WO2005089432A3 - High accuracy measuring and control of low fluid flow rates - Google Patents

High accuracy measuring and control of low fluid flow rates Download PDF

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Publication number
WO2005089432A3
WO2005089432A3 PCT/US2005/008909 US2005008909W WO2005089432A3 WO 2005089432 A3 WO2005089432 A3 WO 2005089432A3 US 2005008909 W US2005008909 W US 2005008909W WO 2005089432 A3 WO2005089432 A3 WO 2005089432A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
flow
tubing
fluid flow
heat
Prior art date
Application number
PCT/US2005/008909
Other languages
French (fr)
Other versions
WO2005089432A2 (en
Inventor
Robert M Mcmillan
Roland Rau
Original Assignee
Mcmillan Co
Robert M Mcmillan
Roland Rau
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mcmillan Co, Robert M Mcmillan, Roland Rau filed Critical Mcmillan Co
Priority to JP2007504107A priority Critical patent/JP2007529749A/en
Publication of WO2005089432A2 publication Critical patent/WO2005089432A2/en
Publication of WO2005089432A3 publication Critical patent/WO2005089432A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/028—Compensating or correcting for variations in pressure, density or temperature for low flow rates

Abstract

The flow of a fluid at low flow rates is measured in a flow sensing assembly and controlled without introducing measuring devices into the fluid flow path. The flow sensing assembly is enclosed in a housing to lessen ambient and fluid temperature change effects on the measurements obtained. As the fluid is flowing through tubing in the flow sensing assembly, the tubing is heated to impart heat to the fluid. Heat sensors are attached at spaced positions from each other along the tubing in the direction of fluid flow to sense temperatures. The amount of heat applied to the tubing is controlled to maintain an established temperature differential between the heat sensors. The amount of heat applied is measured to provide an accurate and proportional indication of the fluid flow rate.
PCT/US2005/008909 2004-03-17 2005-03-17 High accuracy measuring and control of low fluid flow rates WO2005089432A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007504107A JP2007529749A (en) 2004-03-17 2005-03-17 High precision measurement and control of low flow rate fluid

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/803,149 US7000464B2 (en) 2002-05-28 2004-03-17 Measuring and control of low fluid flow rates with heated conduit walls
US10/803,149 2004-03-17

Publications (2)

Publication Number Publication Date
WO2005089432A2 WO2005089432A2 (en) 2005-09-29
WO2005089432A3 true WO2005089432A3 (en) 2005-11-24

Family

ID=34994344

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/008909 WO2005089432A2 (en) 2004-03-17 2005-03-17 High accuracy measuring and control of low fluid flow rates

Country Status (5)

Country Link
US (1) US7000464B2 (en)
JP (1) JP2007529749A (en)
KR (1) KR20060134161A (en)
CN (1) CN100472183C (en)
WO (1) WO2005089432A2 (en)

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DE102007023840B4 (en) * 2007-05-21 2012-02-09 Abb Ag Thermal mass flow meter and method of operation
CN101539016B (en) * 2009-04-21 2014-11-19 北京科技大学 Method for measuring gas-liquid multiphase flow rate by utilizing thermal diffusion and device
US9759632B2 (en) 2011-01-03 2017-09-12 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection and freeze burst prevention
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
US9146172B2 (en) * 2011-01-03 2015-09-29 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
KR101269541B1 (en) * 2011-05-30 2013-06-04 한국수력원자력 주식회사 Apparatus and method for monitoring liquid flow in pipe
US9170136B2 (en) 2013-11-05 2015-10-27 Amphenol Thermometrics, Inc. Systems and methods for flow sensing in a conduit
US10508943B2 (en) * 2014-03-31 2019-12-17 Hitachi Metals, Ltd. Thermal mass flow rate measurement method, thermal mass flow meter using said method, and thermal mass flow controller using said thermal mass flow meter
US10786826B2 (en) 2014-12-19 2020-09-29 Deere & Company Equalization of nozzle performance for sprayers
US10444048B2 (en) * 2014-12-19 2019-10-15 Deere & Company Fluid flow monitoring system
US10655994B2 (en) * 2015-04-30 2020-05-19 Hewlett-Packard Development Company, L.P. Microfluidic flow sensor
CN106908621A (en) * 2015-12-23 2017-06-30 江苏迈拓智能仪表有限公司 A kind of method that pipe section flow rate is measured by temperature-sensitive heater element
US10409295B2 (en) * 2016-12-31 2019-09-10 Applied Materials, Inc. Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
EP3388794B2 (en) * 2017-04-13 2022-03-09 SICK Engineering GmbH Measuring device for measuring a flow speed of a fluid
JP2019027881A (en) * 2017-07-28 2019-02-21 アズビル株式会社 measuring device
JP6879858B2 (en) * 2017-07-31 2021-06-02 アズビル株式会社 Thermal flow meter
DE102017120941A1 (en) * 2017-09-11 2019-03-14 Endress + Hauser Wetzer Gmbh + Co. Kg Thermal flowmeter
JP6843024B2 (en) * 2017-09-15 2021-03-17 アズビル株式会社 Thermal flow meter
DE102022000719A1 (en) 2022-02-28 2023-08-31 Truma Gerätetechnik GmbH & Co. KG Device for determining and/or monitoring a parameter of a fluid

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Also Published As

Publication number Publication date
KR20060134161A (en) 2006-12-27
JP2007529749A (en) 2007-10-25
US7000464B2 (en) 2006-02-21
CN100472183C (en) 2009-03-25
US20040173019A1 (en) 2004-09-09
CN1954196A (en) 2007-04-25
WO2005089432A2 (en) 2005-09-29

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