehat Sutardja | Integrated circuit including silicon wafer with annealed glass paste |
US7253495B2 (en) | 2002-10-15 | 2007-08-07 | Marvell World Trade Ltd. | Integrated circuit package with air gap |
US7760039B2 (en) * | 2002-10-15 | 2010-07-20 | Marvell World Trade Ltd. | Crystal oscillator emulator |
US7768360B2 (en) * | 2002-10-15 | 2010-08-03 | Marvell World Trade Ltd. | Crystal oscillator emulator |
US6995622B2 (en) * | 2004-01-09 | 2006-02-07 | Robert Bosh Gmbh | Frequency and/or phase compensated microelectromechanical oscillator |
FI20040162A0 (en) * | 2004-02-03 | 2004-02-03 | Nokia Oyj | Stabilization of reference oscillator frequency |
US8095813B2 (en) * | 2004-03-22 | 2012-01-10 | Integrated Device Technology, Inc | Integrated circuit systems having processor-controlled clock signal generators therein that support efficient power management |
US7363364B2 (en) * | 2004-03-30 | 2008-04-22 | At&T Delaware Intellectual Property, Inc. | Methods, systems, and products for verifying integrity of web-server served content |
EP1762004B1 (en) * | 2004-06-24 | 2011-01-05 | Nokia Siemens Networks Oy | Frequency synthesizer |
DE102004056699A1 (en) * | 2004-11-24 | 2006-06-01 | Litef Gmbh | Method for controlling / regulating a physical variable of a dynamic system, in particular of a micromechanical sensor |
MX2007008148A (en) * | 2005-01-07 | 2008-01-16 | Univ Boston | Nanomechanical oscillator. |
US7812680B1 (en) | 2005-05-03 | 2010-10-12 | Discera, Inc. | MEMS resonator-based signal modulation |
US7449968B1 (en) * | 2005-05-03 | 2008-11-11 | Discera, Inc. | Frequency and temperature compensation synthesis for a MEMS resonator |
JP2007208584A (en) * | 2006-02-01 | 2007-08-16 | Ricoh Co Ltd | Frequency adjusting circuit |
US7920694B2 (en) * | 2006-02-03 | 2011-04-05 | Immersion Corporation | Generation of consistent haptic effects |
US7936203B2 (en) * | 2006-02-08 | 2011-05-03 | Micron Technology, Inc. | Temperature compensation via power supply modification to produce a temperature-independent delay in an integrated circuit |
US7680227B2 (en) * | 2006-03-02 | 2010-03-16 | Broadcom Corporation | Method and system for filter calibration using fractional-N frequency synthesized signals |
US7443258B2 (en) * | 2006-04-06 | 2008-10-28 | Sitime Corporation | Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same |
WO2007149764A2 (en) * | 2006-06-14 | 2007-12-27 | Sitime Corporation | Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same |
US7446619B2 (en) * | 2006-06-14 | 2008-11-04 | Sitime Corporation | Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same |
WO2007147137A2 (en) * | 2006-06-15 | 2007-12-21 | Sitime Corporation | Stacked die package for mems resonator system |
US20080021944A1 (en) * | 2006-07-20 | 2008-01-24 | Texas Instruments Incorporated | Method and apparatus for reducing jitter in output signals from a frequency synthesizer using a control word having a fractional bit |
JP2008028854A (en) * | 2006-07-24 | 2008-02-07 | Denso Corp | Clock generator |
US7563633B2 (en) * | 2006-08-25 | 2009-07-21 | Robert Bosch Gmbh | Microelectromechanical systems encapsulation process |
JP5105345B2 (en) * | 2006-09-04 | 2012-12-26 | セイコーインスツル株式会社 | Oscillator |
US7649426B2 (en) * | 2006-09-12 | 2010-01-19 | Cts Corporation | Apparatus and method for temperature compensation of crystal oscillators |
WO2008033681A2 (en) * | 2006-09-14 | 2008-03-20 | Sitime Corporation | Microelectromechanical oscillator with intermittent drive |
US8314665B2 (en) * | 2006-09-20 | 2012-11-20 | Trustees Of Boston University | Nano electromechanical integrated-circuit filter |
WO2008036845A2 (en) * | 2006-09-20 | 2008-03-27 | Trustees Of Boston University | Nano electromechanical integrated-circuit bank and switch |
TWI433465B (en) * | 2006-10-17 | 2014-04-01 | Marvell World Trade Ltd | Crystal oscillator emulator |
WO2008048644A2 (en) * | 2006-10-17 | 2008-04-24 | Marvell World Trade Ltd. | Crystal oscillator emulator |
US20080262773A1 (en) * | 2007-04-18 | 2008-10-23 | Exatron Inc. | Systems and methods for measuring temperature |
FI20075292A0 (en) * | 2007-04-26 | 2007-04-26 | Nokia Corp | Stabilization of oscillator signal |
US20080290494A1 (en) * | 2007-05-21 | 2008-11-27 | Markus Lutz | Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same |
US8085075B2 (en) * | 2007-08-16 | 2011-12-27 | General Electric Comapany | Method and system for diagnostic imaging using a digital phase locked loop |
US7545228B1 (en) * | 2007-09-12 | 2009-06-09 | Sitime Inc. | Dynamic temperature compensation for a digitally controlled oscillator using dual MEMS resonators |
US7801694B1 (en) | 2007-09-27 | 2010-09-21 | Watson Industries, Inc. | Gyroscope with temperature compensation |
WO2009048468A1 (en) | 2007-10-11 | 2009-04-16 | Sand 9, Inc. | Signal amplification by hierarchal resonating structures |
JP5105279B2 (en) * | 2007-10-12 | 2012-12-26 | セイコーインスツル株式会社 | Oscillator and oscillator having the oscillator |
US20090108949A1 (en) * | 2007-10-30 | 2009-04-30 | Qualcomm Incorporated | Temperature compensation for crystal oscillators |
US8045669B2 (en) | 2007-11-29 | 2011-10-25 | Qualcomm Incorporated | Digital phase-locked loop operating based on fractional input and output phases |
US8093958B2 (en) * | 2007-12-05 | 2012-01-10 | Integrated Device Technology, Inc. | Clock, frequency reference, and other reference signal generator with a controlled quality factor |
JP4835596B2 (en) * | 2008-01-10 | 2011-12-14 | パナソニック株式会社 | Synthesizer or oscillator module, and synthesizer module, receiver, and electronic device using the synthesizer |
US20090195322A1 (en) * | 2008-01-31 | 2009-08-06 | Qualcomm Incorporated | Crystal oscillator frequency calibration |
WO2009098642A1 (en) * | 2008-02-07 | 2009-08-13 | Nxp B.V. | A method of operating a multi-stream reception scheme |
JP2009194428A (en) * | 2008-02-12 | 2009-08-27 | Panasonic Corp | Synthesizer, receiver using the same and electronic apparatus |
JP4821784B2 (en) * | 2008-02-14 | 2011-11-24 | パナソニック株式会社 | Synthesizer, and receiver and electronic apparatus using the same |
WO2009101792A1 (en) * | 2008-02-12 | 2009-08-20 | Panasonic Corporation | Synthesizer and reception device using the same |
JP4811417B2 (en) * | 2008-02-14 | 2011-11-09 | パナソニック株式会社 | Receiving device and electronic device |
JP2009200888A (en) * | 2008-02-22 | 2009-09-03 | Seiko Instruments Inc | Mems oscillator |
EP2101413A1 (en) * | 2008-03-10 | 2009-09-16 | CSEM Centre Suisse d'Electronique et de Microtechnique SA Recherche et Développement | Thermal compensation device and method for a resonator |
JP4883031B2 (en) * | 2008-03-18 | 2012-02-22 | パナソニック株式会社 | Receiving device and electronic device using the same |
US7990229B2 (en) | 2008-04-01 | 2011-08-02 | Sand9, Inc. | Methods and devices for compensating a signal using resonators |
JP5321179B2 (en) * | 2008-04-11 | 2013-10-23 | 富士通株式会社 | Phase control device, phase control printed board, and control method |
GB2459304B (en) * | 2008-04-18 | 2013-02-20 | Nujira Ltd | Improved pulse width modulation |
US8044737B2 (en) * | 2008-04-29 | 2011-10-25 | Sand9, Inc. | Timing oscillators and related methods |
US8410868B2 (en) | 2009-06-04 | 2013-04-02 | Sand 9, Inc. | Methods and apparatus for temperature control of devices and mechanical resonating structures |
US8044736B2 (en) * | 2008-04-29 | 2011-10-25 | Sand9, Inc. | Timing oscillators and related methods |
US8476809B2 (en) | 2008-04-29 | 2013-07-02 | Sand 9, Inc. | Microelectromechanical systems (MEMS) resonators and related apparatus and methods |
US7777595B2 (en) * | 2008-04-30 | 2010-08-17 | John Mezzalingua Associates, Inc. | Multi-channel filter assemblies |
JP4524326B2 (en) * | 2008-05-13 | 2010-08-18 | 日本電波工業株式会社 | Crystal oscillator |
US20120043999A1 (en) * | 2008-07-01 | 2012-02-23 | Quevy Emmanuel P | Mems stabilized oscillator |
US7982550B1 (en) * | 2008-07-01 | 2011-07-19 | Silicon Laboratories | Highly accurate temperature stable clock based on differential frequency discrimination of oscillators |
US8111108B2 (en) | 2008-07-29 | 2012-02-07 | Sand9, Inc. | Micromechanical resonating devices and related methods |
US8059322B1 (en) | 2008-09-16 | 2011-11-15 | National Semiconductor Corporation | System for suppressing undesirable oscillations in a MEMS scanner |
US20100073096A1 (en) * | 2008-09-22 | 2010-03-25 | Texas Instruments Incorporated | Micro electro-mechanical system based programmable frequency synthesizer and method of operation thereof |
US7830216B1 (en) * | 2008-09-23 | 2010-11-09 | Silicon Labs Sc, Inc. | Precision, temperature stable clock using a frequency-control circuit and a single oscillator |
US7907019B1 (en) | 2008-10-01 | 2011-03-15 | National Semiconductor Corporation | Method and system for operating a MEMS scanner on a resonant mode frequency |
US8154782B1 (en) | 2008-10-01 | 2012-04-10 | Texas Instruments Incorporated | Method and system for generating a drive signal for a MEMS scanner |
US20100155883A1 (en) * | 2008-10-31 | 2010-06-24 | Trustees Of Boston University | Integrated mems and ic systems and related methods |
US8220933B1 (en) | 2008-11-03 | 2012-07-17 | National Semiconductor Corporation | Method and apparatus for data transfer using an optical link in a projector system |
DE102008043598B4 (en) | 2008-11-10 | 2022-04-14 | Robert Bosch Gmbh | Component and manufacturing process for a component |
JP5407765B2 (en) * | 2008-11-20 | 2014-02-05 | 富士通株式会社 | Oscillator and semiconductor device |
US8058769B2 (en) * | 2008-12-17 | 2011-11-15 | Sand9, Inc. | Mechanical resonating structures including a temperature compensation structure |
WO2010077311A1 (en) * | 2008-12-17 | 2010-07-08 | Sand9, Inc. | Multi-port mechanical resonating devices and related methods |
US8689426B2 (en) | 2008-12-17 | 2014-04-08 | Sand 9, Inc. | Method of manufacturing a resonating structure |
GB2466269A (en) * | 2008-12-19 | 2010-06-23 | Ge Infrastructure Sensing Inc | System and method for remote reading of resonant sensors |
WO2010090731A2 (en) * | 2009-02-04 | 2010-08-12 | Sand9, Inc. | Methods and apparatus for tuning devices having mechanical resonators |
US8456250B2 (en) * | 2009-02-04 | 2013-06-04 | Sand 9, Inc. | Methods and apparatus for tuning devices having resonators |
US8395456B2 (en) * | 2009-02-04 | 2013-03-12 | Sand 9, Inc. | Variable phase amplifier circuit and method of use |
US8446078B2 (en) * | 2009-03-26 | 2013-05-21 | Sand 9, Inc. | Mechanical resonating structures and methods |
WO2010114602A1 (en) * | 2009-03-31 | 2010-10-07 | Sand9, Inc. | Integration of piezoelectric materials with substrates |
US9048811B2 (en) | 2009-03-31 | 2015-06-02 | Sand 9, Inc. | Integration of piezoelectric materials with substrates |
US8183944B2 (en) | 2009-04-03 | 2012-05-22 | Invensense, Inc. | Method and system for using a MEMS structure as a timing source |
US8134414B2 (en) * | 2009-04-24 | 2012-03-13 | Integrated Device Technology, Inc. | Clock, frequency reference, and other reference signal generator with frequency stability over temperature variation |
US8331005B2 (en) * | 2009-04-24 | 2012-12-11 | National Semiconductor Corporation | Method and system for providing resonant frequency change compensation in a drive signal for a MEMS scanner |
US8174170B1 (en) | 2009-05-13 | 2012-05-08 | Sand 9, Inc. | Methods and apparatus for mechanical resonating structures |
WO2010143363A1 (en) * | 2009-06-09 | 2010-12-16 | パナソニック株式会社 | Resonator and oscillator using same |
US8164159B1 (en) | 2009-07-18 | 2012-04-24 | Intergrated Device Technologies, inc. | Semiconductor resonators with electromagnetic and environmental shielding and methods of forming same |
JP5232305B2 (en) | 2009-09-28 | 2013-07-10 | 株式会社東芝 | Resonator and oscillator |
JP2011114403A (en) * | 2009-11-24 | 2011-06-09 | Seiko Epson Corp | Temperature compensation method for piezoelectric oscillator, and piezoelectric oscillator |
US9038459B1 (en) * | 2009-12-14 | 2015-05-26 | Hrl Laboratories, Llc | Frequency locking of resonators for improved temperature control of gyroscopes |
US8704604B2 (en) | 2009-12-23 | 2014-04-22 | Sand 9, Inc. | Oscillators having arbitrary frequencies and related systems and methods |
US8604888B2 (en) | 2009-12-23 | 2013-12-10 | Sand 9, Inc. | Oscillators having arbitrary frequencies and related systems and methods |
US8228127B2 (en) * | 2009-12-23 | 2012-07-24 | Sand 9, Inc. | Oscillators having arbitrary frequencies and related systems and methods |
US8821009B2 (en) * | 2009-12-23 | 2014-09-02 | Intel Corporation | Thermal sensors having flexible substrates and use thereof |
WO2011109382A1 (en) | 2010-03-01 | 2011-09-09 | Sand9, Inc. | Microelectromechanical gyroscopes and related apparatus and methods |
US20110212718A1 (en) * | 2010-03-01 | 2011-09-01 | Sand9, Inc. | Methods and apparatus for stabilizing reference oscillators |
WO2011133682A1 (en) | 2010-04-20 | 2011-10-27 | Guiti Zolfagharkhani | Microelectromechanical gyroscopes and related apparatus and methods |
US8378758B2 (en) * | 2010-04-27 | 2013-02-19 | California Institute Of Technology | Parametric feedback oscillators |
WO2012017572A1 (en) * | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | Oscillator |
US9075077B2 (en) | 2010-09-20 | 2015-07-07 | Analog Devices, Inc. | Resonant sensing using extensional modes of a plate |
US8390358B2 (en) * | 2010-10-07 | 2013-03-05 | Cortina Systems, Inc. | Integrated jitter compliant clock signal generation |
JP5956997B2 (en) * | 2010-10-11 | 2016-07-27 | アイメックImec | Design and control of multi-temperature micro-oven for MEMS devices |
US8344817B2 (en) * | 2010-12-22 | 2013-01-01 | Atmel Corporation | Compensating DFLL with error averaging |
CN102141771B (en) * | 2011-03-08 | 2013-10-02 | 无锡辐导微电子有限公司 | Frequency correction method and device |
FR2973504B1 (en) * | 2011-03-31 | 2014-01-10 | Commissariat Energie Atomique | ELECTROMECHANICAL RESONATOR MEASURING SYSTEM, METHOD FOR MANUFACTURING SUCH A SYSTEM, AND METHOD FOR READING AT LEAST TWO ELECTROMECHANICAL RESONATORS |
US8862648B2 (en) | 2011-05-24 | 2014-10-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fast filter calibration apparatus |
JP5204354B1 (en) | 2011-06-09 | 2013-06-05 | パナソニック株式会社 | Oscillator |
US9022644B1 (en) | 2011-09-09 | 2015-05-05 | Sitime Corporation | Micromachined thermistor and temperature measurement circuitry, and method of manufacturing and operating same |
US9383208B2 (en) | 2011-10-13 | 2016-07-05 | Analog Devices, Inc. | Electromechanical magnetometer and applications thereof |
US8593230B2 (en) | 2011-10-14 | 2013-11-26 | Nxp, B.V. | Circuit and method for correcting temperature dependence of frequency for piezoresistive oscillators |
US8884710B2 (en) * | 2011-10-25 | 2014-11-11 | Invensense, Inc. | Gyroscope with phase and duty-cycle locked loop |
CH705679B1 (en) * | 2011-10-28 | 2017-01-31 | Swatch Group Res & Dev Ltd | A circuit for self-regulating the oscillation frequency of an oscillating mechanical system, and a device comprising the same. |
DE102011089813A1 (en) * | 2011-12-23 | 2013-06-27 | Continental Teves Ag & Co. Ohg | Frequency transmitter arrangement |
JP2013171226A (en) * | 2012-02-22 | 2013-09-02 | Funai Electric Co Ltd | Image display device and mirror driving method of the same |
CN102594260A (en) * | 2012-03-01 | 2012-07-18 | 中国科学院半导体研究所 | High-precision temperature-compensation MEMS (Micro-Electromechanical System) oscillator based on parasitic capacitance adjustment |
US8559587B1 (en) | 2012-03-21 | 2013-10-15 | Integrated Device Technology, Inc | Fractional-N dividers having divider modulation circuits therein with segmented accumulators |
US8916407B1 (en) * | 2012-03-29 | 2014-12-23 | Sitime Corporation | MEMS device and method of manufacturing same |
US9091453B2 (en) * | 2012-03-29 | 2015-07-28 | Google Inc. | Enclosure cooling using early compressor turn-off with extended fan operation |
FR2988935B1 (en) * | 2012-04-03 | 2014-04-25 | Commissariat Energie Atomique | DEVICE FOR CONTROLLING NEMS WITH DIGITAL DELAY MODULE |
CN103378855B (en) * | 2012-04-30 | 2016-09-14 | 台湾积体电路制造股份有限公司 | There is phaselocked loop and the method for structure phaselocked loop of doubler |
US9503103B2 (en) * | 2012-04-30 | 2016-11-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Phase locked loop with a frequency multiplier and method of configuring the phase locked loop |
US9299910B1 (en) | 2012-05-17 | 2016-03-29 | Analog Devices, Inc. | Resonator anchors and related apparatus and methods |
US8836392B2 (en) | 2012-06-04 | 2014-09-16 | Silicon Laboratories Inc. | Digital locked loop for producing a clock having a selected frequency ratio relative to a clock produced by a MEMS-based oscillator |
US10677764B2 (en) | 2012-06-11 | 2020-06-09 | Covidien Lp | Temperature estimation and tissue detection of an ultrasonic dissector from frequency response monitoring |
US11076880B2 (en) | 2012-06-11 | 2021-08-03 | Covidien Lp | Temperature estimation and tissue detection of an ultrasonic dissector from frequency response monitoring |
US8604848B1 (en) | 2012-06-29 | 2013-12-10 | Integrated Device Technology Inc. | MEMS-based frequency synthesizers having variable bandwidth temperature compensation |
US8575981B1 (en) | 2012-06-29 | 2013-11-05 | Integrated Device Technology, Inc. | MEMS-based frequency synthesizers with enhanced temperature compensation |
US9618399B1 (en) * | 2012-09-26 | 2017-04-11 | Analog Devices, Inc. | Frequency correction of oscillators and related apparatus and methods |
US9954513B1 (en) | 2012-12-21 | 2018-04-24 | Analog Devices, Inc. | Methods and apparatus for anchoring resonators |
US8963651B2 (en) * | 2013-03-01 | 2015-02-24 | Analog Devices, Inc. | Frequency temperature offset compensation |
US9634227B1 (en) | 2013-03-06 | 2017-04-25 | Analog Devices, Inc. | Suppression of spurious modes of vibration for resonators and related apparatus and methods |
US8981856B1 (en) | 2013-03-15 | 2015-03-17 | Integrated Device Technology, Inc. | High frequency precision oscillators having stable temperature characteristics |
US9000853B1 (en) | 2013-03-15 | 2015-04-07 | Integrated Device Technology, Inc. | Packaged MEMS-based oscillator circuits that support frequency margining and methods of operating same |
CN103354447A (en) * | 2013-07-05 | 2013-10-16 | 广东合微集成电路技术有限公司 | Compensation system used for MEMS resonator |
US9621170B2 (en) * | 2013-08-13 | 2017-04-11 | Silicon Laboratories Inc. | Accurate frequency control using a MEMS-based oscillator |
CN103439529B (en) * | 2013-09-04 | 2016-01-20 | 南京理工大学 | Based on the silicon vibrating beam accelerometer of the integrated high precision measuring temperature structure of chip |
CN104516105A (en) * | 2013-09-29 | 2015-04-15 | 中强光电股份有限公司 | Laser scanning device and calibration method thereof |
US9625290B1 (en) * | 2013-11-26 | 2017-04-18 | Google Inc. | Dynamic calibration of MEMS sensors |
US9929737B2 (en) * | 2013-12-05 | 2018-03-27 | Telefonaktiebolaget Lm Ericsson (Publ) | Oscillator arrangement, method, computer program and communication device |
CN103746656B (en) * | 2014-01-21 | 2017-01-11 | 无锡华普微电子有限公司 | Gigahertz base frequency low-phase noise oscillation circuit |
TWI558096B (en) * | 2014-01-24 | 2016-11-11 | 加高電子股份有限公司 | Temperature compensated mems oscillator |
US9766682B1 (en) * | 2014-01-27 | 2017-09-19 | Marvell International Ltd. | Wakeup time system using drift estimation |
US11645897B2 (en) | 2014-07-25 | 2023-05-09 | 1010210 B.C. Ltd. | Sensor assembly for use in a security alarm system and method of installing the same |
US10249161B2 (en) | 2014-07-25 | 2019-04-02 | 1010210 B.C. Ltd. | Magnetic field sensor |
US11341829B2 (en) | 2014-07-25 | 2022-05-24 | 1010210 B.C. Ltd. | Sensor assembly for use in a security alarm system and method of installing the same |
US11763652B2 (en) | 2014-07-25 | 2023-09-19 | 1010210 B.C. Ltd. | Method of arranging a security alarm system on a window/door and framing, and combination comprising the window/door, framing and security alarm system thereof |
EP3194993B1 (en) * | 2014-07-25 | 2022-03-02 | 1010210 B.C. Ltd. | Magnetic field sensor for use in a security alarm system |
CN105375921A (en) * | 2014-08-27 | 2016-03-02 | 硅谷实验室公司 | Accurate frequency control based on MEMS oscillator |
KR20160026540A (en) * | 2014-09-01 | 2016-03-09 | 삼성전기주식회사 | The apparatus for correcting gyro sensor and correcting Method thereof |
CN104270094B (en) * | 2014-09-25 | 2018-04-17 | 长沙天穹电子科技有限公司 | The apparatus and method of oscillator acceleration effect are reduced using mixed compensation |
US9921239B2 (en) * | 2014-11-20 | 2018-03-20 | Stmicroelectronics, Inc. | Offset cancellation device for micro-electromechanical system |
US9236873B1 (en) | 2014-12-17 | 2016-01-12 | Integrated Device Technology, Inc. | Fractional divider based phase locked loops with digital noise cancellation |
US10030976B2 (en) * | 2015-05-13 | 2018-07-24 | Kionix, Inc. | Phase-based measurement and control of a gyroscope |
US10527503B2 (en) * | 2016-01-08 | 2020-01-07 | Apple Inc. | Reference circuit for metrology system |
CN106100586B (en) * | 2016-06-06 | 2019-01-29 | 东南大学 | Frequency multiplier based on MEMS wideband phase detector |
US10800649B2 (en) | 2016-11-28 | 2020-10-13 | Analog Devices International Unlimited Company | Planar processing of suspended microelectromechanical systems (MEMS) devices |
CN107276581B (en) * | 2017-05-17 | 2021-01-26 | 电子科技大学 | Step temperature compensation method of crystal oscillator |
CN107248845A (en) * | 2017-05-17 | 2017-10-13 | 电子科技大学 | A kind of temperature compensating crystal oscillator based on digital circuit |
CN107276582B (en) * | 2017-05-17 | 2021-01-26 | 电子科技大学 | Temperature compensation crystal oscillator based on analog circuit |
US10684465B2 (en) * | 2017-10-02 | 2020-06-16 | Stmicroelectronics Ltd | MEMS mirror driven by dual pulse drive signal |
US10505497B2 (en) * | 2017-10-05 | 2019-12-10 | Texas Instruments Incorporated | Low-power microelectromechanical system resonator based oscillator using impedance transformation |
US10312185B2 (en) | 2017-10-05 | 2019-06-04 | Texas Instrument Incorporated | Inductively coupled microelectromechanical system resonator |
IT201700124320A1 (en) * | 2017-10-31 | 2019-05-01 | St Microelectronics Srl | MICROELETTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY COMPARED TO TEMPERATURE VARIATIONS |
CN107884608B (en) * | 2017-11-02 | 2020-10-23 | 钜泉光电科技(上海)股份有限公司 | Electric energy meter control system and clock correction method |
US10498346B2 (en) * | 2017-11-09 | 2019-12-03 | Raytheon Company | Midband phase noise reducer for PLLS |
US10447253B2 (en) | 2017-12-13 | 2019-10-15 | Megachips Corporation | High performance PLL based on PVT independent stable oscillator |
MX2020012192A (en) | 2018-05-17 | 2021-01-29 | 1010210 B C Ltd | Security alarm system comprising an rfid tag. |
US11495186B2 (en) * | 2018-05-29 | 2022-11-08 | Microsoft Technology Licensing, Llc | Synchronizing scanning display with video |
CN108922461B (en) * | 2018-07-04 | 2021-09-14 | 歌尔光学科技有限公司 | Micro laser projector, signal processing method and device based on micro laser projector |
WO2020024199A1 (en) * | 2018-08-02 | 2020-02-06 | Texas Instruments Incorporated | High speed flexled digital interface |
CN109547386B (en) * | 2018-11-27 | 2020-08-14 | 海安南京大学高新技术研究院 | PD for high order Sigma-Delta modulatorλDesign method of phase compensator |
US11374535B2 (en) | 2018-12-06 | 2022-06-28 | Sitime Corporation | Ovenized MEMS |
WO2020118421A1 (en) | 2018-12-10 | 2020-06-18 | 1010210 B.C. Ltd. | Method of installing a security alarm system and wireless access point |
JP7346843B2 (en) * | 2019-02-21 | 2023-09-20 | セイコーエプソン株式会社 | Oscillators, electronic equipment and mobile objects |
US10843920B2 (en) | 2019-03-08 | 2020-11-24 | Analog Devices International Unlimited Company | Suspended microelectromechanical system (MEMS) devices |
US11163153B1 (en) * | 2019-05-03 | 2021-11-02 | Microsoft Technology Licensing, Llc | Adjusting notch frequency of adaptive notch filter to track resonant frequency of slow scan microelectromechanical systems (MEMS) mirror |
US11684387B2 (en) | 2019-11-25 | 2023-06-27 | Covidien Lp | Methods and ultrasonic devices and systems for vessel sealing |
EP4007161A1 (en) * | 2020-11-30 | 2022-06-01 | Huawei Technologies Co., Ltd. | Clock oscillator and method for preparing clock oscillator |
CN112737507B (en) * | 2021-02-01 | 2022-07-08 | 山东新港电子科技有限公司 | Method for realizing RTC high precision based on temperature sensor |
CN114900150A (en) * | 2022-05-07 | 2022-08-12 | 福州大学 | High-order temperature frequency compensation circuit combining CMOS circuit and MEMS resonator |
CN116625339B (en) * | 2023-07-20 | 2023-09-19 | 成都市晶蓉微电子有限公司 | System and method for realizing phase demodulation in MEMS gyroscope digital circuit |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6124765A (en) * | 1997-10-24 | 2000-09-26 | Stmicroelectronics, Inc. | Integrated released beam oscillator and associated methods |
Family Cites Families (110)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4443116A (en) * | 1981-01-09 | 1984-04-17 | Citizen Watch Company Limited | Electronic timepiece |
JPH022721A (en) * | 1988-06-16 | 1990-01-08 | Nec Corp | Phase locked loop oscillation circuit |
US5036216A (en) * | 1990-03-08 | 1991-07-30 | Integrated Circuit Systems, Inc. | Video dot clock generator |
DE4317274A1 (en) | 1993-05-25 | 1994-12-01 | Bosch Gmbh Robert | Process for the production of surface-micromechanical structures |
US5616514A (en) | 1993-06-03 | 1997-04-01 | Robert Bosch Gmbh | Method of fabricating a micromechanical sensor |
US5576666A (en) | 1993-11-12 | 1996-11-19 | Nippondenso Technical Center Usa, Inc. | Fractional-N frequency synthesizer with temperature compensation |
WO1996025796A1 (en) * | 1995-02-17 | 1996-08-22 | Intel Corporation | Power dissipation control system for vlsi chips |
KR100393317B1 (en) | 1994-02-15 | 2003-10-23 | 람버스 인코포레이티드 | Delayed synchronization loop |
US5451912A (en) | 1994-06-13 | 1995-09-19 | Cypress Semiconductor Corp. | Methods and apparatus for a programmable frequency generator that requires no dedicated programming pins |
US5922212A (en) | 1995-06-08 | 1999-07-13 | Nippondenso Co., Ltd | Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body |
JPH098551A (en) * | 1995-06-20 | 1997-01-10 | Fujitsu Ltd | Highly stabilized oscillation circuit |
JP3361916B2 (en) | 1995-06-28 | 2003-01-07 | シャープ株式会社 | Method of forming microstructure |
US6000280A (en) | 1995-07-20 | 1999-12-14 | Cornell Research Foundation, Inc. | Drive electrodes for microfabricated torsional cantilevers |
US5684434A (en) | 1995-10-30 | 1997-11-04 | Cypress Semiconductor | Erasable and programmable single chip clock generator |
US5604468A (en) * | 1996-04-22 | 1997-02-18 | Motorola, Inc. | Frequency synthesizer with temperature compensation and frequency multiplication and method of providing the same |
US5919364A (en) | 1996-06-24 | 1999-07-06 | Regents Of The University Of California | Microfabricated filter and shell constructed with a permeable membrane |
US5914801A (en) | 1996-09-27 | 1999-06-22 | Mcnc | Microelectromechanical devices including rotating plates and related methods |
US6125157A (en) | 1997-02-06 | 2000-09-26 | Rambus, Inc. | Delay-locked loop circuitry for clock delay adjustment |
US6087198A (en) | 1998-02-12 | 2000-07-11 | Texas Instruments Incorporated | Low cost packaging for thin-film resonators and thin-film resonator-based filters |
US5976994A (en) | 1997-06-13 | 1999-11-02 | Regents Of The University Of Michigan | Method and system for locally annealing a microstructure formed on a substrate and device formed thereby |
US5856766A (en) | 1997-06-30 | 1999-01-05 | Motorola Inc. | Communication device with a frequency compensating synthesizer and method of providing same |
US5994982A (en) | 1997-07-18 | 1999-11-30 | Trw Inc. | MEMS switched resonators for VCO applications |
US6377646B1 (en) | 1997-07-21 | 2002-04-23 | Cypress Semiconductor Corp. | Spread spectrum at phase lock loop (PLL) feedback path |
KR100252009B1 (en) | 1997-09-25 | 2000-04-15 | 윤종용 | Micro structure for oscillation and method of controlling resonant frequency and the same and microactuator and micro gyroscope using the same |
US6513103B1 (en) | 1997-10-10 | 2003-01-28 | Rambus Inc. | Method and apparatus for adjusting the performance of a synchronous memory system |
US6127908A (en) | 1997-11-17 | 2000-10-03 | Massachusetts Institute Of Technology | Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same |
US6839394B1 (en) | 1997-11-19 | 2005-01-04 | Cypress Semiconductor Corp. | Frequency difference detector with hysteresis |
DE69820908T2 (en) * | 1997-12-12 | 2004-12-23 | Osi Pharmaceuticals, Inc. | N-BENZYL-3-INDENYLACEAMIDE DERIVATIVE FOR THE TREATMENT OF NEOPLASIA |
US6104257A (en) | 1997-12-22 | 2000-08-15 | Cypress Semiconductor Corp. | Crystal oscillator with eprom-controlled frequency trim |
JP4003326B2 (en) | 1998-02-12 | 2007-11-07 | 株式会社デンソー | Semiconductor dynamic quantity sensor and manufacturing method thereof |
US6084479A (en) | 1998-05-28 | 2000-07-04 | Cypress Semiconductor Corp. | Circuit, architecture and method(s) of controlling a periodic signal generating circuit or device |
KR100301043B1 (en) * | 1998-08-08 | 2001-09-06 | 윤종용 | Phase comparator in DLL & method for delay locking |
US6782064B1 (en) | 1998-09-21 | 2004-08-24 | Cypress Semiconductor Corp. | Circuit, architecture and method for asynchronous clock domain switching |
US6188255B1 (en) | 1998-09-28 | 2001-02-13 | Cypress Semiconductor Corp. | Configurable clock generator |
US6337664B1 (en) | 1998-10-21 | 2002-01-08 | Paul E. Mayes | Tuning circuit for edge-loaded nested resonant radiators that provides switching among several wide frequency bands |
US6713938B2 (en) | 1999-01-14 | 2004-03-30 | The Regents Of The University Of Michigan | Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
US6577040B2 (en) | 1999-01-14 | 2003-06-10 | The Regents Of The University Of Michigan | Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
US6424074B2 (en) | 1999-01-14 | 2002-07-23 | The Regents Of The University Of Michigan | Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device |
US6566786B2 (en) | 1999-01-14 | 2003-05-20 | The Regents Of The University Of Michigan | Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
US6236139B1 (en) * | 1999-02-26 | 2001-05-22 | Jds Uniphase Inc. | Temperature compensated microelectromechanical structures and related methods |
US6191660B1 (en) | 1999-03-24 | 2001-02-20 | Cypress Semiconductor Corp. | Programmable oscillator scheme |
US6753739B1 (en) | 1999-03-24 | 2004-06-22 | Cypress Semiconductor Corp. | Programmable oscillator scheme |
US6094102A (en) | 1999-04-30 | 2000-07-25 | Rockwell Science Center, Llc | Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method |
US6114914A (en) | 1999-05-19 | 2000-09-05 | Cypress Semiconductor Corp. | Fractional synthesis scheme for generating periodic signals |
US6177843B1 (en) | 1999-05-26 | 2001-01-23 | Cypress Semiconductor Corp. | Oscillator circuit controlled by programmable logic |
US6497141B1 (en) | 1999-06-07 | 2002-12-24 | Cornell Research Foundation Inc. | Parametric resonance in microelectromechanical structures |
US6650721B1 (en) | 1999-08-05 | 2003-11-18 | Agere Systems Inc. | Phase locked loop with numerically controlled oscillator divider in feedback loop |
US6384406B1 (en) | 1999-08-05 | 2002-05-07 | Microvision, Inc. | Active tuning of a torsional resonant structure |
US6198353B1 (en) | 1999-08-05 | 2001-03-06 | Lucent Technologies, Inc. | Phase locked loop having direct digital synthesizer dividers and improved phase detector |
US6275122B1 (en) | 1999-08-17 | 2001-08-14 | International Business Machines Corporation | Encapsulated MEMS band-pass filter for integrated circuits |
US6317342B1 (en) | 1999-08-24 | 2001-11-13 | Munetix, Inc. | Electrostatic microresonant power conversion |
US6542829B1 (en) | 1999-09-22 | 2003-04-01 | Coventor, Inc. | Characterization of microelectromechanical structures |
DE10046958B4 (en) | 1999-09-27 | 2009-01-02 | Denso Corp., Kariya-shi | Capacitive device for detecting a physical quantity |
WO2001033711A1 (en) * | 1999-11-02 | 2001-05-10 | Eta Sa Fabriques D'ebauches | Time base comprising an integrated micromechanical ring resonator |
US6850554B1 (en) | 1999-11-09 | 2005-02-01 | Cypress Semiconductor Corp. | Circuit and method for controlling a spread spectrum transition |
US6553158B1 (en) | 1999-11-23 | 2003-04-22 | Lnl Technologies, Inc. | Tunable resonator having a movable phase shifter |
CA2327576C (en) * | 1999-12-21 | 2008-09-30 | Eta Sa Fabriques D'ebauches | Low frequency quartz oscillator device with improved thermal characteristics |
EP1117017B1 (en) * | 2000-01-10 | 2009-09-09 | ETA SA Manufacture Horlogère Suisse | Means for generating a signal having a frequency that is substantially independent from temperature |
US6441703B1 (en) | 2000-01-18 | 2002-08-27 | Texas Instruments Incorporated | Multiple frequency acoustic reflector array and monolithic cover for resonators and method |
US6452310B1 (en) | 2000-01-18 | 2002-09-17 | Texas Instruments Incorporated | Thin film resonator and method |
US6859509B1 (en) | 2000-02-04 | 2005-02-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Wide bandwidth phase-locked loop circuit |
CA2406176A1 (en) * | 2000-04-20 | 2001-11-01 | The Regents Of The University Of Michigan | Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
US6529447B1 (en) | 2000-06-19 | 2003-03-04 | Cypress Semiconductor Corp. | Compensation of crystal start up for accurate time measurement |
US6782068B1 (en) | 2000-06-30 | 2004-08-24 | Cypress Semiconductor Corp. | PLL lockout watchdog |
WO2002015403A1 (en) | 2000-08-14 | 2002-02-21 | Jose Alberto Cavazos | Synchronizer with zero metastability |
FI111457B (en) | 2000-10-02 | 2003-07-31 | Nokia Corp | Micromechanical structure |
EP1322545A2 (en) | 2000-10-03 | 2003-07-02 | Honeywell International Inc. | Method of trimming micro-machined electromechanical sensors (mems) devices |
US6798299B1 (en) | 2000-10-26 | 2004-09-28 | Cypress Semiconductor Corporation | Crystal-less oscillator circuit with trimmable analog current control for increased stability |
US20020074897A1 (en) | 2000-12-15 | 2002-06-20 | Qing Ma | Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition |
EP1217735B1 (en) * | 2000-12-21 | 2007-11-14 | ETA SA Manufacture Horlogère Suisse | Time base comprising an integrated micromechanical tuning fork resonator |
US6490147B2 (en) | 2001-01-24 | 2002-12-03 | The Regents Of The University Of Michigan | High-Q micromechanical device and method of tuning same |
US6816979B1 (en) | 2001-02-01 | 2004-11-09 | Cypress Semiconductor Corp. | Configurable fast clock detection logic with programmable resolution |
US20020171420A1 (en) * | 2001-05-11 | 2002-11-21 | Murali Chaparala | Method for tracking the state of a MEMS optical switch using magnetic sensor detection |
US6744174B2 (en) | 2001-04-03 | 2004-06-01 | The Regents Of The University Of California | Frequency sensitivity analysis and optimum design for MEMS resonator |
JP2002325110A (en) | 2001-04-26 | 2002-11-08 | Mitsubishi Electric Corp | Demodulator and demodulation method |
US6600389B2 (en) | 2001-05-30 | 2003-07-29 | Intel Corporation | Tapered structures for generating a set of resonators with systematic resonant frequencies |
US6747389B2 (en) | 2001-06-11 | 2004-06-08 | Intel Corporation | Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications therefor |
JP4449259B2 (en) | 2001-06-19 | 2010-04-14 | 日本電気株式会社 | AFC circuit |
US6690224B1 (en) | 2001-06-27 | 2004-02-10 | Cypress Semiconductor Corp. | Architecture of a PLL with dynamic frequency control on a PLD |
US6570468B2 (en) | 2001-06-29 | 2003-05-27 | Intel Corporation | Resonator frequency correction by modifying support structures |
DE10135427A1 (en) | 2001-07-20 | 2003-02-13 | Siemens Ag | Areal image detector for electromagnetic rays, especially X-rays |
US20030015768A1 (en) | 2001-07-23 | 2003-01-23 | Motorola, Inc. | Structure and method for microelectromechanical system (MEMS) devices integrated with other semiconductor structures |
US6768362B1 (en) | 2001-08-13 | 2004-07-27 | Cypress Semiconductor Corp. | Fail-safe zero delay buffer with automatic internal reference |
US20030034535A1 (en) | 2001-08-15 | 2003-02-20 | Motorola, Inc. | Mems devices suitable for integration with chip having integrated silicon and compound semiconductor devices, and methods for fabricating such devices |
US6958566B2 (en) | 2001-08-16 | 2005-10-25 | The Regents Of The University Of Michigan | Mechanical resonator device having phenomena-dependent electrical stiffness |
JP2003069426A (en) * | 2001-08-23 | 2003-03-07 | Matsushita Electric Ind Co Ltd | Frequency synthesizer |
US6624726B2 (en) | 2001-08-31 | 2003-09-23 | Motorola, Inc. | High Q factor MEMS resonators |
US6808954B2 (en) | 2001-09-07 | 2004-10-26 | Intel Corporation | Vacuum-cavity MEMS resonator |
US6930364B2 (en) | 2001-09-13 | 2005-08-16 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
US6670852B1 (en) | 2001-10-17 | 2003-12-30 | Cypress Semiconductor Corp. | Oscillator tuning method |
US7004015B2 (en) | 2001-10-25 | 2006-02-28 | The Regents Of The University Of Michigan | Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
JP2003204260A (en) | 2001-10-30 | 2003-07-18 | Seiko Epson Corp | Temperature compensated high frequency oscillator and communication equipment |
WO2003055063A1 (en) | 2001-12-06 | 2003-07-03 | University Of Pittsburgh | Tunable piezoelectric micro-mechanical resonator |
WO2003073607A1 (en) * | 2002-02-26 | 2003-09-04 | The Regents Of The University Of Michigan | Mems-based, computer systems, clock generation and oscillator circuits and lc-tank apparatus for use therein |
US7654140B2 (en) | 2002-03-12 | 2010-02-02 | Cornell Research Foundation, Inc. | Heat pumped parametric MEMS device |
US6957183B2 (en) * | 2002-03-20 | 2005-10-18 | Qualcomm Inc. | Method for robust voice recognition by analyzing redundant features of source signal |
US6771096B1 (en) | 2002-03-25 | 2004-08-03 | Cypress Semiconductor Corp. | Circuit, system, and method for using hysteresis to avoid dead zone or non-linear conditions in a phase frequency detector |
US6792379B2 (en) * | 2002-04-24 | 2004-09-14 | Yoshiyuki Ando | Data-based control of integrated circuits |
US6957163B2 (en) * | 2002-04-24 | 2005-10-18 | Yoshiyuki Ando | Integrated circuits having post-silicon adjustment control |
US6940370B2 (en) | 2002-05-06 | 2005-09-06 | The Regents Of The University Of California | MEMS resonator and method of making same |
US6774689B1 (en) | 2002-05-23 | 2004-08-10 | Cypress Semiconductor Corp. | Triple input phase detector and methodology for setting delay between two sets of phase outputs |
US7023065B2 (en) | 2002-08-07 | 2006-04-04 | Georgia Tech Research Corporation | Capacitive resonators and methods of fabrication |
AU2003275159A1 (en) | 2002-09-23 | 2004-04-08 | Georgia Tech Research Corporation | Electrically-coupled micro-electro-mechanical filter systems and methods |
US6922118B2 (en) | 2002-11-01 | 2005-07-26 | Hrl Laboratories, Llc | Micro electrical mechanical system (MEMS) tuning using focused ion beams |
US6836169B2 (en) | 2002-12-20 | 2004-12-28 | Cypress Semiconductor Corporation | Single ended clock signal generator having a differential output |
US6856181B1 (en) | 2002-12-30 | 2005-02-15 | Cypress Semiconductor Corporation | Stability robustness using a non-integer order filter in a circuit |
US6825728B1 (en) | 2003-01-31 | 2004-11-30 | Cypress Semiconductor Corporation | Method and device for generating frequency adjustment parameters for a voltage controlled oscillator |
US6850124B1 (en) | 2003-06-17 | 2005-02-01 | Marvell International Ltd. | Circuit, architecture and method for tracking loop bandwidth in a frequency synthesizer having a wide frequency range |
US6995622B2 (en) * | 2004-01-09 | 2006-02-07 | Robert Bosh Gmbh | Frequency and/or phase compensated microelectromechanical oscillator |
JP4437699B2 (en) * | 2004-05-14 | 2010-03-24 | 富士通マイクロエレクトロニクス株式会社 | Sensor |
-
2004
- 2004-01-09 US US10/754,985 patent/US6995622B2/en not_active Expired - Lifetime
- 2004-10-20 CN CN2004800400634A patent/CN1902824B/en active Active
- 2004-10-20 EP EP15185700.0A patent/EP3002878A1/en not_active Withdrawn
- 2004-10-20 JP JP2006549238A patent/JP5129483B2/en active Active
- 2004-10-20 KR KR1020067013728A patent/KR101068325B1/en active IP Right Grant
- 2004-10-20 EP EP04795658.6A patent/EP1706942B1/en active Active
- 2004-10-20 WO PCT/US2004/034522 patent/WO2005071842A2/en active Application Filing
-
2005
- 2005-09-30 US US11/239,845 patent/US7224236B2/en not_active Expired - Lifetime
- 2005-09-30 US US11/240,010 patent/US7221230B2/en not_active Expired - Lifetime
-
2007
- 2007-04-30 US US11/796,990 patent/US7453324B2/en not_active Expired - Lifetime
- 2007-10-31 US US11/982,084 patent/US7532081B2/en not_active Expired - Lifetime
-
2009
- 2009-05-12 US US12/464,304 patent/US7907027B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6124765A (en) * | 1997-10-24 | 2000-09-26 | Stmicroelectronics, Inc. | Integrated released beam oscillator and associated methods |
US6278337B1 (en) * | 1997-10-24 | 2001-08-21 | Stmicroelectronics, Inc. | Integrated released beam oscillator and associated methods |
Non-Patent Citations (1)
Title |
---|
See also references of EP1706942A2 * |
Also Published As
Publication number | Publication date |
---|---|
US20060022764A1 (en) | 2006-02-02 |
EP1706942A4 (en) | 2008-05-21 |
US6995622B2 (en) | 2006-02-07 |
EP3002878A1 (en) | 2016-04-06 |
KR20060123450A (en) | 2006-12-01 |
US7532081B2 (en) | 2009-05-12 |
EP1706942A2 (en) | 2006-10-04 |
US7907027B2 (en) | 2011-03-15 |
JP5129483B2 (en) | 2013-01-30 |
US7224236B2 (en) | 2007-05-29 |
EP1706942B1 (en) | 2016-05-11 |
US20080164953A1 (en) | 2008-07-10 |
CN1902824A (en) | 2007-01-24 |
US20080150642A1 (en) | 2008-06-26 |
WO2005071842A2 (en) | 2005-08-04 |
US7453324B2 (en) | 2008-11-18 |
US7221230B2 (en) | 2007-05-22 |
CN1902824B (en) | 2011-02-23 |
JP2007518351A (en) | 2007-07-05 |
KR101068325B1 (en) | 2011-09-28 |
US20060033589A1 (en) | 2006-02-16 |
US20090278619A1 (en) | 2009-11-12 |
US20050151592A1 (en) | 2005-07-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2005071842A3 (en) | Frequency and/or phase compensated microelectromechanical oscillator | |
WO2003077422A3 (en) | Calibration techniques for frequency synthesizers | |
US7825708B2 (en) | Dual loop architecture useful for a programmable clock source and clock multiplier applications | |
WO2008006818A3 (en) | Radar system | |
JP4809017B2 (en) | Frequency synthesizer and operation method thereof | |
WO2004102808A3 (en) | Frequency synthesizer with acoustic resonance vco | |
WO2007109744A3 (en) | Dual pll loop for phase noise filtering | |
US9793904B1 (en) | System and method of noise correcting PLL frequency synthesizers | |
WO2006083396A3 (en) | Fractional-n offset phase locked loop | |
CA2352398A1 (en) | Low phase noise frequency converter | |
WO2006000611A1 (en) | Frequency synthesizer | |
WO2005002055A3 (en) | Fractional-n synthesizer and method of programming the output phase | |
WO2009073580A3 (en) | Digital phase-locked loop operating based on fractional input and output phases | |
JP2003519951A (en) | PLL frequency synthesizer with controlled divider pulse width | |
TW200735537A (en) | Phase-locked loop circuit, delay-locked loop circuit and method of tuning output frequencies of the same | |
TW200635233A (en) | A linear phase-locked loop with dual tuning elements | |
TW200701646A (en) | Phase lock loop and operation method thereof | |
WO2002054593A3 (en) | Digital frequency multiplier | |
EP1891737B1 (en) | A system and method for reducing transient response in a fractional n phase lock loop | |
WO2009034881A1 (en) | Phase comparator and phase locked loop | |
TW200723706A (en) | Charge pump, phase-locked loop utilizing the charge pump to achieve compensated loop bandwidth, and related method thereof | |
US9654119B2 (en) | Phase locked loop and operating method thereof | |
WO2021150457A8 (en) | Frequency domain-based clock recovery | |
JP4033154B2 (en) | Fractional N frequency synthesizer device | |
TW200616342A (en) | Automatically calibrated frequency-synthesis apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2004795658 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2006549238 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020067013728 Country of ref document: KR Ref document number: 200480040063.4 Country of ref document: CN |
|
WWP | Wipo information: published in national office |
Ref document number: 2004795658 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 1020067013728 Country of ref document: KR |