WO2005083787A1 - Configurable integrated circuit capacitor array with via layers - Google Patents

Configurable integrated circuit capacitor array with via layers Download PDF

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Publication number
WO2005083787A1
WO2005083787A1 PCT/US2005/005836 US2005005836W WO2005083787A1 WO 2005083787 A1 WO2005083787 A1 WO 2005083787A1 US 2005005836 W US2005005836 W US 2005005836W WO 2005083787 A1 WO2005083787 A1 WO 2005083787A1
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WO
WIPO (PCT)
Prior art keywords
metal
layers
semiconductor device
layer
capacitor
Prior art date
Application number
PCT/US2005/005836
Other languages
French (fr)
Inventor
David Ihme
James C. Kemerling
William D. Cox
Original Assignee
Triad Semiconductor, Inc.
Viasic, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triad Semiconductor, Inc., Viasic, Inc. filed Critical Triad Semiconductor, Inc.
Priority to AT0906405A priority Critical patent/AT502128A2/en
Publication of WO2005083787A1 publication Critical patent/WO2005083787A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors
    • H01G4/385—Single unit multiple capacitors, e.g. dual capacitor in one coil
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0805—Capacitors only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits

Definitions

  • a capacitor is a fundamental two-terminal electronic device that may be manufactured in an integrated circuit.
  • it is often difficult to realize a well controlled capacitance value.
  • the variation that results from the processes involved in the fabrication of integrated circuits may cause the value of a given capacitor to change by as much as 30% from device to device.
  • several smaller capacitors are most often used by connecting them in parallel to create one large capacitor.
  • the accuracy of the combined capacitance of these smaller capacitors can be better than 0.1%. Therefore, an array of capacitors is commonly used in integrated circuits.
  • a capacitor array contains a plurality of individual capacitors positioned in rows and columns to allow for the routing of signals within the integrated circuit.
  • FIG. 1 illustrates a side view of the semiconductor layers forming a stan- dard poly-poly capacitor in an integrated circuit.
  • the capacitor 100 is formed by the poiysilicon layers 106 and 108 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides.
  • Beneath the capacitor 100 is a well 104 that is diffused into the silicon substrate 102.
  • the well 104 is normally connected to a low impedance, low noise point in the circuit to help shield the capacitor from substrate noise.
  • the poiysilicon layers 106 and 108 are connected to a metal routing layer (metal 1) that is used to connect the capacitor 100 to other circuit elements or bond pads within the integrated circuit.
  • Contact 114 connects the bottom poiysilicon layer 106 to a first metal 1 routing track 110
  • contact 116 connects the top poiysilicon layer 108 to a second metal 1 routing track 112.
  • FIG. 2 illustrates a top view of the semiconductor layers forming a standard poly-poly capacitor in an integrated circuit.
  • the first metal 1 routing track 110 is connected to the bottom poiysilicon layer 106 by way of contact 114.
  • the second metal 1 routing track 112 is connected to the top poiysilicon layer 108 by way of contact 116. Beneath the capacitor 100 formed by poiysilicon layers 106 and 108 is the well 104 that is diffused into the silicon substrate 102.
  • the present invention provides for a semiconductor device having a plurality of layers and a capacitor array.
  • the plurality of layers may include three metal layers, two poiysilicon layers, and one via layer.
  • the capacitor array includes a plurality of individual capacitors. At least one of the plurality of layers in the semiconductor device is a via layer configured to determine the connections and capacitances of the plurality of individual capacitors in the capacitor array.
  • the semiconductor device may also include a plurality of circuit elements.
  • a metal structure is disposed within the semicon- ductor device to provide an electromagnetic shield for at least one of the plurality of individual capacitors in the capacitor array.
  • the metal structure may be a metal layer that is connected to ground.
  • FIG. 1 illustrates a side view of the semiconductor layers forming a standard poly-poly capacitor in an integrated circuit.
  • FIG. 2 illustrates a top view of the semiconductor layers forming a standard poly-poly capacitor in an integrated circuit.
  • FIG. 3 illustrates an M by N array of capacitors according to at least some embodiments of the present invention.
  • FIG. 4 illustrates a side view of the semiconductor layers forming a poly- poly capacitor according to at least some embodiments of the present invention.
  • FIG. 5 illustrates a top view of the semiconductor layers forming a poly- poly capacitor according to at least some embodiments of the present invention.
  • FIG. 6 provides a schematic diagram representing the parasitic capacitances formed by a metal shield according to at least some embodiments of the present invention.
  • FIG. 7 illustrates a side view of the semiconductor layers forming two adjacent shielded capacitors according to at least some embodiments of the present invention.
  • FIG. 8 illustrates a top view of the metal 1 layer of two adjacent shielded capacitors according to at least some embodiments of the present invention.
  • FIG. 9 illustrates a top view of the metal 2 and 3 layers of two adjacent shielded capacitors according to at least some embodiments of the present invention.
  • FIG. 10 illustrates an array of capacitors according to at least some embodiments of the present invention.
  • FIG. 11 illustrates the metal 2 and 3 layers of an array of capacitors according to at least some embodiments of the present invention.
  • metal layer refers to any layers that are used to make connections between various elements within a device.
  • the metal layers may contain actual metal routing traces, contacts, or vias.
  • a via may be formed by etching material as defined by a mask layer in the fabrication process or direct exposure to an electron beam. The resulting hole from the etching is then filled by metal and is used to vertically interconnect between metal layers in an integrated circuit.
  • Other terms will either be discussed when introduced, or otherwise should be assumed to have the conventional meaning as understood by persons of ordinary skill in the semiconductor arts.
  • a semiconductor device comprises a plurality of layers and a capacitor array composed of a plurality individual capacitors that are arranged in an organized manner such as rows and columns. Capacitance value and interconnection of both terminals of the capacitors to other circuit elements is configured by the via layers during the manufacturing process.
  • FIG. 3 illustrates an integrated circuit 300 containing an M by N array 302 of capacitors. The capacitors may be connected together using horizontal and vertical routing tracks. These routing tracks are formed of segmented wires of fixed length that may be connected end-to-end through vias, which are shown in more detail in FIG. 4. The combined capaci- tors formed by the configuration of the array may be interconnected to other circuit elements or bond pads within the integrated circuit.
  • a capacitor array may be configured and the signals routed using a single via layer defined by one mask of the manufacturing process. Discussion of the use of via masks and programmable vias to customize a semiconductor device can be found in U.S. Patent 6,580,289, which is incorporated herein by reference.
  • a device according to the present invention may be realized in various semiconductor processes including but not limited to CMOS, BiCMOS, SiGE, GaAs, and HBT.
  • the individual capacitors of the array may be formed with techniques including but not limited to PIP (polysilicon-insulator-polysilicon) and MIM (metal-insulator-metal). Each capacitor has two metal contacts with one on the top plate and the other on the bottom plate.
  • FIG. 4 is an embodiment of the present invention illustrating a side view of the semiconductor layers forming a poly-poly capacitor using a CMOS process.
  • a capacitor 400 is formed by poiysilicon layers 406 and 408 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides. Beneath the capacitor 400 is a well 404 that is diffused into a silicon substrate 402.
  • the well 404 is connected to a low impedance, low noise point in the circuit, such as analog ground, to help shield the capacitor 400 from substrate noise.
  • the poiysilicon layers 406 and 408 are connected to a metal routing layer (metal 2) that is used to connect the capaci- tor 400 to other circuit elements or bond pads within the integrated circuit.
  • the bottom poiysilicon layer 406 is connected to a first metal 2 routing track 418 by way of contact 414 and via 420.
  • the top poiysilicon layer 408 is connected to a second metal 2 routing track 426 (see FIG. 5) by way of contact 416 and via 422.
  • a semiconductor device may include an arrangement of the capacitor array relative to a metal structure that provides electromagnetic shielding of the capacitor array or an individual capacitor within the capacitor array from other layers of the integrated circuit.
  • the shielding allows signals to be routed above and/or below the capacitor array resulting in higher utilization of the integrated circuit area.
  • parasitic capacitances can result from the signal routing that is used to interconnect the individual capacitors.
  • a shield can be formed over the capacitor 400 using a metal shield layer (metal 1 ) 410. Openings are provided in the metal shield layer 410 that allow the top poiysilicon layer 408 and the bottom poiysilicon layer 406 to connect to the metal 2 layer for routing purposes.
  • the metal shield layer 410 is connected to a low impedance, low noise point in the circuit, such as analog ground, by way of via 424 and a third metal 2 routing track 428 (see FIG. 5)
  • FIG. 5 illustrates a top view of the semiconductor layers of a poly-poly capacitor as shown and described in connection with FIG. 4.
  • the first metal 2 routing track 418 is connected through the opening in the metal shield layer 410 to the bottom poiysilicon layer 406 by way of via 420 and contact 414 (see FIG. 4).
  • the second metal 2 routing track 426 is connected through the opening in the metal shield layer 410 to the top poiysilicon layer 408 by way of via 422 and contact 416 (see FIG. 4).
  • the third metal 2 routing track 428 is con- nected to ground and the metal shield layer 410 by way of via 424.
  • Beneath the capacitor 400 formed by poiysilicon layers 406 and 408 is the well 404 (see FIG. 4) that is diffused into the silicon substrate 402.
  • FIG. 6 provides a symbolic representation of the parasitic capacitances formed by the shield using the metal shield layer as shown and described in connection with FIG. 4.
  • Capacitor 602 (C1 ) represents the capacitor formed by the poiysilicon layers 406 and 408 (see FIG. 4).
  • Capacitor 604 (C2) represents the parasitic capacitance formed by the metal shield layer 410 and the top poiysilicon layer 408 (see FIG. 4).
  • Capacitor 606 represents the parasitic capacitance formed by the metal shield layer 410 and the bottom poiysilicon layer 406 (see FIG. 4).
  • Capacitor 608 represents the parasitic capacitance formed by the bottom poiysilicon layer 406 and the well 404 (see FIG. 4).
  • all of the parasitic capacitances are connected to ground, which allows for the effective utilization of the shield in parasitic insensitive switched capacitor circuits where any capacitance to ground is effectively can- celled.
  • a first capacitor 700 is formed by poiysilicon layers 706 and 708 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides.
  • Beneath the capacitor 700 is a well 704 that is diffused into a silicon substrate 702.
  • the well 704 is connected to a low impedance, low noise point in the circuit, such as analog ground, to help shield the capacitor 700 from substrate noise.
  • the poiysilicon layers 706 and 708 are connected to a first metal routing layer (metal 2) that is used to connect the capacitor 700 to other circuit elements or bond pads within the integrated circuit.
  • the bottom polysili- con layer 706 is connected to one of the metal 2 routing tracks 718 by way of contact 714 and via 722.
  • the top poiysilicon layer 708 is connected to at least one of the metal 2 routing tracks 718 by way of contact 716 and via 724.
  • a second metal routing layer (metal 3) is provided.
  • the metal 2 and metal 3 layers may be interconnected using a programmable via layer 730 (detail omitted for clarity). Segments of a metal shield layer (metal 1) are used to form a shield for the individual capacitors. The shield is formed over the first capacitor 700 using a first metal 1 shield segment 710.
  • Openings are provided in the metal 1 shield segment 710 that allow the top poiysilicon layer 708 and the bottom poiysilicon layer 706 of the first capacitor 700 to be connected to the metal 2 layer for routing purposes.
  • the first metal 1 shield segment 710 is connected to a low impedance, low noise point in the circuit, such as analog ground, by way of via 720 and at least one of the metal 2 routing tracks 718. While the metal shield layer in this embodiment is shown as being divided into a plurality of segments that are used to shield various individual capacitors, the metal shield layer may be one complete or partial layer over the entire device or capacitor array or a portion thereof.
  • a second capacitor 701 is formed by poiysilicon layers 707 and 709 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides. Beneath the capacitor 701 is the well 704 that is diffused into the silicon substrate 702.
  • the poiysilicon layers 707 and 709 are connected to the first metal routing layer (metal 2) that is used to connect the capacitor 701 to the other circuit elements or bond pads within the in- tegrated circuit.
  • the bottom poiysilicon layer 707 is connected to at least one of the metal 2 routing tracks 718 by way of contact 715 and via 725.
  • the top poiysilicon layer 709 is connected to at least one of the metal 2 routing tracks 718 by way of contact 717 and via 723.
  • a shield is formed over the second capacitor 701 using a second metal 1 shield segment 711. Openings are provided in the second metal 1 shield segment 711 that allow the top poiysilicon layer 709 and the bottom poiysilicon layer 707 of the second capacitor 701 to be connected to the metal 2 layer for routing purposes.
  • the second metal 1 shield segment 711 is connected to a low impedance, low noise point in the circuit, such as analog ground, by way of via 721 and at least one of the metal 2 routing tracks 718.
  • FIGs. 8 and 9 illustrate a top view of the semiconductor layers forming two adjacent shielded capacitors as shown and described in connection with FIG. 7.
  • FIG. 9 illustrates the metal 2 routing tracks 718 and the metal 3 routing tracks 728 that may be used to connect capacitors 700 and 701 (see FIG. 7) to each other or to other circuit elements or bond pads within the integrated circuit.
  • FIG. 7, FIG. 8, and FIG. 9 together illustrate both a structure and a method of assembling example embodiments of the invention.
  • Using programmable vias to interconnect the metal 2 and metal 3 layers can be automated; therefore, no manual signal routing may be required.
  • the poiysilicon layers 706 and 708 of the first capacitor 700 (see FIG. 7) and the poiysilicon layers 707 and 709 of the second capacitor 701 (see. FIG. 7) are connected to the metal 2 routing tracks 718 (see. FIG.
  • At least one of the metal 2 routing tracks 718 is connected through an opening in the first metal 1 shield segment 710 to the bottom poiysilicon layer 706 by way of via 722 and contact 714 (see FIG. 7). At least one of the metal 2 routing tracks 718 is connected through an opening in the first metal 1 shield segment 710 to the top poiysilicon layer 708 by way of via 724 and contact 716 (see FIG. 7). Additionally, at least one of the metal 2 routing tracks 718 is con- nected to ground and the first metal 1 shield segment 710 by way of via 720.
  • Beneath the capacitors 700 and 701 is the well 704 (see FIG. 7) that is diffused into the silicon substrate 702.
  • At least one of the metal 2 routing tracks 718 is connected through an opening in the second metal 1 shield segment 711 to the bottom poiysilicon layer 707 by way of via 725 and contact 715 (see FIG. 7).
  • At least one of the metal 2 routing tracks 718 is connected through an opening in the second metal 1 shield segment 711 to the top poiysilicon layer 709 by way of via 723 and contact 717 (see FIG. 7).
  • At least one of the metal 2 routing tracks 718 is connected to ground and the second metal 1 shield segment 711 by way of via 721.
  • FIGs. 10 and 11 illustrate an array of capacitors formed using multiple 1 x 2 capacitor tiles.
  • FIGs. 10 and 11 illustrate how the 1 x 2 capacitor tiles can be arranged into an array of any practical size (typically less than 1000 units) by simply alternating the orientation of the metal 2 and metal 3 routing tracks.
  • FIG. 10 illustrates an arrangement of capacitors 1000 such as those shown and described in connection with FIG. 7 above.
  • a routing fabric 1100 is illustrated in FIG. 11. The routing fabric 1100 is composed of 1 x 2 capacitor tiles wherein the orien- tation of the metal 2 routing tracks 1102 is alternated from one capacitor tile to the next to permit the routing of signals throughout the array.
  • the metal 3 routing tracks 1104 are also alternated from one capacitor tile to the next for the same purpose. Specific embodiments of an invention are described herein. One of or- dinary skill in the semiconductor arts will quickly recognize that the invention has other applications in other environments. In fact, many embodiments and implementations are possible. The following claims are in no way intended to limit the scope of the invention to the specific embodiments described above.

Abstract

A semiconductor device having a plurality of layers and a capacitor array that includes a plurality of individual capacitors. At least one of the plurality of layers in the semiconductor device may be a via layer configured to determine the connections and capacitances of the plurality of individual capacitors in the capacitor array. The semiconductor device may include a metal structure disposed within the device to provide an electromagnetic shield for at least one of the plurality of individual capacitors in the capacitor array.

Description

CONFIGURABLE INTEGRATED CIRCUIT CAPACITOR ARRAY WITH VIA LAYERS
DESCRIPTION Background Art
A capacitor is a fundamental two-terminal electronic device that may be manufactured in an integrated circuit. However, in an integrated circuit, it is often difficult to realize a well controlled capacitance value. The variation that results from the processes involved in the fabrication of integrated circuits may cause the value of a given capacitor to change by as much as 30% from device to device. Hence, several smaller capacitors are most often used by connecting them in parallel to create one large capacitor. The accuracy of the combined capacitance of these smaller capacitors can be better than 0.1%. Therefore, an array of capacitors is commonly used in integrated circuits. A capacitor array contains a plurality of individual capacitors positioned in rows and columns to allow for the routing of signals within the integrated circuit. One type of capacitor used in an integrated circuit is a "poly-poly" capacitor, which uses a parallel-plate structure that includes two poiysilicon layers. FIG. 1 illustrates a side view of the semiconductor layers forming a stan- dard poly-poly capacitor in an integrated circuit. The capacitor 100 is formed by the poiysilicon layers 106 and 108 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides. Beneath the capacitor 100 is a well 104 that is diffused into the silicon substrate 102. The well 104 is normally connected to a low impedance, low noise point in the circuit to help shield the capacitor from substrate noise. The poiysilicon layers 106 and 108 are connected to a metal routing layer (metal 1) that is used to connect the capacitor 100 to other circuit elements or bond pads within the integrated circuit. Contact 114 connects the bottom poiysilicon layer 106 to a first metal 1 routing track 110, and contact 116 connects the top poiysilicon layer 108 to a second metal 1 routing track 112. FIG. 2 illustrates a top view of the semiconductor layers forming a standard poly-poly capacitor in an integrated circuit. As shown and described above in connection with FIG. 1 , the first metal 1 routing track 110 is connected to the bottom poiysilicon layer 106 by way of contact 114. The second metal 1 routing track 112 is connected to the top poiysilicon layer 108 by way of contact 116. Beneath the capacitor 100 formed by poiysilicon layers 106 and 108 is the well 104 that is diffused into the silicon substrate 102.
Disclosure of Invention The present invention provides for a semiconductor device having a plurality of layers and a capacitor array. In exemplary embodiments, the plurality of layers may include three metal layers, two poiysilicon layers, and one via layer. The capacitor array includes a plurality of individual capacitors. At least one of the plurality of layers in the semiconductor device is a via layer configured to determine the connections and capacitances of the plurality of individual capacitors in the capacitor array. The semiconductor device may also include a plurality of circuit elements. In some embodiments, a metal structure is disposed within the semicon- ductor device to provide an electromagnetic shield for at least one of the plurality of individual capacitors in the capacitor array. The metal structure may be a metal layer that is connected to ground.
Brief Description of Drawings
FIG. 1 illustrates a side view of the semiconductor layers forming a standard poly-poly capacitor in an integrated circuit. FIG. 2 illustrates a top view of the semiconductor layers forming a standard poly-poly capacitor in an integrated circuit. FIG. 3 illustrates an M by N array of capacitors according to at least some embodiments of the present invention. FIG. 4 illustrates a side view of the semiconductor layers forming a poly- poly capacitor according to at least some embodiments of the present invention. FIG. 5 illustrates a top view of the semiconductor layers forming a poly- poly capacitor according to at least some embodiments of the present invention. FIG. 6 provides a schematic diagram representing the parasitic capacitances formed by a metal shield according to at least some embodiments of the present invention. FIG. 7 illustrates a side view of the semiconductor layers forming two adjacent shielded capacitors according to at least some embodiments of the present invention. FIG. 8 illustrates a top view of the metal 1 layer of two adjacent shielded capacitors according to at least some embodiments of the present invention. FIG. 9 illustrates a top view of the metal 2 and 3 layers of two adjacent shielded capacitors according to at least some embodiments of the present invention. FIG. 10 illustrates an array of capacitors according to at least some embodiments of the present invention. FIG. 11 illustrates the metal 2 and 3 layers of an array of capacitors according to at least some embodiments of the present invention.
Best Mode(s) for Carrying Out the Invention It is to be understood that the present invention is not limited to the example embodiments disclosed herein. The meaning of certain terms as used in the context of this disclosure should be understood as follows. The term "metal layer" refers to any layers that are used to make connections between various elements within a device. The metal layers may contain actual metal routing traces, contacts, or vias. A via may be formed by etching material as defined by a mask layer in the fabrication process or direct exposure to an electron beam. The resulting hole from the etching is then filled by metal and is used to vertically interconnect between metal layers in an integrated circuit. Other terms will either be discussed when introduced, or otherwise should be assumed to have the conventional meaning as understood by persons of ordinary skill in the semiconductor arts. A semiconductor device according to an embodiment of the present invention comprises a plurality of layers and a capacitor array composed of a plurality individual capacitors that are arranged in an organized manner such as rows and columns. Capacitance value and interconnection of both terminals of the capacitors to other circuit elements is configured by the via layers during the manufacturing process. FIG. 3 illustrates an integrated circuit 300 containing an M by N array 302 of capacitors. The capacitors may be connected together using horizontal and vertical routing tracks. These routing tracks are formed of segmented wires of fixed length that may be connected end-to-end through vias, which are shown in more detail in FIG. 4. The combined capaci- tors formed by the configuration of the array may be interconnected to other circuit elements or bond pads within the integrated circuit. In one implementation of the invention, a capacitor array may be configured and the signals routed using a single via layer defined by one mask of the manufacturing process. Discussion of the use of via masks and programmable vias to customize a semiconductor device can be found in U.S. Patent 6,580,289, which is incorporated herein by reference. A device according to the present invention may be realized in various semiconductor processes including but not limited to CMOS, BiCMOS, SiGE, GaAs, and HBT. The individual capacitors of the array may be formed with techniques including but not limited to PIP (polysilicon-insulator-polysilicon) and MIM (metal-insulator-metal). Each capacitor has two metal contacts with one on the top plate and the other on the bottom plate. Each capacitor contact may have the related routing defined by vias. While the specific embodiments of the present invention described herein illustrate capacitors comprising two polysili- con layers, any semiconductor process with a means to realize capacitors using various layers, such as for example two metal layers, and other layers for routing and/or shielding can be used. FIG. 4 is an embodiment of the present invention illustrating a side view of the semiconductor layers forming a poly-poly capacitor using a CMOS process. A capacitor 400 is formed by poiysilicon layers 406 and 408 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides. Beneath the capacitor 400 is a well 404 that is diffused into a silicon substrate 402. The well 404 is connected to a low impedance, low noise point in the circuit, such as analog ground, to help shield the capacitor 400 from substrate noise. The poiysilicon layers 406 and 408 are connected to a metal routing layer (metal 2) that is used to connect the capaci- tor 400 to other circuit elements or bond pads within the integrated circuit. The bottom poiysilicon layer 406 is connected to a first metal 2 routing track 418 by way of contact 414 and via 420. The top poiysilicon layer 408 is connected to a second metal 2 routing track 426 (see FIG. 5) by way of contact 416 and via 422. A semiconductor device according to the present invention may include an arrangement of the capacitor array relative to a metal structure that provides electromagnetic shielding of the capacitor array or an individual capacitor within the capacitor array from other layers of the integrated circuit. The shielding allows signals to be routed above and/or below the capacitor array resulting in higher utilization of the integrated circuit area. When using a capacitor array, parasitic capacitances can result from the signal routing that is used to interconnect the individual capacitors. In order to minimize the effects of these parasitic capacitances, a shield can be formed over the capacitor 400 using a metal shield layer (metal 1 ) 410. Openings are provided in the metal shield layer 410 that allow the top poiysilicon layer 408 and the bottom poiysilicon layer 406 to connect to the metal 2 layer for routing purposes. The metal shield layer 410 is connected to a low impedance, low noise point in the circuit, such as analog ground, by way of via 424 and a third metal 2 routing track 428 (see FIG. 5) FIG. 5 illustrates a top view of the semiconductor layers of a poly-poly capacitor as shown and described in connection with FIG. 4. The first metal 2 routing track 418 is connected through the opening in the metal shield layer 410 to the bottom poiysilicon layer 406 by way of via 420 and contact 414 (see FIG. 4). The second metal 2 routing track 426 is connected through the opening in the metal shield layer 410 to the top poiysilicon layer 408 by way of via 422 and contact 416 (see FIG. 4). The third metal 2 routing track 428 is con- nected to ground and the metal shield layer 410 by way of via 424. Beneath the capacitor 400 formed by poiysilicon layers 406 and 408 is the well 404 (see FIG. 4) that is diffused into the silicon substrate 402. FIG. 6 provides a symbolic representation of the parasitic capacitances formed by the shield using the metal shield layer as shown and described in connection with FIG. 4. Capacitor 602 (C1 ) represents the capacitor formed by the poiysilicon layers 406 and 408 (see FIG. 4). Capacitor 604 (C2) represents the parasitic capacitance formed by the metal shield layer 410 and the top poiysilicon layer 408 (see FIG. 4). Capacitor 606 (C3) represents the parasitic capacitance formed by the metal shield layer 410 and the bottom poiysilicon layer 406 (see FIG. 4). Capacitor 608 (C4) represents the parasitic capacitance formed by the bottom poiysilicon layer 406 and the well 404 (see FIG. 4). As shown in FIG. 6, all of the parasitic capacitances are connected to ground, which allows for the effective utilization of the shield in parasitic insensitive switched capacitor circuits where any capacitance to ground is effectively can- celled. Using a shielded capacitor as shown and described in FIGs. 4 and 5, it is possible to create a capacitor array with more flexibility in the routing of signals. FIG. 7 is an embodiment of the present invention illustrating a side view of the semiconductor layers forming two adjacent shielded capacitors. A first capacitor 700 is formed by poiysilicon layers 706 and 708 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides. Beneath the capacitor 700 is a well 704 that is diffused into a silicon substrate 702. The well 704 is connected to a low impedance, low noise point in the circuit, such as analog ground, to help shield the capacitor 700 from substrate noise. The poiysilicon layers 706 and 708 are connected to a first metal routing layer (metal 2) that is used to connect the capacitor 700 to other circuit elements or bond pads within the integrated circuit. The bottom polysili- con layer 706 is connected to one of the metal 2 routing tracks 718 by way of contact 714 and via 722. The top poiysilicon layer 708 is connected to at least one of the metal 2 routing tracks 718 by way of contact 716 and via 724. To provide maximum routing flexibility within the integrated circuit, a second metal routing layer (metal 3) is provided. The metal 2 and metal 3 layers may be interconnected using a programmable via layer 730 (detail omitted for clarity). Segments of a metal shield layer (metal 1) are used to form a shield for the individual capacitors. The shield is formed over the first capacitor 700 using a first metal 1 shield segment 710. Openings are provided in the metal 1 shield segment 710 that allow the top poiysilicon layer 708 and the bottom poiysilicon layer 706 of the first capacitor 700 to be connected to the metal 2 layer for routing purposes. The first metal 1 shield segment 710 is connected to a low impedance, low noise point in the circuit, such as analog ground, by way of via 720 and at least one of the metal 2 routing tracks 718. While the metal shield layer in this embodiment is shown as being divided into a plurality of segments that are used to shield various individual capacitors, the metal shield layer may be one complete or partial layer over the entire device or capacitor array or a portion thereof. A second capacitor 701 is formed by poiysilicon layers 707 and 709 where an oxide (detail omitted for clarity) between the poiysilicon layers is thinner than normal inter-layer oxides. Beneath the capacitor 701 is the well 704 that is diffused into the silicon substrate 702. The poiysilicon layers 707 and 709 are connected to the first metal routing layer (metal 2) that is used to connect the capacitor 701 to the other circuit elements or bond pads within the in- tegrated circuit. The bottom poiysilicon layer 707 is connected to at least one of the metal 2 routing tracks 718 by way of contact 715 and via 725. The top poiysilicon layer 709 is connected to at least one of the metal 2 routing tracks 718 by way of contact 717 and via 723. A shield is formed over the second capacitor 701 using a second metal 1 shield segment 711. Openings are provided in the second metal 1 shield segment 711 that allow the top poiysilicon layer 709 and the bottom poiysilicon layer 707 of the second capacitor 701 to be connected to the metal 2 layer for routing purposes. The second metal 1 shield segment 711 is connected to a low impedance, low noise point in the circuit, such as analog ground, by way of via 721 and at least one of the metal 2 routing tracks 718. FIGs. 8 and 9 illustrate a top view of the semiconductor layers forming two adjacent shielded capacitors as shown and described in connection with FIG. 7. The two adjacent shielded capacitors form a 1 x 2 capacitor tile. FIG. 9 illustrates the metal 2 routing tracks 718 and the metal 3 routing tracks 728 that may be used to connect capacitors 700 and 701 (see FIG. 7) to each other or to other circuit elements or bond pads within the integrated circuit. In the em- bodiment as shown, there is a routing grid of sixteen vertical metal 2 routing tracks 718 that run perpendicular to eight horizontal metal 3 routing tracks 728, which forms a routing fabric. All of the direct connections are made to the capacitors 700 and 701 using the metal 2 routing tracks 718. The remaining metal 2 routing tracks 718 and all of the metal 3 routing tracks 728 can be used for signal routing. The interconnections between the metal 2 and metal 3 layers may be accomplished using vias, such as the programmable vias described in connection with FIG. 7, where the vertical and horizontal routing tracks cross each other. Thus, FIG. 7, FIG. 8, and FIG. 9 together illustrate both a structure and a method of assembling example embodiments of the invention. Using programmable vias to interconnect the metal 2 and metal 3 layers can be automated; therefore, no manual signal routing may be required. In FIG. 8, the poiysilicon layers 706 and 708 of the first capacitor 700 (see FIG. 7) and the poiysilicon layers 707 and 709 of the second capacitor 701 (see. FIG. 7) are connected to the metal 2 routing tracks 718 (see. FIG. 9) that may be used to connect the first capacitor 700 and the second capacitor 701 to each other or to other circuit elements or bond pads within the integrated circuit. At least one of the metal 2 routing tracks 718 is connected through an opening in the first metal 1 shield segment 710 to the bottom poiysilicon layer 706 by way of via 722 and contact 714 (see FIG. 7). At least one of the metal 2 routing tracks 718 is connected through an opening in the first metal 1 shield segment 710 to the top poiysilicon layer 708 by way of via 724 and contact 716 (see FIG. 7). Additionally, at least one of the metal 2 routing tracks 718 is con- nected to ground and the first metal 1 shield segment 710 by way of via 720. Beneath the capacitors 700 and 701 is the well 704 (see FIG. 7) that is diffused into the silicon substrate 702. At least one of the metal 2 routing tracks 718 is connected through an opening in the second metal 1 shield segment 711 to the bottom poiysilicon layer 707 by way of via 725 and contact 715 (see FIG. 7). At least one of the metal 2 routing tracks 718 is connected through an opening in the second metal 1 shield segment 711 to the top poiysilicon layer 709 by way of via 723 and contact 717 (see FIG. 7). At least one of the metal 2 routing tracks 718 is connected to ground and the second metal 1 shield segment 711 by way of via 721. FIGs. 10 and 11 illustrate an array of capacitors formed using multiple 1 x 2 capacitor tiles. As shown and described in connection with FIGs. 7, 8 and 9 above, two adjacent shielded capacitors may be used to form a 1 x 2 capacitor tile. FIGs. 10 and 11 illustrate how the 1 x 2 capacitor tiles can be arranged into an array of any practical size (typically less than 1000 units) by simply alternating the orientation of the metal 2 and metal 3 routing tracks. FIG. 10 illustrates an arrangement of capacitors 1000 such as those shown and described in connection with FIG. 7 above. A routing fabric 1100 is illustrated in FIG. 11. The routing fabric 1100 is composed of 1 x 2 capacitor tiles wherein the orien- tation of the metal 2 routing tracks 1102 is alternated from one capacitor tile to the next to permit the routing of signals throughout the array. The metal 3 routing tracks 1104 are also alternated from one capacitor tile to the next for the same purpose. Specific embodiments of an invention are described herein. One of or- dinary skill in the semiconductor arts will quickly recognize that the invention has other applications in other environments. In fact, many embodiments and implementations are possible. The following claims are in no way intended to limit the scope of the invention to the specific embodiments described above.

Claims

1. A semiconductor device comprising: a plurality of layers, wherein the plurality of layers comprises at least one via layer; and a capacitor array, wherein the capacitor array further comprises a plurality of individual capacitors arranged so that their connections and capacitances are determined, at least in part, by a configuration of the at least one via layer.
2. The semiconductor device of claim 1 wherein the at least one via layer is a single programmable via layer.
3. The semiconductor device of claim 1 further comprising a metal structure disposed to provide an electromagnetic shield for at least one of the plurality of individual capacitors in the capacitor array.
4. The semiconductor device of claim 3 wherein the metal structure is connected to ground.
5. The semiconductor device of claim 3 wherein the metal structure comprises a metal layer.
6. The semiconductor device according to claim 1 wherein said plu- rality of layers includes at least three metal layers, at least two poiysilicon layers, and the at least one via layer to interconnect said plurality of individual capacitors.
7. The semiconductor device according to claim 1 further comprising a plurality of circuit elements.
8. The semiconductor device according to claim 1 wherein the device is an integrated circuit.
9. A semiconductor device comprising: a plurality of layers; a capacitor array, wherein the capacitor array further comprises a plurality of individual capacitors; and a metal structure disposed to provide an electromagnetic shield for at least one of the plurality of individual capacitors in the capacitor array. i
10. The semiconductor device of claim 9 wherein at least one of the plurality of layers comprises a via layer.
11. The semiconductor device of claim 10 wherein the via layer is programmable.
12. The semiconductor device of claim 9 wherein the plurality of indi- vidual capacitors are interconnected using via connections between routing tracks that are disposed among the plurality of layers.
13. The semiconductor device of claim 9 wherein the plurality of individual capacitors are arranged so that their connections and capacitances are determined, at least in part, by a configuration of at least one of the plurality of layers.
14. The semiconductor device of claim 9 wherein the metal structure is connected to ground.
15. The semiconductor device of claim 9 wherein the metal structure comprises a metal layer.
16. The semiconductor device according to claim 9 wherein said plu- rality of layers includes at least three metal layers, at least two poiysilicon layers, and at least one via layer to interconnect said plurality of individual capacitors.
17. The semiconductor device according to claim 9 further comprising a plurality of circuit elements.
18. The semiconductor device according to claim 9 wherein the de- vice is an integrated circuit.
19. A method of making a semiconductor device, the method comprising: forming a plurality of layers, wherein the plurality of layers com- prises at least one via layer; forming a capacitor array, wherein the capacitor array comprises a plurality of individual capacitors; and configuring the connections and capacitances of the plurality of individual capacitors using the at least one via layer.
20. The method of claim 19 wherein the at least one via layer is a single programmable via layer.
21. The method of claim 19 further comprising forming a metal struc- ture disposed to provide an electromagnetic shield for at least one of the plurality of individual capacitors in the capacitor array.
22. The method of claim 21 wherein the metal structure is connected to ground.
23. The method of claim 21 wherein the metal structure comprises a metal layer.
24. The method of claim 19 wherein said plurality of layers includes at least three metal layers, at least two poiysilicon layers, and the at least one via layer to interconnect said plurality of individual capacitors.
25. The method of claim 19 further comprising forming a plurality of circuit elements.
26. The method of claim 19 wherein the device is an integrated circuit.
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US20050189614A1 (en) 2005-09-01

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